工作模态控制解耦的塔形直线超声电机

针对现有塔形超声电机无法相互独立控制法向和切向振动等实际应用问题,提出了一种工作模态控制解耦的塔形直线超声电机。塔形电机设计有两个非共面的正交工作模态,分别为用于独立控制法向振动的x-z面内对称振动模态以及用于独立控制切向振动的y-z面内弯振模态。相应设计了压电陶瓷片的极化布置方案,即塔形电机的压电陶瓷片分为A,B两相,其中A相用于激励x-z面内对称振动模态,B相用于激励y-z面内弯振模态。通过对电机A,B两相相互独立控制就可以实现两个非共面正交工作模态的控制解耦。实验表明,在解耦控制条件下,当A相电压固定为400Vp-p, B相电压在0~400Vp-p变化时,电机运行速度与B相电压成正比,最大运行速度为420 mm/s,最小运行速度为23mm/s。     

工作模态控制解耦的塔形直线超声电机

针对现有塔形超声电机无法相互独立控制法向和切向振动等实际应用问题,提出了一种工作模态控制解耦的塔形直线超声电机。塔形电机设计有两个非共面的正交工作模态,分别为用于独立控制法向振动的x-z面内对称振动模态以及用于独立控制切向振动的y-z面内弯振模态。相应设计了压电陶瓷片的极化布置方案,即塔形电机的压电陶瓷片分为A,B两相,其中A相用于激励x-z面内对称振动模态,B相用于激励y-z面内弯振模态。通过对电机A,B两相相互独立控制就可以实现两个非共面正交工作模态的控制解耦。实验表明,在解耦控制条件下,当A相电压固定为400Vp-p,B相电压在0~400Vp-p变化时,电机运行速度与B相电压成正比,最大运行速度为420mm/s,最小运行速度为23mm/s。     

单模态驱动的非对称定子结构塔形超声电机

现有单模态驱动超声电机或者只能单向运动,或者存在严重磨损。针对此问题,提出了一种单模态驱动双向运动的塔形超声电机。塔形电机由非对称结构塔形定子和动子构成。塔形定子采用非对称的兰杰文振子结构,设计有低阶和高阶非对称工作模态以及相应的压电陶瓷片极化布置方案,通过模态切换就可以实现电机的单模态驱动和正反向运动。分析了电机的工作原理,制作了原理样机,并对样机进行了模态实验和机械特性实验。结果表明,当A相单相激励,电机工作在高阶工作模态,动子正向运行,最大速度为112mm/s,最大输出力为2N;当B相单相激励,电机工作在低阶工作模态,动子反向运行,最大速度为94mm/s,最大输出力为3N。     

三角位移转换式压电直线电机

为了在保持电机精度的同时获得较大作动行程,提出了一种以叠层压电陶瓷作为激励振动源的压电直线电机。分析了电机的工作原理,推导了电机驱动足在工作时的运动轨迹。设计安装了电机样机,并对其定子进行了测试。最后,在两种激发条件下实验研究了电机的整机性能。结果表明:单组叠层压电陶瓷激励时,该样机定子驱动头在接触面法向和切向同时具有振动分量,并能够在阶跃和连续两种不同激励方式下实现单向大行程直线运动。以锯齿波激励时可实现步进运动,激励频率为20Hz时步距为0.1μm;以两路相位差π/2的正弦波激励时,可在1.5kHz到5.8kHz的激励频率区间输出稳定连续的直线运动,其运动速度随激励频率的升高而增大,在峰-峰值110V(50V偏置)的正弦电压激励下其推力可达4.8N。该电机具有高位置分辨率和宽频率响应,可以在两种工作模式下分别稳定地实现直线步进和大行程连续运行。     

新型惯性式直线超声压电电机的运动机理及实验研究

提出了一种新型惯性式直线超声压电电机.该电机利用压电晶体的逆压电效应和惯性位移原理,由定子的轴向变形,通过摩擦力的作用,以惯性位移的形式传递运动.它由两部分组成,定子由具有位移放大功能的压电复合换能器和轴组成,动子为一带有缺口和环形凹槽的环.分析了该电机的工作原理,并通过仿真和实验相结合的方法分析了两种激励方式对电机性能的影响.实验结果表明:样机采用方波驱动比采用锯齿波驱动的效果好;在采用方波驱动信号驱动时,样机的最大空载速度可达到11 mm/s,最大输出力达到0.5 N.     

棒型直线超声电机最佳激励位置的确定

建立了棒型直线超声电机驱动振子纵向和弯曲振动的力学模型,分析了压电陶瓷位置对驱动振子特定振型振动的激励响应的影响,从而给出了确定激励纵向、弯曲振动的压电陶瓷的最佳安放位置的原则。     

低压驱动Ⅴ形直线超声电机的设计

针对传统Ⅴ形直线超声电机驱动电压较大、驱动电路复杂,在配合变压器驱动时不利于结构微型化的问题,提出了一种利用叠层压电陶瓷驱动的低压Ⅴ形直线超声电机。在对Ⅴ形直线超声电机的运行机理进行理论分析的基础上,设计了基于叠层压电陶瓷的Ⅴ形振子并进行了夹持装置的结构设计,进一步制作样机并开展了阻抗实验,测试了样机的外输出特性。实验结果表明:电机的驱动频率位于36～38 kHz,在37 kHz,50 Vpp的驱动电压激励下,其最大输出力为25.8 N,最高空载速度为1.221 m/s,可在低压驱动下输出大推力,直线超声电机的驱动性能得到了提高。     

摩擦驱动型压电叠堆直线电机的工作原理

以一种典型的摩擦驱动型压电叠堆直线电机结构为例,对摩擦驱动型压电叠堆直线电机的振动摩擦驱动机理进行研究。结合电机系统的振动脱离模型,分析了电机定子与动子脱离的力学条件,进而分析电机结构参数和工作参数对椭圆运动和振动脱离性能的影响。对原理样机进行了试验研究,结果表明,压电叠堆的激励电压、激励频率和电机的预压力对电机的振动脱离性能有显著影响。     

动摩擦型压电叠堆直线电机定子的振动特性

为提高动摩擦非共振型压电电机的输出力,研究了该型电机定子的振动特性及其对电机输出力的影响。通过分析电机的总体结构和工作机理,建立了电机定子的纵向振动模型和伪刚体模型,给出了定子驱动端的振动微分方程,并获得了纵向位移函数和横向位移函数。从功能原理出发,推导了电机的周期平均输出力公式。利用数值分析法对电机的纵向振幅特性和推力特性进行了仿真。设计、制作了电机样机,对不同激励条件下定子驱动端的纵向振动位移和电机输出力进行了测试。仿真和试验结果验证了定子振动特性理论：电机输出力随纵向振幅的增加而增加,且近似成线性关系。测试结果表明：在激励电压峰峰值为100 V、频率为1.6 kHz时,驱动端振幅最大可达0.92μm,样机输出力最大可达3.5 N。     

摩擦驱动型压电叠堆直线电机的工作机理

以一种典型的摩擦驱动型压电叠堆直线电机结构为例,对摩擦驱动型压电叠堆直线电机的振动摩擦驱动机理进行研究.结合电机系统的振动脱离模型,分析了电机定子与动子脱离的力学条件,进而分析电机结构参数和工作参数对椭圆运动和振动脱离性能的影响.对原理样机进行了试验研究,结果表明,压电叠堆的激励电压、激励频率和电机的预压力对电机的振动脱离性能有显著影响.     

Investigation on a cylindrical ultrasonic micromotor

The relationship between the arrangement of ceramics and the force coefficient shows that the maximum excitation efficiency will be obtained when the ceramics are placed at the trough of the first bending mode of the stator. Therefore, a cylindrical ultrasonic micromotor with a novel stator is proposed. The prototype motor is 5 mm in diameter, 30 mm in length and 4.2 g in weight. The micromotor operates with the first bending mode at 53 kHz. Its maximum speed is 350 r/min when the drive voltage is 200 V and the stall torque reaches 2.5 mN · m. As this motor is suitable for miniaturization because of its simple structure, another cylindrical ultrasonic micromotor is developed. Piezoelectric ceramic tube is used as its stator. This micromtor is 2 mm in diameter, 7 mm in length and 0.258 g in weight. Its speed reaches 813 r/min when the drive voltage is 60 V at 75 kHz. The operation mechanism, structure and design method of these two motors are introduced. __________ Translated from Proceedings of the CSEE, 2006, 26(12): 128–133 [译自: 中国电机工程学报]     

双足型直线超声电机的实验研究

研制了一种新型直线超声电机,首先对其驱动机理进行了探讨,设计了电机的具体结构。其次对振子进行了频率响应实验,模态实验,实验表明电机可有效激励出所需振型。分别测定了电机的频率-速度关系、电压-速度关系、相位-速度关系。电机运行中正反两向运动灵活,工作状态稳定,速度基本与输入电压成正比,可采用调压调速;其最大无负载速度可达76 mm/s,最大输出推力2 N,达到了预期设计的目的。     

单模态驱动的V形板结构直线超声电机

为克服双模态超声电机频率一致性的限制和进一步提高V形直线超声电机的输出性能,设计了一种板结构直线超声电机。该电机包括V形定子和直线导轨,定子由2个相互垂直的板结构振子构成,驱动足位于2个变截面梁的连接点上。利用两振子弯曲振动形成的对称和反对称模态,通过两相模态切换,实现电机的双向运动。研制了样机并对其进行了模态实验和机械输出特性测试。借助三维激光测振仪分别测试了驱动足在接触和不接触导轨情况下的运动轨迹,阐述并验证了单模态超声电机的驱动机理。实验结果表明,该电机具有良好的机械输出特性:最大空载速度为690 mm/s,最大推力达100 N,推重比达59.7。     

一种双足驱动压电直线电机

为研制高精度、大行程、大推力的压电直线电机,设计了一种基于叠层压电陶瓷的步进式压电直线电机。分析了电机的工作原理,对电机的结构进行了设计,制作了原理样机,并进行了实验研究。实验表明,在一定频率范围内,定子驱动足振幅与电压成线性关系,且最大振幅可达2.9μm,电机最大无负载速度为796μm/s,最大输出推力为4.8N,达到了预期的目的。     

Linear ultrasonic motor using quadrate plate transducer

A linear ultrasonic motor using a quadrate plate transducer was developed for precision positioning. This motor consists of two pairs of Pb(Zr,Ti)O₃ piezoelectric ceramic elements, which are piezoelectrically excited into the second-bending mode of the motor stator’s neutral surface in two orthogonal directions, on which the tops of four projections move along an elliptical trajectory, which in turn drives a contacted slider into linear motion via frictional forces. The coincident frequency of the stator is easily obtained for its coincident characteristic dimension in two orthogonal directions. The performance characteristics achieved by the motor are: 1) a maximum linear speed of more than 60 mm/s; 2) a stroke of more than150 mm; 3) a driving force of more than 5.0 N; and 4) a response time of about 2 ms.     

Ultrasonic linear motor using the L-B mode Langevin transducer with an exponential horn

An ultrasonic linear motor is proposed and fabricated by using the longitudinal and bending vibration double mode bolt-clamped Langevin type transducer to meet high power and speed requirements in the aerospace and semiconductor industries. The elliptical trajectory of the driving tip is formed by exciting the longitudinal and bending vibration with phase difference, which generates thrust force and normal force, respectively. An exponential shape horn is adopted to achieve a high linear speed. The classical theory of the transducer horn is used to determine the transducer’s longitudinal resonance frequency and configuration dimensions. FEM analysis is used to degenerate the longitudinal and bending vibration resonant frequencies. The different locations of the driving tip on the horn cause different elliptical-shaped vibration trajectories, and how the trajectory’s shape variation influences motor mechanical output is studied by using the FEM method. Simulation analysis and experiment results show that the motor has better performance when the driving tip is located at the antinode of the bending wave. Typical output of the prototype is no-load velocity of 480 mm/s and maximum driving force of 25 N. __________ Translated from Proceedings of the CSEE, 2007, 27(18): 30–34 [译自: 中国电机工程学报]     

一种单稳态微电磁继电器的研究

优化设计出一种微电磁继电器,介绍了其驱动原理,通过对微电磁继电器的电磁驱动力及活动衔铁的位移进行分析计算,设计了微电磁继电器的三维结构,以增大磁路效率,减小漏磁通,从而增加电磁驱动力。采用MEMS加工工艺,试制了该新型微电磁继电器的样件,其尺寸为5 mm×5 mm×1 mm,它由上磁路、下磁路、平面励磁线圈、固定触点和活动衔铁等部分组成。微电磁继电器的平面励磁线圈电阻约20 Ω,外加5 V电压时,微电磁继电器可实现吸合动作。吸合后,微电磁继电器的导通电阻为14.5 Ω,继电器的响应时间为1 ms。     

Principle and experimental verification of novel dual driving face rotary ultrasonic motor

Existing rotary ultrasonic motors operating in extreme environments cannot meet the requirements of good environmental adaptability and compact structure at same time,and existing ultrasonic motors with Langevin transducers show better environmental adaptability,but size of these motors are usually big due to the radial arrangement of the Langevin transducers.A novel dual driving face rotary ultrasonic motor is proposed,and its working principle is experimentally verified.The working principle of the novel ultrasonic motor is firstly proposed.The 5th in-plane flexural vibration travelling wave,excited by the Langevin transducers around the stator ring,is used to drive the rotors.Then the finite element method is used in the determination of dimensions of the prototype motor,and the confirmation of its working principle.After that,a laser Doppler vibrometer system is used for measuring the resonance frequency and vibration amplitude of the stator.At last,output characteristics of the prototype motor are measured,environmental adaptability is tested and performance for driving a metal ball is also investigated.At room temperature and 200 V(zero to peak) driving voltage,the motor’s no-load speed is 80 r/min,the stalling torque is 0.35 N·m and the maximum output power is 0.85 W.The response time of this motor is 0.96 ms at the room temperature,and it decreases or increases little in cold environment.A metal ball driven by the motor can rotate at 210 r/min with the driving voltage 300 V(zero to peak).Results indicate that the prototype motor has a large output torque and good environmental adaptability.A rotary ultrasonic motor owning compact structure and good environmental adaptability is proposed,and lays the foundations of ultrasonic motors’ applications in extreme environments.     

斜动子与塔形定子构成的单驱双动超声电机

针对两相超声电机对模态频率一致性要求高及单相超声电机难于实现双向运动等问题,提出了一种单相驱动双向运动斜动子塔形直线超声电机。动子相对于塔形定子倾斜安装,利用塔形定子的面内对称模态或面内弯曲模态为工作模态,通过切换工作模态改变定子驱动足运动轨迹相对于动子的倾斜方向,实现动子正、反向运动。在分析电机工作原理及设计原则的基础上,推导了电机运行的导轨倾角适用范围,对设计制作的原理样机进行了模态实验和机械特性测试。实验表明,在导轨倾斜角为35°,激励电压为500 V,预压为力4.5 N的条件下,面内对称振动模态工作时的最大空载速度为79 mm/s,最大输出力为0.5 N;面内弯曲模态工作时的最大空载速度为756 mm/s,最大输出力为0.8 N。     

A linear piezo-electric ultrasonic motor using a single flexural vibrating bar for electro-discharge system industrial applications

This paper provides the development process of a linear piezo-electric ultrasonic motor using a single flexural vibrating bar. The process covers the design methodology, conceptual design, basic configuration, modelling and analysis, principle of operation, motor structure, experimental examination and evaluation of the main characteristics of the motor. The motor comprises three main parts: the stator, rotor and sliding element. The mechanism concept of the developed motor is based on creating elliptical motions of surface points generated by superposition of longitudinal and bending vibration modes of oscillating structures. Pressing the stator against the driving tip, the microscopic motions are transferred into a rotary motion then into linear motion through the friction between parts of the motor. The developed motor provides a linear motion and can be driven with common droving system with electrical signal of invariable frequency. Modelling using finite element analysis, mechanism and design of the component of the developed prototype are presented in this paper. The essential experimental test to implement the motor in electro-discharge system industrial application was carried out, and the initial results show that the developed prototype is able to provide a reversible directional of motion, no-load travelling speed equal to 28 mm/s, maximum load of 0.78 N, a resolution <50?μm and a dynamic response <10 ms.