Characterization of co-sputtered Cu-In alloy precursors for CuInSe2 thin films fabrication by close-spaced selenization

Sputtering technique for Cu–In precursor films fabrication using different Cu and In layer sequences have been widely investigated for CuInSe₂ production. But the CuInSe₂ films fabricated from these precursors using H₂Se or Se vapour selenization mostly exhibited poor microstructural properties. The co-sputtering technique for producing Cu–In alloy films and selenization within a close-spaced graphite box resulting in quality CuInSe₂ films was developed. All films were analysed using SEM, EDX, XRD and four-point probe measurements. Alloy films with a broad range of compositions were fabricated and XRD showed mainly In, CuIn₂ and Cu₁₁In₉ phases which were found to vary in intensities as the composition changes. Different morphological properties were displayed as the alloy composition changes. The selenized CuInSe₂ films exhibited different microstructural properties. Very In-rich films yielded the ODC compound with small crystal sizes whilst slightly In-rich or Cu-rich alloys yielded single phase CuInSe₂ films with dense crystals and sizes of about 5 μm. Film resistivities varied from 10⁻²–10⁸ Ω cm. The films had compositions with Cu/In of 0.40–2.3 and Se/(Cu+In) of 0.74–1.35. All CuInSe₂ films with the exception of very Cu-rich ones contained high amount of Se (>50%).     

Effect of selenization pressure on CuInSe2 thin films selenized using co-sputtered Cu-In precursors

CuInSe₂ thin films were formed from the selenization of co-sputtered Cu–In alloy layers. These layers consisted of only two phases, CuIn₂ and Cu₁₁In₉, over broad Cu–In composition ratio. The concentration of Cu₁₁In₉ phase increased by varying the composition from In-rich to Cu-rich. The composition of co-sputtered Cu–In alloy layers was linearly dependent on the sputtering power of Cu and In targets. The metallic layers were selenized either at a low pressure of 10 mTorr or at 1 atm Ar. A small number of Cu–Se and In–Se compounds were observed during the early stage of selenization and single-phase CuInSe₂ was more easily formed in vacuum than at 1 atm Ar. Therefore, CuInSe₂ films selenized in vacuum showed smoother surface and denser microstructure than those selenized at 1 atm. The results showed that CuInSe₂ films selenized in vacuum had good properties suitable for a solar cell.     

Photoluminescence properties of sodium incorporation in CuInSe2 and CuIn3Se5 thin films

CuInSe₂ and CuIn₃Se₅ thin films have been deposited using sodium compounds such as Na₂Se and Na₂S onto Corning 7059 glass substrates by the two-stage co-evaporation method. Enhanced grain growth and preferred (1 1 2) grain orientation as well as a decrease in resistivity with respect to undoped films were observed with sodium incorporation. A clear correlation between the photoluminescence spectra and the resistivity of the films was found by comparing the properties of films with and without Na incorporation. These observations suggest that compensation is reduced due to the suppression of donor-type defects by the presence of Na.     

Study of the sub-bandgap absorption and the optical transitions in CuInSe2 polycrystalline thin films

Optical transitions near the fundamental band edge are studied for CuInSe₂ films having various Cu/In ratios by analysing the variations of the absorption coefficient with incident photon energy. The results indicate different transitions depending upon the Cu/In ratio. There are sub-bandgap absorption for near stoichiometric and Cu-rich films. The results are compared to some literature data.     

Complexing agent effect on the stoichiometric ratio of the electrochemically prepared CuInSe2 thin films

The electrodeposition of CuInSe₂ is investigated to improve the stoichiometric properties of CuInSe₂ layers on indium tin oxide (ITO)-coated glass substrates and to develop one-step electrodeposition method for solar cell applications. XPS was utilized for the characterization of the surface properties of CuInSe₂ layers. The influence of the complexing agent, e.g. benzotriazole, bulk concentration of Cu and Se and deposition potentials on the stoichiometric properties, are discussed.     

Preparation and study of structural and optical properties of CSVT deposited CuInSe2 thin films

A simple close-spaced vapour transport (CSVT) system has been designed and fabricated. Copper indium diselenide (CuInSe₂) thin films of wide range of thickness (4000–60000 Å) have been prepared using the fabricated CSVT system at source temperatures 713, 758 and 843 K. A detailed study on the deposition temperature has been made and the temperature profile along with the reaction kinetics is reported. The composition of the chemical constituents of the films has been determined by energy dispersive X-ray analysis. The structural characterization of the as-deposited CuInSe₂ films of various thicknesses has been carried out by X-ray diffraction method. The diffractogram revealed that the CuInSe₂ films are polycrystalline in nature with chalcopyrite structure. The structural parameters such as lattice constants, axial ratio, tetragonal distortion, crystallite size, dislocation density and strain have been evaluated and the results are discussed. The surface morphology of the as-deposited CuInSe₂ thin films has been studied using scanning electron microscope. The transmittance characteristics of the CuInSe₂ films have been studied using double beam spectrophotometer in the wavelength range 4000–15000 Å and the optical constants n and k are evaluated. The absorption coefficient has been found to be very high and is of the order of 10⁵–10⁶ m⁻¹. CuInSe₂ films are found to have a direct allowed transition and the optical band gap is found to be in the range 0.85–1.05 eV.     

Analysis of the optical absorption characteristics of CuInSe2 thin films

Thin films of compound CuInSe₂ have been developed onto glass substrates by in situ thermal annealing of the stack of successively evaporated elemental layers in vacuum. The atomic compositions and the optical properties of the films have been determined by proton-induced X-ray emission (PIXE) method and spectrophotometry in the photon wavelength range of 300–2500 nm, respectively. The typical optical absorption characteristic of the films has been critically analysed. The absorption coefficients vary from 10³ to 10⁵ cm⁻¹ in the measured wavelength range. The films have more than one type of fundamental electronic transitions. Direct allowed and direct forbidden transitions vary between 0.947 to 0.989 eV and 1.099 to 1.204 eV, respectively, depending on the composition of the films. The former transition varies inversely with the Cu/In ratio while the latter shows no such dependence. Valence band splittings due to spin–orbit coupling converge towards the single-crystal value for the near-stoichiometric (NS) and Cu-rich films.     

Depth profile analysis of CuInSe2 (CIS) thin films grown by the electrodeposition technique

In this study, we report the results obtained from the auger electron spectroscopy (AES) depth profiling of CIS thin films grown by the electrodeposition technique. This result enables one to do a comparison between the bulk and superficial elemental compositions. The AES result is also compared with that obtained by the inductively coupled plasma (ICP) spectroscopy. These results support our proposition that the electrodeposited CIS film has a Cu-rich bulk region and an In rich surface, which leads to the formation of an n-layer (CuIn₂Se_3.5) on the top of the p-type CIS (CuInSe₂) phase     

The influence of the vacuum annealing process on electrodeposited CuInSe2 films

CuInSe₂ films were electrodeposited on mechanical polished Mo substrates. The applied potential was adjusted to get a stoichiometric composition. The as-deposited films were annealed in a high vacuum system for a short time. The films have been characterized by X-ray diffraction, scanning electron microscopy, energy dispersive X-ray analysis, Auger electron spectroscopy. The results indicate that the crystallization of the films was greatly improved by the short time vacuum annealing process without significant change in composition. The capacitance–voltage measurement shows characteristic p-type behaviors. This annealing process after electrodeposition was proved to be a useful method to prepare the polycrystalline CuInSe₂ films for solar cell application.     

Effect of Cl ion implantation on electrical properties of CuInSe2 thin films

The effects of Cl ion implantation on the properties of CuInSe₂ epitaxial thin films have been investigated. Using five kinds of accelerating energies, the doped layer with a constant profile of Cl concentration along the depth direction was fabricated. From the results of reflection of high-energy electron diffraction, the damages due to implantation were removed by annealing at 400°C in N₂. The conductivity type in all implanted films was n-type, and the carrier concentration was increased with increasing Cl concentration in the thin films. Consequently, it is considered that Cl acts as a donor in CuInSe₂.     

Real-time investigations on the formation of CuInSe2 thin film solar cell absorbers from electrodeposited precursors

In this article, we present results of a detailed real-time X-ray diffraction (XRD) study on the formation of CuInSe₂ from electroplated precursors. The solid-state reactions observed during the selenisation of three different types of precursors are presented. The first type of precursors (I) consists of the nanocrystalline phases Cu_2−xSe and InSe at room temperature, which react to CuInSe₂ starting at 470 K. The second type of precursor (II) shows an inhibited CuInSe₂ formation out of the initial phases Cu_2−xSe and γ-In₂Se₃ starting at 400 K. The third precursor type (III) shows completely different selenisation behaviour. Starting from the intermetallic compound Cu₁₁In₉ and amorphous selenium, the formation of the binary selenides In₄Se₃ and CuSe is observed after the melting point of selenium at 494 K. After selenium transfer reactions, the compound semiconductor CuInSe₂ is formed out of Cu_2−xSe and InSe. This type (III) reaction path is well known for the selenisation of SEL precursors (stacked elemental layers of sputtered copper and indium and thermally evaporated selenium).     

An investigation into effect of cationic precursor solutions on formation of CuInSe2 thin films by SILAR method

SILAR deposition of CuInSe₂ films was performed by using Cu²⁺–TEAH₃ (cupric chloride and triethanolamine) and In³⁺–CitNa (indium chloride and sodium citrate) chelating solutions with weak basic pH as well as Na₂SeSO₃ solution at 70 °C. A separate mode and a mixed one of cationic precursor solutions were adopted to investigate effects of the immersion programs on crystallization, composition and morphology of the deposited CuInSe₂ films. Chelating chemistry in two solution modes was deducted based on IR measurement. The XRD, XPS and SEM results showed that well-crystallized, smoothly and distinctly particular CuInSe₂ films could be obtained after annealing in Ar at 400 °C for 1 h by using the mixed cationic solution mode.     

Preparation and evaluation of Cu2ZnSnS4 thin films by sulfurization of E---B evaporated precursors

By sulfurization of E---B evaporated precursors, CZTS(Cu₂ZnSnS₄) films could be prepared successfully. This semiconductor does not consist of any rare-metal such as In. The X-ray diffraction pattern of CZTS thin films showed that these films had a stannite structure. This study estimated the optical band gap energy as 1.45 eV. The optical absorption coefficient was in the order of 10⁴cm⁻¹. The resistivity was in the the order of 10⁴ Ω cm and the conduction type was p-type. Fabricated solar cells, Al/ZnO/CdS/CZTS/Mo/Soda Lime Glass, showed an open-circuit voltage up to 400 mV.     

Effect of 8 MeV electron irradiation on electrical properties of CuInSe2 thin films

Radiation damages due to 8 MeV electron irradiation in electrical properties of CuInSe₂ thin films have been investigated. The n-type CuInSe₂ films in which the carrier concentration was about 3×10¹⁶ cm⁻³, were epitaxially grown on a GaAs(0 0 1) substrate by RF diode sputtering. No significant change in the electrical properties was observed under the electron fluence <3×10¹⁶ e cm⁻². As the electron fluence exceeded 10¹⁷ e cm⁻², both the carrier concentration and Hall mobility slightly decreased. The carrier removal rate was estimated to be about 0.8 cm⁻¹, which is slightly lower than that of III–V compound materials.     

Fabrication of CuInSe2 films and solar cells by the sequential evaporation of In2Se3 and Cu2Se binary compounds

Cu₂Se/In_xSe(x≈1) double layers were prepared by sequentially evaporating In₂Se₃ and Cu₂Se binary compounds at room temperature on glass or Mo-coated glass substrates and CuInSe₂ films were formed by annealing them in a Se atmosphere at 550°C in the same vacuum chamber. The In_xSe thickness was fixed at 1 μm and the Cu₂Se thickness was varied from 0.2 to 0.5 μm. The CuInSe₂ films were single phase and the compositions were Cu-rich when the Cu₂Se thickness was above 0.35 μm. And then, a thin CuIn₃Se₅ layer was formed on the top of the CuInSe₂ film by co-evaporating In₂Se₃ and Se at 550°C. When the thickness of CuIn₃Se₅ layer was about 150 nm, the CuInSe₂ cell showed the active area efficiency of 5.4% with V_oc=286 mV, J_sc=36 mA/cm² and FF=0.52. As the CuIn₃Se₅ thickness increased further, the efficiency decreased.     

Effects of annealing on CuInSe2 films grown by molecular beam epitaxy

CuInSe₂ (CIS) thin films with a range of Cu/In ratios were grown by molecular beam epitaxy on GaAs (0 0 1) at substrate temperatures of T_s = 450–500°C and the effects of annealing under various atmospheres have been investigated. Photoluminescence spectra obtained from an ex-situ vacuum annealed CIS film at a temperature of T_A = 350°C showed a red-shift and a broadening of an emission peak (peak c) which originally appeared at 0.970 eV before annealing and the red-shifted peak c was found to consist of two overlapping peaks. The excitation power dependence of these overlapping peaks indicated the radiative recombination processes associated with the emissions to be a conduction band to acceptor transition (peak at 0.970 eV) and a transition due to donor-acceptor pairs (peak at 0.959 eV), indicating the formation of a shallow donor-type defect during the vacuum annealing process. The origin of this defect has tentatively been attributed to Se vacancies. On the other hand, the molar fraction of oxygen increased with increasing annealing temperature in dry-air. An epitaxially grown In₂O₃ phase was found both in Cu-rich and In-rich films annealed at T_A 350°C, which was not observed in the films annealed in Ar atmosphere. Thermodynamic calculations based on the Cu---In---Se---O---N system showed In₂O₃ to be the most stable phase in good agreement with the experimental results.     

Off-stoichiometry effect on the CuInSe2 dielectric function

The dielectric function of CuInSe₂ has been studied for various composition ratios of Cu/In. The crystals were cut from ingots of 10 mm diameter and 40 mm length, grown by the classical Bridgman method. Spectroscopic ellipsometry measurements have been performed at room temperature in the range of 1.5–5.5 eV. From the measured spectra of the imaginary part of the dielectric function ₂, the broadening effect of the Cu/In ratio has been examined in connection with photoluminescence measurements. All transition edges were found to broaden as the In content increases. The effect of copper d levels has been observed to dominate in the 2.5–3.5 eV range.     

The formation of CuInSe2 thin film solar cell absorbers from electroplated precursors with varying selenium content

We present results from real-time X-ray diffraction experiments on the formation of CuInSe₂ solar cell absorbers by annealing precursors, produced by simultaneous electrodeposition of copper, indium and selenium. The investigations reveal, that a reduced amount of electrochemically deposited selenium is the decisive parameter in order to realise a chalcopyrite formation behaviour as observed for sputtered stacked elemental layer (SEL) precursors. A simultaneous electrodeposition of the elements copper, indium and selenium in the molar ratio 1:1:2 of the chalcopyrite CuInSe₂ leads to the formation of binary copper and indium selenides during the electrodeposition process. The existence of binary selenides besides the intermetallic phase Cu₁₁In₉ as initial phases leads to an unfavourable absorber morphology. This can be explained by the observed semiconductor formation mechanism. A reduction of the deposited amount of selenium favours the formation of the intermetallic compound Cu₁₁In₉ and reduces the amount of binary selenides. These precursors show a formation behaviour and resulting absorber morphology as known for sputtered SEL precursors.     

Sub-micrometer thick CuInSe2 films for solar cells using sequential elemental evaporation

CuInSe₂ thin films were prepared using sequential vacuum evaporation of In, Se and Cu at moderately low substrate temperatures, avoiding any treatment using toxic H₂Se gas. The samples were annealed at 400 °C at a pressure of 10⁻⁵ mbar to form CuInSe₂. Structural, optical, electrical, compositional and morphological characterizations were carried out on these films. We could obtain highly stoichiometric film, using this simple method, without opting for co-evaporation or high substrate temperature for deposition.     

Comparison of point defects in CuInSe2 and CuGaSe2 single crystals

Hall-effect and photoluminescence measurements have been carried out on as-grown and In/Ga-annealed CuInSe₂ and CuGaSe₂ single crystals grown by chemical vapor transport. Various defect levels in these related compounds have been identified and compared. V_Cu and V_Se show similar properties and activation energies in both materials. A tremendous difference is observed in the behavior of III_Cu antisite defects. Ga_Cu levels in CuGaSe₂ are much deeper than In_Cu in CuInSe₂, and furthermore, the formation of In_Cu is much easier compared to Ga_Cu. This is related to the higher formation energy of Ga_Cu in CuGaSe₂. Due to this difference in the defect chemistry of both compounds, it has not been possible until now, to prepare n-type CuGaSe₂ crystals, whereas CuInSe₂ is easily transformed from p- to n-type by annealing in vacuum or In-atmosphere.