PZT/ZnO薄膜制备及其结构特性研究

利用固相反应制备的ZnO-Li_(2.2%)陶瓷靶和RF射频磁控溅射技术在Si(100)基片上制备了高度c轴择优取向的ZnO薄膜,XRD和电性能分析表明掺杂Li离子改善了ZnO靶材的结构和性能,同时研究了不同RF溅射温度对ZnO薄膜结构与取向的影响;然后采用sol-gel前驱单体薄膜制备方法,以ZnO为过渡层淀积PZT薄膜,探讨高度c轴(002)择优取向ZnO薄膜对PZT薄膜结构与性能的影响,实验发现在PZT/ZnO异质结构中,致密、均匀和高度c轴择优取向的ZnO可作为晶核,促进PZT钙钛矿结构转化、晶粒(110)择优取向生长,相应降低PZT薄膜的退火温度.     

中频磁控反应溅射制备c轴择优取向AlN薄膜

通过中频磁控反应溅射,在Si(100)衬底上沉积AlN薄膜,并用X射线衍射、扫描电子显微镜和Raman光谱表征AlN薄膜的微观特征.实验中,研究了氮分压、靶基距、溅射功率对AlN薄膜质量的影响,并优化参数制备高质量的c轴取向的AlN薄膜.结果表明,提高溅射功率、降低靶基距以及降低氮分压,有利于c轴择优取向AlN的生长.在优化条件下制备的AlN薄膜具有高度c轴取向,(002)摇摆曲线的半高宽为5.7°,Raman光谱E2(high)声子峰的FWHM为13.8cm-1.     

透明导电薄膜ZnO∶Mn的低温制备及性能研究

利用直流磁控溅射法在室温玻璃衬底上制备出了可见光透过率高、电阻率低的掺锰氧化锌(ZnO∶Mn)透明导电薄膜。实验制备的ZnO∶Mn为六方纤锌矿结构的多晶薄膜,且具有垂直于衬底方向的c轴择优取向。实验结果表明,靶与衬底之间的距离对ZnO∶Mn薄膜的生长速率、残余应力及电学性能有很大影响,而对薄膜的晶粒尺寸和光学性能影响不大。考虑薄膜的电学、光学及力学性能,认为靶与衬底之间的最佳距离为7.0 cm。在此条件下制备的ZnO∶Mn薄膜的电阻率达到4.2×10-4Ω.cm,可见光透过率为86.6%,而残余应力仅为-0.025 GPa。     

透明导电薄膜ZnO:Mn的低温制备及性能研究

利用直流磁控溅射法在室温玻璃衬底上制备出了可见光透过率高、电阻率低的掺锰氧化锌(ZnO:Mn)透明导电薄膜.实验制备的ZnO:Mn为六方纤锌矿结构的多晶薄膜,且具有垂直于衬底方向的c轴择优取向.实验结果表明,靶与衬底之间的距离对ZnO:Mn薄膜的生长速率、残余应力及电学性能有很大影响,而对薄膜的晶粒尺寸和光学性能影响不大.考虑薄膜的电学、光学及力学性能,认为靶与衬底之间的最佳距离为7.0 cm.在此条件下制备的ZnO:Mn薄膜的电阻率达到4.2×10-4 Ω·cm,可见光透过率为86.6％,丽残余应力仅为-0.025 GPa.     

反应磁控溅射法制备氧化铟锡钽薄膜

利用掺锡氧化铟(ITO)靶和Ta2O5靶双靶共溅法制备了氧化铟锡钽(ITTO)薄膜,研究了在不同衬底温度和退火温度下ITTO薄膜的微结构和光电性能。ITTO薄膜具有更好的晶化程度和较低的表面粗糙度,不同的处理过程导致了晶面择优取向的转变。室温下制备的ITTO薄膜展示了较好的光电性能,提高衬底温度和合理的退火处理可以显著地提高薄膜的光电特性。载流子浓度对于近红外反射、近紫外吸收和光学禁带宽度具有重要的影响。ITTO薄膜具有较宽的光学禁带宽度。在优化制备条件下,可以获得方阻10～20Ω/□、可见光透过率大于85%以及光学禁带宽度大于4.0eV的ITTO薄膜。     

SiO2/Si上直流磁控反应溅射制备AIN薄膜

利用正交设计分析了直流磁控溅射中溅射气压,衬底温度和N2浓度对SiO2/Si衬底上制备的AIN薄膜的（002）择优取向的影响水平。利用X-射线衍射（XRD）、场发射扫描电镜（FESEM）、原子力显微镜（AFM）对薄膜的晶向和表面形貌进行了分析,得到制备高度择优取向的AIN薄膜的最佳期望条件：衬底温度为250℃,溅射气压为2Pa,N2浓度为75％;并得出了氮气浓度对薄膜的（002）择优取向的影响较大。具有择优取向的AIN薄膜的折射率约为2．06。     

预制层结构成分对溅射后硒化制备CIGS薄膜的影响

采用磁控溅射法制备了不同结构成分的铜铟镓(CIG)预制层,对预制层进行硒化得到铜铟镓硒(CIGS)薄膜。采用XRD、SEM及EDS研究了CIG预制层的结构成分对CIGS薄膜的组织与结构的影响。结果表明,不同结构成分的CIG预制层经过硒化后得到的CIGS薄膜中各元素的成分比例差别不大;采用Ga浓度相对较高的CuGa靶制备的两层结构的CIG预制层经硒化后生成的CIGS薄膜,其(112)面择优取向比较明显,晶粒尺寸相对较大。     

溅射功率对ZnO：Si透明导电薄膜性能的影响

采用直流磁控溅射法在室温玻璃基片上制备出了掺硅氧化锌（ZnO：Si）透明导电薄膜,研究了溅射功率对ZnO：Si薄膜结构、形貌、光学及电学性能的影响,实验结果表明,溅射功率对ZnO：Si薄膜的生长速率、结晶质量及电学性能有很大影响,而对其光学性能影响不大。实验制备的ZnO：LSi薄膜为六方纤锌矿结构的多晶薄膜,且具有垂直于基片方向的c轴择优取向。当溅射功率从45W增加到105W时,薄膜的晶化程度提高、晶粒尺寸增大,薄膜的电阻率减小;当溅射功率为105W时,薄膜的电阻率达到最小值3．83~104n·cm,其可见光透过率为94．41％。实验制备的ZnO：Si薄膜可以用作薄膜太阳能电池和液晶显示器的透明电极。     

溅射功率对CdZnTe薄膜成分和结构的影响

采用Cd0.9Zn0.1Te晶体作为溅射靶在玻璃衬底上利用磁控溅射法制备出CdZnTe薄膜,研究了溅射功率对CdZnTe薄膜的成分、结构特性的影响。制备的CdZnTe薄膜是具有闪锌矿结构的多晶薄膜,沿（111）择优取向。随着溅射功率的增大,薄膜沉积速率增大,薄膜结晶质量提高。采用晶体靶Cd0.9Zn0.1Te溅射CdZnTe薄膜时,无论是在何种功率下CdZnTe薄膜中的Cd原子成分均高于Te原子成分,Cd原子表现为择优溅射原子。     

柔性PET衬底上低温制备TZO透明导电薄膜

利用直流磁控溅射法,在室温水冷柔性PET衬底上成功制备出了掺钛氧化锌透明导电薄膜(TZO)。通过X射线衍射和扫描电镜等表征方法对薄膜结构和特性进行测试分析,研究了靶与衬底之间的距离(靶基距)对TZO薄膜表面形貌、结构、力学、电学和光学性能的影响。结果表明,实验制备的柔性TZO透明导电薄膜为具有c轴择优取向的六角纤锌矿结构的多晶薄膜;靶基距对PET衬底上的柔性TZO薄膜的性能有较大的影响。随着靶基距从42 mm增大到70 mm,薄膜的生长速率由22.46 nm/min降低到6.92 nm/min;薄膜的电阻率先由55.99×10-4Ω.cm快速减小到5.34×10-4Ω.cm后略有增大并趋稳,5.34×10-4Ω.cm为最小电阻率,其靶基距为52 mm;70 mm靶基距时样品薄膜应力最小,为0.4914 GPa;所有样品的可见光区平均透过率都高于90.97%。     

Influences of deposition rate and oxygen partial pressure on residual stress and microstructure of YSZ thin films

Yttria-Stabilized Zirconia (YSZ) thin films were deposited on borosilicate crown glass substrates using electron beam evaporation technique and controlling technological parameters: deposition rate and oxygen partial pressure. Spectrophotometry, optical interferometry and X-ray diffraction were used to investigate how the thin film optical properties, residual stresses, and structure depend on these parameters. The results showed that the deposition rate had a significant influence on the increase of the refractive index of YSZ thin films while the oxygen partial pressure had less influence on it. In all samples, the tensile stress increased with the increasing of deposition rate and the decreasing of oxygen partial pressure. Meanwhile, all deposited films were poly-crystallizations, while crystallite size and preferential orientation of YSZ thin films changed as a function of deposition rate and oxygen partial pressure. The variations of the optical spectra and residual stress corresponded to the evolution of the film structures induced by the deposition parameters.     

Biaxial alignment in sputter deposited thin films

Biaxially aligned thin films have not only a preferential crystallographic out-of-plane orientation, but also have an alignment along a certain reference direction parallel to the substrate plane. This type of film has been obtained by unbalanced reactive magnetron sputter deposition on both amorphous glass and randomly textured polycrystalline substrates tilted with respect to the incoming material flux.First, we focus on the development of microstructure and crystallographic out-of-plane orientation. The results are summarized in an extended structure zone model. Based on experimental results, a mechanism for the in-plane alignment is proposed which shows that an in-plane alignment can only be obtained when an overgrowth mechanism drives the microstructural evolution of the thin film. The quality of the in-plane alignment can be evaluated from X-ray diffraction pole figures. The influence of several deposition parameters (target-substrate distance, target-substrate angle, deposition pressure, and substrate bias) on the degree of in-plane alignment is discussed. The influence of these parameters can be traced to the influence of two main properties, i.e. the mobility of the adatoms at the growing surface and the angular spread of the incoming material flux. Finally, since impurities are hard to exclude during deposition, their influence on the microstructure, the preferential out-of-plane orientation, and the in-plane alignment is reported.     

Influence of target-substrate distance and composition on the preferential orientation of yttria-stabilized zirconia thin films

The use of yttria-stabilized zirconia (YSZ) thin films calls for a controlled deposition with full understanding on the influence of deposition parameters on the crystallographic properties of YSZ. YSZ thin films were deposited using magnetron sputtering from two sources, enabling to modify the sample composition in a flexible way. The influence of target-substrate (T-S) distance and the Y content on the crystallographic orientation were studied under different chamber pressures. Correlations were found under both conditions. This way, a two-dimensional map was obtained by showing the change in preferential orientation as a function of sample composition. This map shows the existence of two different trends depending on the pressure. At low pressure, the addition of Y and the decrease in T-S distance, change the orientation from [200] to a complete [111] out-of-plane orientation resulting in a competition between the fastest growth direction and the lowest surface energy. However, a different trend was observed at high pressure, where T-S distance and composition do not influence the preferential orientation of the film.     

Influence of growth rate on the structural and morphological properties of TiN, ZrN and TiN/ZrN multilayers

The effect of the deposition rate on the structural and morphological properties of TiN and ZrN single layers and TiN/ZrN multilayers deposited by radiofrequency reactive magnetron sputtering has been studied. The total pressure was kept constant and the growth rate variation was obtained by small difference of nitrogen concentration in the fed gas. The decreasing deposition rate results in a structural change in the thin films from (111) orientation to (100) one. As consequence the surface morphology becomes smoother. Films roughness is strongly related with texture and it decreases with an increase in the (100) X-ray diffraction line intensity. In order to achieve a clear interpretation of our experimental results, the ratio between the N⁺ ions of the plasma and the atoms number reaching the substrate was considered. At high deposition rate with respect to the N⁺ concentration, the chemical potential of transition metal on (100) growth surface is higher than (111) one favouring the (111) orientation of the films. On the contrary, when the growth rate is low with respect to the nitrogen concentration, the chemical potential of transition metal on (111) growth surface is higher than the (100) one leading to a preferential growth in the (100) direction.     

Characterization of electroplated FeSe thin films

Thin films of iron selenide (FeSe) were electrodeposited on tin oxide coated conducting glass substrates at various bath temperatures, deposition potential and solution pH values. The deposited films were characterized by X-ray diffraction, energy dispersive X-ray analysis, scanning electron microscopy and optical absorption techniques, respectively. The structure was found to be hexagonal with preferential orientation along {002} plane. X-ray line profile analysis technique by the method of variance has been used to evaluate the microstructural parameters. The variation of microstructural parameters with bath temperature, deposition potential and solution pH values were studied. The observed results are discussed in detail.     

Structural analysis of indium sulphide thin films elaborated by chemical bath deposition

X-ray diffraction and scanning electron microscopy show that the crystalline state of indium sulphide thin films, elaborated by chemical bath deposition technique on various substrates, is strongly affected by deposition parameters (deposition time t_D, pH solution and thioacetamide concentration), as well as by annealing treatment.We show that β-In₂S₃ thin films grown on glass substrate during t_D=60 min, and annealed under nitrogen at 400 °C during 1 h are well crystallized according to the cubic structure with the preferential orientation (610). They have a good homogenity and crystallinity.     

Structural and optical properties of CdS thin films grown by chemical bath deposition

Cubic cadmium sulphide (CdS) thin films with (111) preferential orientation were prepared by chemical bath deposition (CBD) technique, using the reaction between NH₄OH, CdSO₄ and CS(NH₂)₂. The films properties have been investigated as a function of bath temperature and deposition time. Structural properties of the obtained films were studied by X-ray diffraction analysis. The structural parameters such as crystallite size have been evaluated. The transmission spectra, recorded in the UV visible range reveal a relatively high transmission coefficient (70%) in the obtained films. The transmittance data analysis indicates that the optical band gap is closely related to the deposition conditions, a direct band gap ranging from 2.0 eV to 2.34 eV was deduced. The electrical characterization shows that CdS films' dark conductivities can be controlled either by the deposition time or the bath temperature.     

制备条件对电致变色氧化镍薄膜特性的影响

在充氧气的真空室内 ,用电子束蒸发NiO粉末颗粒的方法分别以 0 1和 0 8nm/s的淀积速率制备了氧化镍薄膜 ,并在不同的环境中对薄膜进行热处理。研究了薄膜结构和电致变色特性与淀积速率的关系 ,发现以较慢和较快速率淀积的薄膜分别具有NiO晶粒的 (2 0 0 )和 (111)不同择优取向 ,前者致色范围较小 ,后者致色范围较大。还研究了热处理对薄膜的结构、动态致色范围、致色效率 ,以及红外光谱特性的影响 ,发现热处理对薄膜的致色效率影响较小 ,然而对动态致色范围的影响很大。     

制备参数对磁控溅射CoSi2薄膜织构的影响

采用射频磁控溅射法溅射CoSi2合金靶材制备CoSi2薄膜,研究了制备参数对薄膜织构的影响。结果表明,CoSi2薄膜中存在(111)或(220)织构。织构的形成受溅射参数的影响。溅射功率越大,溅射气压越低,(111)织构越强烈。当基底温度增加时,织构经历了先增强后减弱的过程。     

Textured tetragonal ZrO2 film grown on (100) silicon surface by DLI metal-organic chemical vapor deposition

Zirconia (ZrO2) thin films with micronic layer thickness are deposited on Si(100) substrates by MOCVD in a cold wall reactor using direct injection (DLI-CVD) process with Zr2(OiPr)6(thd)2 precursor diluted in cyclohexane. The effects of experimental parameters such as substrate's temperature, injection frequency, oxygen partial pressure in the reactive chamber and deposition duration of the process are investigated in order to produce a strongly textured tetragonal ZrO2 film. The films crystalline structure and crystallite size (several nm) are identified by Grazing incidence X-ray diffraction (GIXRD); the microstructure and morphology are observed with the use of FEG-SEM. GIXRD patterns showed the predominance of nano-crystallized tetragonal phase (or cubic) in the films. Pole figures have been analysed for both {111}(t-c) and {200}(t-c) planes in order to evaluate the relationship binding the preferential crystallographic orientation to the column-like growth structure. Besides, the internal stresses levels (with the use of sin2 psi method) within zirconia layers varied from a compressive to a tensile state depending on the experimental deposition conditions and are related to phase orientation and/or transformation into monoclinic one. It is demonstrated that high temperature, low pressure and low deposition time enhanced the tetragonal phase quality that became highly (200)t textured.