Composition controlled synthesis and Raman analysis of Ge-rich Si(x)Ge(1-x) nanowires

Here, we report the synthesis of Si(x)Ge(1-x) nanowires with x values ranging from 0 to 0.5 using bulk nucleation and growth from larger Ga droplets. Room temperature Raman spectroscopy is shown to determine the composition of the as-synthesized Si(x)Ge(1-x) nanowires. Analysis of peak intensities observed for Ge (near 300 cm(-1)) and the Si-Ge alloy (near 400 cm(-1)) allowed accurate estimation of composition compared to that based on the absolute peak positions. The results showed that the fraction of Ge in the resulting Si(x)Ge(1-x) alloy nanowires is controlled by the vapor phase composition of Ge.     

Diameter-dependent composition of vapor-liquid-solid grown Si(1-x)Ge(x) nanowires

Diameter-dependent compositions of Si(1-x)Ge(x) nanowires grown by a vapor-liquid-solid mechanism using SiH(4) and GeH(4) precursors are studied by transmission electron microscopy and X-ray energy dispersive spectroscopy. For the growth conditions studied, the Ge concentration in Si(1-x)Ge(x) nanowires shows a strong dependence on nanowire diameter, with the Ge concentration decreasing with decreasing nanowire diameter below approximately 50 nm. The size-dependent nature of Ge concentration in Si(1-x)Ge(x) NWs is strongly suggestive of Gibbs-Thomson effects and highlights another important phenomenon in nanowire growth.     

On the formation and photoluminescence of Si(1-x)Ge(x) nanoparticles

Si(1-x)Ge(x) nanoparticles were prepared from two annealed alloy ingots at the compositions of Si:Ge = 9.5:0.5 and 9:1 using a vapor condensation technique under Ar atmosphere. These nanoparticles are all spherical, and increasing the working pressure leads to an increased particle size and size dispersion. Comparing to the alloy ingots, the nanoparticles have a higher average content of Ge. In addition, increasing the working pressure also causes the Si(1-x)Ge(x) nanoparticles to become more Ge-rich. This can be ascribed to the lower melting point and higher kinetic energy of Ge than Si during the evaporation process. The photoluminescence of Si(1-x)Ge(x) nanoparticles ranges from visible light to infrared region, and the luminescence peak exhibits a red shift as the Ge content in the nanoparticles increases. This indicates that the incorporation of Ge into Si has a dominant effect in the radiative recombination process, in comparison with the constant luminescence peak position in the case of pure Si nanoparticles with similar size distribution.     

高真空化学气相外延炉的研制

研制出满足Ｓｉ１－ｘＧｅｘ异质结薄膜材料生长工艺的高真空化学气相外延炉,介绍了Ｓｉ１－ｘＧｅｘ异质结薄膜材料的生长工艺,详述了该气相外延设备的性能指标、结构组成和设计原理,并且给出了利用该设备生长Ｓｉ１－ｘＧｅｘ异质薄膜的实验结果。     

GexSi1-x/Si中应变的会聚束电子衍射研究

介绍了会聚束电子衍射（ＣＢＥＤ）技术与计算机模拟相结合测定ＧｅｘＳｉ１－ｘ／Ｓｉ化学梯度层中应变分布的实验结果,提供了一种高空间分辨率,高灵敏度,且适用于任何材料系中微区晶格常数测定及应变分布研究的技术途径。     

Ge-rich islands grown on patterned Si substrates by low-energy plasma-enhanced chemical vapour deposition

Si(1-x)Ge(x) islands grown on Si patterned substrates have received considerable attention during the last decade for potential applications in microelectronics and optoelectronics. In this work we propose a new methodology to grow Ge-rich islands using a chemical vapour deposition technique. Electron-beam lithography is used to pre-pattern Si substrates, creating material traps. Epitaxial deposition of thin Ge films by low-energy plasma-enhanced chemical vapour deposition then leads to the formation of Ge-rich Si(1-x)Ge(x) islands (x > 0.8) with a homogeneous size distribution, precisely positioned with respect to the substrate pattern. The island morphology was characterized by atomic force microscopy, and the Ge content and strain in the islands was studied by μRaman spectroscopy. This characterization indicates a uniform distribution of islands with high Ge content and low strain: this suggests that the relatively high growth rate (0.1 nm s(-1)) and low temperature (650?°C) used is able to limit Si intermixing, while maintaining a long enough adatom diffusion length to prevent nucleation of islands outside pits. This offers the novel possibility of using these Ge-rich islands to induce strain in a Si cap.     

Electrical transport of bottom-up grown single-crystal Si(1-x)Ge(x) nanowire

In this work, we fabricated an Si(1-x)Ge(x) nanowire (NW) metal-oxide-semiconductor field-effect transistor (MOSFET) by using bottom-up grown single-crystal Si(1-x)Ge(x) NWs integrated with HfO(2) gate dielectric, TaN/Ta gate electrode and Pd Schottky source/drain electrodes, and investigated the electrical transport properties of Si(1-x)Ge(x) NWs. It is found that both undoped and phosphorus-doped Si(1-x)Ge(x) NW MOSFETs exhibit p-MOS operation while enhanced performance of higher I(on)～100?nA and I(on)/I(off)～10(5) are achieved from phosphorus-doped Si(1-x)Ge(x) NWs, which can be attributed to the reduction of the effective Schottky barrier height (SBH). Further improvement in gate control with a subthreshold slope of 142?mV?dec(-1) was obtained by reducing HfO(2) gate dielectric thickness. A comprehensive study on SBH between the Si(1-x)Ge(x) NW channel and Pd source/drain shows that a doped Si(1-x)Ge(x) NW has a lower effective SBH due to a thinner depletion width at the junction and the gate oxide thickness has negligible effect on effective SBH.     

放电等离子烧结Gd/Gd5Si2Ge2复合材料磁热效应研究

以高纯钆和Gd5Si2Ge2合金为原料,采用放电等离子烧结技术制备了两组元Gdx(Gd5Si2Ge2)1-x(x=0,0.33,0.5,0.7,1)层状复合磁制冷材料.通过自制的磁热效应测量仪器直接测量了复合材料在外加磁场1.5 T下的磁热效应(ΔTad).随着复合比例的变化,材料的最大绝热温变(ΔTad)从x=0.3时的1.6 K增加到x=0.7时的2.0 K,而最大绝热温变峰的位置从286K变到了293 K.同时,与单组元的Gd5Si2Ge2合金相比,随着钆的含量增加时,复合材料的最大绝热温变峰变宽.当x=0.7时,层状复合磁制冷材料在外加磁场1.5 T下的最大绝热温变(ΔT)在260-310K范围里从1.1 K变到2.0 K,这种材料非常适合作为室温磁制冷材料.     

Atomically controlled processing in silicon-based CVD epitaxial growth

One of the main requirements for Si-based ultrasmall device is atomic-order control of process technology. Here, we show the concept of atomically controlled processing for group IV semiconductors based on atomic-order surface reaction control in Si-based CVD epitaxial growth. Self-limiting formation of 1-3 atomic layers of group IV or related atoms after thermal adsorption and reaction of hydride gases on Si(1-x)Gex(100) (x = 0-1) surface are generalized based on the Langmuir-type model. Moreover, Si-based epitaxial growth on N, P or C atomic layer formed on Si(1-x)Gex(100) surface is achieved at temperatures below 500 degrees C. N atoms of about 4 x 10(14) cm(-2) are buried in the Si epitaxial layer within about 1 nm thick region. In the Si(0.5)Ge(0.5) epitaxial layer, N atoms of about 6 x 10(14) cm(-2) are confined within about 1.5 nm thick region. The confined N atoms in Si(1-x)Gex preferentially form Si-N bonds. For unstrained Si cap layer grown on top of the P atomic layer formed on Si(1-x)Gex(100) with P atomic amount of below about 4 x 10(14) cm(-2) using Si2H6 instead of SiH4, the incorporated P atoms are almost confined within 1 nm around the heterointerface. It is found that tensile-strain in the Si cap layer growth enhances P surface segregation and reduces the incorporated P atomic amount around the heterointerface. Heavy C atomic-layer doping suppresses strain relaxation as well as intermixing between Si and Ge at the nm-order thick Si(1-x)Gex/Si heterointerface. These results open the way to atomically controlled technology for ULSIs.     

One-step Ge/Si epitaxial growth

Fabricating a low-cost virtual germanium (Ge) template by epitaxial growth of Ge films on silicon wafer with a Ge(x)Si(1-x) (0 < x < 1) graded buffer layer was demonstrated through a facile chemical vapor deposition method in one step by decomposing a hazardousless GeO(2) powder under hydrogen atmosphere without ultra-high vacuum condition and then depositing in a low-temperature region. X-ray diffraction analysis shows that the Ge film with an epitaxial relationship is along the in-plane direction of Si. The successful growth of epitaxial Ge films on Si substrate demonstrates the feasibility of integrating various functional devices on the Ge/Si substrates.     

Ge oxidation in the remaining cores of Si(1-x)Ge(x) nanowires after prolonged oxidation

For this investigation of the Ge behavior of condensed Si(1-y)Ge(y) (y > x) cores during the oxidation of Si(1-x)Ge(x) nanowires, Si(1-x)Ge(x) nanowires were grown in a tube furnace by the vapor-liquid-solid method and thermally oxidized. The test results were characterized using several techniques of transmission electron microscopy. The two types of Ge condensation are related to the diameter and Ge content of the nanowires. The consumption of Si atoms in prolonged oxidation caused the condensed SiGe cores to become Ge-only cores; and the continuous oxidation resulted in the oxidation of the Ge cores. The oxidation of Ge atoms was confirmed by scanning transmission electron microscopy.     

A Semicontinuum Model for Si_<i>x</i>Ge_{<i>1 - x</i>} Alloys: Calculation of Their Elastic Characteristics and the Strain Field at the Free Surface of a Semi-Infinite Alloy

A semicontiuum Green's-function-based model is proposed for analysis of averaged mechanical characteristics of Si_xGe_{1 - x}. The atomistic forces in the model are distributed at discrete lattice sites, but the Green's function is approximated by the continuum GF in the far field and by the averaged lattice GF in the near field. Averaging is achieved by replacing Si and Ge atoms by identical hypothetical atoms that are x fraction Si and (1-x) fraction Ge. The parameters of the model are derived using the atomistic model from the interatomic potential between the hypothetical atoms. The interatomic potential is obtained from the radial embedded atom model proposed in an earlier paper. The parameters of the model potential are estimated partly by interpolation and partly by fitting the calculated and measured values of the cohesive energy and the lattice constant of Si_xGe_{1 - x} as functions of x. The model is applied to calculate the elastic constants of Si_xGe_{1 - x} and the displacement and the strain field at the free surface of a semi-infinite alloy for different values of x due to a buried point defect. The elastic constants predicted by the model are used to calculate the curvature of a single crystal of Si with a 49 nm epitaxial film of Si(0.846)Ge(0.154). The calculated value (312.8 m) of the radius of curvature is in excellent agreement with the recently measured value (314.5 m) at our laboratory.     

Microstructure and magnetic properties of Fe(x)Ni(1-x) alloy nanoplatelets

Plate-like nanoparticles (or nanoplatelets) of Fe(x)Ni(1-x) (x = 0.1, 0.2, 0.3, 0.4, 0.5, and 0.6) alloy were successfully synthesized through a simple sonochemical method. The shapes of the alloy nanoplatelets with different Fe atom contents are almost same. Their average diameters are about 50 nm, and their average thicknesses are several nanometers. The obtained Fe(x)Ni(1-x) alloy nanoplatelets are single-phased and have a face-centered cubic (FCC) crystal structure. The lattice constants of the alloy nanoplatelets are larger than the corresponding bulk value and increase with increasing Fe content. The surface oxidation of the alloy nanoplatelets leads to the lattice expansion. The alloy nanoplatelet powders are all ferromagnetic, and their saturation magnetizations are slightly lower than the corresponding bulk value. The saturation magnetic field and the coercivity increase with increasing Fe content. Magnetic hysteresis loops along the directions deviating different angles from the nanoplatelets plane are obviously different, indicating that the easy-axis is in the in-plane direction and the magnetization reversal is incoherent mode. The micromagnetic simulation results for the array composed of thirty-six Fe0.6Ni0.4 alloy nanoplatelets fit well with the measured data.     

Interface charge induced p-type characteristics of aligned Si(1-x)Gex nanowires

This study reports the electrical transport characteristics of Si(1-x)Gex (x=0-0.3) nanowires. Nanowires with diameters of 50-100 nm were grown on Si substrates. The valence band spectra from the nanowires indicate that energy band gap modulation is readily achievable using the Ge content. The structural characterization showed that the native oxide of the Si(1-x)Gex nanowires was dominated by SiO2; however, the interfaces between the nanowire and the SiO2 layer consisted of a mixture of Si and Ge oxides. The electrical characterization of a nanowire field effect transistor showed p-type behavior in all Si(1-x)Gex compositions due to the Ge-O and Si-O-Ge bonds at the interface and, accordingly, the accumulation of holes in the level filled with electrons. The interfacial bonds also dominate the mobility and on- and off-current ratio. The large interfacial area of the nanowire, together with the trapped negative interface charge, creates an appearance of p-type characteristics in the Si(1-x)Gex alloy system. Surface or interface structural control, as well as compositional modulation, would be critical in realizing high-performance Si(1-x)Gex nanowire devices.     

The dependence of GexSi1-x epitaxial growth on GeH4 flow using chemical vapour deposition

GexSi1-x epilayers were grown at 700–900°C by atmospheric pressure chemical vapour deposition. GexSi1-x, Si and Ge growth rates as functions of GeH4 flow are considered separately to investigate how the growth of the epilayers is enhanced. Arrhenius plots of Si and Ge incorporation in the GexSi1-x growth show the activation energies associated with the growth rates are about 1.2 eV for silicon and 0.4 eV for germanium, indicating that Si growth is limited by surface kinetics and Ge growth is limited by mass transport. A model based on this idea is proposed and used to simulate the growth of GexSi1-x. The calculation and experiment are in good agreement. Growth rate and film composition increase monotonically with growth pressure; both observations are explained by the model. This revised version was published online in August 2006 with corrections to the Cover Date.     

Spin polarization measurement of homogeneously doped Fe(1-x)Co(x)Si nanowires by Andreev reflection spectroscopy

We report a general method for determining the spin polarization from nanowire materials using Andreev reflection spectroscopy implemented with a Nb superconducting contact and common electron-beam lithography device fabrication techniques. This method was applied to magnetic semiconducting Fe(1-x)Co(x)Si alloy nanowires with x? = 0.23, and the average spin polarization extracted from 6 nanowire devices is 28 ± 7% with a highest observed value of 35%. Local-electrode atom probe tomography (APT) confirms the homogeneous distribution of Co atoms in the FeSi host lattice, and X-ray magnetic circular dichroism (XMCD) establishes that the elemental origin of magnetism in this strongly correlated electron system is due to Co atoms.     

Role of confinement on carrier transport in Ge-Si(x)Ge(1-x) core-shell nanowires

We examine the impact of shell content and the associated hole confinement on carrier transport in Ge-Si(x)Ge(1-x) core-shell nanowires (NWs). Using NWs with different Si(x)Ge(1-x) shell compositions (x = 0.5 and 0.7), we fabricate NW field-effect transistors (FETs) with highly doped source/drain and examine their characteristics dependence on shell content. The results demonstrate a 2-fold higher mobility at room temperature, and a 3-fold higher mobility at 77K in the NW FETs with higher (x = 0.7) Si shell content by comparison to those with lower (x = 0.5) Si shell content. Moreover, the carrier mobility shows a stronger temperature dependence in Ge-Si(x)Ge(1-x) core-shell NWs with high Si content, indicating a reduced charge impurity scattering. The results establish that carrier confinement plays a key role in realizing high mobility core-shell NW FETs.     

Thermodynamics of coherently-strained GexSi1-x nanocrystals on Si(001): alloy composition and island formation

We determined the enthalpic and entropic contributions to the thermodynamics of coherently strained nanocrystals grown via deposition of pure Ge on Si(001) surfaces at 600 and 700 degrees C by analyzing their composition profile and local strain. We found that the free energy associated with the entropy of mixing, which drives GexSi1-x alloy formation, was significantly larger than the relaxation enthalpy that produces the islands. Thus, entropy plays a significant role in the evolution of the size and shape of the islands during growth through the strong thermodynamic drive to form an alloy.     

Zn(1-x)Mg(x)Te nanowires grown by solid source molecular beam epitaxy

This paper reports on the epitaxial growth of single-crystalline ternary Zn(1-x)Mg(x)Te nanowires covering a broad compositional range of molar fraction 0≤x≤0.75. The nanowires were grown on (100), (110), and (111) GaAs substrates using a vapor-liquid-solid mechanism. Solid source molecular beam epitaxy and an Au-based nanocatalyst were used for these purposes. The composition of nanowires can be adjusted by changing the ratio of Mg to Zn molecular beam fluxes. Electron microscopy images show that the nanowires are smooth and slightly tapered. The diameters of the obtained nanowires are from?30 to 70?nm and their length is around 1?μm. X-ray diffraction analysis and transmission electron microscopy reveal that the nanowires have a zinc-blende structure throughout the whole range of obtained compositions, and have a [Formula: see text] growth axis. The Raman measurements reveal both the expected splitting and shift of phonon lines with increasing Mg content, thus proving the substitutional incorporation of Mg into metallic sites of the ZnTe lattice.     

Topotaxial fabrication of vertical Aux Ag1-x nanowire arrays: plasmon-active in the blue region and corrosion resistant

Topotaxial growth of Au(x) Ag(1-x) alloy nanowires (NWs) by postepitaxial deposition of Ag vapor on Au NWs and investigation of their plasmonic properties are reported. Ag vapor is supplied onto the epitaxially grown Au NWs, topotaxially turning them into Au(x) Ag(1-x) alloy NWs. The original geometries and alignments of the Au nanostructures are well preserved, while the composition of the alloy NWs is controlled by varying the Ag vapor supply time. The Au(0.5) Ag(0.5) NWs show high surface-enhanced Raman scattering (SERS) activity comparable to that of Ag NWs as well as highly increased oxidation resistance. The plasmon-active wavelength range of the Au(0.5) Ag(0.5) NW is significantly extended to the blue region compared to Au NWs. The Au(x) Ag(1-x) alloy NWs that have plasmonic activity in the blue region in addition to high corrosion resistance will make a superb material for practical plasmonic devices including SERS sensors and optical nanoantennas.