Development of a high precision flexure-based microgripper

This paper presents the design and development of a high precision microgripper for micromanipulation. The design is based on a hybrid flexure-based compliant mechanism and a bias spring structure which render high fidelity and inherent mechanical advantages. Finite element analysis (FEA) was conducted to evaluate responses of the model under specified load and displacement to investigate optimum design of the model. The prototype of the proposed microgripper was fabricated using electro-discharge machining (EDM) process. An experimental study of the performance was carried out and the results are presented. The experimental results are also compared with the computational analysis results. The results show that a high level of displacement amplification and a maximum stroke of 100 μm can be achieved.     

A new design of piezoelectric driven compliant-based microgripper for micromanipulation

This paper describes the development of a microgripper mechanism capable of delivering high precision and fidelity manipulation of micro objects. The mechanism adopts a flexure-based concept on its joints to address the inherent nonlinearities associated with the application of conventional rigid hinges. A combination of two modeling techniques namely Pseudo Rigid Body Model (PRBM) and Finite Element Analysis (FEA) was implemented to expedite the prototyping procedure which leads to the establishment of high performance mechanism. A wire Electro Discharge Machining (EDM) technique was utilized to fabricate the monolithic structure of the gripper mechanism. Experimental studies were conducted on the model prototype to obtain various correlations governing the gripper performance as well as for model verification. The experimental results demonstrate a high level of integrity in comparison to the computational analysis. A high amplification characteristic and maximum stroke of 100 μm can be achieved.     

Precision design and control of a flexure-based roll-to-roll printing system

This paper presents the design, characterization, and control of a flexure-based roll-to-roll (R2R) printing system that achieves nanometer level precision and repeatability. The R2R system includes an unwinding/rewinding module, a web guide mechanism, and a core positioning stage consisting of two monolithic compliant X–Y stages that control the position/force of the print roller. During the printing process, capacitance probes, eddy current sensors and load cells are used to monitor the displacements of the flexure stage and contact force in real time. Control strategies, including decoupling, PID, and cascade control, have been implemented to decouple the cross-axis and cross-stage motion coupling effect and improve the overall precision and dynamic performance. In actual printing processes, the contact force and roller position can be uniformly controlled within ±0.05 N and ±200 nm respectively across a 4 in. wide PET web. To demonstrate the performance, a positive microcontact printing (MCP) process is adapted to the R2R system, printing various fine metal patterns, e.g., optical gratings and electrodes, in a continuous fashion.     

Control and dynamic releasing method of a piezoelectric actuated microgripper

This paper proposes the control and dynamic releasing method of a symmetric microgripper with integrated position sensing. The microgripper adopted in this micromanipulation system is constructed by two L-shaped leverage mechanisms and the fingers of the microgripper is machined much thinner than the gripper body. A combined feedforward/feedback position controller is established to improve the motion accuracy of the microgripper in high frequency. The feedforward controller is established based on rate-dependent inverse Prandtl-Ishlinskii (P–I) hysteresis model. The inertial force generated in dynamic based releasing process is analyzed through MATLAB simulation. Open-loop experimental tests have been performed, and the results indicate the first natural frequency of the microgripper is 730 Hz. Then experiments in high frequency based on the developed combined controller are carried out and the results show the tracking error of a superimposed sinusoidal trajectory with the frequency of 100 Hz, 120 Hz and 130 Hz is 6.4%. Finally, the tiny objects releasing experiments are conducted where the combined controller is used to control the motion amplitude and frequency to achieve inertial force controllable to improve operation accuracy. And the results show that the dynamic releasing strategy is effective.     

长行程精密定位平台的设计

音圈电机与柔顺机构的结合,设计了一个在固定运动范围内具有高精度定位能力的精密定位平台,分析了平台参数的确定方法。给出了提高定位平台稳定性的措施。     

Design and nonlinear analysis of a 6-DOF compliant parallel manipulator with spatial beam flexure hinges

In this paper, a compliant parallel manipulator with six compliant limbs is proposed for micro positioning applications. The load–displacement model of a single compliant limb is established using a nonlinear closed-form spatial beam model. The inverse solution to the compliant parallel manipulator is then implicitly derived by applying load equilibrium to the moving platform. Finally, the compliant model of the limb and the implicit inverse kinematic solution of the manipulator are fully tested by FEA. Discrepancies between results of the presented models and the FEA are analyzed within planned workspaces. The validations demonstrate that accuracies of the proposed models are acceptable and can be improved by shrinking the planned workspace.     

Design and dynamic modeling of a 2-DOF decoupled flexure-based mechanism

Flexure mechanisms with decoupled characteristics have been widely utilized in precision positioning applications.However,these mechanisms suffer from either slow response or low load capability.Furthermore,asymmetric design always leads to thermal error.In order to solve these issues,a novel 2-DOF decoupled mechanism is developed by monolithically manufacturing sets of statically indeterminate symmetric(SIS) flexure structures in parallel.Symmetric design helps to eliminate the thermal error and Finite Element Analysis(FEA) results show that the maximum coupling ratio between X and Y axes is below 0.25% when a maximum pretension force of 200 N is applied.By ignoring the mass effect,all the SIS flexure structures are simplified to "spring-damper" components,from which the static and dynamics model are derived.The relation between the first resonant frequency of the mechanism and the load is investigated by incorporating the load mass into the proposed dynamics model.Analytical results show that even with a load of 0.5 kg,the first resonant frequency is still higher than 300 Hz,indicating a high load capability.The mechanism’s static and dynamic performances are experimentally examined.The linear stiffnesses of the mechanism at the working platform and at the driving point are measured to be 3.563 0 N·μm-1 and 3.362 1 N·μm-1,respectively.The corresponding estimation values from analytical models are 3.405 7 N·μm-1 and 3.381 7 N·μm-1,which correspond to estimation errors of-4.41% and 0.6%,respectively.With an additional load of 0.16 kg,the measured and estimated first resonant frequencies are 362 Hz and 365 Hz,respectively.The estimation error is only 0.55%.The analytical and experimental results show that the developed mechanism has good performances in both decoupling ability and load capability;its static and dynamic performance can be precisely estimated from corresponding analytical models.The proposed mechanism has wide potentials in precision positioning applications.     

Synthesis of multiple degrees-of-freedom spatial-motion compliant parallel mechanisms with desired stiffness and dynamics characteristics

This paper presents a new design method to synthesize multiple degrees-of-freedom (DOF) spatial-motion compliant parallel mechanisms (CPMs). Termed as the beam-based structural optimization approach, a novel curved-and-twisted (C-T) beam configuration is used as the basic design module to optimize the design parameters of the CPMs so as to achieve the targeted stiffness and dynamic characteristics. To derive well-defined fitness (objective) functions for the optimization algorithm, a new analytical approach is introduced to normalize the differences in the units, e.g., N/m or N m/rad, etc., for every component within the stiffness matrix. To evaluate the effectiveness of this design method, it was used to synthesize a 3-DOF spatial-motion (θ_x − θ_y − Z) CPM that delivers an optimized stiffness characteristics with a desired natural frequency of 100 Hz. A working prototype was developed and the experimental investigations show that the synthesized 3-DOF CPM can achieved a large workspace of 8°×8°×5.5 mm, high stiffness ratios, i.e., >200 for non-actuating over actuating stiffness, and a measured natural frequency of 84.4 Hz.     

大行程高分辨率微定位机构的设计分析

压电驱动器的位移输出能力有限,通常借助于柔性机构对其位移量进行放大。提出一种柔性八杆放大机构,并对 其进行有限元分析和理论计算。为了提高放大率,提出两级串连式机构。机构整体具有结构紧凑、放大效率较高的优点。     

Error analysis of a flexure hinge mechanism induced by machining imperfection

Modeling of manufacturing tolerances for machining of a monolithic flexure hinge mechanism is presented. This modeling uses a computer-based method to generate the equations of motion for the mechanism and to predict the induced motion errors for various types of machining imperfections. This paper describes the modeling and the quantitative analysis of the motion errors using a well-known simple compound linear spring as an example. Based on the simulation results of the example problem, effects of the machining imperfection types on motion errors are generalized. The simulation demonstrates that the imperfection of the center position and the size of a machined hole provide an in-plane motion error X, Y, θ_z. In addition, the machining error in the perpendicularity of the hole with respect to the plate also provides an out-of-plane parasitic error Z, θ_y, θ_y.     

Compound joints: Behavior and benefits of flexure arrays

Because compliant mechanisms achieve their motion through deflection of flexible members, they have a limited range of motion and finite stiffness. Many common flexure geometries also suffer from a non-stationary center of rotation. These properties can be obstacles to their adoption in applications that require large displacements, low stiffness, or stationary centers of rotation. This work presents the concept of compound flexures: by assembling arrays of flexures, we can increase range of motion, decrease stiffness, and reduce center shift. We first develop the theory behind some of the basic behavior of compound joints. Then finite element analysis is used to explore other aspects of compound joint behavior such as off-axis stiffness and quantifying the center shift for two flexure types when used in compound joints of various configurations. It is shown in an example that range of motion can be doubled with no appreciable loss in off-axis stiffness, while the desired stiffness κ_θz remains unchanged. A method is presented to achieve zero center shift for a specified rotational displacement. Compound joints are shown to exhibit greater ranges of motion, higher off-axis stiffness, and reduced center shift compared to traditional joints.     

柔顺机构驱动力矩分析

基于伪刚体模型,对一个柔顺曲柄滑块机构的原动件驱动力矩问题进行了研究,分析了当给定从动件运动规律时原动件的驱动力矩问题,得出了主动件驱动力矩与机构参数间的关系,讨论了在一定运动条件下,当原动件获得最大精入力矩时机构各参数的优化设计方案,并提出力矩优化设计模型.通过算例表明该方法可行.     

指数型超声变幅杆有限元分析与试验

针对传统解析法设计的变幅杆不能直接运用于超声振动系统,变幅杆结构需要修正的问题,采用有限元分析的方法对指数型超声变幅杆进行了优化设计,确定出变幅杆的最后结构,使设计的变幅杆符合实际应用要求;依据设计制造了一批变幅杆,并进行了谐振频率测试。测试数据经统计分析后,其结果表明有限元分析法设计的变幅杆可以较好地满足使用要求。     

Dynamic modelling of a flexure-based mechanism for ultra-precision grinding operation

This paper presents the dynamic modelling and performance evaluation methodologies of a flexure-base mechanism for ultra-precision grinding operation. The mechanical design of the mechanism is briefly described. A piezoelectric actuator is utilized to drive the moving platform. A flexure-based structure is utilized to guide the moving platform and to provide preload for the piezoelectric actuator. By simplifying the Hertzian contact as a linear spring and damping component, a bilinear dynamic model is developed to investigate the dynamic characteristics of the flexure-based mechanism. Based on the established model, the separation phenomenon between the moving platform and the piezoelectric actuator is analyzed. The influences of the control voltage and the preload stiffness on the maximum overshoot are extensively investigated. The slope and cycloidal command signals are utilized to reduce and/or avoid the overshoot of such flexure-based mechanism for rapid positioning. The effects of the rising time of the command signals on the maximum overshoot and the settling time are also explored. Experiments are performed to verify the established dynamic model and the performance of the developed flexure-based mechanism.     

Manufacturing error analysis of compliant 3-DOF microrobot

In the fields of micro/nanopositioning application, error analysis is an effective way to enhance the precision of micromanipulators. Manufacturing imperfections, which are inevitable, are the most important factors influencing the accuracy. Therefore, various manufacturing imperfections were studied by taking a planar 3 degrees of freedom (3-DOF) flexure hinge-based microrobot as a case. By formulating static stiffness of the robot, mapping between manufacturing imperfections and end-effector positioning accuracy was obtained. Using the theoretical calculation and finite element method (FEM), effects of various machining imperfection types on end-effector positioning accuracy were evaluated. The results showed that errors of the radium of the hinges and angular differences of the centerline of the hinges were dominant factors resulting in output errors. Conclusions drawn from the experiments can be used to instruct the design of compliant parallel mechanisms by distributing various manufacturing differences of configurable parameters to guarantee precision in the positioning of the end-effector within the required range; they may also be helpful while calibrating this kind of manipulator. __________ Translated from Journal of Beijing University of Aeronautics and Astronautics, 2005, 31(7) (in Chinese)     

新型二维纳米级微动工作台的动力学分析

提出一种新型、集成式压电驱动两自由度nm级微定位工作台系统,工作台采用直角柔性平行板铰链,实现X,Y方向的运动,采用杠杆放大柔性铰链机构实现对压电陶瓷位移的放大.并对这种新型结构形式理论分析与实验测试.根据拉格郎日方程建立微动工作台的运动微分方程,推导出系统前两阶固有频率的解析式.采用有限元分析方法对微动工作台进行模态分析,得到微定位工作台有效工作的谐振频率和振型,并对微动工作台的模态频率进行了实验测试.经理论分析、有限元计算和实验测试结果进行对比与分析的一致性说明理论分析的正确性和数值分析的可靠性.     

压电位移放大机构的力学解析模型及有限元分析

研究了压电位移放大机构的运动学和动力学建模问题。基于能量守恒原理和弹性梁弯曲理论推导了桥式位移放大机构的位移放大比等静力学解析模型;在此基础上,通过拉格朗日方程建立了桥式位移放大机构的固有频率解析模型。通过有限元计算验证和分析了提出的解析模型的可行性和优越性,并与国内外典型的位移放大比数学模型进行了比较。结果表明:由于本文提出的模型考虑了位移放大机构的拉伸和弯曲变形,并且摒弃了国内外普遍采用近似几何关系进行数学推导的思路,因此所建立的位移放大比解析模型精度更高;固有频率解析计算结果与有限元模态分析结果的相对误差约为5%。得到的结果显示:本文给出的建模方法以及位移放大比、固有频率等解析模型可为柔性机构的优化设计和研制提供依据和参考。     

采用计算化学方法解析苯和甲苯红外谱图

本研究应用量子计算化学软件Gaussian 03W HF方法中的3-21G基组优化苯和甲苯分子结构,预测苯和甲苯分子的红外光谱。找到苯环振动吸收峰分别是苯红外图中的1658 cm~(-1)与甲苯红外图中的1667 cm~(-1)。与苯和甲苯文献检索红外谱图相对应(特征吸收峰分别是1478和1485 cm~(-1)),符合较好。还找到苯环C-H拉伸振动吸收峰3080cm~(-1)(苯)和3040 cm~(-1)(甲苯)。能够实用于红外法检测环境中苯和甲苯。     

一种新型3自由度大行程微定位平台设计与分析

为解决微定位平台大行程与高精度之间的矛盾,提出一种新型的3自由度柔性并联机构。该机构三条支链采用特殊方式与动平台相连,使整体机构结构紧凑且具有良好的力学传递性能。同时,机构采用行程大,分辨率高,便于控制的电磁驱动器作为驱动部件,保证机构在不需要引入放大机构的前提下便可获得较大的行程和较高的分辨率。使用大行程柔性铰链代替普通的球铰,降低了加工制造难度和机构刚度模型的求解难度。采用螺旋理论分析了3-P(4S)并联机构末端运动特征,结合单元刚度矩阵法和矩阵位移法推导了3-P(4S)柔性并联机构的静刚度模型,并采用ANSYS进行了分析验证。     

大变形柔顺机构的驱动特性研究

基于“伪刚体模型法” ,分析研究了当给定从动件的变形或给定其运动规律时大变形柔顺机构原动件的驱动问题。首先对柔顺机构中不同柔性元件的运动轨迹进行了分析 ,给出了其“伪刚体模型”中主要结构参数的确定方法。在此基础上 ,研究了当从动件产生预期的变形或满足给定的运动规律时 ,求解原动件驱动力矩的一般方法。最后通过算例说明了方法的有效性。