时间相移显微干涉术用于微机电系统的尺寸表征

提出了将时间相移显微干涉测量方法用于微结构和器件的几何特性检测上．该方法速度快、无损、非接触、易在晶片级进行,具有亚微米级的水平分辨力,垂直分辨力在纳米量级．测量系统采用Mirau显微干涉物镜,利用高性能压电陶瓷物镜纳米定位器实现垂直方向的相移,并通过健壮的5帧Hariharan算法获取表面的相位信息．通过测量美国国家标准研究院（NIST）认证的标准台阶对系统进行了精度标定,并通过测量微谐振器和压力传感器微薄膜的几何尺寸说明了该方法作为测量和过程表征工具的功能．     

MEMS显微干涉测量系统中相位提取算法的选择与分析

描述了一种基于相移显微干涉术的MEMS测试方法,达到了纳米级分辨力．从理论上分析了4种常用相移算法对测量过程主要噪声（相移器的移相误差和探测器的非线性响应误差）的抑制作用,并选定了适合本系统的Hariharan算法．通过对经过美国国家标准研究院（NIST）认证的一个台阶高度的测量,验证了各种算法的测量精度,说明Hariharan算法对噪声有更强的抑制作用,其测量重复性在亚纳米量级．     

Mirau干涉型微纳台阶高度测量系统的研究

为了实现纳米量级到微米量级的微观三维台阶样板高度的快速测量,在普通光学显微镜的基础上改造完成了一台微纳台阶高度测量装置,设计了整体硬件结构,编写了测量控制软件和数据处理软件,并结合Hilbert变换和小波变换实现三维表面形貌测量。使用不同高度的台阶样品进行测试,测试结果表明:系统测量准确度较高,测量重复性较好,垂直测量范围大于50 μm。     

基于白光相移干涉术的微结构几何尺寸表征

将Carré等步长相移法与白光垂直扫描相结合形成了一种白光等步长相移算法,该方法快速、准确、非接触,垂直分辨力可达亚纳米级.测量系统集成了Mirau显微干涉物镜,并通过高精度压电陶瓷纳米定位器带动物镜进行垂直扫描.分析了Carré法应用于白光干涉信号的相位提取的精度,对不同扫描步距以及不同信噪比情况下的测量进行了计算机仿真,确定了测量参数.结合重心法将相位计算的数据范围直接定位于干涉信号的零级条纹,从而省去了相位解包裹过程.通过对微谐振器和标准台阶的测量说明了该方法的有效性,并使用白光相移干涉、白光垂直扫描和单色光相移干涉对44 nm标准台阶进行了测量,并对测量结果进行了比较.     

用于标定镀膜机的膜厚样板的制备和测量

镀膜在国民经济生活中得到广泛应用。影响镀膜性能的一个主要参数是膜层在整个基片上的厚度均匀性。利用挡板在基片上多个区域沉积台阶,测量台阶高度的差值用于分析膜厚的均匀性。通过集成非接触聚焦式测头的纳米测量机进行测量,针对镀膜产品上各个特殊的曲面台阶,以参差平方和为标准,用基底无台阶区域的曲线模型拟合台阶底部曲线,参考ISO 5436-1：2000的台阶评价方法,对镀膜基片上多台阶进行了评价。该方法可以用于镀膜机的验收。     

Manufacture and Measurement of Film Thickness Sample for Calibration of Coating Machine

镀膜在国民经济生活中得到广泛应用.影响镀膜性能的一个主要参数是膜层在整个基片上的厚度均匀性.利用挡板在基片上多个区域沉积台阶,测量台阶高度的差值用于分析膜厚的均匀性.通过集成非接触聚焦式测头的纳米测量机进行测量,针对镀膜产品上各个特殊的曲面台阶,以参差平方和为标准,用基底无台阶区域的曲线模型拟合台阶底部曲线,参考ISO 5436-1:2000的台阶评价方法,对镀膜基片上多台阶进行了评价.该方法可以用于镀膜机的验收.     

外差式激光测振仪相移特性及延迟的测量评价

文章提出了激光测振仪相移特性和延迟时间的一种测量方法,借助于外调制状态下的FM信号源激励,以数字存储示波器进行同步波形测量,用数字化解调方法解调出FM信号中的正弦调制波形,最终获得了激光测振仪相移特性以及系统延迟时间的测量结果,同时,也获得了FM信号源外调制特性中相移特性和系统延迟时间的测量结果.一组实验结果验证了文章方法的正确性和可行性.文章所述方法可用于激光测振仪相移特性和系统延迟的测量评价,同时,也可用于FM信号源相移特性和外调制延迟的测量评价.     

光栅纳米测量中的系统误差修正技术研究

详细研究了光栅纳米测量系统的误差特性 ,以及利用激光干涉仪对高精度光栅测量系统的系统误差进行检测、并在信号处理中予以补偿和修正的方法。实验表明 ,通过这种系统误差修正方法对周期累计误差和细分误差同时进行修正 ,能够大幅度地将计量光栅系统的测量准确度从微米或亚微米量级提高到纳米级水平 ,以实现光栅纳米测量。     

基于干涉显微原理的表面形貌测量系统

根据光学干涉显微法原理,设计开发了一套微纳结构表面形貌测量系统.该系统采用林尼克干涉显微镜,通过参考镜扫描的方法将扫描器与相移器集为一体,分别采用五步相移算法和基于采样定理的包络均方函数(SEST)算法实现相移干涉法(PSI)和垂直扫描干涉法(VSI)两种模式对微纳结构的表面形貌测量.为验证该系统性能,采用标准多刻线样板和标准台阶作为样件对VSI 和PSI 两种模式分别进行了测量实验.结果证明,该系统能够完成微纳结构表面形貌的快速精确测量,可以满足微电子、微机电系统中微纳结构的表面形貌测量要求.     

光栅纳米测量技术及应用

本文简要介绍了光栅纳米测量技术的主要研究内容，着重阐述了其应用实例－一种光栅纳米测微仪的原理结构和实现方法。从系统的重复性、分辨力和准确度三方面入手，深入地研究和探索解决光栅纳米测量过程中的各种关键技术问题的方法和途径，能够有效地将光栅测量的分辨力和准确度从亚微米量级提高到纳米量级。     

Phase reconstruction from undersampled intensity patterns

We demonstrate the uniqueness and convergence of phase recovery from high-spatial-frequency and undersampled intensity data. Furthermore, this is accomplished without the ambiguities that arise in phase unwrapping and without the need to employ a priori information. The method incorporates the technique of line integration of the phase gradient to find the first approximation to the phase and the algorithm of synthetic interferograms to find the unknown phase with high accuracy. The method may be used with any experimental method that at a certain data processing step obtains generalized sine and cosine intensity functions.     

A semi-implicit fractional step finite element method for viscous incompressible flows

This paper describes a new semi-implicit finite element algorithm for time-dependent viscous incompressible flows. The algorithm is of a general type and can handle both low and high Reynolds number flows, although the emphasis is on convection dominated flows. An explicit three-step method is used for the convection term and an implicit trapezoid method for the diffusion term. The consistent mass matrix is only used in the momentum phase of the fractional step algorithm while the lumped mass matrix is used in the pressure phase and in the pressure Poisson equation. An accuracy and stability analysis of the algorithm is provided for the pure convection equation. Two different types of boundary conditions for the end-of-step velocity of the fractional step algorithm have been investigated. Numerical tests for the lid-driven cavity at Re=1 and Re=7500 and flow past a circular cylinder at Re=100 are presented to demonstrate the usefulness of the method.     

Three-dimensional phase step profilometry with a multicore optical fiber

This paper demonstrates the feasibility of using phase stepping and a multicore optical fiber to calculate an object's depth profile. An interference pattern is projected by an optical fiber onto the object. The distorted interference pattern containing the object information is captured by a CCD camera and processed using a phase step interferometry method. The phase step method is less computationally intensive compared to two-dimensional Fourier transform profilometry and provides more accuracy when measuring objects of high frequency spatial variations.     

Selective Nanoscale Fabrication with Roughness Reduction of Polycrystalline Silicon by Physically Induced Fluorine Bonds Using Atomic Force Microscope

Polycrystalline silicon (poly-Si) is widely used as a gate layer in integrated circuits, transistors, and channels through nanofabrication. Nanoremoval and roughness control are required for nanomanufacturing of various electronic devices. Herein, a nanoscale removal method is developed to overcome the limitations of microcracks, complex procedures, and time-consuming conventional fabrication and lithography methods. The method is implemented with a mechanically induced poly-Si phase transition using atomic force microscope (AFM). Mechanical force induces the covalent bonds between silicon and fluorine atoms which cause the phase transition of poly-Si. Then, the bond structure of the Si molecules is weakened and selectively removed by nano-Newton-scale force using AFM. A selective nanoscale removal with roughness control is implemented in 0.5 mM TBAF solution after mechanical force (43.58–58.21 nN) is applied. By the magnitude of nano-Newton force, the removal depth of poly-Si is controlled from 2.66 to 21.52 nm. Finally, the nanoscale fabrication on poly-Si wafer is achieved. The proposed nanoremoval mechanism is a simple fabrication method that provides selective, nanoscale, and highly efficient removal with roughness control.     

Adaptive time stepping strategy for solidification processes based on modified local time truncation error

Adaptive time step methods provide a computationally efficient means of simulating transient problems with a high degree of numerical accuracy. However, choosing appropriate time steps to model the transient characteristics of solidification processes is difficult. The Gresho–Lee–Sani predictor–corrector strategy, one of the most commonly applied adaptive time step methods, fails to accurately model the latent heat release associated with phase change due to its exaggerated time steps while the apparent heat capacity method is applied. Accordingly, the current study develops a modified local time truncation error‐based strategy designed to adaptively adjust the size of the time step during the simulated solidification procedure in such a way that the effects of latent heat release are more accurately modeled and the precision of the computational solutions correspondingly improved. The computational accuracy and efficiency of the proposed method are demonstrated via the simulation of several one‐dimensional and two‐dimensional thermal problems characterized by different phase change phenomena and boundary conditions. The feasibility of the proposed method for the modeling of solidification processes is further verified via its applications to the enthalpy method. Copyright © 2009 John Wiley & Sons, Ltd.     

Full-field automated photoelasticity by fourier polarimetry with three wavelengths

The search for fast, precise, and robust testing techniques remains an important problem in automated full-field photoelasticity. The polarizer-sample-analyzer (PSA)-based three-wavelength polarimetric method presented here employs discrete Fourier analysis and a spectral content unwrapping algorithm to provide completely automatic, simple, fast, and accurate determination of both photoelastic parameters. Fourier analysis of experimental data and a three-wavelength approach reduce the effect of noise and efficiently cope with poor accuracy in regions of both isochromatic and isoclinic maps. Because any polarimetric technique yields the phase value in the principal range of the corresponding trigonometric function, the final step in data processing is phase unwrapping. Because of the good quality of the wrapped phase map and because each point is processed independently, our suggested three-wavelength unwrapping algorithm exhibits a high level of robustness. Unlike some other PSA three-wavelength techniques, the given algorithm here solves the problem of phase unwrapping completely. Specifically, it converts experimentally obtained arccosine-type phase maps directly into full phase value distributions, skipping the step of generating an arctangent-type ramped phase map and resorting to other unwrapping routines for final data processing. The accuracy of the new technique has been estimated with a Babinet-Soleil compensator. Test experiments with the disk in diametric compression and a quartz plate have proved that the technique can be used for precise determination of the isoclinic angle and relative retardation, even for large values of the latter.     

Parallel optical trap assisted nanopatterning on rough surfaces

There exist many optical lithography techniques for generating nanostructures on hard, flat surfaces over large areas. However, few techniques are able to create such patterns on soft materials or surfaces with pre-existing structure. To address this need, we demonstrate the use of parallel optical trap assisted nanopatterning (OTAN) to provide an efficient and robust direct-write method of producing nanoscale features without the need for focal plane adjustment. Parallel patterning on model surfaces of polyimide with vertical steps greater than 1.5?μm shows a feature size uncertainty better than 4% across the step and lateral positional accuracy of 25?nm. A Brownian motion model is used to describe the positional accuracy enabling one to predict how variation in system parameters will affect the nanopatterning results. These combined results suggest that OTAN is a viable technique for massively parallel direct-write nanolithography on non-traditional surfaces.     

高频锁相激光干涉仪技术纳米定位系统

提出了一种基于高频相移电子电路驱动的压电陶瓷执行器和外差式迈克尔逊激光干涉仪的纳米位置控制方法,该方法结合双轴机械传输导轨组成了高精度大量程纳米定位系统.系统实现步长为4.945 nm的直线位移,步长的相对不确定度为1.6×10-9,1μm行程误差重复性为0.1 nm,5 mm往返行程误差重复性为0.4 nm.该方法对纳米技术与计量界在纳米刻度上的操作控制都是很有用的.     

Synthesis of high active-site density nanofibrous MnO2-base materials with enhanced permeabilities

An aqueous solution reaction method is described for preparing nanofibrous MnO₂-base materials. A critical step in the synthesis is an extended period of refluxing of the reactive constituents, which enables the gradual transformation of an initial nanoparticle agglomerated mass into a random-weave nanofibrous structure. Partial transformation of the material realizes a novel bimodal morphology, which combines a high density of chemically active sites with an enhanced fluid permeability rate. High resolution TEM observations reveal that the nanoscale fibers are b-axis oriented single crystals, which contain lattice defects in the form of dislocation dipoles, molecular pores, and nanoscale holes.