复合热释电薄膜红外探测器的研究

热绝缘结构是热释电红外探测器的关键技术之一."复合热释电薄膜红外探测器"是用多孔SiO2薄膜来绝热的,这种无空气隙的新型结构被认为具有更高的机械强度和可靠性.采用溶胶-凝胶技术制备了热导率极低的多孔SiO2薄膜,用金属有机物热分解法制备了优质的铁电薄膜,实现了"复合热释电薄膜"热绝缘结构,获得的星探测率最大值达9.3×107cm.Hz1/2/W.通过快速热处理工艺的采用,提高薄膜一次成膜厚度的研究,改善了薄膜制备与微电路工艺的兼容性.研究了多孔膜厚度、孔径分布与探测率的关系,探讨了镍酸镧(LNO)薄膜作为缓冲层、红外吸收层和上电极的多功能作用.结果表明:孔径分布小的多孔膜有利于探测器性能的提高.在此结构中,存在热性能和电性能的折中问题,多孔膜厚度有一个临界值.LNO薄膜的引入,可以改善性能、简化结构和工艺.讨论了低温铁电薄膜的制备和性能,以及与微电路实现单片集成等问题.     

复合热释电薄膜红外探测器的二维热分析

根据热释电薄膜红外探测器的结构和测试条件,使用有限元软件Ansys对其进行了二维热分析,得到了探测器受到红外辐射后的温度场。分析了复合热释电薄膜红外探测器的绝热层对温度场的影响,并将它与微桥结构探测器的性能进行了比较。结果表明,复合热释电薄膜红外探测器的绝热层能有效地减小热流向硅衬底的散失,并且探测器的响应随着绝热层厚度的增大而增大;当复合热释电薄膜红外探测器中绝热层的热导率低于空气的热导率时,它的绝热性能优于微桥结构．     

钛酸铅热释电薄膜集成红外传感器

最近,由于大量潜在的应用需要,如遥感、红外医学热象和气体探测,室温工作的红外传感器已受到相当重视,PbTiO_3因其热释电系数大且居里温度高,所以它具有优良的热释电特性。本文,我们试验制作了一种可获得红外成象的PbTiO_3薄膜线型列阵探测器,并研究了列阵探测器的基本特性。图1给出了PbTiO_3薄膜集成探测器线列的简单结构。衬底为厚约20～50μm的云母片、单晶硅和硅膜。在硅膜衬底中,灵敏元背面的部分硅被用择优腐蚀方法去除,留下的厚约     

用SiO2气凝胶做隔热层的铁电薄膜红外探测器性能与铁电薄膜层厚度的关系

研究了铁电薄膜红外探测器响应率等器件参数随铁电薄膜厚度的变化.器件的隔热层结构采用气凝胶二氧化硅.实验发现器件的热释电系数,吸收率以及热导均随膜厚增加而增加.铁电膜层厚度为240nm的器件,其热导与微桥结构器件的热导相近,都为10-7W/K量级,证明气凝胶二氧化硅做隔热层能够制备出性能优良的热释电红外探测器.随着薄膜厚度增加,热导急剧增大,这是引起器件响应率降低的原因.制备铁电薄膜过程中的多次650°高温退火可能降低了二氧化硅多孔率.     

热释电探测器用于二氧化碳激光的零差探测

本文报告了热释电探测器用于二氧化碳激光零差探测的理论分析和实验。实验结果表明，对于10.6μm二氧化碳激光，钽酸锂热释电探测器在零差探测时最小可探测功率比直接探测最小可探测功率至少低三个数量级。这对许多探测弱激光信号的应用来说具有实际意义。     

用热电器件实现的红外二氧化碳分析仪

文中介绍了一种采用钽酸锂热释电探测器作光电转换器件的红外二氧化碳浓度分析仪。描述了该仪器的基本原理与结构。该仪器基于朗伯－比尔定律，采用双光束结构、温度补偿、单片机数据处理及选用高性能的钽酸锂热释电探测器关键技术，能够对二氧化碳气体的浓度进行准确、有效的测量和分析。     

薄膜热释电红外探测器吸收和响应性能的模拟研究

采用吸收、热传导和热释电响应模型，对薄膜热释电红外探测器的吸收和响应性能进行了模拟研究。当膜系中各膜层材料的物性参数确定时，对于不同波长的红外辐射及在不同的调制频率下，探测器主要性能的优劣与探测系统的结构设计密切相关。     

热释电单元探测器的电压响应模拟

采用一维热扩散理论，用Matlab应用软件，模拟了热释电单元传感器的电压响应，比较PET塑料衬底、多孔二氧化硅衬底、悬空结构以及体硅衬底的热传导对探测器性能的影响，并与PCLT／P（VDF－TrFE）热释电单元传感器的实验结果作了比较。     

多层热释电薄膜红外探测器的PSPICE模型

在分析了热释电探测器工作原理的基础上,利用PSPICE的ABM功能建立了多层薄膜热释电红外探测器的等效电路模型。该模型可以模拟多层薄膜热释电探测器热学和电学特性的暧态响应和频率响应,模拟的结果与实验数据相一致,等效电路模型与读出电路连接,然后对热释电探测器系统进行模拟,分析不同条件下探测器的响应特性。选取不同的电路参数,该模型也同样适用于其他类型的热释电探测器。     

钽酸锂晶体及其应用分析

钽酸锂作为一种优良的多功能晶体材料,具有良好的压电、电光和热释电等性能,已被广泛应用于通信、电子等行业。该文介绍了钽酸锂晶体的结构、缺陷及性能调控方式,总结了钽酸锂晶体的制备方法及优缺点,分析了钽酸锂晶体在各应用领域的国内外研究进展,并对钽酸锂晶体的发展进行了展望,以期对钽酸锂晶体的应用及研究提供帮助。     

均匀周期极化化学计量比钽酸锂晶片的制备

采用添加助熔剂(K2O)的方法,成功制备了近化学计量比钽酸锂晶体,并基于1mol%MgO掺杂的化学计量比钽酸锂晶体周期性畴反转制备光参量振荡器(OPO)。通过在晶片表面形成占空比为60%的聚酰亚胺周期结构并利用液体电极施加极化电压,运用三步电压极化技术,制备出Z向切割1mm厚的均匀周期极化化学计量比钽酸锂晶片,晶片的畴反转占空比接近50%。     

Guided-wave acousto-optic interaction on proton-exchanged lithium tantalate

A guided-wave acoustic-optic Bragg cell has been fabricated for the first time, to our knowledge, on lithium tantalate. The waveguide is fabricated by dilute melt proton-exchange, and without electrical tuning a maximum diffraction efficiency of 22% has been demonstrated. In addition, the thermo-optic behaviour of the lithium tantalate waveguide has been shown to be similar to that previously demonstrated on titaniumindiffused and proton-exchange lithium niobate waveguides     

Intermodulation in X-cut lithium tantalate resonators

The analysis of intermodulation in X-cut lithium tantalate resonators is performed and applied to the evaluation of the fourth-order nonlinear elastic coefficient. A comparison with an AT-cut quartz resonator indicates that lithium tantalate nonlinearities are much lower.     

Numerical Analysis of Parameters of Pseudosurface Acoustic Waves in Lithium Niobate and Tantalate Crystals

Journal of Communications Technology and Electronics - The results of the analysis and calculation of the propagation parameters of leaky surface acoustic waves in lithium niobate and tantalate...     

硅基非致冷混合式焦平面探测器阵列研究

本文报道一种32×48元高灵敏非致冷混合式焦平面探测器厚膜阵列.提出了一种采用掺杂钛酸锶钡厚膜作为敏感材料的硅基微机械加工电容式红外探测器像元结构,对其工作原理、器件性能优化设计与制作工艺流程进行了分析,得出了优化的结构参数.分析了影响器件性能的关键因素,给出了器件所用铁电材料的基本物理和电学特性参数以及器件的热隔离技术和相应参数.本结构的像元电容值增量接近相同敏感面的体材料红外探测器,减小了像元与衬底电极引线的寄生电容.采用这种结构的红外探测器阵列对电路的精度要求低,便于研制集成电路.该红外探测器阵列结构的设计思路,符合大阵列红外焦平面像元结构设计的发展趋势,为开展非致冷红外焦平面阵列探测器研究奠定了基础.     

Distributed PMD Compensator in Lithium–Niobate–Tantalate: Performance Modeling Toward Highest Bit Rates

Polarization mode dispersion (PMD) is caused by noncircular fiber cores and poses a serious threat for transmitting 10-Gb/s optical signals over older fibers and 40-Gb/s optical signals over any type of fiber. We study the architecture of a PMD compensator (PMDC) capable of 40-Gb/s operation in X-cut Y-propagation lithium niobate (LiNbO₃) based on cascaded integrated optical TE-TM mode converters with endlessly adjustable coupling phases and propose several improvements in its architecture to tailor its performance toward highest bit rates. The performance of such distributed PMDCs can be pushed toward highest bit rates of 160 and 640 Gb/s if they are implemented in mixed ferroelectric crystals such as lithium niobate tantalate (LiNb_1-y/Ta_y/O₃) or lithium tantalate (LiTaO₃) crystals, respectively. A tantalum (Ta) content y of up to 0.5 is good to realize a distributed PMDC for about 160-Gb/s operation. Two- and three-phase TE-TM mode converters for integrated optical PMD compensation are compared, and the latter are found to have slightly better electrooptic efficiency. For Z-cut lithium tantalate, four-phase electrodes which need only two independent operation voltages are found to be more attractive.     

Deformation Anisotropy of <Emphasis Type="Italic">Y</Emphasis> + 128°-Cut Single Crystalline Bidomain Wafers of Lithium Niobate

Bidomain single crystals of lithium niobate (LiNbO₃) and lithium tantalate (LiTaO₃) are promising materials for use as actuators, mechanoelectrical transducers, and sensors capable of working in a wide temperature range. One need to take into account the anisotropy of the properties of the crystalline material when such devices are designed. In this study we investigated deformations of bidomain round shaped Y + 128°-cut wafers of lithium niobate in an external electric field. The dependences of the piezoelectric coefficients on the rotation angles were calculated for lithium niobate and lithium tantalate and plotted for the crystal cuts which are used for the formation of a bidomain ferroelectric structure. In the experiment, we utilized an external heating method and long-time annealing with the lithium out-diffusion method in order to create round bidomain lithium niobate wafers. Optical microscopy was used to obtain the dependences of the bidomain crystals’ movements on the rotation angle with central fastening and the application of an external electric field. We also modelled the shape of the deformed bidomain wafer with the suggestion that the edge movement depends on the radial distance to the fastening point quadratically. In conclusion, we revealed that the bidomain Y + 128°-cut lithium niobate wafer exhibits a saddle-like deformation when a DC electric field is applied.     

Terminals for a high-speed optical pulse code modulation communication system: I. 224-Mbit/s single channel

The design of an experimental single-channel 224-Mbit/s (megabits per second) optical pulse code modulation terminal is described and data are presented which have been obtained with such a terminal using a helium-neon laser operating at 6328 Å. The basic elemets is an optical gate using lithium tantalate whose design and operating characteristics are described.     

红外探测器滤光膜的研究与制备

为满足红外探测器在1.064 m和3~5 m双波段透射,在1.2~2.8 m波段反射,可适应复杂的环境条件、具有高稳定性和可靠性等要求,依据薄膜的设计理论,选择合理的膜系设计方法,借助TFC膜系设计软件对膜系结构进行优化设计。并采用电子束真空蒸发和离子辅助沉积技术,在蓝宝石晶体基底上镀制红外多波段滤光膜。同时对所使用的薄膜材料的光学、物理、化学和机械特性进行分析与研究。通过反复试验,优化工艺参数,使多波段滤光膜得以实现。对所制得的薄膜进行测试,基本满足红外探测器的使用要求。