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1.
Nanocrystalline CdxZn1 − xO thin films with different Cd volume ratios in solution (x = 0, 0.25, 0.50, 0.75 and 1) have been deposited on glass substrate by sol-gel dip-coating method. The as-deposited films were subjected to drying and annealing temperatures of 275 °C and 450 °C in air, respectively. The prepared films were characterized by X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, UV-vis spectroscopy and dc-electrical measurements. The results show that the samples are polycrystalline and the crystallinity of the films enhanced with x. The average grain size is in the range of 20-53 nm. The atomic percent of Cd:Zn was found to be 9.50:1.04, 6.20:3.77 and 4.42:6.61 for x = 0.75, 0.50 and 0.25, respectively. It was observed that the transmittance and the band gap decreased as x increased. All the films exhibit n-type electrical conductivity. The resistivity (ρ) and mobility (μ) are in the range of 3.3 × 102 − 3.4 × 10− 3 Ω cm, and 1.5 − 45 cm2 V− 1 s− 1 respectively. The electron density lies between 1.26 × 1016 and 0.2 × 1020 cm− 3.  相似文献   

2.
H. Zhu  J. Hüpkes  A. Gerber 《Thin solid films》2010,518(17):4997-5002
Mid-frequency magnetron sputtering of aluminum doped zinc oxide films (ZnO:Al) from tube ceramic targets has been investigated for silicon based thin film solar cell applications. The influence of working pressure on structural, electrical, and optical properties of sputtered ZnO:Al films was studied. ZnO:Al thin films with a minimum resistivity of 3.4 × 104 Ω cm, high mobility of 50 cm²/Vs, and high optical transmission close to 90% in visible spectrum region were achieved. The surface texture of ZnO:Al films after a chemical etching step was investigated. A gradual increase in feature sizes (diameter and depth) was observed with increasing sputter pressure. Silicon based thin film solar cells were prepared using the etched ZnO:Al films as front contacts. Energy conversion efficiencies of up to 10.2% were obtained for amorphous/microcrystalline silicon tandem solar cells.  相似文献   

3.
李广  雷青松  薛俊明  杨瑞霞 《真空》2012,49(2):61-65
介绍了ZnO透明导电薄膜的基本特性,制备技术,其中磁控溅射技术和MOCVD技术是制备太阳能电池用ZnO透明导电薄膜的主流生长技术,论述了这两种制备技术的原理、技术特点、制备绒面ZnO薄膜的研究进展,并对ZnO透明导电薄膜的发展趋势做了展望.  相似文献   

4.
Li and Al codoped ZnO (LAZO) thin films have been prepared by a sol-gel method and their structural and optical properties have been investigated. The prepared LAZO films had an average transmittance of over 85% in the visible range. The UV absorption edge was red-shifted with Li-doping, whereas it was blue-shifted with Al-doping. A broad yellowish-white emission was observed from the LAZO films annealed above 600 °C. The visible emission was enhanced with increasing annealing temperature and dopant concentration.  相似文献   

5.
ZnO:Al thin films varying the thickness from 80 to 110 nm were deposited on polished float zone < 100 > Si wafers by radio frequency magnetron sputtering at 100 °C. To texturize these surfaces with the aim of being used as antireflective coating, a wet etching process based on NH4Cl was applied. Taking into account that the layer thickness was small, the control of the etch parameters such as etchant concentration and etching time was evaluated as a function of the textured film properties. An appropriate control of the etching rate to adjust the final thickness to the 80 nm required for the application was realized. Using NH4Cl concentrations of 10 wt.% and short times of up to 25 s, an increase of the film roughness up to a factor of 5.6 of the as-deposited films was achieved. These optimized textured films showed weighted reflectance values below 15% and considerable better electrical properties than the as-deposited 80 nm-thick ZnO:Al films.  相似文献   

6.
Stoichiometric thin film samples of the ternary ZnGa2Te4 defect chalcopyrite compound were prepared and characterized by X-ray diffraction technique. The elemental chemical composition of the prepared bulk material as well as of the as-deposited film was determined by energy-dispersive X-ray spectrometry. ZnGa2Te4 thin films were deposited, by conventional thermal evaporation technique onto highly cleaned glass substrates. The X-ray and electron diffraction studies revealed that the as-deposited and the annealed ZnGa2Te4 films at annealing temperature ta ≤ 548 K are amorphous, while those annealed at ta ≥ 573 K (for 1 h), are polycrystalline. The optical properties of the as-deposited films have been investigated for the first time at normal incidence in the spectral range from 500 to 2500 nm. The refractive index dispersion in the transmission and low absorption region is adequately described by the Wemple–DiDomenico single oscillator model, whereby, the values of the oscillator parameters have been calculated. The analysis of the optical absorption coefficient revealed an in-direct optical transition with energy of 1.33 eV for the as-deposited sample. This work suggested that ZnGa2Te4 is a good candidate in solar cell devices as an absorbing layer.  相似文献   

7.
《材料科学技术学报》2019,35(11):2734-2741
The present study investigated the influence of substrate temperature (Ts) and working pressure (PAr) on tailoring the properties of nanocrystalline (nc) molybdenum (Mo) films fabricated by radio-frequency magnetron sputtering. The structural, morphological, electrical and optical properties of nc-Mo films were evaluated in detail. The Mo films exhibited (110) orientation with average crystallite size varying from 9 to 22 (±1) nm on increasing Ts. Corroborating with structural data, the electrical resistivity decreased from 55 μΩ cm to 10 μΩ cm, which is the lowest among all the Mo films. For Mo films deposited under variable PAr, the (110) peak intensity decrement coupled with peak broadening on increasing PAr. Lower deposition pressure yielded densely packed thin films with superior structural properties along with low resistivity of ˜15 μΩ cm. Optimum conditions to produce high quality Mo films with excellent structural, morphological, electrical and optical characteristics for utilization in solar cells as back contact layers were identified.  相似文献   

8.
Ni1−xMgxO thin films across the full compositional range were formed by a low-cost sol-gel spin coating method. Optical transmission of the resultant films in the ultraviolet-visible spectral region increased to as high as 90% upon sintering, and X-ray diffraction verified an increase in crystallinity for sintering temperatures up to 1000 °C, with root mean square roughness below 1 nm when sintered between 600 and 800 °C. The lattice parameter of the rock salt Ni1−xMgxO films showed a linear shift with increased magnesium concentration, consistent with a Vegard's Law relationship between the two binaries. Optical energy gaps from 3.6 to > 6.5 eV were realized by adjusting the composition of the Ni1−xMgxO films, demonstrating the suitability of the ternary for optical devices in the UV-C spectral region.  相似文献   

9.
Mono- and bis-chalcone have been synthesized by the reaction of 3-acetyl-2,5-dimethylthiophene and N, N-di-methylbenzaldehyde/terephthalaldehyde in ethanolic NaOH in microwave oven. The structure of these compounds was established by elemental analysis, IR, 1H NMR, 13 C NMR and GC-MS spectral analysis. Thin films with thickness of 100 nm of mono- and bis-chalcone were evaporated by thermal evaporation onto glass/Si wafer substrates under a vacuum of 10− 6 Torr. The optical constants (absorption coefficient and optical band gap) of these films have been studied as a function of photon energy in the wavelength region 300-1100 nm. Analysis of the optical absorption data shows that the rule of non-direct transitions predominates. The optical band gaps for mono- and bis-chalcone are found to be 2.31 and 0.99 eV respectively. It has been found that the absorption coefficient changes with increasing photon energy. The peak values of the absorption coefficient are found to be at 370 nm for mono-chalcone and 460 nm for bis-chalcone thin films.  相似文献   

10.
Rengang Zhang  Baoyi Wang 《Vacuum》2008,82(11):1208-1211
Nanocrystalline ZnS thin films are prepared on glass and quartz substrates by sulfurizing ZnO thin films in the H2S-containing mixture at 500 °C. These films are investigated by X-ray diffraction, scanning electron morphology, optical transmittance and photoluminescence spectra. The results show that the ZnS thin films have the hexagonal structure with a c-axis preferred orientation. Also, these nanostructure ZnS thin films with the grain size of ∼50 nm along the c-axis, exhibit the optical transparency as high as ∼80% in the visible region. It is found that sulfur replacement of oxygen sites in crystal lattices and recrystallization can take place during sulfidation, resulting in an evident increase of the grain size for the sulfurized films. Under the optimum sulfidation time of 2 h, the resultant ZnS thin films have a high crystallinity, low defect concentration and good optical properties with the band gap of 3.66 eV.  相似文献   

11.
The amorphous Ge11.4Te86.4Ga2.2 chalcogenide thin films were prepared by thermal evaporation onto chemically cleaned glass substrates. Properties measurements include X-ray diffraction (XRD), Scanning electron microscopy (SEM), Differential scanning calorimetry (DSC), Four-point probe and VIS-NIR transmission spectra. The allowed indirect transition optical band gap and activation energy of samples were calculated according to the classical Tauc equation and Kissinger's equation, respectively. The results show that there is an amorphous-to-crystalline phase transition of Ge11.4Te86.4Ga2.2 thin film. The investigated film has high crystallization temperature (∼200 °C) and activation energy (2.48 eV), indicating the film has good amorphous stability. The sheet resistance of the crystalline state is ∼10 Ω/and the amorphous/crystalline resistance ratio is about 105. Besides, a wide optical band gap (0.653 eV) of Ge11.4Te86.4Ga2.2 is obtained, indicating that the material possesses a low threshold current from amorphous-to-crystalline state for phase-change memory application.  相似文献   

12.
ZnO films thin films have been deposited on glass and three different LiNbO3 (LNO) substrates at room temperature using radio frequency magnetron sputtering. The structure and optical properties of the films were investigated by X-ray diffraction (XRD), optical transmission spectroscopy and spectro-photometry. XRD analysis shows that all the films are hexagonal wurtzite structure, and there is compressive strain in the films. Typical optical transmittance values in the order of 80% were obtained for all the films, and the band gaps are in the range of 3.273-3.282 eV. The Photo-Luminescence (PL) spectra results indicate that the type of substrate affects the photoluminecence of ZnO films significantly, and the films on rotated Y-cut 128° LNO substrates have strong UV emission at room temperature.  相似文献   

13.
In this study, preparation of Nb-doped (0-20 mol% Nb) TiO2 dip-coated thin films on glazed porcelain substrates via sol-gel process has been investigated. The effects of Nb on the structural, optical, and photo-catalytic properties of applied thin films have been studied by X-ray diffraction, Raman spectroscopy, and scanning electron microscopy. Surface topography and surface chemical state of thin films was examined by atomic force microscope and X-ray photoelectron spectroscopy. XRD and Raman study showed that the Nb doping inhibited the grain growth. The photo-catalytic activity of the film was tested on degradation of methylene blue. Best photo-catalytic activity of Nb-doped TiO2 thin films were measured in the TiO2-1 mol% Nb sample. The average optical transmittance of about 47% in the visible range and the band gap of films became wider with increasing Nb doping concentration. The Nb5+ dopant presented substitutional Ti4+ into TiO2 lattice.  相似文献   

14.
This paper presents the preliminary results of optical characterization using spectroscopic ellipsometry of wurtzite indium gallium nitride (InxGa1−xN) thin films with medium indium content (0.38 < x < 0.68) that were deposited on silicon dioxide using plasma-enhanced evaporation. A Kramers-Kronig consistent parametric analytical model using Gaussian oscillators to describe the absorption spectra has been developed to extract the real and imaginary components of the dielectric function (?1, ?2) of InxGa1−xN films. Scanning electron microscope (SEM) images are presented to examine film microstructure and verify film thicknesses determined from ellipsometry modeling. This fitting procedure, model, and parameters can be employed in the future to extract physical parameters from ellipsometric data from other InxGa1−xN films.  相似文献   

15.
The spherical Cu2ZnSnS4 nanoparticles with the average diameters (~8–10 nm) have been synthesized by sol gel method. The effects of solvents and reaction temperatures on the properties of the as-synthesized nanoparticles were investigated. The X-ray diffraction shows as grown Cu2ZnSnS4 nanoparticles exhibit kesterite crystal structure along preferential orientation (1 1 2) plane. The crystalline nature of nanoparticles was improved in ethylene glycol solvent with the increase in reaction temperature. Rietveld refinement study was performed and structural parameters were determined for the Cu2ZnSnS4 nanoparticles. The Raman spectra show the main characteristic peak of A1 vibrational mode which confirmed the formation of Cu2ZnSnS4 phase in all the samples. Scanning electron micrographs depict the irregular aggregate formation of nanoparticles in methanol solvent and uniformly distributed aggregates of nanoparticles with ethylene glycol solvent. Transmission electron microscopy results show the synthesis of polycrystalline porous nanostructures and uniform spherical nanoparticles in methanol and ethylene glycol solvents respectively at the temperature of 250 °C. UV–vis absorption spectra indicated the broad absorption in visible range and the band gap of the nanoparticles was found to 1.38 and 1.45 eV which is suitable for absorbing the solar radiation. The obtained results revealed ethylene glycol as a suitable solvent and 250 °C as the favorable synthesis temperature.  相似文献   

16.
The optical absorbance of four ternary thin films, i.e. MgSiP2, MgGeP2, MgSiAs2, MgGeAs2 have been theoretically examined over a wide range of wavelength from 300 nm to 800 nm. The combination of first-principle electronic structure calculations and the optical matrix approach for modeling the multilayer assembly have been employed for theoretical studies. The analysis of the calculated absorbance spectra at room temperature with unpolarized light and normal incidence, revealed that MgGeAs2 with a direct energy band gap of 1.6 eV exhibit a considerable high optical absorption, where a thickness of 3.2 μm of this thin film is sufficient to absorb 90% of the incident light and generates a maximum photocurrent of ∼23 mA/cm2.  相似文献   

17.
Silicon thin-film solar cells based on microcrystalline silicon (μc-Si:H) were prepared in a 30 × 30 cm2 plasma-enhanced chemical vapor deposition reactor using 13.56 or 40.68 MHz plasma excitation frequency. Plasma emission was recorded by optical emission spectroscopy during μc-Si:H absorber layer deposition at deposition rates between 0.5 and 2.5 nm/s. The time course of SiH? and Hβ emission indicated strong drifts in the process conditions particularly at low total gas flows. By actively controlling the SiH4 gas flow, the observed process drifts were successfully suppressed resulting in a more homogeneous i-layer crystallinity along the growth direction. In a deposition regime with efficient usage of the process gas, the μc-Si:H solar cell efficiency was enhanced from 7.9 % up to 8.8 % by applying process control.  相似文献   

18.
Our recent investigations have identified a pathway to produce transparent conducting oxide (TCO) films that demonstrate higher infrared transparency. The technique involves controlling the dielectric permittivity of the TCO film such that the electrical properties are maintained, but the plasma frequency (ωp) is shifted to longer wavelength. This has the effect of reducing free-carrier absorption in the visible and near-infrared spectral region, thus producing a TCO film with higher optical transmission. The technique has been demonstrated for sputtered films of indium tin oxide by adding small amounts of ZrO2 to a ceramic sputtering target, and for SnO2:F films deposited by chemical vapor deposition using a metalorganic Zr source.  相似文献   

19.
In this paper the effects of substrate temperature (room temperature - 350 °C) on the phase composition and crystallization orientation of the tantalum thin film deposited by direct current magnetron sputtering in an extremely low power deposition regime are presented. In this experiment, heating the substrates to 350 °C resulted in the growth of the hard and brittle tetragonal crystalline structure (β-Ta). Deposited tantalum has a conical structure with large voided boundaries. Sheet resistance of samples is much larger than for the convenient conductors which decreased with increasing the substrate temperature.  相似文献   

20.
Conductive zinc oxide (ZnO) grown by low pressure chemical vapor deposition (LPCVD) technique possesses a rough surface that induces an efficient light scattering in thin film silicon (TF Si) solar cells, which makes this TCO an ideal candidate for contacting such devices. IMT-EPFL has developed an in-house LPCVD process for the deposition of nanotextured boron doped ZnO films used as rough TCO for TF Si solar cells. This paper is a general review and synthesis of the study of the electrical, optical and structural properties of the ZnO:B that has been performed at IMT-EPFL.The influence of the free carrier absorption and the grain size on the electrical and optical properties of LPCVD ZnO:B is discussed. Transport mechanisms at grain boundaries are studied. It is seen that high doping of the ZnO grains facilitates the tunnelling of the electrons through potential barriers that are located at the grain boundaries. Therefore, even if these potential barriers increase after an exposition of the film to a humid atmosphere, the heavily doped LPCVD ZnO:B layers show a remarkable stable conductivity. However, the introduction of diborane in the CVD reaction induces also a degradation of the intra-grain mobility and increases over-proportionally the optical absorption of the ZnO:B films. Hence, the necessity to finely tune the doping level of LPCVD ZnO:B films is highlighted. Finally, the next challenges to push further the optimization of LPCVD ZnO:B films for thin film silicon solar cells are discussed, as well as some remarkable record cell results achieved with LPCVD ZnO:B as front electrode.  相似文献   

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