共查询到18条相似文献,搜索用时 78 毫秒
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采用超声喷雾热解法,以石英玻璃为衬底,以乙酸 锌(Zn(CH3COO)2·2H2O)、硝酸镁(Mg(NO3)2·6H2O) 和醋酸钠(CH3COONa·3H2O)为前驱体溶液,在不同衬底温 度(480~560℃)下制备Na-Mg共掺杂ZnO薄膜。通过X-射线衍射(X RD)、扫描电子显微镜(SEM)、 光致发光(PL)谱和紫外-可见(UV-Vis)分光光度计等表征手段对样品的晶格结构 、表面形貌、PL性能 和透过率进行了研究。结果表明,衬底温度对薄膜结构和光学特性影响显著,当衬底温度为 500 ℃时制备的 Na-Mg共掺杂ZnO薄膜的c轴择优最明显,表面形貌更加致密,结 晶质量最好,PL性能最佳。 相似文献
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利用直流磁控溅射工艺,在水冷玻璃衬底上成功沉积出了高透光、低电阻率的Ti-Al共掺ZnO(TAZO)透明导电薄膜.X射线衍射(XRD)研究结果表明,TAZO薄膜为具有c轴择优取向的六角纤锌矿结构多品薄膜.研究了TAZO薄膜的应力、结构以及光电性能与薄膜厚度的关系,结果表明.当薄膜厚为531 nm时,薄膜晶格畸变最小,具... 相似文献
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采用基于密度泛函理论的第一性原理方法,分析了Ga-Eu共掺杂ZnO(GEZO)结构的能带结构、态密度、马利肯布居分布以及光学性质。结果表明,计算得到的晶格常数及带隙与实验值一致。Ga,Eu的掺入贡献了导电载流子,使体系的电导率增强。费米能级进入导带,呈现n型导电。从态密度中可知费米能级处出现了由Eu的4f态引入的杂质带,Ga也在导带底处贡献了4p和4s态。原子和键的平均马利肯布居分布表明,Ga,Eu原子的掺入增强了键的离子性。光学性质方面,Ga,Eu的掺入使得介电函数实部和虚部的峰位向低能区转移,吸收率和反射率在可见光区均有提高。 相似文献
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本文利用溶胶-凝胶旋涂法在玻璃衬底上制备了 本征、N单掺和Li-N共掺的ZnO薄膜。 研究Li掺杂量的改变对薄膜的晶体结构、表面形貌、透过性能和发光性能的影响。采用了紫 外-可见分光光度计(UV-VIS)、光致发光谱(PL)、扫描电子显微镜(SEM)和X射线衍 射 仪(XRD)等表征手段对样品进行了测试。结果表明:Li掺杂量的改变对薄膜的结构和性能 都有一定的影响,随着Li掺杂量的增加,(002)衍射峰强度增大,晶 粒尺寸先增加后减小, 紫外发射峰的强度和薄膜的透过性能同样是先增强后减弱。当Li元素的原子比为6at%时, 薄膜的c轴择优取向明显,结晶性能最好,薄膜紫外发光最强,透过率最大。 相似文献
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以醋酸锌水溶液为前驱体,分别以醋酸铵和硝酸铟为氮(N)源和铟(In)源,采用超声喷雾热解法在石英玻璃衬底上沉积了氮铟(NIn)共掺杂ZnO薄膜。采用X射线衍射、场发射扫描电镜、霍尔效应、塞贝克效应、光致发光谱等分析方法,研究了NIn共掺杂对所得ZnO薄膜的晶体结构、电学和光学性能的影响规律。结果表明:通过氮铟共掺杂,ZnO薄膜的电学和光学性能发生明显改变。优化工艺条件下,所得ZnO基薄膜结构均匀致密,电阻率为6.75×103Ω·cm,并且在室温光致发光谱中检测到很强的近带边紫外发光峰,表明薄膜具有较理想的化学计量比和较高的光学质量。 相似文献
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利用直流反应磁控溅射技术制得N-Al共掺的p型ZnO薄膜,N2O为生长气氛.利用X射线衍射(XRD),Hall实验,X射线光电子能谱(XPS)和光学透射谱对共掺ZnO薄膜的性能进行研究.结果表明,薄膜中Al的存在显著提高了N的掺杂量,N以N-Al键的形式存在.N-Al共掺ZnO薄膜具有优良的p型传导特性.当Al含量为0.15wt%时,共掺ZnO薄膜的电学性能取得最优值,载流子浓度为2.52×1017cm-3,电阻率为57.3Ω·cm,Han迁移率为0.43cm2/(V·s).N-Al共掺p型ZnO薄膜具有高度c轴取向,在可见光区域透射率高达90%. 相似文献
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Influence of growth time on crystalline structure, conductivity and optical properties of ZnO thin films 总被引:5,自引:5,他引:0
This paper examines the growth of ZnO thin films on glass substrate at 350 ℃ using an ultrasonic spray technique. We have investigated the influence of growth time ranging from 1 to 4 min on structural, optical and electrical properties of ZnO thin films. The as-grown films exhibit a hexagonal structure wurtzite and are (002) oriented. The maximum value of grain size G = 63.99 nm is attained for ZnO films grown at 2 min. The average transmittance is about 80%, thus the films are transparent in the visible region. The optical gap energy is found to increase from 3.26 to 3.37 eV with growth time increased from 1 to 2 min. The minimum value of electrical resistivity of the films is 0.13 Ω·cm obtained at 2 min. A systematic study on the influence of growth time on the properties of ZnO thin films deposited by ultrasonic spray at 350 ℃ has been reported. 相似文献
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Fe-doped ZnO thin films have been prepared by spray pyrolysis on glass substrates and the influence of Fe-doping concentration on the structural and optical properties of the films has been studied.The X-ray diffraction (XRD) analysis shows that Fe doping has a significant effect on crystalline quality,grain size and strain in the thin films.The best crystalline structure is obtained for 3 at%Fe doping as observed from scanning electron microscopy (SEM) and XRD.However,lower or higher Fe-doping degrades the crystalline quality in turn.Moreover,UV spectroscopy demonstrates the influence of Fe-incorporation on visible range transmittance of ZnO where the best transmittance is obtained for 3 at%doping.The results have been illustrated simultaneously focusing previous results obtained from literature. 相似文献
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Mn-W co-doped ZnO(ZMWO) thin films with low resistivity and high transparency were successfully prepared on glass substrate by direct current(DC) magnetron sputtering at low temperature.The sputtering power was varied from 65 to 150 W.The crystallinity and resistivity of ZMWO films greatly depend on sputtering power while the optical transmittance and optical band gap are not sensitive to sputtering power.All the deposited films are polycrystalline with a hexagonal structure and have a preferred orientat... 相似文献
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Tin sulfide thin films(SnxSy) with an atomic ratio of y/x = 0.5 have been deposited on a glass substrate by spray pyrolysis.The effects of deposition parameters,such as spray solution rate(R),substrate temperature (Ts) and film thickness(t),on the structural,optical,thermo-electrical and photoconductivity related properties of the films have been studied.The precursor solution was prepared by dissolving tin chloride(SnCl4,5H2O) and thiourea in propanol,and SnxSy thin film was prepared with a mole ratio of y/x = 0.5.The prepared films were characterized by X-ray diffraction(XRD),scanning electron microscopy(SEM) and UV-vis spectroscopy. It is indicated that the XRD patterns of SnxSy films have amorphous and polycrystalline structures and the size of the grains has been changed from 7 to 16 nm.The optical gap of SnxSy thin films is determined to be about 2.41 to 3.08 eV by a plot of the variation of(αhv)2 versus hv related to the change of deposition conditions.The thermoelectric and photo-conductivity measurement results for the films show that these properties are depend considerably on the deposition parameters. 相似文献