一种使用平面线圈结构的微型电磁继电器

本文介绍一种采用平面线圈结构的微型电磁继电器的制造工艺和理论分析。这种继电器的大小大约是 4mm× 4mm× 0 .5mm ,工艺比较简单 ,主要采用光刻、蒸镀、电镀和腐蚀牺牲层等普通的微加工技术来完成全部制作工艺。因此可以大大地降低继电器的生产成本、物理尺寸和制造的复杂性。另外 ,还进行了一些有关线圈通过激励电流后对活动电极产生电磁力的理论计算和仿真 ,利用这些结果可以对这种电磁继电器的结构和参数进行优化设计     

微型电磁继电器的制作和仿真分析

介绍了一种基于MEMS技术的微型电磁继电器的制作过程和仿真分析.这种微继电器的大小约是4mm×4mm×0.5mm,主要采用普通的微加工技术来完成全部制作工艺.与传统继电器相比,这种继电器采用平面线圈来代替螺线管线圈,有利于MEMS工艺,并且提出了一种双支撑的悬臂梁结构做为活动电极,具有较高的灵敏性和稳定性.另外,还进行了一些有关线圈通过激励电流后对活动电极产生电磁力的理论计算和仿真分析,利用这些结果可以对这种电磁继电器的结构和参数进一步优化.     

微型电磁继电器的制作和仿真分析

介绍了一种基于MEMS技术的微型电磁继电器的制作过程和仿真分析.这种微继电器的大小约是4mm×4mm×0.5mm,主要采用普通的微加工技术来完成全部制作工艺.与传统继电器相比,这种继电器采用平面线圈来代替螺线管线圈,有利于MEMS工艺,并且提出了一种双支撑的悬臂梁结构做为活动电极,具有较高的灵敏性和稳定性.另外,还进行了一些有关线圈通过激励电流后对活动电极产生电磁力的理论计算和仿真分析,利用这些结果可以对这种电磁继电器的结构和参数进一步优化.     

UV-LIGA技术制造微型电磁继电器的初步研究

详细阐述了一种微型电磁继电器的设计和初步研制过程。该微继电器主要由电极、悬臂梁结构和电磁线圈组成。设计过程中考虑了微继电器打开、闭合时电磁力、静电力和悬臂梁回复力之间的制约关系,即微继电器打开时悬臂梁回复力应大于接触部位的静电力;闭合时电磁力应大于悬臂梁的回复力。从而推算出电磁线圈的安匝数和悬臂梁结构尺寸的合理范围并选定了合适的参数,用UV-LIGA技术初步制作了这种微型电磁继电器的主要部分。     

微三维结构电火花铣削关键技术研究

为解决电火花方法加工微三维结构时工具电极的制备、测量和损耗补偿问题,研究了块反拷法和线电极磨削法(WEDG)相配合的电极加工工艺,设计了通过4点接触感知实现的电极在线测量系统,提出了由数控系统对放电状态进行实时监测、统计并根据统计结果预测电极损耗状况的自动补偿策略。此技术方案在计算电极加工路径时无需作任何补偿考虑,因此可选用普通金属铣削CAM软件生成加工代码,特别适合复杂自由曲面微结构的加工。综合采用此技术设计了专用微细电火花数控系统,制备了直径30μm,长度3mm的工具电极,使用此电极加工出1mm×0.3mm×0.18mm的雕塑头像。     

机电组件

Y2002-63302-101 0302670超薄 MOS 电容器的退火效应=Annealing effects on ul-trathin MOS capacitors[会,英]/Ng,A.C.-H.& Xu,J.//2001 IEEE Hong Kong Electron Devices Meet-ing.—101～105(E)Y2002-63333-2244 0302671纳米电机系统中纳米级电磁机械的模拟、分析和控制=Modeling,analysis,and control of nanoscale electro-magnetic machines in nanoelectromechanical systems[会,英]/Lyshevski,S.E.& Lyshevsk,M.A.//Proceed-ings of the 2001 American Control Conference Vol.3 of6.—2244～2248(HE)0302672RF-MEMS 电感三维衬底耦合的扩展 PEEC 法分析[刊]/龙海波//电子学报.—2002,30(9).—1308～1312(C) Y2002-63302-101 0302670超薄 MOS 电容器的退火效应=Annealing effects on ul-trathin MOS capacitors[会,英]/Ng,A.C.-H.& Xu,J.//2001 IEEE Hong Kong Electron Devices Meet-ing.—101～105(E)Y2002-63333-2244 0302671纳米电机系统中纳米级电磁机械的模拟、分析和控制=Modeling,analysis,and control of nanoscale electro-magnetic machines in nanoelectromechanical systems[会,英]/Lyshevski,S.E.& Lyshevski,M.A.//Proceed-ings of the 2001 American Control Conference Vol.3 of6.—2244～2248(HE)0302672RF-MEMS 电感三维衬底耦合的扩展 PEEC 法分析[刊]/龙海波//电子学报.—2002,30(9).—1308～1312(C)0302673基于超程时间减小速率建模的电磁继电器可靠性寿命分析方法的研究[刊]/翟国富//电子器件.—2002,25(3).—301～304(L)电磁继电器触点的磨损和老化是影响继电器可靠性的重要因素之一。超程时间的减小是电磁继电器触点磨损和老化的主要表现形式。本文提出以超程时间减小速率为随机变量,建立了电磁继电器可靠性寿命分析数学模型,给出了寿命可靠度计算方法。实例计算结果表明,该模型是有效的。参6一种使用平面线圈结构的微型电磁继电器[刊]/张宇峰//电子器件.—2002,25(3).—214～219(L)本文介绍一种采用平面线圈结构的微型电磁继电器的制造工艺和理论分析。这种继电器的大小大约是4min×4mm×0.5mm,工艺比较简单,主要采用光刻、蒸镀、电镀和腐蚀牺牲层等普通的微加工技术来完成全部制作工艺。因此可以大大地降低继电器的生产成本、物理尺寸和制造的复杂性。另外,还进行了一些有关线圈通过激励电流后对活动电极产生电磁力的理论计算和仿真,利用这些结果可以对这种电磁继电器的结构和参数进行优化设计。参40302675电爆炸断路开关[刊]/龚兴根//强激光与粒子束.—2002,14(4).—577～582(E)叙述了金属导体电爆炸的物理过程,分析了金属导体电爆炸时电阻率与比作用量、压力、能量、密度、爆炸产物膨胀速度、导体电流密度及周围介质等影响因素的关系,从而确定电爆炸断路开关的一般设计原则。参90302676功率连接器故障分析与模拟[刊]/罗国平//中国邮电高校学报(英文版).—2002,9(3).—79～80(E)0302677电流监测在笼型异步电动机转子故障诊断中的应用[刊]/王旭红//长沙电力学院学报(自然科学版).—2002,17(3).—41～43(K)     

安全可靠的延熄开关

本文介绍一种实用、可靠的延熄开关,采用的是超小型自锁继电器(也称记忆自锁继电器)。这种继电器具有机械锁存功能,向线圈中加一激励脉冲时,其触点状态会改变一次。本文所用的这种继电器触点负载为3A220VAC,线圈驱动功率≤1W,外形尺寸为24×22×16mm,插脚形式,脚距与JZC—21F相同。当然,也可以用西安交通大学研制的JASM—7F小型磁保持     

AXICOM MT4型继电器

MT4型继电器是4极通信／信号继电器，采用穿孔型(THT)封装，无极化，无闭锁，只有1个线圈。MT4型继电器的特征是可用作通信／信号继电器；外形尺寸为20mm&;#215;14．8mm(0．795英寸&;#215;0．582英寸)；开关电流为1．25A；有4个转换触点(4种形状C／4PDT)；双插触点；在线圈与触点之间的电压满足bellcore GR 1089．FCC Part 68和ITU-TK20 2500V。     

Ku频段小型化低噪声放大器的设计

设计制作了一款基于微组装工艺的小型化低噪声放大器（LNA）。该器件广泛选用裸管芯、芯片电容等微型器件,采用两级放大电路结构,使用AWR与HFSS电磁仿真软件进行设计、优化和仿真,运用键合金丝微波特性进行噪声系数调试,实现较好的低噪声微波特性。最终实现了在12.25GHz-12.75GHz 工作频段,增益大于20dB,噪声系数小于1.2dB的低噪声放大器,整体电路尺寸仅为12mm×10mm×7mm。     

一种新型并联梳齿驱动的静电型微继电器

介绍了一种新型的、利用并联梳齿结构驱动的静电型微继电器及其制造工艺。通过优化并联梳齿结构的几何尺寸,可以使微继电器的阈值电压降低到5V。该微继电器的主体部分使用一套表面牺牲层标准工艺制造,同时,使用溅射工艺制作Au接触电极,可以使接触电阻降到100mΩ以下,增加了微继电器的使用寿命。由于该微继电器的驱动电压和制造工艺都和普通集成电路的驱动电压和制造工艺相兼容,因此两者在产业化生产中可以很容易地被集成在同一芯片上。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks