Atmospheric Pressure Plasma Jet in Ar and O2/Ar Mixtures： Properties and High Performance for Surface Cleaning＊

An atmospheric pressure plasma jet generated in Ar and O2/Ar mixtures has been investigated by specially designed equipment with double power electrodes at 20~32 kHz, and their effects on the cleaning of surfaces have been studied. Properties of the jet discharge are studied by electrical diagnostics, including the waveform of discharge voltage, discharge current and the Q-V Lissajous figures. The optical emission spectroscopy is used to measure the plasma parameters, such as the excitation temperature and the gas temperature. It is found that the consumed power and the excitation temperature increase with increase of the discharge frequency. On the other hand, at the same discharge frequency, these parameters in O2/Ar mixture plasma are found to be much larger. The effect on surface cleaning is studied from the changes in the contact angle. For Ar plasma jet, the contact angle decreases with increase of the discharge frequency. For O2/Ar mixture plasma jet, the contact angle decreases with increase of discharge frequency up to 26 kHz, however, further increase of discharge frequency does not show further decrease in the contact angle. At the same discharge frequency, the contact angle after O2/Ar mixture plasma cleaning is found to be much lower compared to the case of pure Ar. From the results of quadrupole mass-spectrum analysis, we can identify more fragment molecules of CO and H2O in the emitted gases after O2/Ar plasma jet treatment compared with Ar plasma jet treatment, which are produced by the decomposition of surface organic contaminants during the cleaning process.     

Surface Modification of Polyethylene （PE） Films Using Dielectric Barrier Discharge Plasma at Atmospheric Pressure

Modification of the surface properties of polyethylene （PE） films is studied using air dielectric barrier discharge at atmospheric pressure. The treated samples are examined by Water contact angle measurements, Fourier transform infrared attenuated total reflection spectroscopy （FTIR-ATR）, X-ray photoelectron spectroscopy （XPS） and scanning electron microscopy （SEM）. With the increase in treating time, the water contact angle changes from 93.2° before treatment to a minimum of 53.3° after a treatment for 50 s. Both ATR and XPS results show some oxidized species are introduced into the sample surface by the plasma treatment and the tendency of the water contact angle with the treating time is the same as that of oxygen concentration on the treated sample surface. SEM result shows the surface roughness of PE samples increases with the treatment time increasing.     

Surface Modification of Fluororubber Using Atmospheric Pressure Dielectric Barrier Discharge （DBD）

Fluoride rubber F2311 film, an alternating copolymer of CF2-CFC1 （CTFE） and CH2-CF2 （VF2） components, was treated by atmospheric pressure dielectric barrier discharge （DBD） in air. The surface structure, topography and surface chemistry of the treated F2311 films were characterized by contact angle measurement, atomic force microscopy （AFM）, and X-ray photoelectron spectroscopy （XPS）, respectively. The experimental results showed that a short time air plasma treatment led to morphological, wettability and chemical changes in the F2311 films. The surface hydrophilicity increased greatly after the plasma treatment, the static water contact angle decreased from 98.6° to 32°, and oxygen containing groups （C=O, O-C=O, etc. ） were introduced. Atomic force microscopy revealed that plasma produced by DBD etched F2311 films obviously. The roughness of the samples increased remarkably with the formation of peaks and valleys on the treated surfaces. The increased surface wettability may be correlated with both the introduction of hydrophilic groups due to air plasma oxidation of the surface and the change in surface morphology etched by DBD.     

Preliminary Studies of Practicability of Laminar Plasma Surface Treatment Process

The basic remelting and cladding tests with laminar plasma technology on metals have been conducted in order to demonstrate the possibility of the technology applied in material surface modification. The experimental results show that the properties of the modified layers of the cast iron surface can be improved notably by the remelting treatment and those of the stainless steel by the cladding treatment. The related results are also verified by microscopic studies such as scanning electron microscopic （SEM） observations, energy dispersive spectra （EDS） analysis and the Vickers hardness measurements of the surface modified layers.     

Improving Hydrophobicity of Glass Surface Using Dielectric Barrier Discharge Treatment in Atmospheric Air

Non-thermal plasmas under atmospheric pressure are of great interest in industrial applications, especially in material surface treatment. In this paper, the treatment of a glass surface for improving hydrophobicity using the non-thermal plasma generated by dielectric barrier discharge （DBD） at atmospheric pressure in ambient air is conducted, and the surface properties of the glass before and after the DBD treatment are studied by using contact angle measurement, surface resistance measurement and wet flashover voltage tests. The effects of the applied voltage and time duration of DBD on the surface modification are studied, and the optimal conditions for the treatment are obtained. It is found that a layer of hydrophobic coating is formed on the glass surface after spraying a thin layer of silicone oil and undergoing the DBD treatment, and the improvement of hydrophobicity depends on DBD voltage and treating time. It seems that there exists an optimum treating time for a certain applied voltage of DBD during the surface treatment, The test results of thermal aging and chemical aging show that the hydrophobic layer has quite stable characteristics. The interaction mechanism between the DBD plasma and the glass surface is discussed. It is concluded that CHa and large molecule radicals can react with the radicals in the glass surface to replace OH, and the hydrophobicity of the glass surface is improved accordingly.     

Studies of Wettability of Medical PVC by Remote Nitrogen Plasma

The effects of remote nitrogen plasma and nitrogen plasma on medical PVC＇s surface modification are studied. The surface properties are characterized by the contact angle measurement, X-ray photoelectron spectroscopy and scanning electron microscopy. Results show that the remote nitrogen plasma treatments modify the PVC surface in both morphology and composition and the treatment by the remote nitrogen plasma in PVC surface modification is more effective than that by the nitrogen plasma. Remote nitrogen plasma can modify the surface more uniformly. After the PVC surface is treated for 2 man by remote nitrogen plasma, the [w（O）＋ w （N）]/w （C）] value increases from 0.13 to 0.51 and the water contact angle decreases from 89° to 18 .     

Frication Property of Mo-Cr-Infiltrated Steel Layer by Plasma Surface Metallurgy

Introduced in this article is the technique to acquire a high performance strengthened layer on carbon steel samples, namely, plasma alloying on the surface of Q235 steel and heat treatment technology. With this technique the alloying elements of Mo, Cr, and C can be obtained on the surface of Q235 steel samples. The content of the constituent elements is approximately up to high speed steels （HSS）. The surface property required for the HSS after hardening and low tempering is attained. In the test, the alloying elements Mo and Cr were penetrated into the Q235 steel samples by glow discharge sputtering so that the content of the alloyed layer on the surface of the Q235 steel samples was about 20% Mo and 10% Cr. Two kinds of experiments were conducted. One was to carry out ultra-saturated carburization. The alloyed layer＇s composition was similar to molybdenum HSS with surface carburizing of more than 2.0%. The carbides of the alloyed layer were compact, uniform and disperse without a coarse eutectic ledeburite structure, The another was ion nitriding after the alloying elements of Mo and Cr were penetrated. The first process included hardening with low tempering and hardening with cryogenic treatment for 2 hr and low tempering. The second one was ion nitriding only. It was found that the surface hardness after cryogenic treatment is up to 1600HV, much higher thanthat without cryogenic treatment. The abrasion test results indicate that, without the penetrated alloy elements Mo and Cr and without cryogenic treatment and ion nitriding, the friction coefficient is lower by one order of magnitude. The change in relative resistance is similar to the change in the friction coefficient, but without a proportional relationship,     

Surface Activation of Plane and Curved Automotive Polymer Surfaces by Using a Fittable Multi-Pin DBD Plasma Source

In this work, surface activation of automotive polymers using atmospheric pressure plasmas was investigated. The aim was to increase the polar fraction of the surface energy of both plane and convex polymer devices with a radius in the range of 30 mm. For this purpose, a fittable low temperature atmospheric pressure plasma source based on capacitively coupled multi-pin electrodes was set up and applied. Each single electrode generates a treatment spot of approximately 2 cm2 with a tunable power density of up to 1.4 W/cm2. The surface energy was evaluated by contact angle measurements. After treatment at a low energy density of 1.01 J/cm2, the polar fraction of the surface energy of the investigated polymers was increased by a factor of 3.3 to 132, depending on the polymer materials. It was shown that by applying the presented fittable plasma source, this effect is independent of the surface radius of the polymer sample.     

Surface Treatment of Polyethylene Terephthalate Film Using Atmospheric Pressure Glow Discharge in Air

Non-thermal plasmas under atmospheric pressure are of great interest in polymer surface processing because of their convenience, effectiveness and low cost. In this paper, the treatment of Polyethylene terephthalate (PET) film surface for improving hydrophilicity using the non-thermal plasma generated by atmospheric pressure glow discharge (APGD) in air is conducted. The discharge characteristics of APGD are shown by measurement of their electrical discharge parameters and observation of light-emission phenomena, and the surface properties of PET before and after the APGD treatment are studied using contact angle measurement, x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). It is found that the APGD is homogeneous and stable in the whole gas gap, which differs from the commonly filamentary dielectric barrier discharge (DBD). A short time (several seconds) APGD treatment can modify the surface characteristics of PET film markedly and uniformly. After 10 s APGD treatment, the     

Numerical and Experimental Investigation of Electron Beam Air Plasma Properties at Moderate Pressure简

Large size of air plasma at near atmospheric pressure has specific effects in aerospace applications. In this paper, a two dimensional multi-fluid model coupled with Monte Carlo （MC） model is established, and some experiments were carried out to investigate the characteristics of electron beam air plasma at pressure of 100-170 Torr. Based on the model, the properties of electron beam air plasma are acquired. The electron density is of the order of 1016 m-3 and the longitudinal size can exceed 1.2 m. The profiles of charged particles demonstrate that the oxygen molecule is very important for air plasma and its elementary processes play a key role in plasma equilibrium processes. The potential is almost negative and a very low potential belt is observed at the edge of plasma acting as a protection shell. A series of experiments were carried out in a low pressure vacuum facility and the beam plasma densities were diagnosed. The experimental results demonstrate that electron density increased with the electron beam energy, and the relatively low pressure was favorable for gaining high density plasma. Hence in order to achieve high density and large size plasma, it requires the researchers to choose proper discharge parameters.     

Comparison of Yeast Inactivation Treated in He, Air and N2 DBD Plasma

In this paper, the mechanism of yeast inactivation in low temperature atmospheric pressure helium, nitrogen and air plasmas generated by dielectric barrier discharge is analysed and compared. The results show that all the three gas plasmas have a high germicidal efficiency. The morphology of the yeast is observed by scanning electron microscopy, which reveals that the yeast treated in helium plasma is ruptured completely but there are only some flaws on the cell walls in the nitrogen and air plasma treated samples. Also, the flaws on the cell walls treated by air plasma are more significant than that by nitrogen treatment. Simultaneously, the pH values of the samples after 5 rain nitrogen and air plasma treatment have no remarkable change either, while the sample treated with helium plasma descends below 4.0, which is beyond the optimum one for the yeast＇s living environment. The difference in pH values may be caused by the treatment effect and the degree of the cell＇s rupture when the gas discharge plasma treatment is applied.     

Surface XPS-investigations of tobacco leaves treated with low-temperature plasma

The tobacco leaves were treated with low-temperature plasma in Ar, N2, O2. and air atmospheres at different powers （60-130 W）. The surface-elemental components, their relative contents, and the functional groups of the surface components of the tobacco leaves were determined using XPS （X-ray photoelectron spectroscopy）. The experimental results showed that the percentage of the elements C, N, and O had changed considerably and a large number of polar functional groups containing oxygen atoms were incorporated into the components on the tobacco surfaces. The measurements of the surface contact angle showed that the surface contact angle of the modified tobacco leaves was 0 degree, whereas it was 110 degrees before the plasma treatment. These results indicate that the wettability of the modified tobacco leaves improved dramatically. This work may be significant for future researches on the surface modification of the tobacco leaves.     

Effects of Low Energy and High Flux Helium／Hydrogen Plasma Irradiation on Tungsten as Plasma Facing Material

The High-Z material tungsten (W) has been considered as a plasma facing material in the divertor region of ITER (International Thermonuclear Experimental Reactor). In ITER, the divertor is expected to operate under high particle fluxes (> 1023 m-2s-1) from the plasma as well as from intrinsic impurities with a very low energy (< 200 eV). During the past dacade, the effects of plasma irradiation on tungsten have been studied extensively as functions of the ion energy, fluence and surface temperature in the burning plasma conditions. In this paper, recent results concerning blister and bubble formations on the tungsten surface under low energy (< 100 eV) and high flux (> 1021 m-2s-1) He/H plasma irradiation are reviewed to gain a better understanding of the performance of tungsten as a plasma facing material under the burning plasma conditions.     

High-Density Polyethylene(HDPE) Surface Treatment Using an RF Capacitive Atmospheric Pressure Cold Ar Plasma Jet

In this study,a high-density polyethylene（HDPE,5-mm-thick,0.95 g/cm3） surface was treated using an RF capacitive atmospheric pressure cold Ar plasma jet.By using this Ar plasma jet,a hydrophilic HDPE surface was formed during the plasma treatment.In particular, the effects of an additive gas（N₂ or O2） on the HDPE surface treatment were investigated in detail.It was shown that the addition of N2 or O2 gas had an important influence on the HDPE surface treatment.Compared to pure Ar plasma treatment,a lower value of water contact angle （WCA） was obtained when a trace of N2 or O2 gas was added.It was also found that besides the quantities of active species in the plasma jet,the treatment temperature played an important role in the HDPE surface treatment.This is because surface molecular motion is not negligible when the treatment temperature is close to the melting point of the polymer.     

The Solubility of Natural Cellulose After DBD Plasma Treatment

Natural cellulose was treated by an atmospheidc DBD plasma. The solubility of cellulose in a diluted alkaline solution after the plasma treatment was investigated. The properties were characterized by X-ray photoelectron spectroscopy （XPS）, Fourier-transform infrared spectroscopy （FTIR） and scanning electron microscopy （SEM）. The results indicated that the surface of cellulose treated by the argon DBD plasma was significantly etched, and the relevant force of hydrogen bonding was decreased. This might be the essential reason for the solubility improvement of natural cellulose in the diluted alkaline solution. Through a comparison of two discharge modes, the atmospheric DBD plasma gun and the parallel plate capacitively coupled DBD plasma, it was found that the atmospheric DBD plasma gun was more effective in fragmentizing the cellulose due to its production of a high energy plasma based on its special structure.     

Sterilization of Turmeric by Atmospheric Pressure Dielectric Barrier Discharge Plasma

In this study atmospheric pressure dielectric barrier discharge （DBD） plasma has been employed for sterilizing dry turmeric powders. A 6 kV, 6 kHz frequency generator was used to generate plasma with Ar, Ar/Ou, He, and He/O2 gases between the 5 mm gap of two quartz covered electrodes. The complete sterilization time of samples due to plasma treatment was measured. The most important contaminant of turmeric is bacillus subtilis. The results show that the shortest sterilization time of 15 rain is achieved by exposing the samples to Ar/O2 plasma. Survival curves of samples are exponential functions of time and the addition of oxygen to plasma leads to a significant increase of the absolute value of time constant of the curves. Magnitudes of protein and DNA in treated samples were increased to a similar value for all samples. Taste, color, and solubility of samples were not changed after the plasma treatment.     

Influence of Chemical Precleaning on the Plasma Treatment Efficiency of Aluminum by RF Plasma Pencil

This paper is aimed to show the influence of initial chemical pretreatment prior to subsequent plasma activation of aluminum surfaces.The results of our study showed that the state of the topmost surface layer（i.e.the surface morphology and chemical groups）of plasma modified aluminum significantly depends on the chemical precleaning.Commonly used chemicals（isopropanol,trichlorethane,solution of Na OH in deionized water）were used as precleaning agents.The plasma treatments were done using a radio frequency driven atmospheric pressure plasma pencil developed at Masaryk University,which operates in Ar,Ar/O₂ gas mixtures.The effectiveness of the plasma treatment was estimated by the wettability measurements,showing high wettability improvement already after 0.3 s treatment.The effects of surface cleaning（hydrocarbon removal）,surface oxidation and activation（generation of OH groups）were estimated using infrared spectroscopy.The changes in the surface morphology were measured using scanning electron microscopy.Optical emission spectroscopy measurements in the near-to-surface region with temperature calculations showed that plasma itself depends on the sample precleaning procedure.     

Plasma Limiter Based on Surface Wave Plasma Excited by Microwave

A novel plasma limiter, in which the plasma is excited by surface wave, is presented. The breakdown time of some gases filled in the limiter were calculated as a function of gas pres- sure, ionization degree and density of seed electrons under low pressure （0.01 -1 Torr） and high pressure （10 -1000 Torr） cases. The results show that the limiter filled with Xe with a pressure of 0.9 Torr, seed electron density of 10^16 m^-3, and ionization degree of 10^-4, has a breakdown time of approximate 19.6 ns.     

Ions Bombardment in Thin Films and Surface Processing

Ions bombardment is very important in thin films and surface processing.The ion energy and ion flux are two improtant parameters in ion bombardment.The ion current density mainly dependent on the plasma density gives the number of energetic ions bombarding the substrate.The self-bias voltage in plasma sheath accelerates plasma ions towards the substrate.RF discharge can increase plasma density and RF bias can also provide the insulator substrate with a plasma sheath.In order to choose and control ion energy,ion density,the angle of incidence,and ion species,ion beam sources are used.New types of electrodeless ion sources(RF,MW,ECR-MW) have been introduced in detail,In the last,the effects of ion bombardment on thin films and surface processing are presented.     

The Diagnosis of Plasma Parameters in Surface Alloying Technique by Optical Emission Spectrometry

Electron density （Ne） in a glow discharge plasma for the surface alloying technique is diagnosed by optical emission spectrometry （OES）. With CH4 as the feeding gas, Ne is obtained by comparing the Hβ spectrum according to the Stark broadening effect. It is noticed that Ne varies with the working pressures （30 Pa to 70 Pa） and cathode voltages （500 V to 1000 V）, respectively. Due to an abnormal glow discharge, Ne is between 1. 71 × 10^15 /cm^3 to 6.64 × 10^15 /cm^3 and increases rapidly with working gas pressures and cathode voltages. The results show that OES is a useful method to measure the plasma parameters in a surface alloying glow discharge plasma.