Effect of N2-Gas Partial Pressure on the Structure and Properties of Copper Nitride Films by DC Reactive Magnetron Sputtering

Copper nitride thin films were deposited on glass substrates by reactive direct current （DC） magnetron sputtering at various N2-gas partial pressures and room temperature. Xray diffraction measurements showed that the films were composed of Cu3N crystallites and exhibited a preferential orientation of the [111] direction at a low nitrogen gas （N2） partial pressure. The film growth preferred the [111] and the [100] direction at a high N2 partial pressure. Such preferential film growth is interpreted as being due to the variation in the Copper （Cu） nitrification rate with the N2 pressure. The N2 partial pressure affects not only the crystal structure of the film but also the deposition rate and the resistivity of the Cu3N film. In our experiment, the deposition rate of Cu3N films was 18 nm/min to 30 nm/min and increased with the N2 partial pressure. The resistivity of the Cu3N films increased sharply with the increasing N2 partial pressure. At a low N2 partial pressure, the Cu3N films showed a metallic conduction mechanism through the Cu path, and at a high N2 partial pressure, the conductivity of the Cu3N films showed a semiconductor conduction mechanism.     

Cu Films Deposited by Unbalanced Magnetron Sputtering Enhanced by ICP and External Magnetic Field Confinement

Metallic copper（Cu） films were deposited on a Si （100） substrate by unbalanced magnetron sputtering enhanced by radio-frequency plasma and external magnetic field confinement. The morphology and structure of the films were examined by scanning electron microscopy （SEM）, atomic force microscope （AFM） and X-ray diffraction （XRD）. The surface average roughness of the deposited Cu films was characterized by AFM data and resistivity was measured by a four-point probe. The results show that the Cu films deposited with radio-frequency discharge enhanced ionization and external magnetic field confinement have a smooth surface, low surface roughness and low resistivity. The reasons may be that the radio-frequency discharge and external magnetic field enhance the plasma density, which further improves the ion bombardment effect under the same bias voltage conditions. Ion bombardment can obviously influence the growth features and characteristics of the deposited Cu films.     

Microstructure and Mechanical Properties of CrN Films Deposited by Inductively Coupled Plasma Enhanced Radio Frequency Magnetron Sputtering

CrN films have been synthesized on Si（100） wafer by inductively coupled plasma （ICP）-enhanced radio frequency （RF） magnetron sputtering. The effects of ICP power on microstructure, crystal orientation, nanohardness and stress of the CrN films have been investigated. With the increase of ICP power, the current density at substrate increases and the films exhibit denser structure, while the DC self-bias of target and the deposition rate of films decrease. The films change from crystal structure to amorphous structure with the increase of ICP power. The measured nanohardness and the compressive stress of films reach the topmost at ICP power of 150 W and 200 W, respectively. The mechanical properties of films show strong dependence on the crystalline structure and the density influenced by the ICP power.     

Microstructure,Hardness and Corrosion Resistance of ZrN Films Prepared by Inductively Coupled Plasma Enhanced RF Magnetron Sputtering

ZrN fihns were deposited on Si（111） and M2 steel by inductively coupled plasma （ICP）-enhanced RF magnetron sputtering. The effect of ICP power on the microstructure, mechanical properties and corrosion resistance of ZrN films was investigated. When the ICP power is below 300 W, the ZrN films show a columnar structure. With the increase of ICP power, the texture coefficient （To） of the （111） plane, the nanohardness and elastic modulus of the films increase and reach the maximum at a power of 300 W. As the ICP Power exceeds 300 W, the films exhibit a ZrN and ZrNx mixed crystal structure without columnar grain while the nanohardness and elastic modulus of the films decrease. All the ZrN coated samples show a higher corrosion resistance than that of the bare M2 steel substrate in 3.5% NaCl electrolyte. The nanohardness and elastic modulus mostly depend on the crystalline structure and Tc of ZrN（111）.     

Magnetic Field Improvement in End Region of Rectangular Planar DC Magnetron Based on Particle Simulation

For a rectangular planar direct current （DC） magnetron, anomalous target erosion may occur in the curve-out region and inner side of the curved region. One key factor is that the magnetic field in the end region is weaker than that in the straight region, and another important factor may be that there is a circumferential component of the magnetic field in the curved region. Through a calculation of three-dimensional magnetic field for the rectangular magnetron, a magnet structure shimmed by permanent magnet bars and ferromagnetic bars is proposed to solve the above problems. Through a three-dimensional non-self-consistent particle simulation and the Yamamura/Tawara formula, the target erosion profile could be predicted. The simulation results show that for an improved uniformity in magnetic field, the entire target utilization could be much enhanced.     

Simulation to Predict Target Erosion of Planar DC Magnetron

Plasma properties in a planar DC magnetron system are simulated by a non-self- consistent particle method in two dimensions. Through tracing the trajectories of the energetic electrons in the specified electric field and the magnetic field, and treating the collision process by Monte Carlo method, the spatial profile of ionization events can be obtained conveniently. Assuming that the ions speed up from the ionization points and bombard the target with the energy at these points, and according to the Yamamura/Tawara method, the target erosion can be predicted. The magnetic field is calculated by the finite element method, and the electric field is estimated according to the self-consistent simulation and measured results. The influence of the time step size on the target erosion profile is analysed first to find a proper step size. Then the influence of electric field estimated on the erosion profile is discussed. The erosion profile may become narrower if the sheath thickness is increased. Finally, considering the dynamic erosion process, the erosion profile may get wider over time for the magnetron with shunt bar.     

A Study of Removing Chlorobenzene by the Synergistic Effect of Catalysts and Dielectric-Barrier Discharge Driven by Bipolar Pulse-Power

In this study, the improvement in the removal of chlorobenzene （C6H5Cl） in the air was investigated by combining dielectric barrier discharge （DBD） driven by bipolar pulse-power with catalysts. Molecular sieve 4A （MS-4A） and MnO2/γ-Al2O3 （MnO2/ALP） as two kinds of catalysts were tested at different positions in a DBD reactor. Catalysts were located either in the discharging area between two electrodes, or just behind the discharging area （in the afterglow area） closed to the outlet. The results indicated that DBD reactor with a bipolar pulse power-supply produced strong instant discharge and energetic particles, which can effectively activate catalysts of MS-4A and MnO2/ALP located in the afterglow area to achieve the synergistic effects on effective fission of chemical bonds of chlorobenzene. It was considered that the gas-chlorobenzene and the chlorobenzene adsorbed on the catalysts were decomposed simultaneously.     

Collimated LaBr3 detector response function in radioactivity analysis of nuclear waste drums

The properties of a Lanthanum bromide （LaBr3） detector and its response functions were investigated via experiments and simulations in this paper. The LaBr3 detector had good relative energy resolution and higher efficiency than a high-purity germanium detector. Monte Carlo and other numerical methods were used to calculate the efficiencies of a LaBr3 detector with a square collimation window. A model of the numerical method was established based on a pure geometric model that was consistent with the experimental situation. The results showed that the detector response functions calculated by these methods were in great agreement with experimental results.     

Magnetization of Multifilamentary Superconductor Nb3Sn in Perpendicular Field

Hysteresis loss is one of the electromagnetic characteristics controlled by time evolution of magnetic field and current distribution inside the conductor. Brandt＇s method allows us to model the interaction of the conductor with an external magnetic field. Instead of the constant critical current density （Jc =CONST）, the Jc scaling law from current-voltage （I-V） measurement is used to model the magnetization loop. By comparing the calculated results with the measured data, it is shown that the Jc scaling law, i.e. the deviatoric strain model, is not useful in a very low field. To solve this problem, the Kim model about Jc as a function of applied field has been applied in the low field case. This method can be used to predict the hysteresis loss of Nb3Sn filamentary strand.     

Effects of Hydroxyl Radicals on Introduced Organisms of Ship＇s Ballast Water Based Micro-Gap Discharge

With the physical method of micro-gap gas discharge, OH. radicals were produced by the ionization of O2 in air and H2O in the gaseous state, in order to explore more effective method totreat the ship＇s ballast water. The surface morphology of Al2O3 dielectric layer was analysed using Atomic Force Microscopy （AFM）, where the size of Al2O3 particles was in the range of 2 μm to 5 μm. At the same time, the biochemical effect of hydroxyl radicals on the introduced organisms and the quality of ship＇s ballast water were studied. The results indicate that the main reasons of cell death are lipid peroxide and damage of the antioxidant enzyme system in Catalase （CAT）, Peroxidase （POD） and Superoxide dismutase （SOD）. In addition, the quality of the ballast water was greatly improved.     

Study of Metal and Ceramic Thermionic Vacuum arc Discharges

The thermionic vacuum arc （TVA） is a new type of plasma source, which generates a pure metal and ceramic vapour plasma containing ions with a directed energy. TVA discharges can be ignited in high vacuum conditions between a heated cathode （electron gun） and an anode （tungsten crucible） containing the material. The accelerated electron beam, incident on the anode, heats the crucible, together with its contents, to a high temperature. After establishing a steadystate density of the evaporating anode material atoms, and when the voltage applied is high enough, a bright discharge is ignited between the electrodes. We generated silver and Al2O3 TVA discharges in order to compare the metal and ceramic TVA discharges. The electrical and optical characteristics of silver and Al2O3 TVA discharges were analysed. The TVA is also a new technique for the deposition of thin films. The film condenses on the sample from the plasma state of the vapour phase of the anode material, generated by a TVA. We deposited silver and Al2O3 thin films onto an aluminium substrate layer-by-layer using their TVA discharges, and produced micro and/or nano-layer Ag-Al2O3 composite samples. The composite samples using scanning electron microscopy was also analysed.     

The Gas Nucleation Process Study of Anatase TiO2 in Atmospheric Non-Thermal Plasma EnhancedChemical Vapor Deposition简

Abstract The gas phase nucleation process of anatase TiO2 in atmospheric non-thermal plasma enhanced chemical vapor deposition is studied. The particles synthesized in the plasma gas phase at different power density were collected outside of the reactor. The structure of the collected particles has been investigated by field scanning electron microscope （FESEM）, X-ray diffraction （XRD）, high resolution transmission electron microscopy （HRTEM） and selected area electron diffraction （SAED）. The analysis shows that uniform crystalline nuclei with average size of several nanometers have been formed in the scale of micro second through this reactive atmo- spheric plasma gas process. The crystallinity of the nanoparticles increases with power density. The high density of crystalline nanonuclei in the plasma gas phase and the low gas temperature are beneficial to the fast deposition of the 3D porous anatase TiO2 film.     

Investigation of the Parallel Flow in the Edge Plasma of EAST

The effects of the E × B drift and ballooning-like transport on the edge plasma in EAST tokamak are investigated with a simplified fluid model. The simulation results show that the E × B drift and ballooning-like transport affect the plasma behavior. When the toroidal field is reversed, at the low field side the density is much larger and temperatures （both electron and ion） are lower, and the profiles of the density and temperatures become more symmetric. With the ballooning-like transport considered, the spatial ballooning-like distribution at the low field side is not very important, but the magnitude affects the ratios of the inner/outer particle flux and energy as well as the E × B drift. At the top of the scrape-off layer, the Mach number exceeding 0.3 for the normal toroidal field and approaching 0.2 for the reversed toroidal field in the simulation are obtained when the drift and ballooning-like transport are included in the model.     

Balmer Hα,Hβ and Hγ Spectral Lines Intensities in High-Power RF Hydrogen Plasmas

Hα（Balmer-alpha）, Hβ （Balmer-beta） and Hγ （Balmer-gamma） spectral line inten- sities in atomic hydrogen plasma are investigated by using a high-power RF source. The intensities of the Hα, Hβ and Hγ spectral lines are detected by increasing the input power （0-6 kW） of ICPs （inductively coupled plasmas）. With the increase of net input power, the intensity of Hα im- proves rapidly （0-2 kW）, and then reaches its dynamic equilibrium; the intensities of Hβ can be divided into three processes： obvious increase （0-2 kW）, rapid increase （2-4 kW）, almost constant （4-6 kW）; while the intensities of Hγ increase very slowly. The energy levels of the excited hydro- gen atoms and the splitting energy levels produced by an obvious Stark effect play an important role in the results.     

Preparation of copper nanoparticles by radiation

Copper nanoparticles were successfully synthesized by 60Co-γ radiation with aqueous solution of cupric sulfate under inert nitrogen-purged conditions. Cu nanoparticles were characterized by using X-ray diffraction （XRD）, transmission electron microscopy （TEM）, laser particle size distribution analyzer （LSPSDA） and differential scanning calorimeter （DSC） techniques, respectively. The effects of solution system, pH, additive of surfactant and absorbed doses on the particle size and its distribution as well as stored stability of Cu naoparticles were investigated. High resolution TEM pictures showed the formation of homogeneous cubic-structured copper nanoparticles with different sizes depends on the synthetic conditions. This new kind of synthesis method shows the excellent stability, which may provide an efficient way to improve the fine tuning of the structure and size of copper nanoparticles.     

掺钛对UO2微球晶粒生长机制的影响

采用溶胶-凝胶方法制备掺钛0.3%(质量分数,下同)UO2微球,用金相显微镜观察微球微观结构、图像分析仪计算微球晶粒尺寸。对掺钛0.3%UO2微球晶粒长大机制进行了研究。经过计算得到在1 250～1 550℃之间掺钛UO2微球晶粒生长的平均活化能Ea=232.79kJ/mol,明显地低于UO2微球晶粒生长的平均活化能(Ea0=518.32kJ/mol);掺钛UO2微球在烧结后期(1 250℃之后),微球部分区域可能形成高价态的U4O9相,加快了U原子扩散速度,加速了晶粒生长。     

Development of Data Acquisition Card Driver for ICRH System on EAST

Presented in this paper is the development of the driver for the data acquisition card with a peripheral component interconnection （PCI） local bus on the ion cyclotron range of frequency heating （1CRH） system. The driver is mainly aimed at the embedded VxWorks system （real-time operating system） which is widely used in various fields of real-time systems. An efficient way is employed to develop this driver, which will advance the real-time control of the ICRH system on the experimental advanced superconductor tokamak （EAST）. The driver is designed using the TORNADO integrated development environment （IDE）, and implemented in C plus language. The details include the hardware configuration, analogue/digital （A/D） and digital/analogue （D/A） conversion, input and output （I/O） operation of the driver to support over five cards. The data acquisition card can be manipulated in a low-level program and meet the requirements of A/D conversion and D/A outputs.     

Simultaneous Oxidization of NOx and SO2 by a New Non-thermal Plasma Reactor Enhanced by Catalyst and Additive

The non-thermal plasma as one of the most promising technologies for removing NOx and SO2 has attrm~ted much attention. In this study, a new plasma reactor combined with catalyst and additive was developed to effectively oxidize and remove NOx and SO2 in the flue gas. The experimental results showed that TiO2 could improve the oxidation efficiency of SO2 in the case of applying plasma while having a negative effect on the oxidation process of NO and NOx. With the addition of NH3, the oxidation rates of NOx, NO and SO2 were slightly increased. However, the effect of adding NH3 on NOx oxidation was negative when the temperature was above 200℃.     

Role of Ion Beam Irradiation and Annealing Effect on the Deposition of AlON Nanolayers by Using Plasma Focus Device

AlON nanolayers are synthesized on Al substrate by the irradiation of energetic nitrogen ions using plasma focusing. Samples are exposed to multiple （5, 10, 15, 20 and 25） focus shots. Ion energy and ion number density range from 80 keV to 1.4 MeV and 5.6×10^19 m^- 3 to 1.3×10^19 m ^-3, respectively. Moreover, the effect of continuous annealing （473 K and 523 K） on an AlN surface layer synthesized with 25 focus shots is also examined. The main features of the X-ray diffraction （XRD） patterns with increasing focus shots are： （i） variation in the crystallinity of AlN along （111）, （200） and （311） planes, （ii） increasing average crystallite size of AlN （111） plane, and （iii） stress relaxation observed in AlN （111） and （200） planes. The crystallinity of AlN surface layer is comparatively better at 473 K annealing temperature. A broadened diffraction peak related to an aluminium oxide phase showing weak crystallinity is observed for 15 focus shots while non-bounded oxides are present in all other deposited layers. Raman and Fourier transform infrared spectroscopy （FTIR） analysis confirm the presence of AlN and Al203 for the surface layer annealed at 473 K temperature. Raman analysis shows that the overlapping of AlN and Al2Oa results in the development of residual stresses. Scanning electron microscope （SEM） results demonstrate that the formation of rounded grains （range from 20 nm to 200 nm） and variations in their microstructures features depend on the increasing number of focus shots. Decomposition of larger clusters into smaller ones is observed.     

Simulation of Electron-Beam Generating Plasma at Atmospheric Pressure

As electron-beam generating plasma is widely applied, the software tool EGS4 （Electron-Gamma Shower） was used to simulate the transmission and energy deposition of electron-beam in air. The simulation results indicated that the range of the electron-beam was inversely proportional to the gas pressure in a wide range of gas pressure, and the electron-beam of 200 keV could generate a plasma with a density 10^11 cm^-3 in air of latm. In addition, the energy distribution of the beam-electron and plasma density profile produced by the beam were achieved.