原子层沉积技术在新型太阳能电池中的应用

原子层沉积技术(ALD)是一项正处于发展之中、在许多领域具有巨大应用前景的新型材料制备技术,该技术在纳米结构和纳米复合结构的制备方面显示出独特的优势,在新型薄膜太阳能电池领域呈现出巨大的发展潜力和前景。首先概述了ALD技术的工作原理,简要介绍了近几年ALD技术在硅基太阳能电池和铜铟镓硒薄膜电池(CIGS)中的应用,然后重点综述了原子层沉积纳米功能薄膜在染料敏化太阳能电池(DSSCs)和有机-无机杂化钙钛矿太阳能电池(PSCs)为代表的新型薄膜太阳能电池中的应用。最后,总结了原子层沉积功能薄膜的特点和优势,展望了ALD在新能源材料与器件领域的应用前景和发展趋势。     

原子层沉积技术及其在铁电薄膜制备中的应用

讲述原子层沉积技术原理与特点的同时，进一步论述了它在沉积机理和实验真空度这两方面与传统薄膜沉积工艺的异同；综述了此技术在铁电薄膜制备研究方面的最新进展，前驱体的制备与选择、薄膜缺陷的控制以及表面化学反应动力学依然是当前原子层制备铁电薄膜研究的重点；最后展望了原子层沉积技术制备铁电薄膜的发展方向。     

Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition

Atomic layer deposition (ALD) has recently become the method of choice for the semiconductor industry to conformally process extremely thin insulating layers (high‐k oxides) onto large‐area silicon substrates. ALD is also a key technology for the surface modification of complex nanostructured materials. After briefly introducing ALD, this Review will focus on the various aspects of nanomaterials and their processing by ALD, including nanopores, nanowires and ‐tubes, nanopatterning and nanolaminates as well as low‐temperature ALD for organic nanostructures and biomaterials. Finally, selected examples will be given of device applications, illustrating recent innovative approaches of how ALD can be used in nanotechnology.     

等离子体增强原子层沉积增透阻隔膜的研究

高阻隔高透光率的柔性复合材料在包装和电子封装领域具有很高的应用价值。本文采用等离子增强原子层沉积技术在PET基体上制备了多层结构的增透阻隔膜,研究了等离子增强原子层沉积制备氧化硅和氮化硅的工艺参数,利用光学模拟软件设计出所需透过率的膜层结构。结果表明：等离子体增强原子层沉积制备的薄膜原子力显微镜表面形貌晶粒分布均匀,薄膜致密,红外光谱显示制备的薄膜为高纯度的SiO₂和Si₃N₄,薄膜的透水率降低了2个数量级,可见光范围透过率可达到94%。     

原子层沉积氧化铝包覆羰基铁粉的抗腐蚀性及吸波性能

为了提高羰基铁粉的抗腐蚀能力及改善其电磁性能, 以TMA和H₂O为前驱体, 利用原子层沉积(ALD)方法对羰基铁粉进行表面包覆改性, 在羰基铁粉表面包覆不同厚度的氧化铝。通过扫描电镜(SEM)、透射电镜(TEM)、综合热分析仪(TGA)、红外光谱(FTIR)和矢量网络分析仪等技术手段系统分析了改性前后羰基铁粉性能指标。结果表明, 通过ALD方法可在羰基铁粉表面生长纳米级别具有良好保型的氧化铝薄膜, 形成了极佳的羰基铁/氧化铝壳层结构复合材料。与原样品相比, 包覆改性后的羰基铁粉热稳定性与抗腐蚀性有极大的提高, 且随着包覆厚度的增加, 抗氧化能力增强, 最大抗氧化温度可超过550℃。同时羰基铁粉包覆氧化铝后, 其介电常数明显减小, 磁导率变化相对较小, 改善了原羰基铁粉的电磁参数与吸波性能。     

From Single Atoms to Nanoparticles: Autocatalysis and Metal Aggregation in Atomic Layer Deposition of Pt on TiO2 Nanopowder

A fundamental understanding of the interplay between ligand‐removal kinetics and metal aggregation during the formation of platinum nanoparticles (NPs) in atomic layer deposition of Pt on TiO₂ nanopowder using trimethyl(methylcyclo‐pentadienyl)platinum(IV) as the precursor and O₂ as the coreactant is presented. The growth follows a pathway from single atoms to NPs as a function of the oxygen exposure (P_O2 × time). The growth kinetics is modeled by accounting for the autocatalytic combustion of the precursor ligands via a variant of the Finke–Watzky two‐step model. Even at relatively high oxygen exposures (<120 mbar s) little to no Pt is deposited after the first cycle and most of the Pt is atomically dispersed. Increasing the oxygen exposure above 120 mbar s results in a rapid increase in the Pt loading, which saturates at exposures >> 120 mbar s. The deposition of more Pt leads to the formation of NPs that can be as large as 6 nm. Crucially, high P_O2 (≥5 mbar) hinders metal aggregation, thus leading to narrow particle size distributions. The results show that ALD of Pt NPs is reproducible across small and large surface areas if the precursor ligands are removed at high P_O2.     

Mussel Adhesion‐Inspired Reverse Transfection Platform Enhances Osteogenic Differentiation and Bone Formation of Human Adipose‐Derived Stem Cells

Using small interfering RNA (siRNA) to regulate gene expression is an emerging strategy for stem cell manipulation to improve stem cell therapy. However, conventional methods of siRNA delivery into stem cells based on solution‐mediated transfection are limited due to low transfection efficiency and insufficient duration of cell‐siRNA contact during lengthy culturing protocols. To overcome these limitations, a bio‐inspired polymer‐mediated reverse transfection system is developed consisting of implantable poly(lactic‐co‐glycolic acid) (PLGA) scaffolds functionalized with siRNA‐lipidoid nanoparticle (sLNP) complexes via polydopamine (pDA) coating. Immobilized sLNP complexes are stably maintained without any loss of siRNA on the pDA‐coated scaffolds for 2 weeks, likely due to the formation of strong covalent bonds between amine groups of sLNP and catechol group of pDA. siRNA reverse transfection with the pDA‐sLNP‐PLGA system does not exhibit cytotoxicity and induces efficient silencing of an osteogenesis inhibitor gene in human adipose‐derived stem cells (hADSCs), resulting in enhanced osteogenic differentiation of hADSCs. Finally, hADSCs osteogenically committed on the pDA‐sLNP‐PLGA scaffolds enhanced bone formation in a mouse model of critical‐sized bone defect. Therefore, the bio‐inspired reverse transfection system can provide an all‐in‐one platform for genetic modification, differentiation, and transplantation of stem cells, simultaneously enabling both stem cell manipulation and tissue engineering.