A 100 ns 5 V only 64K/spl times/1 MOS dynamic RAM

A new high performance 36500 mil/SUP 2/ 64K dynamic RAM has been designed and incorporates: 1) a twisted-metal bit-line architecture, 2) an ultrasensitive sense amplifier with self-restore to V/SUB DD/, 3) internal constant-voltage supply to memory cell plate, 4) a bit-line equalizer and full-size reference capacitor, 5) high-performance enhancement-depletion mode inverter-buffer circuits, 6) TTL negative undershoot protection on address circuits, and 7) active hold-down transistors for both X and Y drivers. A nominal 100 ns access time and power dissipation of less than 150 mW was observed during active operation with a 20 mW power dissipation in the standby mode.     

A 70 ns high density 64K CMOS dynamic RAM

A 64K /spl times/ 1 CMOS dynamic RAM has been developed in a double-poly n-well CMOS technology with device scaling to the HMOS III level. A p-channel memory array with n-well protection reduced the operating soft error rate to less than one FIT. Periphery complexity is simplified due to CMOS circuits resulting in a size of 30,464 mil/SUP 2/ with a redundancy efficiency of 68%. The RAM has a typical access time of 70 ns and a CMOS standby power of 25 /spl mu/W. In addition, a static column design offers 35-ns data cycle time for high-bandwidth application.     

A 25 ns 64K static RAM

A high-performance 64K/spl times/1-bit CMOS SRAM is described. The RAM has an access time of 25 ns with active power of 350 mW and standby power of 15 mW. The access time has been obtained by using a 1.5 /spl mu/m rule CMOS process, advanced double-level A1 interconnection technology, an equalizer circuit, and a digit line sense amplifier that is the first sense amplifier directly connected to digit lines. The WRITE recovery circuit is effective in improving WRITE characteristics, and a block selecting circuit was used for low power dissipation.     

A 64-kbit dynamic MOS RAM

A 64-kbit dynamic MOS RAM is developed by using 2 /spl mu/m rule VLSI fabrication technology and low power circuit technology. The 2 /spl mu/m rule VLSI fabrication technology is achieved by improving various aspects of the ultraviolet photolithographic, thin-gate oxidation, arsenic ion implantation, and multilevel interconnection processes. Microminiaturization of the device structure has made the voltage requirements for its MOST threshold voltage and DC supply voltages low. A highly sensitive and low power dissipating sense circuit has been developed for the VLSI RAM. A new level-detecting circuit with a logic threshold which is independent of MOST threshold voltage is proposed. A dynamic address-buffer circuit is also shown. The fabricated 64K RAM has 200 ns of access time, 370 ns of minimum cycle time, and 150 mW of power dissipation under typical supply voltage conditions of V/SUB DD/=7 V and V/SUB BB/=-2 V.     

A 50 ns 4K static DSA MOS RAM

An advanced DSA MOS (DMOS) technology is discussed as it applies to a high-speed 4K bit semiconductor static memory. It uses a polysilicon gate length of 4 /spl mu/m, a gate oxide thickness less than 800 /spl Aring/, and a shallow junction depth (<0.6 /spl mu/m) using conventional photolithographic methods. With these features, the effective channel length of the DSA MOST was reduced to 0.5 /spl mu/m and a smaller junction capacitance was obtained by the use of a high-resistivity (100-200 /spl Omega/.cm) substrate without a substrate bias generator. Combined with the depletion load transistors and selective oxidation processing, a static RAM of 50 ns access time at 630 mW power dissipation, die size of 5.24/spl times/5.36 mm/SUP 2/, and cell size of 53/spl times/62 /spl mu/m/SUP 2/ was obtained.     

A 64 Kbit MOS dynamic RAM with novel memory capacitor

A 64 Kbit dynamic RAM is described. The RAM features a novel memory cell using a polysilicon-dielectric-polysilicon (PDP) capacitor. This structure provides performance and density advantages over the conventional approaches. A new sense amplifier configuration is also described in detail. It multiplexes two pairs of bit lines for each sense amplifier. Thus the number of memory cells per bit line is halved. This reduces the length of each bit line, thereby increasing the signal voltage available to the sense amplifier. A compatible dummy cell design is included in the discussion. Using conservative processing (3.5 /spl mu/m device channel length with 700 /spl Aring/ gate oxide thickness) a die size of 3.2 mm/spl times/7.9 mm is achieved. Experimental data are presented in the text.     

A low-power sub 100 ns 256K bit dynamic RAM

A 256K-word /spl times/ 1-bit NMOS dynamic RAM using 2-/spl mu/m design rules and MoSi/SUB 2/ gate technology is described. A marked low-power dissipation of 170 mW (5 V V/SUB cc/, 260-ns cycle time) has been achieved by using a partial activation scheme. Optimized circuits exhibit a typical CAS access time of 34 ns. For the purpose of optimizing circuit parameters, an electron beam tester was successfully applied to observe the internal timing of real chips. Laser repairable redundancy with four spare rows and four spare columns is implemented for yield improvement.     

A 3.5 ns/77 K and 6.2 ns/300 K 64 K CMOS RAM with ECL interfaces

A 64 K CMOS RAM with emitter-coupled logic (ECL) interfaces having access times of 6.2 ns at room temperature and with a CMOS process specifically optimized for low-temperature operation, 3.5 ns at liquid nitrogen (LN) temperature, is presented. The CMOS processes feature a 0.5 μm L_eff, self-aligned TiSi₂ double-level metal, and an average minimum feature size of 1.35 μm. Circuits keyed to high-speed operation are described with emphasis on low power and safe operation. Unique aspects of LN-temperature operation including circuit-device interactions, the impact of velocity saturation effects on channel length, temperature and power supply sensitivities, and the characteristics of the ECL-to-CMOS receiver circuits are discussed     

A fault-tolerant 30 ns/375 mW 16K/spl times/1 NMOS static RAM

A fault-tolerant 30950 mil/SUP 2/ (19.9 mm/SUP 2/) 16K/spl times/1 static MOS RAM has been fabricated with a single polysilicon E/D NMOS process. Using circuit techniques normally restricted to dynamic RAMs, but adapted for asynchronous operation, the device achieves a typical access time of 30 ns while dissipating only 375 mW. Among the topics discussed in a new single-polysilicon memory cell configuration, the first truly asynchronous bootstrap circuit, an active bit-line equilibration and precharge scheme, and a new power-efficient substrate bias generator. Also described is an on-chip redundancy scheme which consumes approximately 2 percent of the total chip area, does not compromise access time and can be programmed using standard test equipment.     

A 20 ns 64K (4K/spl times/16) NMOS RAM

A 64K (4K/spl times/16) NMOS RAM is described which uses new circuit techniques and design concepts to achieve an average nominal access time of 20 ns. The RAM was built using a relatively straightforward NMOS technology with single-level metal, single-level polycide, an average minimum feature size of 1.7 /spl mu/m, and an effective channel length of 1.2 /spl mu/m. The chip is organized physically into four 16K blocks. Cell area is 292 /spl mu/m/SUP 2/ with a chip area of 32.6 mm/SUP 2/. A four-device split-wordline cell was used to reduce the wordline delay. Chip organization, simplified clocking and timing, and new circuits were especially important for improved performance. An address buffer with internal reference, a switched decoupled bootstrapped decoder, and a self-timed sense amplifier are described.     

A 35 ns 16K NMOS static RAM

An NMOS 16K/spl times/1 bit fully static MOS RAM with 35 ns access time has been successfully developed. High speed access time was achieved by the combination of an NMOS process with the 2.2 /spl mu/m gate length transistor, high speed sense amplifier, and reduction on delay time at the crossunder. The improvements of row and column decoder circuits result in the low active and standby power dissipation of 275 mW and 22.5 mW, respectively. The soft error rate of the poly load cell was minimized by reducing the collection efficiency of alpha-particle induced electrons.     

A 64K/spl times/1 bit dynamic ED-MOS RAM

A 64K/spl times/1 bit dynamic RAM based on an innovative short channel ED-MOS process technology and an improved ED-MOS sense amplifier circuit has been realized. The RAM has been designed by using 2-3 /spl mu/m design rules and employing ED-MOS peripheral circuits capable of low supply voltage operation. As a result, dynamic memory operation has been demonstrated with an access time less than 140 ns and a cycle time of 350 ns, using a single 5 V power supply.     

Fully boosted 64K dynamic RAM with automatic and self-refresh

A novel high-speed low-power 64K dynamic RAM with enough margin has been attained using a double polysilicon and 3-/spl mu/m process technologies. To obtain a low soft error rate below 1/spl times/10/SUP -6/ errors per device hour without sacrificing the high-speed and low-power operation, some novel approaches are proposed in the circuit and device designs. In particular, fully boosted circuits and the Hi-C cell structure with polysilicon bit line are designed to increase the margin of the single 5-V power supply 64K dynamic RAM. The fabricated device provides a typical access time of 90 ns and an operating power of 190 mW at 25/spl deg/C. Also, the design features of the automatic and self-refresh functions on the same chip are described.     

A 15-ns CMOS 64K RAM

The RAM was built using a technology with self-aligned TiSi/SUB 2/, single-level metal, an average minimum feature size of 1.35 /spl mu/m, and a minimum effective channel length of 1.1 /spl mu/m. An access of 10 ns is possible with the word line stitched on a second level of metal and some minor redesign. High speed is achieved through innovative circuits and design concepts. Novel CMOS circuits include a sense-amp set signal generator, a row decoder, and an input circuit. A layout-rule-independent graphics tool, which was used for the artwork design, is discussed.     

A high-speed ECL 100K compatible 64/spl times/4 bit RAM with 6 ns access time

An ECL 100K compatible 64/spl times/4 bit RAM with 6 ns access time, 600 mW power dissipation, and a chip size of 4.8 mm/SUP 2/ has been developed for caches and scratchpad memories to enhance the performance of high-speed computer systems. The excellent speed performance together with the high-packing density has been achieved by using an oxide isolation technology in conjunction with novel circuit techniques. The device is adaptable to modern subnanosecond logic arrays, and, hence, is a member of the Siemens SH 100 family.     

A 5 V-only 64K dynamic RAM based on high S/N design

A 5 V-only 64K dynamic RAM is designed and fabricated using double poly-Si technology based on the 3 /spl mu/m design rule. The design features of this dynamic RAM are described. In particular, memory cell and S/N (signal/noise) designs are focused of a dynamic RAM with an on-chip bias generator. The device fabricated provides a typical access time of 120 ns and a 170 mW operating power, with minimized sense noise of less than 50 mV.     

An 18 ns CMOS/SOS 4K static RAM

A high-speed CMOS/SOS 4K word/spl times/1 bit static RAM is described. The RAM features a MoSi/SUB 2/ gate CMOS/SOS technology with 2 /spl mu/m gate length and 500 /spl Aring/ thick gate oxide. Performance advantage of SOS over bulk is discussed for the scaled-down MOS LSI with 1-2 /spl mu/m gate. A standard 6-transistor CMOS cell and a two-stage sense amplifier scheme are utilized. In spite of the rather conservative 3.5 /spl mu/m design rule except for the 2 /spl mu/m gate length, the cell size of 36/spl times/36 /spl mu/m, the die size of 3.11/spl times/4.07 mm, and the typical read access and cycle time of 18 ns are achieved. The active and standby power dissipation are 200 mW and 50 /spl mu/W, respectively.     

A 64K DRAM with 35 ns static column operation

A 64K dynamic RAM with a function mode similar to static memory operation is described. The device has multiplexed address inputs and a one-address strobe clock (RAS). After a row address is applied to the device, column selection is performed as in static memory, resulting in fast cycle time and simplicity of use. Column address access time and cycle times of 35 ns are achieved. The device has some other functions to reduce critical timings. Address transition detector circuits are used for column selection. An improved column decoder is provided to allow column address input skew. The device uses NMOS single transistor memory cells and is packaged in a standard 300-mil 16-pin DIP.     

A 30 ns 16K/spl times/1 fully static RAM

A fully static 16K/spl times/1 random access memory (SRAM) with significantly improved speed is discussed. Design innovations using conservative 2.5 /spl mu/m transistors and state-of-the-art double level poly (DLP) scaled NMOS technology were utilized to accomplish 30 ns address and chip select access times with an active power of 550 mW and standby power of 75 mW. A cost effective DLP process was developed using `shared' contacts in the cell. These `shared' contacts utilize second level poly to provide connection between the first poly level and moat, reduced the number of contacts per cell to four. The DPL cell size is 1.6 mil/SUP 2/ (1000 /spl mu/m/SUP 2/) which yields a bar size of 158/spl times/264 mil/SUP 2/ (4.0/spl times/6.7 mm/SUP 2/). In this fully static design a novel architecture was used to power down half of the X-decoders in the active mode using the AO address buffer signals. This technique allowed the use of power saved in the X-decoder to be distributed throughout the circuit to improve overall access times. One of the other major speed improvements came from utilizing column sense amps. The use of the column sense amp improves the overall speed by more than 20 percent. A write cycle of 30 ns has been achieved with a typical write pulse width of 10 ns.