倒装芯片封装材料-各向异性导电胶的研究进展

介绍了两种新型各向异性导电胶ACA(Anisotropic Conductive Adhesive)结构,分析了邦定压力和导电颗粒特性对常用ACA互连接触电阻的影响,综合叙述了环境因素、邦定参数、误对准、凸点高度等对ACA互连可靠性影响的研究进展.     

Evaluation of the Delamination in a Flip Chip Using Anisotropic Conductive Adhesive Films Under Moisture/Reflow Sensitivity Test

Anisotropic conductive adhesive films (ACFs) have been used for electronic assemblies such as the connection between a liquid crystal display panel and a flexible printed circuit board. ACF interconnection is expected to be a key technology for flip chip packaging, system-in-packaging, and chip size packaging. This paper presents a methodology for quantitative evaluation of the delamination in a flip chip interconnected by an ACF under moisture/reflow sensitivity tests. Moisture concentration after moisture absorption was obtained by the finite element method. Then, the vapor pressure in the flip chip during solder reflow process was estimated. Finally the delamination was predicted by comparing the stress intensity factor of an interface crack due to vapor pressure with the delamination toughness. It is found that the delamination is well predicted by the present methodology.     

Dynamics of Ultrasonic Transducer System for Thermosonic Flip Chip Bonding

Thermosonic flip chip bonding is used in certain fine pitch IC packaging for its unique features. By using this bonding process in this paper, 1 mm$, times ,$1 mm chip with 8 gold bumps has been bonded onto a silver-coated substrate. Dynamical properties of transducer system, which is the key component for providing the ultrasonic energy, have been investigated using finite element model (FEM) and measurement using impedance analyzer and laser doppler vibrometer (LDV). The simulation results show that the ultrasonic transducer vibrates by coupling with all excited modes, therefore resulting in complicated motions during bonding. The third axial mode, which includes 1.5 wavelengths and 3 nodes, is the dominant working vibration. However, this axial mode is severely disturbed by undesirable non-axial modes such as flexural modes. There are some other unwanted parasitic modes close to dominant mode. Measured velocities of the transducer horn show that the system vibrates under several modes simultaneously. The impedance measurements reveal additional frequencies overlapping the working frequency. All non-axial modes of the ultrasonic transducer disturb the bonding process and degrade the bonding quality. A subtle control is needed to obtain unique axial mode and stable vibration for high bonding quality.      

倒装芯片各向异性导电胶互连的剪切结合强度

采用冲击试验方法研究了各向异性导电胶膜(ACF)互连的玻璃和柔性基板上倒装芯片(COG和COF)的剪切结合强度.结果表明:COF比COG的剪切强度高.ACF的固化程度达85%时有最大的结合强度.键合温度、导电颗粒状态、缺陷等因素对ACF互连的结合强度有较大影响,而键合压力的影响不大.     

倒装芯片各向异性导电胶互连的剪切结合强度

采用冲击试验方法研究了各向异性导电胶膜(ACF)互连的玻璃和柔性基板上倒装芯片(COG和COF)的剪切结合强度.结果表明:COF比COG的剪切强度高.ACF的固化程度达85 %时有最大的结合强度.键合温度、导电颗粒状态、缺陷等因素对ACF互连的结合强度有较大影响,而键合压力的影响不大.     

芯片互连超声键合技术连接机制探讨

超声键合是实现集成电路封装中芯片互连的关键技术之一.对于超声键合过程焊点形成机理以及超声在键合过程中发挥的作用的正确理解是实现参数优化和获得可靠焊点的关键.综述了超声键合技术连接机理,归纳总结并探讨了四种键合机制,包括:摩擦生热键合理论、位错理论、滑动摩擦及变形理论和微滑移理论.     

Thermosonic Flip Chip Interconnection Using Electroplated Copper Column Arrays

A novel flip chip process is reported in which bare dies are thermosonically bonded to arrays of electroplated copper columns formed on a substrate. The new process is intended as a low-cost, lead-free chip-on-board (COB) interconnection method for high-frequency devices. A detailed study has been performed of the electroplating and thermosonic bonding techniques involved. It was found that oxygen plasma treatment of the resist mask could increase the yield of the fine-pitch (<150 mum) column electroplating process, while the flatness of the resulting columns was affected by the plating current density and the sidewall profiles in the resist mold. Under optimal conditions, column arrays with flat tops could be produced with a 100% yield, and with a column height deviation of less than 0.5 mum over an area of 10 mmtimes10 mm. The array thermosonic bonding process was studied with the aid of Box-Behnken design of experiments based on response surface methodology. A second-order relationship between the input bonding variables and the bonding strength was derived and used to determine optimal process conditions. With this optimized process, silicon chips with aluminium metallization were thermosonically flip chip bonded to quartz test boards bumped with gold-capped copper columns. Sixteen prototype assemblies without underfill protection were evaluated by accelerated lifetime tests. The contact resistances of single column connections showed no significant change after 50 thermal shocks of 0 degC to 100 degC, and samples subjected to high-temperature storage remained intact at all bonding interfaces after 1.5 h at 300 degC. Thermal cycling between -55degC and 125 degC produced open-circuit defects in a small number of connections after 70 cycles     

Adhesion and Reliability of Anisotropic Conductive Films (ACFs) Joints on Organic Solderability Preservatives (OSPs) Metal Surface Finish

The effect of final metal finishes of Cu electrodes on the adhesion and reliability of anisotropic conductive film (ACF) joints was investigated. Two different metal surface finishes, electroless Ni/immersion Au (ENIG) and organic solderability preservatives (OSPs) coated on Cu, were selected in this study for ACF bonding. The adhesion strength of ACF/OSP joints was higher than that of ACF/bare Cu and ACF/ENIG joints. The fracture sites of the ACF/bare Cu and ACF/ENIG joints were ACF/metal interfaces, while those of ACF/OSP joints were inside the ACF. Transmission electron microscope (TEM) and Fourier-transform infrared (FT-IR) analyses showed that the OSP coating layer on the Cu electrodes reacted with the epoxy resin of the ACFs but still remained at the bonding interface. According to the in-depth X-ray photoelectron spectroscopy (XPS) analysis, additional C-N bonds formed after the OSP-epoxy reaction and the outermost nitrogen of the OSP layer participated in curing of the epoxy resin of the ACF. Therefore, the OSP layer acted as an adhesion promoter to ACFs. Furthermore, this role of the OSP layer enhanced the reliability of the ACF/OSP joints under high temperature and humid environments, as compared to the ACF/ENIG joints.     

Theoretical Prediction and Experimental Measurement of the Degree of Cure of Anisotropic Conductive Films (ACFs) for Chip-On-Flex (COF) Applications

The degree of cure of anisotropic conductive films (ACFs) was theoretically predicted and experimentally measured to investigate the effect of the degree of cure of ACFs on the electrical and mechanical stability of ACF joints and the␣reliability of chip-on-flex (COF) assemblies. The cure reaction of ACFs, observed by an isothermal differential scanning calorimetry (DSC) analysis, followed an autocatalytic cure mechanism, and the degree of cure of ACFs as a function of time and temperature was mathematically derived from an autocatalytic cure kinetics model. To simulate the ACF temperature field accurately during the COF bonding process, the thermal properties of the ACF such as the thermal diffusivity (α), specific heat capacity (C _p), and thermal conductivity (λ) were characterized experimentally. The degrees of cure of ACFs as functions of the bonding time during the COF bonding process were theoretically predicted by the incorporation of autocatalytic kinetics modeling and ACF temperature simulation. The predicted degrees of cure of ACFs were well matched with the experimental data measured by attenuated total reflectance/Fourier-transform infrared (ATR/FT-IR) analysis. The contact resistances of the ACF joints and the peel adhesion strengths of the COF assemblies were evaluated for electrical and mechanical interconnection stability. According to these results, the ACF contact resistances decreased and the ACF peel adhesion strengths increased as the degree of cure of ACFs increased. In addition, to investigate the effect of the degree of cure of ACFs on the reliability of COF assemblies, an 85°C/85% relative humidity (85°C/85% RH) test was performed. These results showed that the reliability of COF assemblies also strongly depends on the degree of cure of the ACFs.     

热超声倒装键合换能系统多模态振动与有限元分析

研究了热超声倒装键合设备的核心执行机构——换能系统的动力学特性.利用激光多谱勒测振仪测试系统末端各方向的振动速度,发现系统以轴向振动为主,但受到其他非轴向振动的干扰.非轴向振动对芯片造成芯片倾斜、键合强度降低等负面影响.采用有限元方法对换能系统建模,仿真计算发现换能系统振动是各方向振动的耦合结果,且工作模态附近存在多种干扰模态.最后分析了系统多模态产生的根源并提出抑制方法.     

Low-Temperature Curable Photo-Active Anisotropic Conductive Films (PA-ACFs)

Photo-active anisotropic conductive films (PA-ACFs) with curing temperatures below 120°C were introduced using photo-active curing agents. The PA-ACFs showed no curing before UV activation, and the crosslinking systems of the PA-ACFs were not activated under fluorescent light exposure. However, after UV activation, the PA-ACFs were completely cured at 120°C within 10 s. Flex-on-board (FOB) assembly using PA-ACFs had adhesion strength and joint resistances similar to those of the FOB assemblies using conventional epoxy-based ACFs. This study demonstrates that PA-ACFs provide reliable interconnection and minimal thermal deformation among all the commercially available ACFs, especially for low T _g substrate applications.     

采用底部填料预涂工艺的Au-Sn粘结倒芯片COF技术

概述了COF粘结技术以及应用底部填料预涂工艺的Au-Sn粘结倒芯片COF技术。     

面向窄节距倒装互连的预成型底部填充技术

近年来随着电子产品的小型化发展,窄节距倒装芯片互连已经成为研究热点。传统的倒装芯片组装后底部填充技术(例如底部毛细填充)在用于窄节距互连时易产生孔洞,导致可靠性降低,因此产业界开发了面向窄节距倒装芯片互连的预成型底部填充技术,主要包括非流动底部填充和圆片级底部填充。介绍了这类新型底部填充技术的具体工艺及材料需求,并提出了目前其在大规模量产以及未来更窄节距应用中存在的问题及挑战,总结了目前产业界在提高量产生产效率、提升电互连的可靠性以及开发纳米级高热导率填料等方面提出的解决方案,分析了该技术未来的发展方向。     

倒装芯片热电极键合工艺研究

文章将论述一种无掩模制造细小焊料凸点技术。利用热电极键合工艺将带有凸点的倒装芯片焊到基板上。此项工艺能将间距小至40μm的倒装芯片组装到基板上。文章也论述了间距为40μm、电镀AuSn钎料凸点的倒装芯片组装工艺技术。金属间化合物相的形成对焊点可靠性有重要影响,尤其是对于细小焊点。文中研究了金属间化合物相的形成与增加对可靠性的影响。讨论分析了热循环和湿气等可靠性试验结果。     

Study of the Formation of Bubbles in Rigid Substrate-Flexible Substrate Bonding Using Anisotropic Conductive Films and the Bubble Effects on Anisotropic Conductive Film Joint Reliability

The formation of process-related bubbles that become entrapped inside the anisotropic conductive film (ACF) layer during bonding processes remains an issue. The formation of these bubbles is strongly influenced by the process variables, such as bonding pressure and bonding temperature. Therefore, bonding process variables of bonding temperature, bonding pressure, and type of flexible substrate (FS) were changed in order to investigate the effects of the changes as they concern the formation of bubbles. According to the results, the tendency toward bubble formation was closely related to these three factors. The bubble area increased as the bonding temperature increased. Moreover, the shape and tendency of bubbles coincided with temperature distribution in␣the ACF layer. Two different types of FS, each with different surface roughnesses and energies, were used. The bubbles formed only on the FS with the larger roughness and lower surface energy. According to the results from a surface energy measurement of FS types using goniometry, a FS with a higher surface energy is favorable for a bubble-free assembly, as the higher surface energy provides better wettability. In addition, in order to investigate the effect of bubbles on the reliability of ACF joints, the pressure cooker test (PCT) was performed, and all samples with bubbles electrically failed after 72 h of a PCT, as the process-related bubbles provided a moisture penetration path and entrapment site for moisture. However, all type 1 test vehicles (TVs) survived even after 120 h of a PCT. Therefore, Ar and O₂ plasma treatments were performed on the FS with the lower surface energy in order to improve the surface energies and wettability. Following this, the bubbles were successfully removed at rigid substrate (RS)–FS bonding joints using ACFs.     

Experimental Analysis of Mechanical and Electrical Characteristics of Metal-Coated Conductive Spheres for Anisotropic Conductive Adhesives (ACAs) Interconnection

An accurate characterization for the deformation behavior of conductive particles is important: 1) to understand the anisotropic conductive adhesive (ACA) interconnection and 2) to optimize the ACA bonding parameter. This paper introduces an experimental technique, which has been developed to allow continuous monitoring of deformation characteristics of a single conductive particle. The load-deformation curve of a single conductive particle is measured, which provides the quantitative estimation of the mechanical and electrical characteristics of metal-coated polymer spheres used in ACAs. Based on the load-deformation result of a single conductive particle and the number of trapped particles on a bump, equivalent spring models are used to predict the deformation degree of conductive particles after flip chip assembly. For two kinds of conductive particles with different polymer cores, the mechanical and electrical characteristics of ACA interconnection were studied. Such results are used to further achieve a more sophisticated approach of the ACA bonding process and contact reliability.     

倒装芯片键合技术发展现状与展望

我国集成电路发展十二五规划中提到,大力发展先进封装和测试技术,推进高密度堆叠型三维封装产品的进程,支持封装工艺技术升级和产能扩充。阐述了先进封装技术中的倒装芯片键合工艺现状及发展趋势,以及国际主流倒装设备发展及国内应用现状,重点介绍了北京中电科装备有限公司的倒装机产品。国产电子装备厂商应认清回流焊倒装芯片键合设备市场发展,缩短倒装设备产品开发周期和推向市场的时间,奠定国产电子先进封装设备产业化基础;同时抓紧研发细间距铜柱凸点倒装和热压焊接技术,迎接热压倒装芯片工艺及其设备的挑战。     

ACF各向异性导电胶的工艺评价方法

ACF作为一种实装材料,可以方便地实现精细电极的导通连接。其原理是通过加热、加压、树脂受热固化、ACF中的导电粒子连接上下电极,从而实现电极固定和电极导通。实际上受ACF成份的影响,每种ACF的特性都不一样,而在生产应用中,温度、压力、时间、位置、辅助材料等因素又会对连接的效果产生影响。为了确保ACF适用于厂内的工艺,把ACF的应用风险降低。评价一种ACF的过程,通常分为单体评价、工艺评价和产品评价。文中将以屏侧ACF为例,讨论ACF工艺评价的方法。     

Effects of Heating Rate on Material Properties of Anisotropic Conductive Film (ACF) and Thermal Cycling Reliability of ACF Flip Chip Assembly

In this paper, the effects of heating rate during anisotropic conductive film (ACF) curing processes on ACF material properties such as thermomechanical and rheological properties were investigated. It was found that as the heating rate increased, the coefficient of thermal expansion (CTE) of the ACF increased, and the storage modulus and glass transition temperature $(T _{g})$ of the ACF decreased. Variation of the ACF material properties are attributed to cross-linking density, which is thought to be related with the ACF density. In addition, as the heating rate increased, the minimum viscosity of the ACF decreased and the curing onset temperature increased during the curing process. The similar phenomenon was also found in in-situ contact resistance measurement. As the heating rate increased, contact resistance establishing temperature increased and the contact resistances of the ACF flip chip assemblies decreased. The decrease in contact resistance was due to larger conductive particle deformation which leads to larger electrical contact area. The effect of the heating rate of ACFs on thermal cycling (T/C) reliability of flip chip assemblies was also investigated. As the heating rate increased, the contact resistances of the ACF flip chip assembly rapidly increased during the T/C test. The T/C reliability test result was analyzed by two terms of shear strain and conductive particle deformation. Reduced gap of joints due to reduced ACF viscosity resulted in larger shear strain. Moreover, many cracks were observed at metal-coated layers of conductive particles due to larger deformation.