Parameters of high-frequency vacuum breakdown in a mass-spectrometer ion source

The electrical and optical characteristics of hf vacuum breakdown are experimentally investigated. It is shown that the breakdown current amplitude can reach 20 A with a voltage of up to 30 kV on the electrodes and a discharge duration of 20–25 nsec.Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 42, No. 4, pp. 645–648, April, 1982.     

粗氩塔工况周期性恶化分析及处理

简述 6 0 0 0m3 /h空分设备粗氩塔运转 1～ 3个月后就出现工况周期性恶化的故障 ;经过分析检查 ,原因为管道变形、珠光砂进入所致 ;经 4项整改措施 ,粗氩塔工况恢复正常。     

A high-frequency discharge on a dielectric surface

Plasma generation from a high-frequency (HF) oscillator, operating in the frequency range from hundreds of kilohertz to hundreds of megahertz, is one of the most interesting and promising ways of plasma creation in gas flows. A feature of an HF oscillator is that it utilizes only a single electrode, which can be placed inside the body and have no direct contact with the medium. The surrounding medium including the elements of the setup acts as the second electrode.     

Time of flight mass spectrometry with continuously operating ion source

Developments in Continuous Time of Flight (CTOF) mass spectrometry which uses a continuously operating ion source and a special modulation demodulation technique are presented. The expected advantages are higher sensitivity and minor space charge limitations. The present article discusses the solution of the problems of beam modulation in conjunction with the appearance of higher harmonic ghost peaks in the Time Of Flight spectrum, as well as the construction of the modulator device in order to allow modulation frequencies high enough for satisfactory resolution. The objective of the experimental set-up is to demonstrate the operation of this novel measuring principle and the effectiveness of the developments. The CTOF method is far less limited by physics than Pulsed Time of Flight (PTOF) techniques. By investing the same amount of effort to both methods, CTOF will likely outperform PTOF in most parameters.     

缩短全精馏提氩设备调试投产时间的操作

简介粗氩塔投运条件 ,主塔工况对粗氩塔的影响与调整 ,粗氩塔的调整与投运     

Transport coefficients of a gas mixture of atoms and excited molecules

We obtain compact analytical expressions for the transport coefficients.Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 52, No. 2, pp. 324–329, February, 1987.     

Pinch-plasma radiation source for extreme-ultraviolet lithography with a kilohertz repetition frequency

An extreme-ultraviolet radiation source based on a xenon pinch plasma is discussed with respect to the demands on a radiation source for extreme-ultraviolet lithography. Operation of the discharge in a self-igniting-plasma mode and omitting a switch permits a very effective and low-inductive coupling of the electrically stored energy to the electrode system. The xenon plasma exhibits broadband emission characteristics that offer radiation near 11 and 13 nm. Both wavelengths are useful in combination with beryllium- and silicon-based multilayer mirrors. The plasma emits approximately 74 mW/sr at 11.5 nm and 40 mW/sr at 13.5 nm in a bandwidth of 2% when operated at a repetition frequency of 120 Hz. The source size is less than 500 mum in diameter (FWHM) when viewed from the axial direction. The pulse-to-pulse stability is better than 3.6%. First results with a repetition rate of as much as 6 kHz promise the possibility of scaling to the required emission power for extreme-ultraviolet lithography.     

A coherent trough in the envelope of a signal formed by the interferometer with a partially coherent radiation source

When a mixed radiation from physically different sources with substantially different widths of spectral lines is used in an interferometer, a single trough can appear under certain conditions in the envelope of the time-dependent interference signal. This trough can be used as a measurement signal.     

Quasi-continuous source of radiation on the basis of a magnetically fixed discharge

A quasi-continuous mode of operation is realized for a plasma source of light utilizing a magnetically fixed discharge with the glow duration of 0.2 s. It is demonstrated that, with a discharge channel length of 8 cm and width of 2 cm, a magnetically fixed discharge with a magnet system in the form of an electromagnet with transverse magnetic field induction of 4.5 × 10⁵ A/m at a current of 5000 A provides a radiation power of 80 kW. During the time of glow, the plasma source radiates 17.5 kJ. The spectral distribution of radiation energy is close to that of blackbody at T = 5500 K.     

Optical heterodyne arrangement with a two-frequency radiation source for mechanical vibration measurements

Conclusions An experimental model of an optical heterodyne arrangement has been developed and fabricated for the measurement of mechanical vibrations having a complicated form. The metrological characteristics of the arrangement were determined experimentally. The relative measuring error for the velocity of harmonic vibrations over the range from 0.2 to 20 mm/sec, referred to the upper limit, is 1.2%. The arrangement can reproduce an analog of mechanical vibrations having a complicated form with a dynamic error of no more than 4%.Translated from Izmeritel'naya Tekhnika, No. 9, pp. 39–41, September, 1973.     

Tunable green laser source based on frequency mixing of pump and laser radiation from a Nd:YVO4 crystal operating at 1342 nm with an intracavity KTP crystal

We report on cw tunable green laser light generation from a Nd:YVO4 laser operating at 1342 nm. Visible radiation was produced by a frequency mixing of pump and laser radiation inside an intracavity KTP crystal. When Nd:YVO4 was diode pumped, green laser was tunable from 503 to 505 nm. The green tuning range increases up to 22 nm when a Ti:sapphire laser is used as the pump source. In nonoptimal conditions, and for a pump power of 650 mW, green power was above 3 mW and close to 0.1 mW for Ti:sapphire and diode pumping, respectively.     

制氩系统的停运对主塔精馏工况的影响

结合因粗氩塔停运而导致主塔精馏工况恶化的一次故障,分析了停运粗氩塔时主塔精馏工况的变化情况,提出了停运制氩系统时的操作原则。     

Excitation of a dielectric cylinder by a point source of radiation

The excitation of a layered dielectric cylinder by a point source is investigated. A procedure is described for representing the solutions of diffraction problems in terms of fractional Bessel and related functions (so-called cylinder functions) suitable for numerical calculations. Far-field diffraction patterns are calculated for cylinders of large radius. Translated from Izmeritel'naya Tekhnika, No. 3, pp. 43–46, March, 1996.     

建立一种准确测定氢气、氖气和氩气三元混合气含量的方法

介绍利用热导气相色谱分析仪测定氢气、氖气和氩气三元混合气中各组分含量的分析方法,试验结果计算表明,该分析方法能够满足电子芯片保护气产品质量检测的要求。     

The effect of a UV preionization pulse on short-wave radiation output from a laser-produced-plasma source with a Xe gas-jet target

Experiments aimed to raise the emissivity of a laser-produced plasma source with a Xe gas target in the far-UV spectral range are described. In these experiments, the main pulse of the IR Nd:YAG laser was preceded by a pre-ionization pulse of a UV KrF excimer laser. The consequences of applying the prepulse and its influence on the short-wavelength emission intensity were traced up to main-pulse delays of about 5 μs with respect to the prepulse. It is supposed that the main mechanism by which the prepulse affects the evolution of the plasma and its emission intensity is related to the density waves excited in the gas target by this pulse.     

Highly repetitive, extreme-ultraviolet radiation source based on a gas-discharge plasma.

An extreme-ultraviolet (EUV) radiation source near the 13-nm wavelength generated in a small (1.1 J) pinch plasma is presented. The ignition of the plasma occurs in a pseudosparklike electrode geometry, which allows for omitting a switch between the storage capacity and the electrode system and for low inductive coupling of the electrically stored energy to the plasma. Thus energies of only a few joules are sufficient to create current pulses in the range of several kiloamperes, which lead to a compression and a heating of the plasmas to electron densities of more than 10(17) cm(-3) and temperatures of several tens of electron volts, which is necessary for emission in the EUV range. As an example, the emission spectrum of an oxygen plasma in the 11-18-nm range is presented. Transitions of beryllium- and lithium-like oxygen ions can be identified. Current waveform and time-resolved measurements of the EUV emission are discussed. In initial experiments a repetitive operation at nearly 0.2 kHz could be demonstrated. Additionally, the broadband emission of a xenon plasma generated in a 2.2-J discharge is presented.