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1.
We have studied 5 MeV Au2+ ion implantation with fluences between 7 × 107 and 2 × 108 cm 2 in Si by deep level transient spectroscopy (DLTS) and scanning capacitance microscopy (SCM). The DLTS measurements show formation of electrically active defects such as the two negative charge states of the divacancy (V2(/–) and V2(–/0)) and the vacancy–oxygen (VO) center. It is observed that the intensity of the V2(/–) peak is lower compared to that of V2(–/0) by a factor of 5. This has been attributed to a highly localized distribution of the defects along the ion tracks, which results in trapping of the carriers at V2(–/0) and incomplete occupancy of V2(/–). The SCM measurements obtained in a plan view show a random pattern of regions with a reduced SCM signal for the samples implanted with fluence above 2 × 108 cm 2. The reduced SCM signal is attributed to extra charges associated with acceptor states, such as V2(–/0), formed along the ion tracks in the bulk Si. Indeed, the electron emission rate from the V2(–/0) state is in the range of 10 kHz at room temperature, which is well below the probing frequency of the SCM measurements, resulting in “freezing” of electrons at V2(–/0).  相似文献   

2.
《Thin solid films》2006,515(2):509-512
Silicon nitride (Si3N4) is an important insulator, frequently used in VLSI technology and for encapsulation. Conventionally it is prepared by low pressure and plasma-enhanced chemical vapour deposition, but may also be successfully deposited by RF sputtering. In the present work the sputtering process was characterised, together with some measurements on the high-field DC electrical properties in sandwich samples with Au electrodes. Films were Ar-sputtered using a Si3N4 sputtering target at gas pressures up to 2.12 Pa and RF discharge powers of 60–200 W. The deposition rate R was in the range 0.03–0.19 nm s 1 and was directly proportional to the discharge power and varied linearly with the pressure. Au electrodes formed sandwich structures with thicknesses of 50 nm–1 μm. Conductivity was essentially ohmic below 300 nm, while for the thicker films space-charge limited conductivity, dominated by an exponential distribution of traps, was observed. A mobility value of μ = 2.89 × 10 6 m2 V 1 s 1 was derived from temperature measurements, and further analysis of the JV data indicated a thermally generated electron concentration of 3.23 × 1019 m 3 and a trap concentration of 1.57 × 1024 m 3. It was concluded that this method is suitable for the deposition of thin films, which have similar electrical properties to those prepared by chemical vapour deposition methods.  相似文献   

3.
A novel low-temperature (600–850 °C), chemical vapor deposition method, involving a simple reaction between disiloxane (H3Si–O–SiH3) and ammonia (NH3), is described to deposit stoichiometric, Si2N2O, and non-stoichiometric, SiOxNy, silicon oxynitride films (5–500 nm) on Si substrates. Note, the gaseous reactants are free from carbon and other undesirable contaminants. The deposition of Si2N2O on Si (with (1 0 0) orientation and a native oxide layer of 1 nm) was conducted at a pressure of 2 Torr and at extremely high rates of 20–30 nm min−1 with complete hydrogen elimination. The deposition rate of SiOxNy on highly-doped Si (with (1 1 1) orientation but without native oxide) at 10−6 Torr was ∼1.5 nm min−1, and achieved via the reaction of disiloxane with N atoms, generated by an RF source in an MBE chamber. The phase, composition and structure of the oxynitride films were characterized by a variety of analytical techniques. The hardness of Si2N2O, and the capacitance–voltage (CV) as a function of frequency and leakage current density–voltage (JLV) characteristics were determined on MOS (Al/Si2N2O/SiO/p-Si) structures. The hardness, frequency-dispersionless dielectric permittivity (K), and JL at 6 V for a 20 nm Si2N2O film were determined to be 18 GPa, 6 and 0.05–0.1 nA cm−2, respectively.  相似文献   

4.
《Materials Letters》2007,61(14-15):3030-3036
Transparent conducting thin films of F:SnO2 have been deposited onto preheated glass substrates by a spray pyrolysis technique using pentahydrate stannic chloride (SnCl4·5H2O) and ammonium fluoride (NH4F) as precursors and mixture of water and propane-2-ol as solvent. The concentration of SnCl4·5H2O and NH4F is kept fixed and the ratio of water and propane-2-ol solvent in the spraying solution is varied. A fine spray of the source solution using air as a carrier gas has grown films of thickness up to 995 nm. Optical absorption, X-ray diffraction, Van der Pauw technique for measurement of a sheet resistance and Hall effect measurements at room temperature for determination of carrier density and conductivity have been used. The as-deposited films are of polycrystalline SnO2 with a tetragonal crystal structure and are preferentially having orientation along the (200) direction with texture coefficient as high as 6.16. The average grain size for the as-deposited sample is found to be of the order of 44 nm. The films have moderate optical transmission (up to 70–85% at 550 nm). The figure of merit (ϕ) values vary from 1.95 · 10 3 to 35.68 · 10 3 Ω 1. The films are heavily doped, degenerate and exhibit n-type electrical conductivity. The lowest sheet resistance (Rs) for the optimized sample is 5.1 Ω. The films have a resistivity of 5.43 · 10 4 Ω cm and mobility around 7.38 cm2 V 1 s 1.  相似文献   

5.
《Materials Letters》2006,60(17-18):2148-2152
The present paper reports the measurements on space charge limited conduction in bulk glassy Se100  xSbx (x = 2, 4, 6, 8). IV characteristics have been measured at various fixed temperatures. These characteristics show that, at low electric fields, an ohmic behaviour is observed. However, at high electric fields (E ∼104 V/cm), the current becomes superohmic.At high fields (104 V/cm), current could be fitted to the theory of space charge limited conduction in case of uniform distribution of localized states in the mobility gap of these materials. Using the theory of SCLC for the uniform distribution of the traps, the density of localized states near Fermi level is also calculated. Density of localized states initially increases with Sb concentration till 6 at.% of Sb and then decreases with further increase of Sb. This decrease is explained in terms of average coordination number.  相似文献   

6.
《Materials Letters》2007,61(11-12):2170-2172
Compression behaviour and micro-structure evaluation of Zr57Nb5Cu15.4Ni12.6Al10 bulk metallic glass is investigated at room temperature up to 32.8 GPa using in-situ high pressure energy dispersive X-ray diffraction with a synchrotron radiation source. The equation of state of the bulk metallic glass is − ΔV / V = 0.012P  2.49 × 10 4P2  9.5 × 10 7P3 + 5.02 × 10 8P4. The result shows that the nearest atom pair of the as-quenched bulk metallic glass corresponds to Zr–Zr correlations. And with pressure increasing, the nearest atom pair changes to a new one at 32.8 GPa.  相似文献   

7.
《Materials Research Bulletin》2006,41(7):1392-1402
In situ high temperature X-ray diffraction (HTXRD) studies on monoclinic silicalite-1 (S-1, silica polymorph of ZSM-5) and an orthorhombic metallosilicate molecular sieve, zirconium silicalite-1 (ZrS-1) with MFI structure (Si/Zr = 50) have been carried out using a laboratory X-ray diffractometer with an Anton Parr HTK 1600 attachment. While the structure of the S-1 collapsed at 1123 K forming α-cristobalite. S-1 and ZrS-1 showed a complex thermal expansion behavior in the temperature range 298–1023 K, ZrS-1 was stable. Powder X-ray diffraction (PXRD) data taken in this region have shown strong negative lattice thermal expansion coefficient, αV = −6.75 × 10−6 and −17.92 × 10−6 K−1 in the temperature range 298–1023 K−1 for S-1 and ZrS-1 samples, respectively. The thermal expansion behavior of S-1 and ZrS-1 is anisotropic, with the relative strength of contraction along a axis is more than that along b and c axes. Three different thermal expansion regions could be identified in the overall temperature range (298–1023 K) studied, corroborating with the three steps of weight loss in the TG curve of ZrS-1 sample. While the region between 298 and 423 K, displays positive thermal expansion coefficient with αV = 2.647 × 10−6 and 4.24 × 10−6 K−1, the second region between 423 and 873 K shows strong negative thermal expansion (NTE) coefficient αV = −7.602 × 10−6 and −15.04 × 10−6 K−1, respectively, for S-1 and ZrS-1 samples. The region between 873 and 1023 K, shows a very strong NTE coefficient with αV = −12.08 × 10−6 and −45.622 × 10−6 K−1 for S-1 and ZrS-1, respectively, which is the highest in the whole temperature range studied. NTE seen over a temperature range 298–1023 K could be associated with transverse vibrations of bridging oxygen atoms in the structure which results in an apparent shortening of the Si–O distances.  相似文献   

8.
《Thin solid films》2006,494(1-2):92-97
Nanocrystalline diamond/amorphous carbon (NCD/a-C) composite thin films have been deposited by microwave plasma chemical vapour deposition from methane-rich CH4/N2 mixtures. The films have been thoroughly characterized with respect to basic properties such as growth rates, morphology and structure, composition, crystallinity, and bonding environment. They consist of diamond nanocrystals with diameters of 3–5 nm, which are embedded in an amorphous carbon matrix. Further studies are aimed at application relevant properties. I/V and Hall measurements showed that the films are p-type conductive with a resistitivity of 0.14 Ω cm, a carrier concentration of 1.9 × 1017 cm 3, and a carrier mobility of 250 cm2/Vs. Reflection, scattering and ellipsometric measurements revealed a refractive index of 1.95–2.1 in the visible region and an rather high extinction coefficient of about 0.14 at 400 nm. The films possess a hardness of ca. 40 GPa and a Young's modulus of ca. 390 GPa. Nano tribo test and nano scratch tests proved a low friction coefficient, and a strong protective effect and good adhesion on silicon substrates. First biomedical tests showed that the films are not cytotoxic but bioinert. Finally, the deposition of multilayers nano/polycrystalline diamond with improved properties is demonstrated.  相似文献   

9.
Tm3+/Al3+ co-doped silica glass was prepared by sol–gel method combined with high temperature sintering. Glasses with compositions of xTm2O3–15xAl2O3–(100  16x) SiO2 (in mol%, x = 0.1, 0.3, 0.5, 0.8 and 1.0) were prepared. The high thulium doped silica glass was realized. Their spectroscopic parameters were calculated and analyzed by Judd–Ofelt theory. Large absorption cross section (4.65 × 10−21 cm2 at 1668 nm) and stimulated emission cross section (6.00 × 10−21 cm2 at 1812 nm), as well as low hydroxyl content (0.180 cm−1), long fluorescence lifetime (834 μs at 1800 nm), large σem × τrad (30.05 × 10−21 cm2 ms) and large relative intensity ratio of the 1.8 μm (3F4  3H6) to 1.46 (3H4  3F4) emissions (90.33) are achieved in this Tm3+/Al3+ co-doped silica glasses. According to emission characteristics, the optimum thulium doping concentration is around 0.8 mol%. The cross relaxation (CR) between ground and excited states of Tm3+ ions was used to explain the optimum thulium doping concentration. These results suggest that the sol–gel method is an effective way to prepare Tm3+ doped silica glass with high Tm3+ doping and prospective spectroscopic properties.  相似文献   

10.
《Materials Research Bulletin》2006,41(9):1612-1621
The simultaneous thermal decomposition and nitridation of [VO(NH2O)2Gly]·H2O complex in NH3 atmosphere at 723–973 K gives the nanocrystalline vanadium nitride (VN) having crystallite size of 8–32 nm. It shows cubic NaCl structure with lattice parameter of a = 4.137 nm. XRD pattern Rietveld analysis program for crystal structure of VN shows the space group-Fm3m. The particle sizes measured by BET and SEM techniques are in the range of 26–100 nm. The particles are spherical and distributed homogeneously and found larger than XRD crystallite size because of agglomeration of crystallites. The fundamental IR absorption of VN material is found at 995 cm−1 which gives the force constant of 634.3 Nm−1. The electrical resistivity and magnetic studies show the superconducting to normal transition (Tc) at 9.2 K. Thermal decomposition of VN is carried out in O2 atmosphere which goes through the formation of an oxynitride (V–Np–Oq) intermediate phase up to 913 K. Finally, nanocrystalline V2O5 is formed at 973 K. The V2O5 has orthorhombic structure with lattice parameters of a = 11.537, b = 3.568 and c = 4.380 Å and the XRD crystallite size of 10 nm.  相似文献   

11.
The application of a hybrid PAni–V2O5 cathode material in reversible lithium electrochemical cells is reported. We have studied the influence of synthesis conditions and subsequent treatments of the hybrid under oxygen in order to optimize its performance as a lithium-insertion cathode. The temperature and length of this treatment is a key parameter in determining the final specific charge of the cathode. The optimal material yielded a specific charge as high as 302 A h kg–1 measured at low discharge rate (C/48) corresponding to the insertion of 2.72 lithium ions per formula unit (C6H4N)0.6V2O5–0.3H2O). Higher scan rates of C/12 lead to specific capacities of 200 A h kg−1. The thermal and electrochemical stability of the hybrid, especially in relation to the decomposition of the organic polymer and their effect on battery performance and cyclability are also discussed.  相似文献   

12.
Electrochemical oxidation of diethylenetriamine (DETA) charged with 0.1 M LiSO3CF3, leads to a polymeric coating (polyethyleneimine film: PEI) on the porous silicon (PS) surface. The obtained passivated electrode is characterized through IRTF spectrometry and through C(V) curves on PS/PEI structures showing good insulating properties of the PEI film. The passivated electrode presents a linear pH sensitivity close to 62 mV per pH unit. Such sensitivity is higher compared to flat PEI passivated silicon electrode. The results were fitted with the generalized site-binding theory and the following parameters were found: the surface site density Ns was found to be equal to 3.6 × 1016 cm 2 and pKH (KH acido-basic constant of the amino group) is − 5.54.  相似文献   

13.
《Optical Materials》2008,30(12):1635-1639
Novel pure and cobalt-doped magnesium borate crystals (Mg3B2O6) have been grown successfully by the Czochralski technique for the first time. Crystal growth, X-ray powder diffraction (XRD) analysis, absorption spectrum, fluorescence spectrum as well as fluorescence decay curve of Co2+:Mg3B2O6 (MBO) were described. From the absorption peaks for the octahedral Co2+ ions, the crystal-field parameter Dq and the Racah parameter B were estimated to be 943.3 cm−1 and 821.6 cm−1, respectively. The fluorescence lifetime of the transition 4T1(4P)  4T2 centered at 717 nm was measured to be 9.68 ms.  相似文献   

14.
《Optical Materials》2014,36(12):2425-2428
We report the temperature influence on the voltage-controlled diffractive property of Mn-doped potassium sodium tantalate niobate crystal. The crystal was grown by the top seeded solution growth method. Its quadratic electro-optic coefficients achieved as high as R11 = 3.50 × 10−15 m2/V2 and R12 = −0.44 × 10−15 m2/V2 near the Curie temperature, while they declined with the increasing temperature. The external electric field which correspond to the maximum diffraction efficiency of photorefractive grating moved from 166 V/mm to 512 V/mm as the temperature increased from 25 °C to 32.5 °C. The maximum diffraction efficiencies all reached the maximum value of 60% at different temperatures. The results were discussed and compared with the theoretical equations.  相似文献   

15.
《Optical Materials》2014,36(12):2400-2404
Erbium doped tellurite glasses (TeO2 + Li2O + TiO2) were prepared by conventional melt-quenching method to study the influence of the Er3+ concentration on the luminescence quantum efficiency (η) at 1.5 μm. Absorption and luminescence data were used to characterize the samples, and the η parameter was measured using the well-known thermal lens spectroscopy. For low Er3+ concentration, the measured values are around 76%, and the concentration behavior of η shows Er–Er and Er–OH interactions, which agreed with the measured lifetime values.  相似文献   

16.
There have been studied single crystals of undoped and doped Bi12TiO20 with two concentrations of W5+ (2.62 × 1017 cm−3 and 2.62 × 1018 cm−3). There have been obtained absorption spectra in the energy range of 10,482–15,408 cm−1 by classical measurements. There have been determined the cross-section (σa) of the impurity absorption and the oscillator strength of dd transitions. There have been calculated the refractive index of doped crystals and the concentration of Ti3+ ions in an undoped sample through an experiment.  相似文献   

17.
《Materials Letters》2007,61(11-12):2460-2463
Ga-doped zinc oxide (ZnO:Ga) transparent conductive films with highly (002)-preferred orientation were deposited on glass substrates by DC reactive magnetron sputtering method in Ar + O2 ambience with different Ar/O2 ratios. The structural, electrical, and optical properties were investigated by X-ray diffraction, Hall measurement, and optical transmission spectroscopy. The resistivity and optical transmittance of the ZnO:Ga thin films are of the order of 10 4 Ω cm and over 85%, respectively. The lowest electrical resistivity of the film is found to be about 3.58 × 10 4 Ω cm. The influences of Ar/O2 gas ratios on the resistivity, Hall mobility, and carrier concentration were analyzed.  相似文献   

18.
《Materials Research Bulletin》2006,41(10):1835-1844
(C2N2H10)[FexV1−x(HPO3)F3] (x = 0.44, 0.72) have been synthesized using mild solvothermal conditions under autogenous pressure and the ethylenediamine molecule as templating agent. The crystal structures have been determined from X-ray single-crystal diffraction data. The compounds crystallize in the orthorhombic P212121 space group with Z = 4 and unit-cell parameters a = 12.8494(9), b = 9.5430(6), c = 6.4372(5) Å, and a = 12.8578(1), b = 9.5342(1), c = 6.4370(7) Å for (C2N2H10)[Fe0.44V0.56(HPO3)F3] and (C2N2H10)[Fe0.72V0.28(HPO3)F3], (1) and (2), respectively. These isostructural compounds exhibit a monodimensional crystal structure formed by pillared double anionic chains with the formula [M(HPO3)F3]2−, extended along the [0 0 1] direction. These doubled ionic chains are the result of the linking of two simple chains in which there are alternating octahedral [MO3F3] and tetrahedral groups [HPO3]. The ethylendiammonium cations are placed in the space delimited by three different chains. The metallic ions are interconnected by the pseudo-pyramidal (HPO3)2− phosphite oxoanions, adopting a slightly distorted octahedral geometry. The IR spectra show bands corresponding to the phosphite oxoanion and the ethylendiamonium cation at 2400 and 1600 cm−1, respectively. The thermogravimetric analyses show that these phases are stable up to ca. 280 °C, at higher temperatures, the decomposition of the crystal structure begins by calcination of the organic cation and the elimination of the fluoride anions. The diffuse reflectance spectra show bands of the V3+ ion (d2) in octahedral symmetry. The values of the Dq (1540, 1540 cm−1), and Racah parameters, B (560, 535 cm−1) and C (3055, 3140 cm−1) for (1) and (2), respectively, correspond with those usually found for octahedrically coordinated V(III) compounds. Magnetic measurements, performed on a powered sample from 5.0 to 300 K at 1000 G, in the ZFC and FC modes, indicate the existence of antiferromagnetic interactions.  相似文献   

19.
The temperature dependent transport properties of molybdenum oxide (MoO3) doped N,N′-di(1-naphthyl)-N,N′-diphenylbenzidin (α-NPD) were studied over a frequency range of 100 Hz to 1 MHz. The value of trap density and mobility calculated by detailed analysis of current–voltage (IV) characteristics are 9.43 × 1026 m?3 and 1.23 × 10?6 cm2 V?1 s?1, respectively. The relaxation time for the carriers in the bulk and in the interface region decreases with temperature. The Cole–Cole plot indicates the device can be modeled as the combination of two parallel resistor–capacitor (RC) circuits with a series resistance of around 70 Ω. The dc conductivity shows two different regions in the studied temperature range with activation energy of Ea  0.107 eV (region I) and Ea  52 meV (region II), respectively. The ac conductivity follows the universal power law and the onset frequency increases with increase of temperature. The temperature dependent conduction mechanism can be explained by correlated hopping barrier (CBH) model.  相似文献   

20.
Ti–45Al–2Cr–2Nb alloy was directionally solidified at different growth rates varying from 0.2 to 1.2 mm/min by applying an electromagnetic cold crucible directional solidification technique. It was determined that well-aligned α2 (Ti3Al)/γ(TiAl) lamellar structures, B2 phase and blocky γ phase were generated in columnar grains. The interlamellar spacing (λ) decreases with the increasing growth rate (V) according to the relationship λ  V 0.48, but the volume fraction of B2 is increased as growth rate is increasing. Results of uniaxial tensile tests show that the B2 phase and the blocky γ phase have significant influence on tensile failure when they are presented in the matrix of α2/γ lamellar structures, because they are usually employed to act as cracking sources during the tension process.  相似文献   

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