Fabrication of metallic micromirror using electroplating technology

A nickel micromirror array was designed and successfully fabricated using a thick photoresist as a sacrificial layer and as a mold for nickel electroplating. It was composed of two address electrodes, two support posts and a nickel mirror plate. The mirror plate, which is supported by two nickel posts, is overhung about 10???m from the silicon substrate. The nickel mirror plate is actuated by an electrostatic force generated by electrostatic potential difference applied between the mirror plate and the address electrode. Optimized fabrication processes have been developed to reduce residual stress in mirror plate and prevent contact between the mirror plate and the substrate, which ensure a reasonable flat and smooth micromirror for operation at low actuation voltage.     

Piston-motion micromirror based on electrowetting of liquid metals

This paper reports a new actuating method of a micromirror with piston motion by the electrowetting effect. Liquid metals drops (LMD), gallium and mercury, instead of conventional electrolyte solution, are used in the electrowetting experiments to reduce the vapor pressure and to increase the conductivity. An approximate formula of LMD height changes versus actuated voltage is deduced and the electrowetting setup is improved for actuating the mirror. The actuating performance of the LMD as a pivot is investigated. The hysteresis of contact angle is effectively minimized with argon sputtering the surface of the insulating layer, which makes the deformation of the LMD highly repeatable. The frequency response (0.01 Hz-3 kHz) and 6 vibration modes of the mercury drop are observed. The maximum acceleration of the drop during the actuation is 300 g (g=9/spl middot/8 m/s/sup 2/). We fabricated a 1000 /spl mu/m/spl times/1000 /spl mu/m/spl times/20 /spl mu/m, 50 /spl mu/g micromirror and an actuating circuit based on the electrowetting of liquid metal. With the LMD confine spot, a mercury drop of 500 /spl mu/m in diameter is placed between the mirror and the actuating electrodes. A 440-Hz sinusoidal voltage of 75 V actuates the micromirror, with a maximum of 60 /spl mu/m displacement.     

Fabrication of metallic micromirror using electroplating technology

A nickel micromirror array was designed and successfully fabricated using a thick photoresist as a sacrificial layer and as a mold for nickel electroplating. It was composed of two address electrodes, two support posts and a nickel mirror plate. The mirror plate, which is supported by two nickel posts, is overhung about 10 μm from the silicon substrate. The nickel mirror plate is actuated by an electrostatic force generated by electrostatic potential difference applied between the mirror plate and the address electrode. Optimized fabrication processes have been developed to reduce residual stress in mirror plate and prevent contact between the mirror plate and the substrate, which ensure a reasonable flat and smooth micromirror for operation at low actuation voltage.

     

基于SOA技术的新型标准文献服务管理系统研发

在全面分析我国企业标准文献管理工作现状和存在问题的基础上,应用SOA和Web Service技术成功研发了新型标准文献服务管理系统,实现了标准题录检索、标准文献传送、标准跟踪等多项特色功能,并在多家标准化技术机构推广应用,显著提升了标准文献服务的有效性和工作效率。研究表明,SOA技术可成功应用于标准文献服务管理系统,为企业和社会提供更快捷高效的知识服务。     

表面缺陷检测的机器视觉技术研究进展

物体表面缺陷检测技术是工业质检领域的一项重大课题,对工业生产有着重要的意义。针对近些年基于机器视觉的表面缺陷检测技术进行梳理总结。首先,列举了几种缺陷检测在工业领域的应用场景;其次从特征提取和分类算法的角度简要阐述了传统的机器视觉方法;重点探讨了缺陷检测中常用的经典神经网络结构和缺陷检测算法的最新发展,并介绍了两种常用的缺陷检测算法优化方式;最后,分析了缺陷检测领域面临的三大挑战：实时性问题、小样本问题和小目标问题,目的是为工业表面缺陷检测的研究提供有益的参考和脉络梳理。     

Development of a novel piezoresistive thin film sensor system based on hydrogenated carbon

Thin film sensor systems based on hydrogenated carbon have the advantage to combine two very important characteristics in order to be used in measurement engineering: Firstly, the sensory layer demonstrates piezoresistive behavior and secondly its good properties related to hardness and wear resistance lead in a tribologically stable system. Therefore, the thin film sensor systems can be applied into the main distribution of force within machine parts or used for universal interchangeable sensor systems, e.g. sensory washers. In this article the deposition of a self-contained thin film sensor system on a large technical component (spindle shaft) is shown. The spindle shaft with a length of 480 mm and an outer diameter of 90 mm is part of a belt driven machining spindle for planing machines in woodworking industries. In order to establish a measurement system, which allows monitoring the clamping force of the tool holder and the imbalance of the mounted tool, the thin film sensor system was directly applied to the front surface of the spindle shaft. For this application a novel self-contained thin film sensor system was developed, which consists of an alumina layer for electrical isolation, a chromium layer to establish internal sensor electrodes, a piezoresistive hydrogenated carbon layer (1 μm) and a second covering wear resistance and insulation layer (silicon and oxygen modified carbon layer). The piezoresistive sensor layer and the top layer are part of the diamond like carbon layer family (Robertson, Diam Relat Mater 12:79–84, 2003; Bewilogua et al. DLC based coatings for tribological applications, pp. 67–75, 2006; Biehl et al. Thin Solid Films 515(3):1171–1175, 2006, Novel measurement and monitoring system for forming processes based on piezoresistive thin film systems. Springer Verlag, pp. 879–883, 2010).     

Fabrication of a rotary micromirror for fiber-optic switching

The implementation of all-optical telecommunication networks requires more efficient optical-to-optical wavelength routing devices to replace the conventional optical-to-electrical cross connects. In this paper, we demonstrate a novel rotary micromirror for directly fiber-optic switching. To fabricate this electrostatically actuated rotary micromirror, a very simple micromachining process has been developed using SOI wafer and DRIE technology. Based on this one-mask process, all the components for an NxN cross-connect with 2N-switch-architecture can be fabricated on a monolithic silicon substrate, including the optic fiber couplers, electrostatic comb drives and reflective vertical mirror arrays.     

用相移干涉法测量表面三维轮廓的研究

简要地介绍了以白光干涉理论为基础 ,利用相移干涉法进行表面三维轮廓测量的原理与系统的构成 ,重点讨论了用计算机实现用白光相移干涉法测量表面三维轮廓的算法和数据处理的过程     

Electrocapillary piston motion and a prototype of phase-manipulating micromirror

In this paper, we study the piston motion of a mercury droplet that is confined in a metal-plated microhole. This droplet is actuated by the electrocapillary effect and large displacements of up to 210 /spl mu/m are achieved with very low voltages (/spl sim/2 V). We use a high-speed camera (10,000 frames/s) to capture the piston motion and we find the resonance frequency is /spl sim/50 Hz. The mercury droplet geometry in equilibrium state is analyzed based on Laplace equation and volume conservation. A mathematical model is developed; it predicts that the resonant frequency of mercury droplet is 150 Hz. A prototype of piston-motion micromirror is also demonstrated in the experiment, with a frequency of 400 Hz and amplitude of /spl sim/8 /spl mu/m at 2 V.     

Development of a novel long range piezoelectric motor based on double rectangular trajectories driving

Microsystem Technologies - This paper proposes a novel stepping type piezoelectric motor that can perform long range rotational motion with high resolution. Pseudo-rigid-body method is used to...     

Light-directed,spatially addressable oxygen detection in a hydrogel microarray based on phase-based lifetime detection using a digital micromirror device

A digital light modulation system that utilizes a modified commercial digital micromirror device (DMD) projector, which is equipped with a UV LED as a light modulation source, has been developed to spatially direct excitation light toward a hydrogel microarray to detect local oxygen via phase-based phosphorescence lifetime detection. Oxygen-sensitive luminescent microspheres that were encapsulated into the hydrogel microarray were used to detect the local O₂ concentration by sequentially addressing the modulated UV light to each hydrogel microsensing element. Two different hydrogels of alginate and polyethylene glycol diacrylate (PEGDA) were used as the supporting matrices to encapsulate the oxygen-sensitive luminescent microspheres within the hydrogels as microsensing elements. By controlling the illumination pattern on the DMD, the modulated excitation light can be spatially projected to only excite the microsensing element of interest, which can significantly decrease background noise and improve sensitivity. Gaseous oxygen, dissolved oxygen (DO), and glucose sensors that monitored the DO concentrations in the presence of oxygen and oxidase enzymes were characterized using phase-based lifetime detection; the measurements were consistent with the linear Stern–Volmer relationship. In addition, the sensitivity of the alginate supporting matrix was found to be higher than that of PEGDA due to its higher oxygen permeability in the alginate matrix structures. The proposed hydrogel microarray could easily produce large-scale cell-trapped hydrogel microarray. Moreover, the proposed DMD-based digital light modulation system is especially suited to these large-scale cell-trapped hydrogel microarrays in living cell assays.     

一种垂直梳齿驱动V型梁微镜设计

设计了一种垂直梳齿驱动的V型扭转梁支撑的微镜器件.采用有限元仿真和解析方法对该器件进行了静态和动态分析.在100V直流电压下,镜面转角可达0.7°,能够满足镜而扫描所需要的起始角.同时对比了不同支撑梁结构下的前五阶模态频率以及前两阶频率比,并分析了不同梁间距以及V型梁夹角下各个参数的变化趋势,得出了使微扭转镜工作在最稳...     

基于SAW技术的新型裁判无源通信系统

利用声表面波(SAW)技术设计实现了一种用于裁判之间的无线无源联络系统.其基本原理是主裁判携带的收发器发射射频查询脉冲信号,边裁携带的用SAW器件实现的无源信号发生器接收到查询信号后,利用阻抗变化所引起的不同反射性,把由边裁控制的按钮开关的状态调制到对查询信号的反射回波上,收发器通过对接收信号的处理获得边裁的信息.这种方法与通常的无线收发机相比,信号发生器工作在无源状态,无需电池供电,同时利用声波的延迟特性,提高了抗干扰性.实验结果表明:本方法能够有效实现无源信息传输.     

A study on the coupled dynamic characteristics for a torsional micromirror

A nonlinear dynamic model of an electrostatic torsional micromirror considering the coupled effect of the torsion and vertical bending motion of its torsional beam simultaneously is presented. The effect of the vertical deformation of the mirror plate and the distributed mass of the torsion beam are also considered in this model. The validity of the model is verified by a finite element simulation with ANSYS. Undamped and damped responses of the torsional and vertical vibration of the micromirror are analyzed by the model given here. The results of the simulation indicate that this model can simulate the dynamic behaviors of the micromirror fast and accurately.     

机场场面无线传感器网络监控系统关键技术研究

针对传统的机场场面目视指挥管理模式存在的不足,提出了一种基于无线传感器网络的监控系统设计方案.对系统中无线网络定位系统和监控系统两个关键技术进行了研究,并给出了针对关键技术的研究成果.在ZigBee2006协议栈的基础上,研究无线网络通信技术,实现ZigBee模块之间的无线通信.以国内某机场为例,借助GIS技术和C#语言设计了机场场面监控界面.     

A novel gradient thermoelectric microwave power sensors based on GaAs MMIC technology

Microsystem Technologies - A novel gradient thermoelectric microwave power sensor is designed to improve the performance in this work. The thermocouples are designed with different lengths based on...     

A novel calibration approach of soft sensor based on multirate data fusion technology

In multirate chemical processes, soft sensor is commonly used for fast-rate quality estimations. As the kernel of soft sensor, modeling technique has drawn much attention from researchers. But most of the modeling methods have disadvantages of uncertain estimation errors and limited modeling capability. To these issues, soft sensor calibration is considered as an efficient alternative, which however is often ignored by researchers and the current application level is relatively low. A novel soft sensor calibration method is proposed in this paper. Under multirate sampling conditions, data fusion technology based on Kalman filter is introduced into soft sensor maintenance to integrate the soft sensor model estimations with process measurements. The performance of the algorithm is evaluated through simulations and a laboratory scale experiment. The factors that may influence the performance are also discussed in detail. The results demonstrate that the multirate Kalman filter approach is able to improve the accuracy and reliability of soft estimations, when the essential dynamics is included in the Kalman filtering model and the filter parameters are properly tuned.     

基于Haptic技术的盲人辅助路径诱导服务研制

针对盲人具有敏锐于常人的触觉资源,综合应用GPS、GIS和Haptic(震动)等技术,开发研制了一种盲人路径诱导新模式。该模式向盲人提供路口等关键节点和偏离规划路径两种情况下的差异性震动,具有抗噪声干扰、反馈及时和高有效性等优点,具有很高的使用价值。     

基于数据融合的陶瓷窑炉温度记录仪的研究

根据陶瓷窑炉的功能和技术指标要求,给出了测温系统的设计方案。设计中采用了基于算术平均值与分批估计的软件数据融合的热电偶线性化处理算法,很好地解决了系统中热电偶测温的不确定性,提高了测量精度,保证了测量数据的可靠性。同时该无纸温度记录仪,具有高测量精度、高可靠性、高稳定性、低成本的特点,通用性强。