Variable Focusing Microlens Chip for Potential Sensing Applications

A variable focusing microlens chip, which has the capability of adjusting its focal length over a wide range without any mechanical driving parts, is reported in this paper. The packaged microlens chip consists of a flexible polymer lens, a fluidic chamber, an integrated sensor, and an actuator. A thermal actuator is introduced into this variable focusing microlens to obtain relatively large actuation force and displacement. The hemispheric convex polymer lens provides an initial focal point without being actuated. The focal length change is controlled by varying the voltage applied to the thermal actuator. A 1.9-mm-diameter polymer lens is made to test the performance of the device. The focal length of this chip varies from 14.658 to 2.782 mm, which corresponds to the change of numerical aperture from 0.078 to 0.412. Based on the working mechanism and constructing method of the single lens chip, a variable focusing microlenses array has been fabricated for future testing and application. Potential sensing applications for single lens and array include cell detection and immobilization, optical sensors, lab-on-a-chip, ophthalmic lens systems, microphotonics, high throughput scanning, and confocal imaging system     

Solvent Detection and Water Monitoring With a Macroporous Silicon Field-Effect Sensor

Integration of electrical and fluidic systems for the design and fabrication of a system-on-chip (SOC) capable of sensing various liquid phase solvents is reported. A monolithic integration strategy makes use of macroporous silicon (MPS) as a gateway to interface the electrical and fluidic domains. In this application, the MPS material, acting as a sensing membrane, is used in a flow-through structure to transport an analyte from fluidic channels on one side of the chip to sensing electrodes on the other. A fluid-oxide-semiconductor interface results in the modulation of a space charge region in the semiconductor where real-time measurements are used to detect and distinguish between the presences of various solvents. The fluidic system has delivered sample volumes as small as 2 mul. Selected test solvents (i.e. acetone, ethanol, isopropyl alcohol, methanol, and toluene) have generated a measured change in capacitance up to 11%. A practical application of this sensor was demonstrated by monitoring various concentrations of isopropyl alcohol in a water supply. Undiluted samples provide characteristic responses that can be used for signature identification. The sensing device has a high degree of reusability and does not require heating or other solvent removal methods often necessitated in other sensing devices     

A Fully Electronic Label-Free DNA Sensor Chip

This paper presents a microfabricated DNA chip for fully electronic, label-free DNA recognition based on capacitance measurements. The chip has been fabricated in 0.5-mum CMOS technology and it features an array of individually addressable sensing sites consisting of pairs of gold electrodes and addressing logic. Read-out circuitry is built externally using standard components to provide increased experimental flexibility. The chip has been electrically characterized and tested with various solutions containing DNA samples. Significant capacitance variations due to DNA hybridization have been measured, thus showing that the approach represents a viable solution for a single chip DNA sensor array     

Dynamic optically reconfigurable gate array very large-scale integration with partial reconfiguration capability

We present a proposal of a partial reconfiguration architecture for optically reconfigurable gate arrays and present an 11,424 gate dynamic optically reconfigurable gate array VLSI chip that was fabricated on a 96.04 mm(2) chip using an 0.35 μm three-metal complementary metal oxide semiconductor process technology. The fabricated VLSI chip achieved a 2.21 μs partial reconfiguration.     

Electrochemical surface plasmon resonance measurement based on gold nanohole array fabricated by nanoimprinting technique

In this paper, we describe our development of an electrochemical surface plasmon resonance (EC-SPR) measurement device based on a bottom-filled gold nanohole array. The polymer based gold nanohole array was fabricated with a UV nanoimprint technique and electron beam gold deposition. Direct reflection mode measurement was used to monitor the SPR dip in the reflection spectra. A cyclic voltammogram was also operated by using the standard three electrodes containing working electrode having a gold nanohole array and counter and reference electrodes. The gold nanohole array was modified with an osmium-poly(vinylpyridine)-wired horseradish peroxidase (Os-gel-HRP) film, and its redox state induced by the change in potential was monitored simultaneously. The redox state of the local film was obtained simply by scanning the sample substrate stage. The substrate modified with Os-gel-HRP film was incorporated in a microfluidic chip, and then the hydrogen peroxide was determined in terms of the redox change in the Os complex mediator from the slope of the SPR dip shift. The linear relation of hydrogen peroxide from 10 to 250 μM was successfully monitored, and a high conversion efficiency was realized.     

Elimination of high-voltage field effects in end column electrochemical detection in capillary electrophoresis by use of on-chip microband electrodes

The influence of the separation voltage on end column electrochemical detection (EC) in capillary electrophoresis (CE) has been investigated using an electrochemical detector chip based on an array of microband electrodes. It is shown, both theoretically and experimentally, that the effect of the CE electric field on the detection can be practically eliminated, without using a decoupler, by positioning the reference electrode sufficiently close to the working electrode. In the present study, this was demonstrated by using an experimental setup in which neighboring microband electrodes on a chip, positioned 30 microns from the end of the CE capillary, were used as working and reference electrodes, respectively. The short distance (i.e., 10 microns) between the working and reference electrode ensured that both of the electrodes were very similarly affected by the presence of the CE electric field. With this experimental setup, no significant influence of the CE voltage on the peak potentials for gold oxide reduction could be seen for CE voltages up to +30 kV. The detector noise level was also found to be reduced.     

Integrated all-diamond ultramicroelectrode arrays: optimization of faradaic and capacitive currents

Integrated all-diamond ultramicroelectrode arrays (UMEAs) were fabricated using standard photolithography processes. The array consisted of typically 45 ultramicroelectrodes with a diameter of 10 μm and with a center-to-center spacing of 60 μm. The quasi-reference and counter electrodes were made from conductive diamond and were integrated on a 5 × 5 mm(2) chip. On the UMEA, a high ratio of faradaic current to capacitive current was achieved on heavily boron-doped and hydrogen-terminated diamond surfaces at slow scan rates and in high concentration of supporting electrolyte. A sensitive and reproducible detection of dopamine was achieved on hydrogen-terminated diamond UMEA at slow scan rates. The detection limit of dopamine in the presence of ascorbic acid was 1.0 nM, which is 50-100 times lower than that obtained on the macrosized boron-doped diamond electrodes. This array is promising for sensitive and reproducible detection of analytes in solutions with low detection limits.     

Multichannel microchip electrophoresis device fabricated in polycarbonate with an integrated contact conductivity sensor array

A 16-channel microfluidic chip with an integrated contact conductivity sensor array is presented. The microfluidic network consisted of 16 separation channels that were hot-embossed into polycarbonate (PC) using a high-precision micromilled metal master. All channels were 40 microm deep and 60 microm wide with an effective separation length of 40 mm. A gold (Au) sensor array was lithographically patterned onto a PC cover plate and assembled to the fluidic chip via thermal bonding in such a way that a pair of Au microelectrodes (60 microm wide with a 5 microm spacing) was incorporated into each of the 16 channels and served as independent contact conductivity detectors. The spacing between the corresponding fluidic reservoirs for each separation channel was set to 9 mm, which allowed for loading samples and buffers to all 40 reservoirs situated on the microchip in only five pipetting steps using an 8-channel pipettor. A printed circuit board (PCB) with platinum (Pt) wires was used to distribute the electrophoresis high-voltage to all reservoirs situated on the fluidic chip. Another PCB was used for collecting the conductivity signals from the patterned Au microelectrodes. The device performance was evaluated using microchip capillary zone electrophoresis (mu-CZE) of amino acid, peptide, and protein mixtures as well as oligonucleotides that were separated via microchip capillary electrochromatography (mu-CEC). The separations were performed with an electric field (E) of 90 V/cm and were completed in less than 4 min in all cases. The conductivity detection was carried out using a bipolar pulse voltage waveform with a pulse amplitude of +/-0.6 V and a frequency of 6.0 kHz. The conductivity sensor array concentration limit of detection (SNR = 3) was determined to be 7.1 microM for alanine. The separation efficiency was found to be 6.4 x 10(4), 2.0 x 10(3), 4.8 x 10(3), and 3.4 x 10(2) plates for the mu-CEC of the oligonucleotides and mu-CZE of the amino acids, peptides, and proteins, respectively, with an average channel-to-channel migration time reproducibility of 2.8%. The average resolution obtained for mu-CEC of the oligonucleotides and mu-CZE of the amino acids, peptides, and proteins was 4.6, 1.0, 0.9, and 1.0, respectively. To the best of our knowledge, this report is the first to describe a multichannel microchip electrophoresis device with integrated contact conductivity sensor array.     

Soft microelectrode linear array for scanning electrochemical microscopy

A linear array of eight individual addressable microelectrodes has been developed in order to perform high-throughput scanning electrochemical microscopy (SECM) imaging of large sample areas in contact regime. Similar to previous reports, the soft microelectrode array was fabricated by ablating microchannels on a polyethylene terephthalate (PET) film and filling them with carbon ink. Improvements have been achieved by using a 5 μm thick Parylene coating that allows for smaller working distances, as the probe was mounted with the Parylene coating facing the sample surface. Additionally, the application of a SECM holder allows scanning in contact regime with a tilted probe, reducing the topographic effects and assuring the probe bending direction. The main advantage of the soft microelectrode array is the considerable decrease in the experimental time needed for imaging large sample areas. Additionally, soft microelectrode arrays are very stable and can be used several times, since the electrode surface can be regenerated by blade cutting. Cyclic voltammograms and approach curves were recorded in order to assess the electrochemical properties of the device. An SECM image of a gold on glass chip was obtained with high resolution and sensitivity, proving the feasibility of soft microelectrode arrays to detect localized surface activity. Finite element method (FEM) simulations were performed in order to establish the effect of diffusion layer overlapping between neighboring electrodes on the respective approach curves.     

Design and fabrication of a microimpedance biosensor for bacterial detection

A biosensor for bacterial detection was developed based on microelectromechanical systems, heterobifunctional crosslinkers and immobilized antibodies. The sensor detected the change in impedance caused by the presence of bacteria immobilized on interdigitated gold electrodes and was fabricated from (100) silicon with a 2-/spl mu/m layer of thermal oxide as an insulating layer. The sensor active area is 9.6 mm/sup 2/ and consists of two interdigital gold electrode arrays measuring 0.8 /spl times/ 6 mm. Escherichia coli specific antibodies were immobilized to the oxide between the electrodes to create a biological sensing surface. The impedance across the interdigital electrodes was measured after immersing the biosensor in solution. Bacteria cells present in the sample solution attached to the antibodies and became tethered to the electrode array, thereby causing a change in measured impedance. The biosensor was able to discriminate between different cellular concentrations from 10/sup 5/ to 10/sup 7/ CFU/mL in pure culture. The sample testing process, including data acquisition, required 5 min. The design, fabrication, and testing of the biosensor is discussed along with the implications of these findings toward further biosensor development.     

Validation of a fully integrated microfluidic array device for influenza A subtype identification and sequencing

Rapid detection and identification of influenza virus is becoming increasingly important in the face of concerns over an influenza pandemic. A fully integrated and self-contained microfluidic device has been developed to rapidly identify influenza A hemagglutinin and neuraminidase subtypes and sequence portions of both genes. The device consists of a DNA microarray with 12 000 features and a microfluidic cartridge that automates the fluidic handling steps required to carry out a genotyping assay for pathogen identification and sequencing. The fully integrated microfluidic device consists of microfluidic pumps, mixers, valves, fluid channels, reagent storage chambers, and DNA microarray silicon chip. Microarray hybridization and subsequent fluidic handling and reactions were performed in this fully automated and miniature device before fluorescent image scanning of the microarray chip. A micromixing technique based on gas bubbling generated by electrochemical micropumps was developed. Low-cost check valves were implemented in the cartridge to prevent cross talk of the stored reagents. The genotyping results showed that the device identified influenza A hemagglutinin and neuraminidase subtypes and sequenced portions of both genes, demonstrating the potential of integrated microfluidic and microarray technology for multiple virus detection. The device provides a cost-effective solution to eliminate labor-intensive and time-consuming fluidic handling steps and allows the detection and identification of influenza virus in a rapid and automated fashion.     

Self-regulated, droplet-based sample chopper for microfluidic absorbance detection

Akin to optical beam chopping, we demonstrate that formation and routing of aqueous droplets in oil can chop a fluidic sample to permit phase sensitive detection. This hand-operated microfluidic sample chopper (μChopper) greatly reduces the detection limit of molecular absorbance in a 27 μm optical path. With direct dependence on path length, absorbance is fundamentally incompatible with microfluidics. While other microfluidic absorbance approaches use complex additions to fabrication, such as fiber coupling and increased optical paths, this self-regulated μChopper uses opposing droplet generators to passively alternate sample and reference droplets at ~10 Hz each. Each droplet's identity is automatically locked-in to its generator, allowing downstream lock-in analysis to nearly eliminate large signal drift or 1/f noise. With a lock-in time constant of 1.9 s and total interrogated volume of 59 nL (122 droplets), a detection limit of 3.0 × 10(-4) absorbance units or 500 nM bromophenol blue (BPB) (29 fmol) was achieved using only an optical microscope and a standard, single-depth (27 μm) microfluidic device. The system was further applied to nanoliter pH sensing and validated with a spectrophotometer. The μChopper represents a fluidic analog to an optical beam chopper, and the self-regulated sample/reference droplet alternation promotes ease of use.     

A microfabricated biosensor for detecting foodborne bioterrorism agents

A biosensor for the detection of pathogenic bacteria was developed for biosecurity applications. The sensor was fabricated using photolithography and incorporates heterobifunctional crosslinkers and immobilized antibodies. The sensor detected the change in impedance caused by the presence of bacteria immobilized on interdigitated gold electrodes and was fabricated from (100) silicon with a 2-/spl mu/m layer of thermal oxide as an insulating layer. The sensor has a large active area of 9.6 mm/sup 2/ and consists of two interdigital gold electrode arrays each measuring 0.8 /spl times/ 6 mm. Pathogenic Escherichia coli and Salmonella infantis were tested in serially diluted pure culture. Analyte specific antibodies were immobilized to the oxide between the electrodes to create a biological sensing surface. After immersing the biosensor in solution, the impedance across the interdigital electrodes was measured. Bacteria cells present in the sample solution attached to the antibodies and became tethered to the electrode array thereby causing a change in measured impedance. The biosensor was able to discriminate between different cellular concentrations from 10/sup 4/ - 10/sup 7/ CFU/mL (colony-forming units per milliliter) in solution. The sample testing process, including data acquisition, required 5 min. The design, fabrication, and testing of the biosensor is discussed along with the implications of these findings toward further biosensor development.     

Characterization of Integrated Tin Oxide Gas Sensors With Metal Additives and Ion Implantations

Post-treatment of the sensing film in tin oxide gas sensor arrays is widely used to improve the selectivity in gas recognition applications. This letter describes the characterization study of an integrated tin oxide gas sensor array chip in which the sensing films are modified using metal additives and ion implantations. Measurement results reveal that metal additives present a higher impact on the sensor sensitivity compared with ion implantations. The latter has no significant effect on the sensing properties. The drift is increased for the sensors with only ion implantation compared with the ones with metal additives. An array combining both post-treatment techniques is expected to improve the overall recognition performance.     

On-chip microfluidic transport and mixing using electrowetting and incorporation of sensing functions

An integrated system was developed that performs microfluidic transport, mixing, and sensing on a single chip. The operation principle for the microfluidic transport was based on electrowetting. A solution to be transported was confined in a space between a row of gold working electrodes and a protruding poly(dimethylsiloxane) (PDMS) structure. When a negative potential was applied to one of the gold working electrodes, it became hydrophilic, and the solution was transported through the flow channel. The solution could be transported in any desired direction in a network of flow channels by switching on necessary electrodes one by one. Furthermore, two solutions transported through two flow channels could be mixed using a mixing electrode based on the same principle. To demonstrate the applicability of a lab-on-a-chip, an air gap ammonia electrode was integrated by taking advantage of the open structure of the flow channel. Gaseous ammonia that was produced after pH adjustment and diffused through an air gap caused a pH change in the electrolyte layer, which was measured with an iridium oxide pH indicator electrode. The 90% response time was less than 1 min for the millimolar order of ammonia. The calibration curve was linear down to 10 microM. The ammonia-sensing system was also applied to construct biosensing systems for urea and creatinine. A linear relationship was observed between the potential and the logarithm of the concentration of the analytes down to 50 microM for both urea and creatinine. The developed microfluidic system can be a basic building block for future systems.     

Chip cleaning and regeneration for electrochemical sensor arrays

Sensing systems based on electrochemical detection have generated great interest because electronic readout may replace conventional optical readout in microarray. Moreover, they offer the possibility to avoid labelling for target molecules. A typical electrochemical array consists of many sensing sites. An ideal micro-fabricated sensor-chip should have the same measured values for all the equivalent sensing sites (or spots). To achieve high reliability in electrochemical measurements, high quality in functionalization of the electrodes surface is essential. Molecular probes are often immobilized by using alkanethiols onto gold electrodes. Applying effective cleaning methods on the chip is a fundamental requirement for the formation of densely-packed and stable self-assembly monolayers. However, the available well-known techniques for chip cleaning may not be so reliable. Furthermore, it could be necessary to recycle the chip for reuse. Also in this case, an effective recycling technique is required to re-obtain well cleaned sensing surfaces on the chip. This paper presents experimental results on the efficacy and efficiency of the available techniques for initial cleaning and further recycling of micro-fabricated chips. Piranha, plasma, reductive and oxidative cleaning methods were applied and the obtained results were critically compared. Some interesting results were attained by using commonly considered cleaning methodologies. This study outlines oxidative electrochemical cleaning and recycling as the more efficient cleaning procedure for electrochemical based sensor arrays.     

Toward total automation of microfluidics for extraterrestial in situ analysis

Despite multiple orbiter and landed missions to extraterrestrial bodies in the solar system, including Mars and Titan, we still know relatively little about the detailed chemical composition and quantity of organics and biomolecules in those bodies. For chemical analysis on astrobiologically relevant targets such as Mars, Europa, Titan, and Enceladus, instrumentation should be extremely sensitive and capable of analyzing a broad range of organic molecules. Microchip capillary electrophoresis (μCE) with laser-induced fluorescence (LIF) detection provides this required sensitivity and targets a wide range of relevant markers but, to date, has lacked the necessary degree of automation for spaceflight applications. Here we describe a fully integrated microfluidic device capable of performing automated end-to-end analyses of amino acids by μCE with LIF detection. The device integrates an array of pneumatically actuated valves and pumps for autonomous fluidic routing with an electrophoretic channel. Operation of the device, including manipulation of liquids for sample pretreatment and electrophoretic analysis, was performed exclusively via computer control. The device was validated by mixing of laboratory standards and labeling of amino acids with Pacific Blue succinimidyl ester followed by electrophoretic analysis. To our knowledge, this is the first demonstration of completely automated end-to-end μCE analyses on a single, fully integrated microfluidic device.     

Influence of electrode material on properties of SnO2-based gas sensor

The influence of electrode material on the properties of oxide semiconductor gas sensor was studied. SnO₂ thick films were printed on top of Au and Pt electrodes on alumina substrate using screen-printing technique. The gap between the electrodes was made narrow (approx. 5 μm) to emphasize the effects, which the electrodes might have on the overall conductance and gas-sensing properties of the sensor, at different temperatures. Laser micromachining was used in the fabrication of the electrode structure with the narrow gap. Temperature-stimulated conductance measurements were carried out in different ambient atmosphere conditions in order to have information about the effects that the electrode materials have on the overall sensor conductance. Many different gases at different concentrations in synthetic air were used in the experiments. It is possible to conclude from the results that the interface between the electrode and sensing material has a very important role for the sensing mechanism of tin dioxide gas sensors.     

An addressable microelectrode array for electrochemical detection

Column and row electrodes on two different glass substrates were orthogonally arranged in order to assemble an addressable microelectrode device for the purpose of comprehensive electrochemical detection. Amperometric signal at the individual crossing point of the column and row electrodes was detected separately on the basis of redox cycling of localized electroactive species occurring between the electrodes. The addressable microelectrode device was simple and could be easily assembled; however, it comprised as many as 10 x 10 addressable detection points on a single chip. The basic electrochemical performance of the device was investigated by using the ferricyanide/ferrocyanide redox couple. Electrochemical responses at 100 individual points could be collected within 22 s. The present device was successfully used for imaging the spots of alkaline phosphatase on the array substrate. The results indicate that the device can be applied to comprehensive and high-throughput detection and imaging of biochemical species.