Nonlinear dynamic characteristics of piezoelectric bending actuators under strong applied electric field

Dynamic characteristics of piezoelectric bending actuators under low and high electric fields are studied using the asymptotic theory of nonstationary vibrations. The proposed nonlinear model predicts the changes in fundamental resonant frequencies of the piezoelectric cantilever. The predicted resonance amplitude of the tip deflections of the piezoelectric actuators, which increases with the increase in the magnitude of the electric field, well agrees with the experimental results. Additionally, the decrease in the mechanical quality factor with the increase in the electric field, the tip deflection of piezoelectric actuators near resonance frequency,and the amplitude of the tip deflection at the fundamental vibration tone under an applied electric field varying with time have also been obtained using the present model.     

A hybrid model for rate-dependent hysteresis in piezoelectric actuators

A hybrid model is proposed in this paper to describe the static nonlinear and dynamic characteristics of rate-dependent hysteresis in piezoelectric actuators. In this model, a neural network based submodel is implemented to approximate the static nonlinear characteristic of the hysteresis while a submodel with the first-order differential operators is constructed to describe the dynamic behavior of the hysteresis. In this paper, a special hysteretic operator is proposed to extract the hysteretic feature of the hysteresis. Then, an expanded input space with such special hysteretic operator is constructed. Based on the constructed expanded input space, the neural network can be implemented to approximate the hysteresis phenomenon. The submodel to describe the dynamics is a sum of the weighted first-order differential operators. Finally, the experimental results of applying the proposed method to the modeling of hysteresis in a piezoelectric actuator are also presented.     

A vibrating micro-scale CMM probe for measuring high aspect ratio structures

This paper describes the development and initial testing of a novel three-axis vibrating micro-scale co-ordinate measuring machine (micro-CMM) probe. The vibrating micro-CMM probe is designed to address the needs of micro-manufacturing industry, in particular the requirement to measure high aspect ratio micrometre sized features to nanometre accuracy. The vibrating micro-CMM probe was also designed to address the problems inherent with micrometre and nanometre scale co-ordinate measurements caused by surface interaction forces. The initial concepts were first developed using extensive computational modelling and materials analysis. Production techniques were also investigated. The result was a micro-CMM probe consisting of three flexures, instrumented with piezoelectric actuators and sensors. The micro-CMM probe is capable of controlled vibrations in three axes; an essential feature of the design that directly addresses the problems inherent with tactile CMM probe interactions with measurement surfaces on the micrometre and nanometre scale. The ability of this micro-CMM probe to accurately measure high aspect ratio features will be dependant on the aspect ratio of the stylus. Investigations have been conducted to determine the optimum dimensions of the stylus.     

ROBUST TWO‐DEGREE‐OF‐FREEDOM CONTROL OF AN ATOMIC FORCE MICROSCOPE

The performance of an atomic force microscope (AFM) is improved substantially by utilizing modern model‐based control methods in comparison to a standard proportional‐integral (PI) controlled AFM system. We present the design and implementation of a two‐degree‐of‐freedom (2DOF)‐controller to accomplish topography measurements at high scan‐rates with reduced measurement error. An H_∞‐controller operates the AFM system in a closed loop while a model‐based feedforward controller tracks the scanner to the last recorded scan‐line. Experimental results compare the actual performance of the standard PI‐controlled AFM and the 2DOF controlled system. The new controller reduces the control error considerably and enables imaging at higher speeds and at weaker tip‐sample interaction forces.     

Tracking of piezoelectric actuators with hysteresis: A nonlinear robust output regulation approach

Hysteretic characteristics commonly exist in piezoelectric actuators (PEAs) and degrade the positioning accuracy particularly in the case of low‐frequency trajectory tracking. A PEA with hysteretic characteristics is usually difficult to precisely control because the unmeasurable hysteretic force is typically generated by a complicated nonlinear dynamic model. This task can be theoretically formulated as a robust output regulation problem with a specific nonlinear and non‐autonomous exosystem. In this paper, the theoretical problem is first solved within a novel internal model architecture. With the proposed controller, the PEA is able to asymptotically track a desired reference trajectory with the robustness to plant uncertainties. The effectiveness of the design is verified by extensive experiments. Copyright © 2016 John Wiley & Sons, Ltd.     

基于稳健回归的AFM图像水平矫正算法

 AFM（Atomic Force Microscope,原子力显微镜）图像经常会出现背景倾斜或弯曲。背景倾斜的原因源于探针和样本表面的倾角或XYZ扫描仪带来的弯曲。本文将稳健的MM估计算法应用到AFM图像二维背景拟合中,消除背景的倾斜,并利用fast-s估计算法作为初始化,以缩短计算时间。实验结果表明,与传统方法相比,本方法的AFM图像水平矫正效果更好。     

压电定位系统的自抗扰控制设计

纳米定位系统中广泛采用的压电驱动器因存在非线性、多映射的迟滞特性而严重影响了纳米定位系统的定位精度.为消除迟滞对定位精度的影响,将其视为干扰,设计不基于迟滞及定位系统精确数学模型的自抗扰控制算法,利用扩张状态观测器实时估计迟滞,进而补偿其对定位精度的影响,获得了良好的定化系统控制仿真效果.仿真结果表明,自抗扰控制器能够仃效消除迟滞、提高纳米定位系统的定位精度.     

Simultaneous compensation of hysteresis and creep in a single piezoelectric actuator by open-loop control for quasi-static space active optics applications

Owing to their excellent properties piezoelectric actuators are studied as embedded elements for the quasi-statically active shape control of spatial optical mirrors. However, unwanted nonlinear effects in piezoelectric actuators, i.e., hysteresis and creep, severely limit their performance. This paper aims at developing a control methodology to compensate hysteresis and creep in a piezoelectric actuator simultaneously for quasi-static space active applications. In the methodology developed, hysteresis and creep behaviors are successively compensated by open-loop control. First, a derivative Preisach model is proposed to accurately portray the hysteresis while requiring relatively few measurements and describing the detachment between major and minor loops. The inverse derivative Preisach model is derived and inserted in open-loop to achieve hysteresis compensation. Then, the creep in the hysteresis compensated piezoelectric actuator is described by the use of a nonlinear viscoelastic model and a low pass filter is suggested to eliminate the effect of the inverse derivative Preisach model on the step reference input. To invert the creep model, the concept of “input relaxation” is implemented and an inverse multiplicative structure allows identifying the parameters of the inverse model while circumventing the difficulty of a mathematical computation. Finally, by cascading the low pass filter, the inverse model of creep and the inverse derivative Preisach model one after the other with the single piezoelectric actuator, the simultaneous compensation of hysteresis and creep is achieved. Experimental results show that in the case of step-like reference signals the hysteresis and the creep in a piezoelectric actuator can be significantly reduced at the same time. It implies that the developed methodology is effective and feasible in space active optics applications for which quasi-static distortions need to be compensated.     

Mechanical and tribological characterization of a thermally actuated MEMS cantilever

The temperature effect on the mechanical and tribological behaviors of a microelectromechanical systems cantilever is experimentally investigated using an atomic force microscope. A nonlinear variation of the bending stiffness of microcantilevers as a function of temperature is determined. The variation of the adhesion force between the tip of atomic force microscope (AFM) probe (Si₃N₄) and the microcantilever fabricated in gold is monitored at different temperatures. Using the lateral mode operation of atomic force microscope, the influence of temperature on friction coefficient between the tip of AFM probe and microcantilever is presented. Finite element analysis is used to estimate the thermal field distribution in microcantilever and the axial expansion.     

A nano-metrology system with a two-dimensional combined optical and X-ray interferometer and an atomic force microscope

A two-dimensional nano-scale measuring system utilizing a two-dimensional combined optical and X-ray interferometer (2D COXI) was developed for the standardization of measurement in the nanometer region. The system consists of a 2D COXI and an atomic force microscope (AFM). The designed, two-dimensional, flexure-stage scans and the cantilever tip probes the nano-structure of the specimen. The calibrated optical interferometers in the 2D COXI were used to measure two-dimensional nano-scale lengths. The accuracy of the optical interferometers was enhanced to enable sub-nanometer measurements. To demonstrate the nano-scale measuring system, we used it to measure the nano-scale pitches of gratings.     

Reduction of phase error between sinusoidal motions and vibration of a tube scanner during spiral scanning using an AFM

The design of a phase-locked loop (PLL)-based proportional integral (PI) controller for compensating the phase error between motions from the lateral axes of a piezoelectric tube scanner (PTS) during spiral scanning for an atomic force microscope (AFM) is proposed in this paper. Spiral motion of the PTS for scanning of material surfaces or biological samples using an AFM is achieved by applying two sinusoidal signals with a 90 degree phase-shift and of varying amplitudes to the X and Y-axes of the scanner. The phase error between the X and Y-axes positions and scanner’s vibration due to its mechanical properties increase with increasing scanning speeds which reduce the imaging performance of the AFM at high frequencies. In the proposed control scheme, a vibration compensator is used with the X and Y-PTS to damp the vibration of the PTS at its resonant frequency and the phase error between the displacements of the two lateral axes of the scanner is measured by a phase detector and a PI controller is used to reduce the error. Comparisons of experimental results for reference tracking and imaging performance with the AFM PI controller demonstrate the efficiency of the proposed control method.     

Computation of static shapes and voltages for micromachineddeformable mirrors with nonlinear electrostatic actuators

In modeling micromachined deformable mirrors with electrostatic actuators whose gap spacings are of the same order of magnitude as those of the surface deformations, it is necessary to use nonlinear models for the actuators. In this paper, we consider micromachined deformable mirrors modeled by a membrane or plate equation with nonlinear electrostatic actuator characteristics. Numerical methods for computing the mirror deformation due to given actuator voltages and the actuator voltages required for producing the desired deformations at the actuator locations are presented. The application of the proposed methods to circular deformable mirrors whose surfaces are modeled by elastic membranes is discussed in detail. Numerical results are obtained for a typical circular micromachined mirror with electrostatic actuators     

Vibration Control of a Planar Parallel Manipulator Using Piezoelectric Actuators

This paper presents an active damping control approach applied to piezoelectric actuators attached to flexible linkages of a planar parallel manipulator for the purpose of attenuation of unwanted mechanical vibrations. Lightweight linkages of parallel manipulators deform under high acceleration and deceleration, inducing unwanted vibration of linkages. Such vibration must be damped quickly to reduce settling time of the manipulator platform position and orientation. An integrated control system for a parallel manipulator is proposed to achieve precise path tracking of the platform while damping the undesirable manipulator linkage vibration. The proposed control system consists of a PD feedback control scheme for rigid body motion of the platform, and a linear velocity feedback control scheme applied to piezoelectric actuators to damp unwanted linkage vibrations. In this paper, we apply the proposed vibration suppression algorithm to two different types of piezoelectric actuators and evaluate their respective performances. The two piezoelectric actuators are (i) a PVDF layer applied to the flexible linkage and (ii) PZT actuator segments also applied to the linkage. Simulation results show that both piezoelectric actuators achieve good performance in vibration attenuation of the planar parallel manipulator. The dynamics of the planar parallel platform are selected such that the linkages have considerable flexibility, to better exhibit the effects of the vibration damping control system proposed.     

动态迟滞Hammerstein系统的改进卡尔曼状态估计

迟滞特性具有非光滑、多值映射等复杂特性.而在实际的工程中,当输入电压变化频率超过一定的范围时,迟滞的特性是随着输入频率的改变发生变化,使得整个系统的状态估计工作更复杂.本文首先提出一种新的描述动态迟滞的方法,进而描述了动态迟滞Hammerstein系统的状态空间方程,根据此系统在传统卡尔曼滤波器的基础上进行改进得到一种新的非光滑卡尔曼滤波器.最后通过仿真和实验,比较了在输入信号变化频率比较大时,用动态迟滞Hammerstein系统来描述压电陶瓷和采用静态迟滞Hammerstein系统来描述压电陶瓷的特性,非光滑卡尔曼滤波器对这两种含有噪声的模型进行滤波,结果表明由于静态迟滞Hammerstein系统的建模不能很好的描述压电陶瓷的特性,模型存在着误差,因此对系统状态估计的结果也没有用动态Hammerstein系统的误差小,从而说明当输入电压频率变化比较大时研究动态的迟滞Hammerstein模型是很有意义的.     

压电作动器的动态迟滞建模与H∞鲁棒控制

压电作动器具有率相关动态迟滞非线性特性,给传统建模和控制技术提出了挑战.本文针对压电作动器,提出了一种基于Bouc-Wen的Hammerstein率相关迟滞非线性模型,其中Bouc-Wen模型和线性动态模块分别用于描述系统的静态迟滞非线性特性和率相关特性.同时,构造了一个基于Bouc-Wen模型的迟滞补偿器,将迟滞补偿器与被控对象串联使系统线性化;并建立了不确定性系统模型,提出了一种H∞鲁棒跟踪控制方案,可以实现给定频率范围内单频率和复合频率参考信号的良好跟踪.实验结果表明,所建动态模型具有良好的泛化能力,跟踪控制相对误差小于8%,证明了所提出方法的有效性.     

基于ANN和单个三轴加速度传感器的汽车运动姿态测量

汽车车身姿态测量一直是汽车技术的关键一环。提出了一种无陀螺实时车身姿态测量方案,利用单个三轴加速度传感器通过BP人工神经网络(ANN)映射出实时车身姿态。方案巧妙地根据汽车行驶的特性作出物理模型以及算法的精简,利用神经网络的非线性函数学习和泛化推理能力,对输入的三轴加速度值进行惯性有害分量滤除和系统误差补偿然后映射输出...     

基于单神经元PID控制器的压电陶瓷控制方法

卫星地面综合测试是卫星研制过程中的重要环节,对系统功能验证及性能评估具有重要作用。传统的卫星地面综合测试系统存在研制周期长、投入较大、自动化流程不够完整、可重用性较差等不足。而北斗导航卫星地面综合测试系统采用分布式、高实时性、可配置、多主机的集成体系结构,是集计算机通讯、实时控制、实时数据处理、事后分析等功能于一体的测试系统,适用于从卫星总装集成到发射各个阶段的电气测试。通过卫星系统级的各项接口、功能、性能指标测试,表明该系统满足支持系统论证、状态确认、问题排查等测试需求,有力支撑了北斗导航卫星的成功发射和在轨运行。     

Integrated design of the feedback controller and topography estimator for atomic force microscopy

In atomic force microscopy (AFM) the force between the measurement tip and the sample is controlled in a feedback loop to prevent damage of the tip and sample during imaging, and to convert the measurement of the tip–sample force into an estimate of the sample topography. Dynamical uncertainties of the system limit the achievable control bandwidth and the accuracy of the topography estimation. This paper presents an integrated approach to design a feedback controller and topography estimator, taking into account the dynamical uncertainties of the system. The proposed methodology is experimentally demonstrated on a commercial AFM system, showing a direct trade-off between the control bandwidth and the accuracy of the topography estimation.     

适用于原子力显微镜先进扫描模式的学习控制系统

原子力显微镜(AFM)是进行纳米测量和操作的一种重要工具.针对原子力显微镜系统,论文提出了一种基于学习控制的先进扫描模式.具体而言,首先构造了一种适用于AFM的学习控制系统,它由对于扫描管动态特性的最优逆补偿环节和对于样品表面特性的学习算法两部分组成.然后,针对测量过程中扫描线之间的偏移,通过将常见的比例-积分控制算法与这种学习控制相结合,实现了一种基于学习算法的先进扫描模式.论文将这种模式应用于周期性样品来测试其性能,仿真和实验结果表明它可以显著提高测量的速度和精度,同时将样品与探针针尖的距离控制在一个合理的范围之内,以避免损坏样品或探针.这种先进扫描模式可以应用于对快速生物过程的实时监测,同时也可以用来完成重复刻写等纳米操作.     

Molecular dynamics prediction of nanofluidic contact angle offset by an AFM

This paper investigates the nano-fluidic contact angle measurement by performing molecular dynamics simulations. The contact angle between a nano-water droplet and a platinum surface is important for the design of the porous catalyst layer in low-temperature fuel cells. The measurement can generally be conducted by an atomic force microscope (AFM). However, the interaction force between the water droplet and the probe tip of the microscope may influence the measurement results. This paper employs the molecular dynamics technique to investigate the offset of the contact angle measurement. Calculations are in two sets, one simulated the water molecules clustering on the platinum surface, and the other involved the AFM measurement of the contact angle. The former case presents the original contact angle between the nano-scale water droplet and the platinum surface; the offset of the contact angle measurement due to intrusion of the AFM probe is predictable from the latter case. For engineering purposes, we present a correlation between the offset angle and the AFM measurement locations.