Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications

Scanning probe microscopies (SPM) and cantilever-based sensors generally use low-frequency mechanical devices of microscale dimensions or larger. Almost universally, off-chip methods are used to sense displacement in these devices, but this approach is not suitable for nanoscale devices. Nanoscale mechanical sensors offer a greatly enhanced performance that is unattainable with microscale devices. Here we describe the fabrication and operation of self-sensing nanocantilevers with fundamental mechanical resonances up to very high frequencies (VHF). These devices use integrated electronic displacement transducers based on piezoresistive thin metal films, permitting straightforward and optimal nanodevice readout. This non-optical transduction enables applications requiring previously inaccessible sensitivity and bandwidth, such as fast SPM and VHF force sensing. Detection of 127 MHz cantilever vibrations is demonstrated with a thermomechanical-noise-limited displacement sensitivity of 39 fm Hz(-1/2). Our smallest devices, with dimensions approaching the mean free path at atmospheric pressure, maintain high resonance quality factors in ambient conditions. This enables chemisorption measurements in air at room temperature, with unprecedented mass resolution less than 1 attogram (10(-18) g).     

Design and analysis of an integrated optical sensor for scanning force microscopies

In this paper, a novel probe for displacement sensing will be introduced. It is based on a conventional GaAs cantilever, integrated with a Bragg grating as a photo-elastic strain sensor. The deflection of the cantilever is measured directly from the intensity modulation of the reflected light. The principle of the experimental setup and the sensor, as well as the theoretical investigation of the force and displacement sensitivity of the probe, is presented. Finite-element method simulations were performed to get the optimum sensor design. Transfer matrix method simulation of the waveguide grating have been described in detail. In order to enhance the sensitivity, different types of grating structures are discussed. Using this new design, it should be possible to achieve sensitivities, defined as the fractional change in detected optical power per unit displacement of the cantilever, as high as 10/sup -4/ /spl Aring//sup -1/ of cantilever deflection.     

Potential of interferometric cantilever detection and its application for SFM/AFM in liquids

We have developed an optical cantilever deflection detector with a spot size <3?μm and fm?Hz(-1/2) sensitivity over a>10?MHz bandwidth. In this work, we demonstrate its potential for detecting small-amplitude oscillations of various flexural and torsional oscillation modes of cantilevers. The high deflection sensitivity of the interferometer is particularly useful for detecting cantilever oscillations in aqueous solutions, enabling us to reach the thermal noise limit in scanning or atomic force microscopy experiments with stiff cantilevers. This has resulted in atomic-resolution images of solid-liquid interfaces and submolecular-resolution images of native membranes.     

A new detection system for extremely small vertically mounted cantilevers

Detection techniques currently used in scanning force microscopy impose limitations on the geometrical dimensions of the probes and, as a consequence, on their force sensitivity and temporal response. A new technique, based on scattered evanescent electromagnetic waves (SEW), is presented here that can detect the displacement of the extreme end of a vertically mounted cantilever. The resolution of this method is tested using different cantilever sizes and a theoretical model is developed to maximize the detection sensitivity. The applications presented here clearly show that the SEW detection system enables the use of force sensors with sub-micron size, opening new possibilities in the investigation of biomolecular systems and high speed imaging. Two types of cantilevers were successfully tested: a high force sensitivity lever with a spring constant of 0.17?pN?nm(-1) and a resonant frequency of 32?kHz; and a high speed lever with a spring constant of 50?pN?nm(-1) and a resonant frequency of 1.8?MHz. Both these force sensors were fabricated by modifying commercial microcantilevers in a focused ion beam system. It is important to emphasize that these modified cantilevers could not be detected by the conventional optical detection system used in commercial atomic force microscopes.     

Nano-electromechanical displacement sensing based on single-walled carbon nanotubes

We present a nano-electromechanical system based on an individual single-walled carbon nanotube (SWNT) demonstrating their potential use for future displacement sensing at the nanoscale. The fabrication and characterization of the proposed nanoscaled transducer, consisting of a suspended metal cantilever mounted on top of the center of a suspended SWNT, is presented and discussed. The displacement of the nanoscale cantilever is detected via the electromechanically induced change in conductance of the strained SWNT. A relative differential resistance sensitivity (for a metallic SWNT) of up to 27.5%/nm was measured and a piezoresistive gauge factor of a SWNT of up to 2900 was extracted.     

A single electron transistor on an atomic force microscope probe

We report fabrication as well as proof-of-concept experiments of a noninvasive sensor of weak nanoscale electric fields. The sensor is a single electron transistor (SET) placed at the tip of a noncontact atomic force microscope (AFM). This is a general technology to make any nanometer-sized lithography pattern at edges or tips of a cantilever. The height control of the AFM allows the SET to hover a few nanometers above the substrate, improving both the electric field sensitivity and lateral resolution of the electrometer. Our AFM-SET sensor is prepared by a scalable technology. It means that the probe can be routinely fabricated and replaced, if broken.     

Scanning probe microscopy based on magnetoresistive sensing

Integrated sensors are essential for scanning probe microscopy (SPM) based systems that employ arrays of microcantilevers for high throughput. Common integrated sensors, such as piezoresistive, piezoelectric, capacitive and thermoelectric sensors, suffer from low bandwidth and/or low resolution. In this paper, a novel magnetoresistive-sensor-based scanning probe microscopy (MR-SPM) technique is presented. The principle of MR-SPM is first demonstrated using experiments with magnetic cantilevers and commercial MR sensors. A new cantilever design tailored to MR-SPM is then presented and micromagnetic simulations are employed to evaluate the achievable resolution. A remarkable resolution of 0.84?? over a bandwidth of 1?MHz is estimated, which would significantly outperform state-of-the-art optical deflection sensors. Due to its combination of high resolution at high bandwidth, and its amenability to integration in probe arrays, MR-SPM holds great promise for low-cost, high-throughput SPM.     

Multifunctional probe array for nano patterning and imaging

This letter reports the design, fabrication, and testing of a multifunctional scanning probe array for nanoscale imaging and patterning. The probe array consists of multiple cantilever probes, with each probe being able to perform a dedicated function such as scanning probe lithography (e.g., dip pen nanolithography and scanning probe contact printing) or scanning probe microscopy (e.g., atomic force microscopy and lateral force microscopy). The bending states of each probe can be controlled by using an integrated thermal electric actuator so that it is possible to engage any individual probe(s) independently for writing or imaging purposes. The multifunctional probe array is therefore capable of performing a rich variety of operations with minimal chemical crosstalk and high registration accuracy. It will eliminate the need for probe chip exchanges and increase the operational efficiency. The probe tips in a given array may be made of different materials. Further, the tip and cantilever may be made of different materials for a given probe. In this work, we focus on the development of a probe array consisting of dip pen nanolithography probes, scanning probe contact printing probes (of various tip sizes), and scanning probe microscopy probes.     

Accurate and precise calibration of AFM cantilever spring constants using laser Doppler vibrometry

Accurate cantilever spring constants are important in atomic force microscopy both in control of sensitive imaging and to provide correct nanomechanical property measurements. Conventional atomic force microscope (AFM) spring constant calibration techniques are usually performed in an AFM. They rely on significant handling and often require touching the cantilever probe tip to a surface to calibrate the optical lever sensitivity of the configuration. This can damage the tip. The thermal calibration technique developed for laser Doppler vibrometry (LDV) can be used to calibrate cantilevers without handling or touching the tip to a surface. Both flexural and torsional spring constants can be measured. Using both Euler-Bernoulli modeling and an SI traceable electrostatic force balance technique as a comparison we demonstrate that the LDV thermal technique is capable of providing rapid calibrations with a combination of ease, accuracy and precision beyond anything previously available.     

Control of curvature in highly compliant probe cantilevers during carbon nanotube growth

Direct growth of a sharp carbon nanotube (CNT) probe on a very thin and highly flexible cantilever by plasma-enhanced chemical vapor deposition (PECVD) is desirable for atomic force microscopy (AFM) of nanoscale features on soft or fragile materials. Plasma-induced surface stresses in such fabrication processes, however, tend to cause serious bending of these cantilevers, which makes the CNT probe unsuitable for AFM measurements. Here, we report a new tunable CNT growth technique that controls cantilever bending during deposition, thereby enabling the creation of either flat or deliberately curved AFM cantilevers containing a CNT probe. By introducing hydrogen gas to the (acetylene + ammonia) feed gas during CNT growth and adjusting the ammonia to hydrogen flow ratio, the cantilever surface stress can be altered from compressive to tensile stress, and in doing so controlling the degree of cantilever bending. The CNT probes grown under these conditions have high aspect ratios and are robust. Contact-mode imaging has been demonstrated using these probe tips. Such CNT probes can be useful for bio-imaging involving DNA and other delicate biological features in a liquid environment.     

基于Pro/E软件悬臂梁的优化设计

以悬臂梁为例,运用Pro/E软件中的Mechanica模块对其进行敏感性分析和优化分析。通过改变悬臂梁截面的长度和宽度尺寸,获得悬臂梁质量和受力方向的位移随尺寸的变化情况;在满足安全的情况下,对悬臂梁截面的长度和宽度尺寸进行了优化,找到了长度和宽度的最佳值,从而提高了产品的设计质量。     

Real-time detection of linear and angular displacements with a modified DVD optical head

Here we demonstrate that an astigmatic detection system (ADS), constructed with a modified digital-versatile-disk (DVD) optical head, can achieve real-time measurement of a linear displacement and two-dimensional (2D) tilt angles with a high sensitivity. An atomic force microscope (AFM), using our detection system to sense the deflection of microfabricated cantilevers, can resolve single atomic steps on graphite surfaces with a noise level less than 0.04?nm in topographic images. This astigmatic detection system can even detect mechanical resonances due to thermal vibrations of microfabricated cantilevers. The high sensitivity, small detecting size and high bandwidth of this detection system is suitable for dynamic characterization of elements in micromachined components. Further optimization of the system will promise many other applications in diverse technological fields.     

Back-focal-plane position detection with extended linear range for photonic force microscopy

In photonic force microscopes, the position detection with high temporal and spatial resolution is usually implemented by a quadrant position detector placed in the back focal plane of a condenser. An objective with high numerical aperture (NA) for the optical trap has also been used to focus a detection beam. In that case the displacement of the probe at a fixed position of the detector produces a unique and linear response only in a restricted region of the probe displacement, usually several hundred nanometers. There are specific experiments where the absolute position of the probe is a relevant measure together with the probe position relative the optical trap focus. In our scheme we introduce the detection beam into the condenser with low NA through a pinhole with tunable size. This combination permits us to create a wide detection spot and to achieve the linear range of several micrometers by the probe position detection without reducing the trapping force.     

Numerical characterization of whispering-gallery mode optical microcavities

We characterize planar microcavities in whispering-gallery mode optical resonances. The microcavity consists of a waveguide and a microdisk, and a nanoscale gap separates the waveguide and the microdisk. The devices can be fabricated on Si-based thin films by using conventional microelectronics techniques. To characterize these types of cavity, we study a broad range of resonator configuration parameters including the size of the microdisk, the width of the gap, and the waveguide dimensions. The finite-element method is used for solving Maxwell's equations. The electric fields and the energy density distributions are obtained and compared between the on-resonance and off-resonance situations. A brilliant ring with a strong electric field and a high-energy density is found inside the periphery of the microdisk under first-order resonance. While under second-order resonance, there are two bright rings, and the light intensity in the inner ring is stronger than that in the outer ring. The resonant frequencies and their free spectral ranges are predominantly determined by the size of the microdisk. The gap effect on the resonant frequencies is observable, although it is minor. The gap strongly affects the full width at half-maximum (FWHM), finesse, and quality factor of the resonances. With an increase in the gap width from 100 to 300 nm, both the Q value and finesse increase substantially, while the FWHM decreases. The waveguide width has a visible influence on the Q value, FWHM, and finesse as well.     

Nanometer displacement measurement using Fresnel diffraction

We introduce a relatively simple and efficient optical technique to measure nanoscale displacement based on visibility variations of the Fresnel diffraction fringes from a two-dimensional phase step. In this paper we use our technique to measure electromechanical expansions by a thin piezoelectric ceramic and also thermal changes in the diameter of a tungsten wire. Early results provide convincing evidence that sensitivity up to a few nanometers can be achieved, and our technique has the potential to be used as a nanodisplacement probe.     

Actuation of polypyrrole nanowires

Nanoscale actuators are essential components of the NEMS (nanoelectromechanical systems) and nanorobots of the future, and are expected to become a major area of development within nanotechnology. This paper demonstrates for the first time that individual polypyrrole (PPy) nanowires with diameters under 100 nm exhibit actuation behavior, and therefore can potentially be used for constructing nanoscale actuators. PPy is an electroactive polymer which can change volume on the basis of its oxidation state. PPy-based macroscale and microscale actuators have been demonstrated, but their nanoscale counterparts have not been realized until now. The research reported here answers positively the fundamental question of whether PPy wires still exhibit useful volume changes at the nanoscale. Nanowires with a 50?nm diameter and a length of approximately 6?μm, are fabricated by chemical polymerization using track-etched polycarbonate membranes as templates. Their actuation response as a function of oxidation state is investigated by electrochemical AFM (atomic force microscopy). An estimate of the minimum actuation force is made, based on the displacement of the AFM cantilever.     

Piconewton‐Scale Analysis of Ras‐BRaf Signal Transduction with Single‐Molecule Force Spectroscopy

Intermolecular interactions dominate the behavior of signal transduction in various physiological and pathological cell processes, yet assessing these interactions remains a challenging task. Here, this study reports a single‐molecule force spectroscopic method that enables functional delineation of two interaction sites (≈35 pN and ≈90 pN) between signaling effectors Ras and BRaf in the canonical mitogen‐activated protein kinase (MAPK) pathway. This analysis reveals mutations on BRaf at Q257 and A246, two sites frequently linked to cardio‐faciocutaneous syndrome, result in ≈10?30 pN alterations in Ras? BRaf intermolecular binding force. The magnitude of changes in Ras? BRaf binding force correlates with the size of alterations in protein affinity and in α‐amino‐3‐hydroxy‐5‐methyl‐4‐isoxazolepropionic acid (AMPA)‐sensitive glutamate receptor (‐R)‐mediated synaptic transmission in neurons expressing replacement BRaf mutants, and predicts the extent of learning impairments in animals expressing replacement BRaf mutants. These results establish single‐molecule force spectroscopy as an effective platform for evaluating the piconewton‐level interaction of signaling molecules and predicting the behavior outcome of signal transduction.     

Electrical Scanning Probe Microscopy on Active Organic Electronic Devices

Polymer‐ and small‐molecule‐based organic electronic devices are being developed for applications including electroluminescent displays, transistors, and solar cells due to the promise of low‐cost manufacturing. It has become clear that these materials exhibit nanoscale heterogeneities in their optical and electrical properties that affect device performance, and that this nanoscale structure varies as a function of film processing and device‐fabrication conditions. Thus, there is a need for high‐resolution measurements that directly correlate both electronic and optical properties with local film structure in organic semiconductor films. In this article, we highlight the use of electrical scanning probe microscopy techniques, such as conductive atomic force microscopy (c‐AFM), electrostatic force microscopy (EFM), scanning Kelvin probe microscopy (SKPM), and similar variants to elucidate charge injection/extraction, transport, trapping, and generation/recombination in organic devices. We discuss the use of these tools to probe device structures ranging from light‐emitting diodes (LEDs) and thin‐film transistors (TFT), to light‐emitting electrochemical cells (LECs) and organic photovoltaics.     

Forty-channel phased array ultrasonic probe using 0.91Pb(Zn(1/3 )Nb(2/3))O(3)-0.09PbTiO(3) single crystal

A 0.91Pb(Zn(1/3)Nb(2/3))O(3)-0.09PbTiO (3) (PZN-PT) single crystal with high electromechanical coupling factor (k(33))>90% has been used to fabricate a 40-channel phased array ultrasonic probe with greater sensitivity and broader bandwidth than conventional probes. This probe has a center frequency of 3.5 MHz and an aperture of about 6.0x7.5 mm. The standard probe fabrication process was modified for PZN-PT. The dispersion of echo signals was within +/-20% of the mean value. After recovery poling, the echo amplitude of the PZN-PT single-crystal probe is 8 and 5 dB higher than that of one- and two-matching-layer PZT probes, respectively. Moreover, the fractional bandwidth of the single-matching-layer PZN-PT probe is broader than that of the two-matching-layer PZT probes. The PZN-PT single crystals provide great improvements in the sensitivity and bandwidth of phased array probes.     

Superior Energy Storage Properties and Optical Transparency in K0.5Na0.5NbO3-Based Dielectric Ceramics via Multiple Synergistic Strategies

Eco-friendly transparent dielectric ceramics with superior energy storage properties are highly desirable in various transparent energy-storage electronic devices, ranging from advanced transparent pulse capacitors to electro-optical multifunctional devices. However, the collaborative improvement of energy storage properties and optical transparency in KNN-based ceramics still remains challenging. To address this issue, multiple synergistic strategies are proposed, such as refining the grain size, introducing polar nanoregions, and inducing a high-symmetry phase structure. Accordingly, outstanding energy storage density (W_total ≈7.5 J cm⁻³, W_rec ≈5.3 J cm⁻³) and optical transmittance (≈76% at 1600 nm, ≈62% at 780 nm) are simultaneously realized in the 0.94(K_0.5Na_0.5)NbO₃-0.06Sr_0.7La_0.2ZrO₃ ceramic, together with satisfactory charge-discharge performances (discharge energy density: ≈2.7 J cm⁻³, power density: ≈243 MW cm⁻³, discharge rate: ≈76 ns), surpassing previously reported KNN-based transparent ceramics. Piezoresponse force microscopy and transmission electron microscopy revealed that this excellent performance can be attributed to the nanoscale domain and submicron-scale grain size. The significant improvement in the optical transparency and energy storage properties of the materials resulted in the widening of the application prospects of the materials.