Normal-incidence efficiencies of 4800-grooves/mm-ruled replica gratings with multilayer and gold coatings in the 125-325-A wavelength region

The normal-incidence efficiencies of two 4800-grooves/mm ruled replica gratings, one with a dual-bandpass molybdenum/silicon multilayer coating and the other with a gold coating, were measured by use of synchrotron radiation in the 125-325-A wavelength region. The peak reflectance of the multilayer coating was 22% in the first Bragg order near 235 A and 28% in the second Bragg order near 126 A. The peak efficiency of the multilayer grating was 2.6% in the first diffraction order near 225 A and 0.3% in the second diffraction order near 125 A. The efficiencies of the multilayer grating were much higher than the corresponding efficiencies of the gold grating. The characterization of the surfaces of the gratings by atomic force microscopy indicated rms microroughness values in the 5-18-mum(-1) frequency range of 12-20 A for the multilayer grating and 22-32 A for the gold grating. Both gratings had bumpy surface features larger than the nominal groove height. The rather large surface roughness and groove irregularities had a detrimental effect on the grating efficiencies.     

Efficiencies of master, replica, and multilayer gratings for the soft-x-ray-extreme-ultraviolet range: modeling based on the modified integral method and comparisons with measurements

The near-normal-incidence efficiencies of a 2400-groove/mm holographic master grating, a replica grating, and a multilayer grating are modeled in the soft-x-ray-extreme-ultraviolet (EUV) regions and are compared with efficiencies that are measured with synchrotron radiation. The efficiencies are calculated by the computer program PCGrate, which is based on a rigorous modified integral method. The theory of our integral method is described both for monolayer and multilayer gratings designated for the soft-x-ray-EUV-wavelength range. The calculations account for the groove profile as determined from atomic force microscopy with a depth scaling in the case of the multilayer grating and an average random microroughness (0.7 nm) for the short wavelengths. The refractive indices of the grating substrate and coatings have been taken from different sources because of the wide range of the wavelengths (4.5-50 nm). The measured peak absolute efficiency of 10.4% in the second diffraction order at a wavelength of 11.4 nm is achieved for the multilayer grating and is in good agreement with a computed value of approximately 11.5%. Rigorous modeling of the efficiencies of three similar gratings is in good overall agreement with the measured efficiency over a wide wavelength region. Additional calculations have indicated that relatively high normal incidence efficiency (of at least several percent) and large angular dispersion in the higher orders can be achieved in the 4.5-10.5-nm range by application of various multilayer coatings.     

Mo/Si multilayer-coated ruled blazed gratings for the soft-x-ray region

Two Mo/Si multilayer-coated blazed gratings have been fabricated for operation at soft-x-ray wavelengths above the Si L edge, λ ≥ 12.4 nm, at (near) normal incidence. The sawtooth profile of the grating structure was mechanically ruled into a 200-nm Au film that was deposited onto a plane glass substrate. To smooth the rough Au surface and to prevent interdiffusion of the Au film with the upper Mo/Si multilayer, a carbon film was evaporated onto the Au grating surface of one of the gratings before the deposition of the multilayer coating. We matched the multilayer grating, working on blaze in the third diffraction order, in which an absolute diffraction efficiency of 3.4% at a wavelength of 14 nm was measured, whereas only 1.1% was achieved for a similar grating (without a carbon interlayer). These efficiencies are higher than those obtained for other ruled blazed gratings reported in the literature. As a result of the multilayer and grating periodicity, the wavelength of diffraction can be tuned bya rotation of the grating, which is important for application in a soft-x-ray monochromator.     

High-efficiency MoRu-Be multilayer-coated gratings operating near normal incidence in the 11.1-12.0-nm wavelength range

MoRu-Be multilayer coatings were applied to two diffraction gratings for the purpose of enhancing their normal-incidence efficiency in the 11.1-12.0-nm wavelength range. The grating substrates were replicas of a holographic master grating that had a blazed groove profile with 2400 grooves/mm and a 2-m radius of curvature. The relatively low average microroughness (0.8 nm) of the grating surfaces contributed to the relatively high groove efficiency of the grating substrates and the reflectance of the MoRu-Be multilayer coatings. The peak efficiency, measured with synchrotron radiation, was 10.4% in the second diffraction order at a wavelength of 11.37 nm.     

Simple measuring technique for the diffraction efficiency of slanted volume gratings at various wavelengths

To measure diffraction efficiencies of gratings as a function of wavelength, it is necessary to have quasi-monochromatic light sources of various wavelengths. We propose a method to measure the wavelength dependence of the grating diffraction efficiency by using a quasi-monochromatic light source. This method of estimating the real diffraction characteristics of the gratings for various wavelengths is very useful and simple. First the diffraction efficiency of the grating as a function of various incident-beam angles of monochromatic light is measured, then, using these data, we can obtain the diffraction efficiencies for various wavelengths of the same incident angle of light by virtue of a mathematical-conversion method. The mathematical-conversion results for two laminated differently slanted angle gratings of the same volume grating period are in good agreement with the experimental ones.     

Quasi-blazed type multilayer zone plate for X-rays

In order to attain high diffraction efficiency in high-energy X-ray region, we have developed multilevel-type (6-step) multilayer FZPs with the diameter of 70 μm, which composed of concentric multilayers of alternating high-Z (Cu), low-Z (Al), and four types of composite materials (Cu, Al) layers. Such a multilevel-type FZP with high diffraction efficiency contributes the reduction of the radiation damage to biological specimens, the simplification of the X-ray optical system. Some FZPs are fabricated and their diffraction efficiencies were evaluated at the beamline of SPring-8. For one FZP, the peak efficiency for the 1st-order diffraction of 51% has been obtained at 70 keV. The efficiencies higher than 40% have been achieved in the wide energy range of 70-90 keV. That for the 2nd-order diffraction of 46% has been obtained at 37.5 keV. For another FZP, the peak efficiency for the 1st-order diffraction of 52% has been obtained at 41.3 keV. The efficiencies higher than 45% have been achieved in the wide energy range of 33-49.5 keV.     

Fabry-perot multilayers for enhancing the diffraction efficiency of ion-implanted gratings

Enhancement of the free-space diffraction efficiency of gratings made by titanium-ion implantation is demonstrated both theoretically and experimentally. Indeed, by insertion of a grating into a multilayer dielectric Fabry-Perot cavity, the diffraction efficiency can be increased to as much as 24 times that of a single grating. The sensitivity of the diffraction efficiency to the optogeometrical parameters of the grating or of the Fabry-Perot cavity is discussed. Moreover, a process for performance of a phase grating inside a Fabry-Perot cavity is described, and experimental results concerning efficiency measurements are compared with computed values for various grating periods.     

Thin-film interference effects on the efficiency of a normal-incidence grating in the 100-350-A wavelength region

Thin-film interference effects were observed in the normal-incidence efficiency of a 2400-groove/mm replica grating. The efficiency was measured in the 100-350-A wavelength range and had an oscillatory behavior that resulted from the presence of a thin SiO(2) coating. The thicknesses of the SiO(2) and the underlying oxidized aluminum layers were inferred from computer modeling of the zero-order efficiency. The efficiencies in the diffracted orders were calculated with the modified integral approach and accounting for the multilayer coating and the groove profile derived from atomic force microscopy. The calculated and measured efficiencies were in good agreement.     

Normal-incidence efficiencies in the 115-340-Å wavelength region of replicas of the Skylab 3600-line/mm grating with multilayer and gold coatings

Multilayer and gold coatings were applied to replicas of the 3600-line/mm ruled grating that was developed for the Naval Research Laboratory S082A spectroheliograph that was flown on the Skylab spacecraft. The Mo-Si multilayer coating had a peak normal-incidence reflectance of 50% at a wavelength of 136 ?. The normal-incidence efficiency of the multilayer-coated grating was measured by the use of synchrotron radiation and was compared with the efficiency of the gold-coated replica grating in the 115-340-? wavelength region. The peak efficiency of the multilayer grating was 1.3% in the 133-137-? region and was a factor of 65 higher than the efficiency of the gold grating. The multilayer and gold coated gratings, as well as an uncoated replica grating substrate, were characterized by the use of a scanning probe microscope. The rms microroughness of the uncoated and multilayer-coated gratings was 10 ?, and the microroughness of the gold grating was 16 ?.     

Effective grating theory for resonance domain surface-relief diffraction gratings

An effective grating model, which generalizes effective-medium theory to the case of resonance domain surface-relief gratings, is presented. In addition to the zero order, it takes into account the first diffraction order, which obeys the Bragg condition. Modeling the surface-relief grating as an effective grating with two diffraction orders provides closed-form analytical relationships between efficiency and grating parameters. The aspect ratio, the grating period, and the required incidence angle that would lead to high diffraction efficiencies are predicted for TE and TM polarization and verified by rigorous numerical calculations.     

Fabrication and testing of sputtered-sliced kinoform style Fresnel zone plate

The Fresnel zone plate (FZP) is a type of lens for focusing X-rays. We have fabricated a kinoform style FZP with a 30-step structure composed of concentric multilayer of alternating Cu layer, Al layer, and 28 composite material (Cu, Al) layers. The multilayer was deposited using a magnetron sputtering apparatus with two DC-sputtering guns. The focusing characteristics were evaluated at the synchrotron radiation beamline of SPring-8, and the focused beam size measured by knife-edge scanning was 0.8 μm at 40 keV. The peak diffraction efficiencies measured using ion chambers for 1st- and 2nd-order diffraction were 42% and 12% at 40 keV and 20 keV, respectively. High-order X-ray diffraction was also examined using the data obtained from a CCD camera.     

Stabilization of volume gratings recorded in polyvinyl alcohol-acrylamide photopolymers with diffraction efficiencies higher than 90%

Abstract

Obtaining holographic volume gratings with high diffraction efficiencies that can be used under white light has been a serious problem for the polyvinyl alcohol-acrylamide-based photopolymers developed by other researchers. In this paper we propose to eliminate the residual monomer in order to stabilize the holographic gratings. The residual dye and residual monomer are the main problems in achieving high diffraction efficiencies stable under white light. In order to polymerize the residual monomer we illuminate the gratings with coherent green light and incoherent white light and we heat the grating at 80°C for different times. We also study the conservation of gratings dried in critical conditions of humidity and temperature. After stabilization the diffraction efficiencies achieved were clearly higher than 90%.     

Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: efficiency

Using synchrotron radiation, we have measured the efficiency at an angle of incidence of 10 degrees of a holographic ion-etched spherical blazed grating and three of its fourth-generation replicas. The measured efficiency profile of replicas 1 and 3 prior to multilayer coating oscillated from thin-film interference produced by the replicas' Al/Al2O3/SiO2 structure. A Mo2C/Si multilayer coating was applied to the master grating and replicas 1 and 2. After coating, the maximum grating efficiency occurred in the -2nd order and the maximum values were 12.4% at 143.8 angstroms for the master and 11.6% at 145.2 angstroms for replicas 1 and 2. On the basis of measurements obtained after coating, the derived groove efficiency was 22.2% for the master, 19.4% for replica 1, and 19.3% for replica 2. The groove efficiency of the uncoated replica 3 was 24.3% at 142.5 angstroms. We find that the replicas are reasonably faithful copies of the ion-etched master, and models based on measured atomic force microscope groove profiles are in general agreement with measured results. However, subtle issues remain regarding the widths of the peak order profile and the location of its maximum wavelength.     

Grazing-incidence efficiencies in the 28-42-A wavelength region of replicas of the Skylab 3600-line/mm concave grating with multilayer and gold coatings

The efficiencies of replicas of the Skylab 3600-line/mm concave grating with multilayer and gold coatings were measured by using synchrotron radiation at an angle of incidence of 79 degrees and in the 28-42-A wavelength range. The blaze angle of the grating facets that faced the incident radiation was 3.1 degrees , and the average angle of the opposite facets was 6 degrees . For the gold grating, the -1 outside order had the highest efficiency of any diffracted order (excluding the zero order) over the entire wavelength range. Calculations of the grating efficiency indicated that the high efficiency in the -1 order resulted from the rather small angle (6 degrees ) of the facets opposite the incident radiation. For the multilayer grating, the efficiency in the on-blaze +2 inside order was enhanced in the 30-34-A wavelength region as a result of the high reflectance of the multilayer coating. The maximum efficiency in the +2 order occurred at the wavelength (32 A) corresponding to the peak of the reflectance of the multilayer coating on the facets facing the incident radiation. These results further demonstrate that a multilayer coating can be used to enhance the efficiency, in a selected wavelength range and in the on-blaze order, of a grating operating at a small grazing angle (11 degrees ).     

Fabrication and testing of sputtered-sliced kinoform style Fresnel zone plate

The Fresnel zone plate (FZP) is a type of lens for focusing X-rays. We have fabricated a kinoform style FZP with a 30-step structure composed of concentric multilayer of alternating Cu layer, Al layer, and 28 composite material (Cu, Al) layers. The multilayer was deposited using a magnetron sputtering apparatus with two DC-sputtering guns. The focusing characteristics were evaluated at the synchrotron radiation beamline of SPring-8, and the focused beam size measured by knife-edge scanning was 0.8 μm at 40 keV. The peak diffraction efficiencies measured using ion chambers for 1st- and 2nd-order diffraction were 42% and 12% at 40 keV and 20 keV, respectively. High-order X-ray diffraction was also examined using the data obtained from a CCD camera.     

Polarization dependence of diffraction gratings that have total internal reflection facets

The total internal reflection (TIR) grating is an integrated optical diffraction grating designed to achieve high efficiency for the retrodiffracted order by use of total internal reflection twice within a groove of the grating rather than by use of metalized grooves. Numerical calculations are presented for both TE and TM polarizations of incident light. When the TIR grating was used in the -mth-order Littrow mount with m > 13, the diffraction efficiency was found to decrease linearly with 1/m. The polarization dependence of the retrodiffraction efficiency exceeds 3 dB for TIR gratings formed in silica glass (n = 1.5) but is very small for gratings with InP-based technology (n = 3.2).     

High-efficiency reflective diffraction gratings in fused silica as (de)multiplexers at 1.55microm for dense wavelength division multiplexing application

We describe high-efficiency, high-dispersion reflection gratings fabricated in bulk fused silica illuminated by incident lights in the C + L bands as (de)multiplexers for dense wavelength division multiplexing (DWDM) application. Based on the phenomenon of total internal reflection, gratings with optimized profile parameters exhibit diffraction efficiencies of more than 90% under TM- and TE-polarized incident lights for 101-nm spectral bandwidths (1520-1620 nm) and can reach an efficiency of greater than 97% for both polarizations at a wavelength of 1550 nm. Without loss of metal absorption, without coating of dielectric film layers, and independent of tooth shape, this new kind of grating should be of great interest for DWDM application.     

High-efficiency transmission gratings buried in a fused-SiO2 glass plate

Binary gratings were fabricated with high first-order diffraction efficiency by conventional electron-beam drawing and subsequent inductive coupled-plasma dry etching upon the surfaces of SiO2 glass plates. The gratings were covered with a thin SiO2 film by plasma-enhanced chemical-vapor deposition without the grooves' being filled in. The buried gratings exhibited first-order diffraction efficiencies of 84% for transverse-electric and 87% for transverse-magnetic polarized light at a wavelength of 1.55 microm when the period and the depth were 1.5 and 2.8 microm, respectively.     

Optimization of the parallelogrammic grating diffraction efficiency for normally incident waves

The diffraction directivity of parallelogrammic gratings with second-order pitch is examined for a plane wave normally incident upon a corrugated waveguide structure. The three diffracted components are assumed to be in the form of guided waves, which permits a self-consistent calculation. The efficiencies of diffraction into the horizontal components are obtained. Also, the dependence of efficiency on grating thickness, waveguide thickness, grating pitch, and angle of inclination is determined. The approach provides a useful simulation tool for optimizing the design parameters for waveguide couplers with an orthogonal source.     

Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-A wavelength region

We characterized a laminar grating with a Mo/Si multilayer coating by using synchrotron radiation and atomic force microscopy. The grating substrate had 2400 grooves/mm, 40-A groove depth, and 2080-A groove width. The microroughness of the grating substrate was 5 A rms. The multilayer coating was optimized to have peak normal-incidence reflectance at a wavelength near 150 A. For an angle of incidence of 10 degrees the peak grating efficiency was 16.3% in the +1 order and 15.0% in the -1 order. The efficiency in the zero order was lower by a factor of 40 owing to the excellent matching of the groove depth and groove width to the wavelength of the incident radiation. By dividing the grating efficiencies by the measured reflectance of the multilayer coating, we obtained inferred groove efficiencies of 34% and 32% in the +1 and -1 orders, respectively.