离子束混合处理后钢的磨损行为

一、引言近几年来,离子注入技术在金属方面的研究和应用越来越引起人们的重视。但是金属材料的研究要求注入剂量高(一般在10~(17)离子/平方厘米以上),要求注入的离子种类多,这样对离子注入机的发展提出了新的要求。(即注入机束流强、离子源能引出的离子种类多等)。目前欧美等国正在不断解决这一课题,制造束流强(毫安级)、能注入离子种类多的离子注入机。除此之外,还在探索一种新的离子束工艺,以代替直接将所需离子注入金属内的离子注入工艺。这种工艺     

多功能全方位复合离子注入系统的研制

生物医学中的牙种植体表面处理一直是困扰研究者们多年的难题。口腔中牙种植体表面的腐蚀和口腔细菌的滋生是牙种植体失效的主要形式。骨组织与种植体的结合活性差,是影响牙种植体寿命的关键因素。核工业西南物理研究院研制了一台多功能全方位复合离子注入机,基于现有牙种植体产品,利用等离子体浸没注入,对牙种植体表面注入锌、银等离子体进行表面改性,赋予其良好的成骨活性和抗菌性能,以延长牙种植体的使用寿命。     

抽油泵柱塞等离子体浸没离子注入工艺研究

采用不同的等离子体浸没离子注入（PIII）工艺对45钢油井抽油泵柱塞进行了氮离子注入,研究结果发现,不同条件下的氮离子注入均能提高抽油泵柱塞表面的显微硬度的耐磨性,尤其采用射频等离子体浸没离子注入技术对抽油泵柱塞进行注入处理,柱塞表面显微硬度得到了显著提高,同时耐腐蚀性也明显改善。     

国外关于改善材料疲劳特性用离子注入技术研究情况综述

介绍了国外开发的以提高材料疲劳特性为目的的离子注入技术，包括他的原理、工艺和特点，讨论了注入剂量、离子种类和材料成分等对疲劳特性的影响，以及该项技术当前的最新研究动向。     

国外关于改善材料疲劳特性用离子注入技术研究情况综述

介绍了国外开发的以提高材料疲劳特性为目的的离子注入技术，包括他的原理、工艺和特点，讨论了注入剂量、离子种类和材料成分等对疲劳特性的影响，以及该项技术当前的最新研究动向。     

GCr15钢等离子体源离子注入表面改性

用等离子体源离子注入技术对GCr15钢进行了氮离子注入,对注入层的成分进行了俄歇剖面分析,对注入层的显微硬度和摩擦性能进行了测试,对摩擦磨损表面进行了扫描电镜分析,研究结果表明;注入层的硬度和耐磨性均获得了明显的提高。     

LZ-70型离子注入机

LZ-70型离子注入机是由温州自动化研究所和温州潜水泵厂研制和生产的。一、用途和特点LZ一70型离子注入机是半导体工业生产专用的低能硼离子注入的专用注入机,主要用于MOS型集成电路、微波三极管等器件的生产     

加速管的结构设计

加速管是离子注入机的主要部件之一,在很大程度上,它在注入机中起到了心脏的作用。其结构设计,除要求对中性好、密封严格外,还有高压绝缘等要求。为此,在80kev离子注入机上,我们对三园筒加速管     

ZLZ—200型中束流离子注入机

ZLZ-200型离子注入机是生产集成电路的关键没备。本文对该机的主要技术指标、特点及调试结果作了介绍,文中列出了国内外机器比较表及质谱图,可看出该注入机技术性能居国内领先地位,某些指标已接近国际八十年代水平。     

空间齿轮传动副用材料离子注入改性工艺研究

对空间机械的齿轮传动副用材料进行Ti+N离子注入表面改性研究,考察不同注入能量和剂量条件下的改性材料的硬度和真空摩擦磨损性能,获得表面改性效果优异的离子注入工艺参数。结果表明,在注入能量为Ti+/45keV+N+/65 keV,注入剂量为7×1017cm-2的工艺参数条件下,改性材料的真空摩擦学性能相对最好,表面改性效果最佳。     

Characterization of a single electrode focusing lens for ion beam deceleration

An ion beam deceleration system was studied for the high-current ion implanter at the Laboratório de Aceleradores e Tecnologias de Radiação at the Campus Tecnológico e Nuclear, of Instituto Superior Técnico. The installed system consists of a target plate and one electrostatic focusing lens with one electrode. This article describes the results of the evaluation of the new system. With this upgrade, the ion implanter provides enhanced versatility for decelerating to 5 keV a high current ion beam at the µA level. This implantation provides a wide area and allows for a continuous magnetic beam scanning, extending the energy range to lower values, opening up a wider set of applications.     

Fretting wear behavior of nitrogen ion implanted titanium alloys in bovine serum lubrication

Nitrogen ion implantation was performed on biomedical titanium alloys by using of the PBII technology to improve the surface mechanical properties for the application of artificial joints. The titanium nitride phase was characterized with X-ray photoelectron spectroscopy (XPS). The nanohardness of the titanium alloys and implanted samples were measured by using of in-situ nano-mechanical testing system (TriboIndenter). Then, the fretting wear of nitrogen ion implanted titanium alloys was done on the universal multifunctional tester (UMT) with ball-on-flat fretting style in bovine serum lubrication. The fretting wear mechanism was investigated with scanning electron microscopy (SEM) and 3D surface profiler. The XPS analysis results indicate that nitrogen diffuses into the titanium alloy and forms a hard TiN layer on the Ti6Al4V alloys. The nanohardness increases from 6.40 to 7.7 GPa at the normal load of 2 mN, which reveals that nitrogen ion implantation is an effective way to enhance the surface hardness of Ti6Al4V. The coefficients of friction for Ti6Al4V alloy in bovine serum are obviously lower than that in dry friction, but the coefficients of friction for nitrogen ion implanted Ti6Al4V alloy in bovine serum are higher than that in dry friction. Fatigue wear controls the fretting failure mechanism of nitrogen ion implanted Ti6Al4V alloy fretting in bovine serum. The testing results in this paper prove that nitrogen ion implantation can effectively increase the fretting wear resistance for Ti6Al4V alloy in dry friction, and has a considerable improvement for Ti6Al4V alloy in bovine serum lubrication.     

Sliding wear behaviour of Zr-ion-implanted D3 tool steel

The wear and friction characteristics of zirconium-ion-implanted AISI D3 tool steel have been investigated using pin-on-disc methods. Ion implantation was carried out using a vacuum-arc-based ion implanter to form multicharged zirconium ion beams at a mean ion energy of 130 keV, and the implantation doses investigated were approximately 3.6×10¹⁶, 5×10¹⁶ and 1×10¹⁷ ions cm⁻². It was found that Zr implantation decreased both the wear and the coefficient of friction. The beneficial effects of Zr implantation in terms of associated Auger electron spectroscopy, Rutherford backscattering spectroscopy and scanning electron microscopy microprobe analyses are described.     

SEM electron channelling patterns as a technique for the characterization of ion-implantation damage

Electron channelling patterns (ECPs) formed in back-scattered images in the scanning electron microscope (SEM) have been used occasionally to confirm surface amorphization during ion implantation. In order to place such observations on a more quantitative basis, the study reported here has explored the variation of ECP appearance with both specimen damage levels (and thus subsurface structures) and SEM accelerating voltage (i.e. sampled depth). Polished and annealed (0001) single crystal sapphire discs were implanted to various damage levels up to both subsurface and full surface amorphization. Damage levels were measured independently by Rutherford back-scattering (RBS). Selected-area ECPs were obtained in a Jeol-840 electron microscope operating over the range 5–40 kV in 5-kV steps. Progressive ECP degradation—in terms of high-order line disappearance—was observed with increasing dose, culminating in total pattern loss when full surface amorphization occurred. However, ECP information could still be obtained from the damaged near-surface material even when a subsurface amorphous layer was present, thus demonstrating the shallow retrieval depth of information from the ECP technique. Indeed, because the spatial distribution of damage from ion implantation is both calculable and measurable, these experiments have also allowed us, for the first time, to explore and demonstrate the shallow sample depths from which the majority of ECP contrast originates (< 150 nm in sapphire at an accelerating voltage of 35 kV), even when the beam penetration is considerable by comparison (～ 5 μm). Furthermore, the way in which this sampled depth varies with SEM accelerating voltage is both demonstrated and shown to be a powerful diagnostic technique for studying the distribution of near-surface structural damage.     

Improved wear resistance of ultra-high molecular weight polyethylene by plasma immersion ion implantation

Surface modification of ultra-high molecular weight polyethylene (UHMWPE) has been explored using the novel non-line-of-slight plasma immersion ion implantation (PIII) with nitrogen. The modified surfaces were characterised by SEM and a Nano Test 600 testing machine. The tribological behaviour of PIII treated UHMWPE sliding against AISI 316L stainless steel counterfaces was evaluated using a pin-on-disc tribometer under water lubricated conditions. The experimental results show that PIII is a very promising surface engineering technique to improve such surface mechanical properties as surface hardness and elastic modulus of UHMWPE. As a result, the wear resistance of UHMWPE was significantly enhanced by a factor of three following PIII treatment, as compared with untreated material. It was found that the significantly improved wear resistance of PIII treated UHMWPE can be mainly attributed to ion bombardment induced cross-linking, and thus surface hardening.     

Microstructure and wear resistance of thermal sprayed steel coatings ion beam implanted with nitrogen

In the present study, the high-current-density nitrogen ion implantation technique is applied to enhance mechanical properties of thermal sprayed steel coatings. XRD measurements and optical microscopy of ion implanted coatings show clearly the presence of nitrogen solid solutions and precipitates of new phases in the surface layers of coatings. Phases formed are controlled by the temperature of ion beam processing, initial chemical composition and microstructure of coatings. Wear tests demonstrate that properly selected parameters of ion implantation dramatically improve wear and score-resistance of coatings. The influence of the microstructure and phase composition of nitrogen ion implanted layers on tribological properties is discussed.     

轴承滚道表面的改性处理方法

对渗碳和离子注入两种工艺方法和作用进行了介绍,并对两种工艺方法进行了一定的比较,重点对近年来广泛应用的离子注入技术进行了推介。     

金属陶瓷表面处理的研究进展

对近年来国内外有关金属陶瓷表面处理的研究成果进行了总结和分析。主要介绍了气相沉积技术、氮化处理和离子注入等在金属陶瓷表面处理中的应用及其对材料晶粒度、组织和性能的影响，指出了金属陶瓷表面处理未来的发展方向。     

Online system for temperature and accumulated dose control in plasma-based ion implantation

Surface treatment optimization requires the control of the ion dose and the workpiece temperature, two parameters that are not trivially measurable in plasma-based ion implantation. A temperature and ion fluence monitoring system has been developed and implemented in a plasma-based ion implanter. It is based on the measurement with a thermopile of the radiation emitted from the back face of a thin copper disk inserted in the stainless steel sample holder. Since the incident ions carry practically all the incident power, the measurement of the Cu disk temperature that increases during implantation can provide an evaluation of the ion fluence in real time. A model has been developed for the deconvolution of the temperature data and has been fitted to the temperature behavior during implantation. A good agreement between the total integrated doses, evaluated with Rutherford backscattering spectroscopy characterization, and the ion fluence calculated by means of this model has been obtained with a discrepancy less than 16%.