离子轰击对氮化铀表面氧化行为的影响

采用离子氮化技术制备得到一定厚度的氮化铀层,以不同能量的氩离子轰击考察氮化铀的辐照氧化行为,并与大气中的自然氧化行为进行对比,考察材料在辐照环境下的稳定性。结果表明,氮化铀表面经氩离子轰击后,表面形貌发生了改变;氩离子轰击氧化与大气中的自然氧化行为存在差异,离子轰击增强了氮化铀表面的氧化程度,但其对氧化行为的影响主要在浅表面,大气氧化的氮化铀氧化层更厚;随着氩离子轰击能量的增加,表面氧化物含量及氧化层深度显著增加。总体而言,氩离子辐照对氮化铀层的影响随深度的增加而减弱,并不影响氮化铀的整体稳定性。     

Discharge Characteristics of Large-Area High-Power RF Ion Source for Positive and Negative Neutral Beam Injectors

A large-area high-power radio-frequency(RF) driven ion source was developed for positive and negative neutral beam injectors at the Korea Atomic Energy Research Institute(KAERI). The RF ion source consists of a driver region, including a helical antenna and a discharge chamber, and an expansion region. RF power can be transferred at up to 10 kW with a fixed frequency of 2 MHz through an optimized RF matching system. An actively water-cooled Faraday shield is located inside the driver region of the ion source for the stable and steady-state operations of high-power RF discharge. Plasma ignition of the ion source is initiated by the injection of argongas without a starter-filament heating, and the argon-gas is then slowly exchanged by the injection of hydrogen-gas to produce pure hydrogen plasmas. The uniformities of the plasma parameter,such as a plasma density and an electron temperature, are measured at the lowest area of the driver region using two RF-compensated electrostatic probes along the direction of the shortand long-dimensions of the driver region. The plasma parameters will be compared with those obtained at the lowest area of the expansion bucket to analyze the plasma expansion properties from the driver region to the expansion region.     

10cm×30cm矩形射频离子束源的研制

本文介绍了射频(Radio frequency,RF)感应耦合等离子体(Inductive couple plasma,ICP)离子束源的设计研究.该射频离子束源可工作于Ar,在使用四栅引出系统时,可获得100-1000 eV的离子束.当射频功率为900 W,在Ar为工作气体时,束流可达到600 mA.在束流为120 mA时,距源26 cm处,在主轴方向27 cm的范围内不均匀性小于±6%.该离子束源可作为大面积离子束刻蚀、离子束抛光等的离子束源.     

2D hybrid-PIC simulation of the two and three-grid system of ion thruster

A 2D hybrid-PIC simulation model is proposed to investigate the beam extraction phenomena of the ion thruster. In which the electrons of the plasma sheath upstream the accelerator grid are assumed as particles while the downstream are fluid for improving the calculation efficiency. The ion transparency, plasma sheath formation, ion beam extraction characteristic of a two- and three-grid system have been compared in detail in this paper. From the comparison of the appearing time of the under-perveance phenomena in the two- and three-grid system, it illustrated that the two grid system has the wider operation range of the plasma densities than the three-grid one.     

钛薄膜氢化及热释放特性研究

用高能离子非卢瑟福背散射分析和前向反冲分析方法研究了Ｃ、Ｏ污染对Ｔｉ膜的吸放氢能力的影响。实验观测到,１．２６＊１０＾１６ｃｍ＾－２和２．６＊１０＾１６ｃｍ＾－２Ｏ的双重污染可使Ｔｉ膜在３００ｎｍ的范围内存在着低的Ｈ浓度区,使氢的热释放温度大大提高。     

Analysis of the characteristics of the plasma of an RF driven ion source for a neutral beam injector

A radio frequency(RF)driven ion source is a very important component of a neutral beam injector for large magnetic confinement fusion devices.In order to study the key technology and physics of an RF driven ion source for a neutral beam injector in China,an RF ion source test facility was developed at the Institute of Plasma Physics,Chinese Academy of Sciences.In this paper,a two-dimensional fluid model is used to simulate the fundamental physical characteristics of RF plasma discharge.Simulation results show the relationship of the characteristics of plasma(such as electron density and electron temperature)and RF power and gas pressure.In order to verify the effectiveness of the model,the characteristics of the plasma are investigated using a Langmuir probe.In this paper,experimental and simulation results are presented,and the possible reasons for the discrepancies between them are given.This paper can help us understand the characteristics of RF plasma discharge,and give a basis for further R&D for an RF ion source.     

RADI—A RF source size-scaling experiment towards the ITER neutral beam negative ion source

IPP Garching is currently developing a negative hydrogen ion RF source for the ITER neutral beam system. The source demonstrated already current densities in excess of the ITER requirements (>200 A/m² D⁻) at the required source pressure and electron/ion ratio, but with only small extraction area and limited pulse length. A new test facility (RADI) went recently into operation for the demonstration of the required (plasma) homogeneity of a large RF source and the modular driver concept.The source with the dimension of 0.8 m × 0.76 m has roughly the width and half the height of the ITER source; its modular driver concept will allow an easy extrapolation in only one direction to the full size ITER source. The RF power supply consists of two 180 kW, 1 MHz RF generators capable of 30 s pulses. A dummy grid matches the conductance of the ITER source. Full size extraction is presently not possible due to the lack of an insulator, a large size extraction system and a beam dump.The main parameters determining the performance of this “half-size” source are the negative ion and electron density in front of the grid as well as the homogeneity of their profiles across the grid. Those will be measured by optical emission and cavity ring down spectroscopy, by Langmuir probes and laser detachment. These methods have been calibrated to the extracted current densities achieved at the smaller source test facilities at IPP for similar source parameters. However, in order to get some information about the possible ion and electron currents, local single aperture extraction with a Faraday cup system is planned.     

Development of Powerful RF Plasma Sources for Present and Future NBI Systems

This paper deals with the topic of RF plasma sources and their application in high-power neutral beam heating systems for nuclear fusion devices. RF sources represent an interesting alternative to the conventional arc discharge sources. Due to the absence of hot filaments they exhibit an inherent simplicity both in mechanical and electrical aspects and consequently offer advantages in terms of cost savings, gain in availability and reliability and reduced maintenance. This renders the RF plasma source attractive for any long pulse (> 10 sec) NBI system and in particular for the ITER NBI system. The latter, however, requires that the RF plasma source is also capable of delivering negative rather than positive hydrogen ions.In the first part of the paper the types, characteristics and operation experience of RF plasma sources for positive ions in operation are described. The second part is devoted to the development for ITER NBI: the basic requirements, physics and technology issues and the present status     

PTFE表面辐照改性研究进展

聚四氟乙烯(PTFE)是一种具有润滑、绝缘及化学惰性的工程塑料,被广泛地用于电子、化工、纺织、医疗、机械、环境等领域。由于C—F键能高以及氟原子规整地排列在C—C链骨架上,因此PTFE表面能极低且表面润湿性和粘结性差,需要进行表面改性以增强PTFE与其它材料的界面亲和性。通过伽马射线/电子束和低温等离子体对PTFE进行辐照接枝改性和功能化修饰,能够有效地改善和优化其表面性能,使PTFE材料得到更好的利用。低温等离子体技术尤其适合PTFE表面改性处理,因为它不会导致PTFE本体材料的降解。本文综述了国内外关于PTFE表面辐照改性及应用的研究进展。     

离子束轰击涂层(BDC)对钢材耐海水腐蚀的影响

本文介绍了离子束轰击扩散涂层(BDC)对20~#钢和2Cr13钢耐海水腐蚀的影响。通过人工海水全浸腐蚀实验及电化学性能测试,获得了2Cr13 Cr Ni的表面混层的耐海水腐蚀能力与1Cr18Ni9Ti的耐蚀能力相当的结果。     

Development and experimental study of large size composite plasma immersion ion implantation device

Plasma immersion ion implantation(PⅢ) overcomes the direct exposure limit of traditional beamline ion implantation, and is suitable for the treatment of complex work-piece with large size. PⅢ technology is often used for surface modification of metal, plastics and ceramics. Based on the requirement of surface modification of large size insulating material, a composite full-directional PⅢ device based on RF plasma source and metal plasma source is developed in this paper. This device can not only realize gas ion implantation, but also can realize metal ion implantation, and can also realize gas ion mixing with metal ions injection. This device has two metal plasma sources and each metal source contains three cathodes. Under the condition of keeping the vacuum unchanged, the cathode can be switched freely. The volume of the vacuum chamber is about 0.94 m~3, and maximum vacuum degree is about 5?×?10~(-4) Pa. The density of RF plasma in homogeneous region is about 10~9 cm~(-3), and plasma density in the ion implantation region is about 10~(10) cm~(-3). This device can be used for large-size sample material PⅢ treatment, the maximum size of the sample diameter up to 400 mm. The experimental results show that the plasma discharge in the device is stable and can run for a long time. It is suitable for surface treatment of insulating materials.     

Commissioning and first results of the ITER-relevant negative ion beam test facility ELISE

The test facility ELISE which was constructed in the last three years at the Max-Planck-Institut für Plasmaphysik (IPP), Garching, is an important intermediate step of the development of the neutral beam system for ITER. ELISE allows gaining an early experience of the performance and operation of large RF driven sources for negative hydrogen ions and will give an important input for the commissioning and the design of the SPIDER and MITICA test facilities at Padua and the ITER neutral beam system. ELISE has gone recently into operation with first plasma and beam pulses. The experiments aim at the demonstration of an ion beam at the required parameters within 2 years of operation until end of 2014, the end of the service contract with F4E for the establishment and exploitation of ELISE.     

First results of negative ion extraction with Cs for CRAFT prototype negative beam source

In order to understand the physics and pre-study the engineering issues for radio frequency(RF)negative beam source, a prototype source with a single driver and three-electrode accelerator was developed. Recently, the beam source was tested on the RF source test facility with RF plasma generation, negative ion production and extraction. A magnetic filter system and a Cs injection system were employed to enhance the negative ion production. As a result, a long pulse of 105 s negative ion beam with current density of 153 A m-2 was repeatedly extracted successfully. The source pressure is 0.6 Pa and the ratio of co-extracted electron and negative ion current is around0.3. The details of design and experimental results of beam source were shown in this letter.     

离子注入用高低温变温靶室

本文介绍了一个在77-800K范围可变温度下进行离子注入和就地电学测量的靶室。该靶室曾为金属、硅化物以及某些超导材料的离子束混合实验在10W左右的束流功率下使用了几年,温度漂移在±3K。     

Preliminary results of optical emission spectroscopy by line ratio method in the RF negative ion source at ASIPP

Optical emission spectroscopy (OES) using the trace rare gases of Ar and Xe have been carried out in a radio frequency (RF) driven negative ion source at Institute of Plasma Physics, Chinese Academy of Science (ASIPP), in order to determine the electron temperature and density of the hydrogen plasma. The line-ratio methods based on population models are applied to describe the radiation process of the excited state particles and establish their relations with the plasma parameters. The spectral lines from the argon and xenon excited state atoms with the wavelength of 750.4 and 828.0 nm are used to calculate the electron temperature based on the corona model. The argon ions emission lines with the wavelength of 480 and 488 nm are selected to calculate the electron density based on the collisional radiative model. OES has given the preliminary results of the electron temperature and density by varying the discharge gas pressure and RF power. According to the experimental results, the typical plasma parameters is T_e ≈ 2–4 eV and n_e ≈ 1×10 ¹⁷– 8×10¹⁷ m⁻³ in front of plasma grid.     

Characteristics of Positive Ions in the Sheath Region of Magnetized Collisional Electronegative Discharges

A hydrodynamic model is used to investigate the characteristics of positive ions in the sheath region of a low-pressure magnetized electronegative discharge. Positive ions are modeled as a cold fluid, while the electron and negative ion density distributions obey the Boltzmann distribution with two different temperatures. By taking into account the ion-neutral collision effect in the sheath region and assuming that the momentum transfer cross section has a power law dependence on the velocity of positive ions, the sheath formation criterion （modified Bohm＇s criterion） is derived and it is shown that there are specified maximum and minimum limits for the ion Mach number M. Considering these two limits of M, the behaviors of electrostatic potential, charged particle density distributions and positive ion velocities in the sheath region are studied for different values of ion-neutral collision frequency.     

Experimental Study of Diagnosis Neutral Beam for HT-7 Tokamak

Parametrical effect on plasma discharge and beam extraction in the diagnosis neutral beam （DNB） system for HT-7 tokamak was studied experimentally. Useful results with an improved beam quality were obtained.     

Effect of radio-frequency substrate bias on ion properties and sputtering behavior of 2 MHz magnetron sputtering

The effect of radio-frequency substrate bias on ion properties and sputtering behavior of 2 MHz magnetron discharge was investigated. The ion velocity distribution function(IVDF), the maximum ion energy and ion flux density were measured at the substrate by a retarding field energy analyzer. The sputtering behavior was investigated by the electric characteristics of target and bias discharges using voltage–current probe technique. It was found that the substrate bias led to the decrease of sputtering power, voltage and current with the amplitude 7.5%. The substrate bias also led to the broadening of IVDFs and the increase of ion flux density, made the energy divergent of ions impacting the substrate. This effect was further enhanced by increasing bias power and reducing discharge pressure.     

Achievement of 1000 s plasma generation of RF source for neutral beam injector

A radio frequency(RF) ion source was developed for neutral beam injector in Institute of Plasma Physics, Chinese Academy of Sciences(ASIPP). A cylindrical driver based RF plasma source was tested and optimized for long pulse operation. Recently, the plasma source achieved 1000 s stable plasma discharge with RF power of 35 k W and source pressure of 0.7 Pa for the first time.The heat loading on each of driver components such as the Faraday shield(FS), RF coil and expansion chamber was measured by the water flow calorimeter system. The experiment results showed that FS is the component with highest heat loading and the heat loading on FS was about 65.8% of total heat loading on source. The details of the long pulse operation of RF plasma source are presented in this paper.     

Performance of a New Ion Source for KSTAR Tokamak Plasma Heating

In the experimental campaign of 2010 and 2011 on KSTAR, the NBI-1 system was equipped with one prototype ion source and operated successfully, providing a neutral beam power of 0.7-1.6 MW to the tokamak plasma. The new ion source planned for the 2012 KSTAR campaign had a much more advanced performance compared with the previous one. The target performance of the new ion source was to provide a neutral deuterium beam of 2 MW to the tokamak plasma. The ion source was newly designed, fabricated, and assembled in 2011. The new ion source was then conditioned up to 64 A/100 keV over a 2-hour beam extraction and performance tested at the NB test stand （NBTS） at the Korea Atomic Energy Research Institute （KAERI） in 2012. The measured optimum perveance at which the beam divergence is a minimum was about 2.5μP, and the minimum beam divergent angle was under 1.0° at 60 keV. These results indicate that the 2.0 MW neutral beam power at 100 keV required for the heating of plasma in KSTAR can be delivered by the installation of the new ion source in the KSTAR NBI-1 system.