类金刚石碳膜的制备及其应用

类金刚石是一种新型材料,制备应用这种材料已成为国内外研究的热门课题。本文作者结合自己多年的研究工作,就这种材料的制备及其特性、结构和应用作了介绍和述评、     

类金刚石膜的性质及应用

介绍了类金刚石膜（Diamond—like Carbon films，DLC films）的结构、制备方法和发展现状。综述了DLC膜的机械、电子、光学和医学等性能以及在这些领域中的应用状况。     

超薄类金刚石膜纳米摩擦性能研究

使用原子力显微镜对由微波等离子体电子回旋共振化学气相沉积技术制备的超薄类金刚石薄膜的纳米摩擦性能进行了研究。结果表明：氢化非晶碳膜(a-C：H)的摩擦力和外加载荷基本成线性关系，可以使用修正的Amonton公式进行表征；厚度在64．9nm以下薄膜的微观承载性能和膜厚存在明显的正比例关系。通过分析磨损深度和循环次数之间的关系以及对磨损区域的导电性研究，表明a-C：H膜表层的微观承载性能较其内层相差很大，表面存在着一层软膜。     

金刚石膜性能及其应用

金刚石膜性能及其应用北京天地东方金刚石技术有限公司伏虎侯立金刚石具有优异的物理及化学性能，但是天然和人造金刚石呈颗粒状，使其大多数功能特性应用无法实现。金刚石膜具有与单晶金刚石相同的性能，由于解决了尺寸问题，这一新型材料才能使金刚石的许多优异特性得到...     

类金刚石碳膜的结合性能评估和本征硬度测量

采用压痕试验法在超显微硬度仪上对不同基体材料上类金刚石碳膜的结合性能进行了评估，并对类金刚石碳膜的本征硬度进行了测量。结果表明，临界载荷Ｐｃｒ，抗裂性指标ｄＰ／ｄＸ是评估膜基结合性能的两个有用参数，可用来评定膜基结合性能。硅基体上类金刚石碳膜的硬度达２７ＧＰａ，硬质合金基体上类金刚石碳膜的硬度达２０ＧＰａ。     

类金刚石膜的力学性能及其工具应用

阐述了类金刚石膜的力学性能和类金刚石膜工具的应用及研究现状。     

ECR结合中频磁控溅射制备掺Cu类金刚石膜工艺及性能研究

为改善DLC膜的内应力及导热问题,采用ECR微波等离子体化学气相沉积及中频磁控溅射的方法制备掺Cu类金刚石膜,研究溅射电流对薄膜中Cu含量、薄膜表面形貌、结构及机械性能的影响.结果表明:改变溅射电流能有效地控制类金刚石膜中金属含量,拉曼光谱显示,制备的薄膜为典型的类金刚石薄膜结构;Cu的掺入使得类金刚石膜的硬度和耐磨损性能下降,但在一定溅射电流下可得到薄膜结构及机械性能均较好的掺Cu类金刚石膜.     

类金刚石膜（DLC）的热稳定性

阐述了类金刚石膜的热稳定性影响因素,主要包括薄膜成分和厚度及退火环境和加热方式,薄膜的机械性能、电学性能和光学性能在退火处理过程中,会随薄膜结构的变化而发生相应的变化.     

无氢类金刚石薄膜的过滤式阴极电弧沉积

研制了一套过滤式阴极电弧沉积设备 ,并利用该设备成功地获得了类金刚石薄膜。扫描电镜分析表明 :获得的薄膜在硅基片上是光滑和致密的。喇曼光谱研究表明 ,这种薄膜是典型的无氢类金刚石薄膜。膜层的摩擦试验表明 :无氢类金刚石薄膜的摩擦系数较低 ,是一种理想的耐磨材料     

射频磁控溅射法制备类金刚石薄膜的研究

采用射频磁控溅射法,纯Ar溅射石墨靶,制备出了类金刚石薄膜,并对薄膜沉积速率随各工艺参数的变化规律、薄膜结构以及光学性能进行了系统的研究。结果表明,沉积速率随射频功率、CH4流量和溅射气压的增大而增大;随温度的增大呈现先增大后小的趋势。结构分析发现,所制备的DLC薄膜是由sp2键镶嵌在sp3键基体中构成的。在3μm~5μm波段对Si衬底有明显的增透效果。     

The Tribological Properties of Low-friction Hydrogenated Diamond-like Carbon Measured in Ultrahigh Vacuum

In this paper, we investigate the sliding friction and wear behavior of a hydrogenated diamond-like carbon (DLC) film in ultrahigh vacuum (UHV) and under partial pressures of water vapor, oxygen, nitrogen and hydrogen. The initial friction coefficient of the film in UHV was ~0.15, but decreased steadily to values as low as 0.03 after about 30 sliding passes. During longer duration tests, the friction coefficient increased again to values as high as ~0.15 and such an increase in friction coincided with hydrogen desorption from the contacting surfaces (as detected by a mass spectrometer). Heating DLC to temperatures higher than 360 K also caused desorption of hydrogen and a resulting marked increase in friction. The presence of molecular nitrogen, oxygen and hydrogen in the test chamber did not have any noticeable effect on friction, but the presence of thermally dissociated or ionized hydrogen within the close proximity of sliding surfaces had a beneficial effect by restoring the low friction behavior of the DLC films. The introduction of water vapor into test chamber had an adverse effect on friction. The results of this study confirm that hydrogen is key to low friction behavior of hydrogenated DLC films and that the presence of water molecules has an adverse effect on their friction behavior.     

含硅类金刚石膜硬度压痕测试的有限元模拟

使用Abaqus有限元软件通过加载荷与加载位移两种方法对含硅类金刚石膜进行了压痕测试模拟,得到了不同硅含量类金刚石膜的硬度曲线。结果表明:两种方法的模拟结果较吻合,其中加载位移的方法较稳定,速度较快,含硅类金刚石膜的硬度随着硅含量的增加而减小;模拟结果得到了相关试验的验证。     

Tribological Properties of Diamond-Like Carbon Films in Low and High Moist Air

Diamond-like carbon (DLC) film was deposited on Si wafer by a plasma CVD deposition system using benzene. Tribological properties of the DLC film were evaluated using a ball-on-disk tribo-meter in low (RH 1720 %) and high humidity (RH 9095 %) conditions in air. The effect of sliding speed (4.2 mm/s to 25 mm/s) and load (1.06 N to 3.08 N) on friction and wear was investigated. The friction behavior of the DLC film was obviously different in low and high humidity. When tested under low humidity conditions, the friction coefficient decreased significantly with increasing speed, and increased with load. However, under high humidity conditions, the friction coefficient increased with the speed and decreased with increasing load. The wear of the DLC film was little influenced by the sliding speed, normal load and humidity; a level of 10^-8 mm³/Nm could be obtained in all tests. The formation of a uniform transfer layer would be the main factor which controlled the friction coefficient of the DLC films. Unlike the friction, the wear resistance of the DLC film is not so easy to discuss and may be affected mainly by the tribo-chemical reaction in all the test conditions.     

过滤式阴极电弧沉积类金刚石薄膜的碳弧稳定性研究

介绍自行研制的一套过滤式阴极电弧沉积设备,并以石墨作为靶材进行类金刚石薄膜的沉积研究,碳弧本身的惰性限制了电弧的稳定性。电弧电压,磁场等对弧的稳定性有很大的作用。试验得到表面光滑的类金刚石薄膜,并对其进行了形貌分析。     

非晶金刚石膜在高速钢丝锥上的应用

利用过滤阴极真空电弧离子镀膜机 (JM 1型非晶金刚石镀膜机 )在高速钢试件和丝锥上沉积 150～2 0 0nm的非晶金刚石膜 ,对该镀膜丝锥进行摩擦系数、膜 /基结合力、耐磨性以及丝锥效能试验 ,并在多个用户厂进行应用考核。试验结果表明 ,非晶金刚石膜对钢的摩擦系数为 0 0 92～ 0 0 98,膜 /基结合力 (临界载荷 )为 17 65～2 0 2 7N ,耐磨寿命比高速钢基体提高 10 6～ 3 19倍 ,镀膜丝锥寿命提高 2 46～ 5 6倍。实用考核表明 ,镀膜丝锥在加工有色金属、钢、铸铁机件的应用中 ,分别提高丝锥寿命 0 67～ 4 56倍     

Role of the Transfer Film on the Friction and Wear of Metal Carbide Reinforced Amorphous Carbon Coatings During Run-in

The relationship between friction, wear, and transfer films of three metal carbide-reinforced amorphous carbon coatings (TiC/a:C, TiC/a:C–H, and WC/a:C–H), sometimes referred to as metal-doped diamond-like carbon coatings, has been investigated. Tribological tests were performed in an in situ tribometer with sapphire or steel hemispheres run against coated flats in dry or ambient air. The sliding contact interface was observed and recorded by optical microscopy during reciprocating sliding tests. The friction and wear behavior during run-in depended on the number of sliding cycles to form a stationary transfer film on the hemisphere. Stationary transfer films formed rapidly (within ten cycles) and the friction coefficient fell to 0.2 (ambient air) or 0.1 (dry air), except with sapphire against WC/a:C–H in dry air; with the latter, a stationary transfer film required nearly 100 cycles to form, during which the friction remained high and the wear rate was from 10 to 100 times higher than the other two coatings. For all coatings, three velocity accommodation modes (VAM) were observed from run-in to steady-state sliding and were correlated with the friction and wear behavior. The delayed adherence of the transfer film to sapphire from WC/a:C–H coatings in dry air is discussed in terms of equilibrium thermochemistry. Friction and wear behavior during run-in, therefore, depended on transfer film adherence to the hemisphere and the VAM between transfer films and the coating.     

类金刚石膜生长特性的分子动力学模拟

类金刚石膜(Diamond-like Carbon,DLC)的沉积过程直接影响着薄膜分子结构,从而决定着最终薄膜的物理化学特性。采用分子动力学模拟的方法,计算了以C原子为沉积物,在50eV和100eV入射能量下制备无氢DLC膜的动力学过程,详细考察了不同生长阶段表面生成膜的生长特性。通过比较,模拟结果观察到并揭示出在一定的入射能量冲击下,基体表面薄膜的一种新的点—链—网成长过程及薄膜形成机制。同时发现,随着入射能量的增加,基底的逃逸原子数亦相应增加,基底原子向表面薄膜的扩散和渗透距离变长,薄膜密度在入射能量较高时,变化数量及趋势基本一致。     

类金刚石薄膜摩擦机理及其摩擦学性能影响因素的研究现状

类金刚石薄膜(DLC)具有十分优异的减摩耐磨性能,是一种极具发展潜力的固体润滑材料。但其摩擦学性能受到很多因素的影响,这些因素主要可以分为两大类:固有因素和外在因素。在不同的固有因素和外界因素影响下DLC薄膜的摩擦学性能会产生较大差异,这大大制约了人们对其摩擦学行为及摩擦机理的认识,限制了其应用范围的扩展。总结了目前有关DLC薄膜摩擦机理的三种理论,即转移膜理论、滑行界面石墨化理论和化学吸附钝化悬键理论,并在此基础上概括分析了各固有因素和外界因素对DLC薄膜摩擦学性能的影响及其机理,提出未来可以从基础理论和相关技术两方面对DLC薄膜的摩擦学性能展开深入研究。