共查询到19条相似文献,搜索用时 886 毫秒
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MEMS热膜式微型流量传感器的研制 总被引:1,自引:1,他引:0
针对微型流量传感器的应用问题,提出了一种可以准确测量各种气体微型流量、基于MEMS工艺的新型MEMS热膜式传感器。基于热量传递原理的热膜式流量传感器由一个加热器和一对微型温度传感器组成,只要测得两个温度传感器的温度差值,就能得到气体的流量。分析了该器件的原理并进行了ANSYS仿真,设计了器件的结构,进行MEMS工艺开发,制作出可实用化的产品。测试表明,该器件的测量量程达到0.5~200m3/h,精度1.5级,响应时间20ms,量程比1:400,显示该器件测量流量的功能达到了实用化水平。 相似文献
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研究了一种基于硅悬臂梁谐振器的新型气体传感器.该传感器在敏感环境中,可同时获得敏感膜电导率和质量变化,测量被测气体分子的荷质比,具有高灵敏度和高选择性.根据这一原理,针对气体传感器的需求,设计了硅悬臂梁谐振器化学传感器结构,进行了仿真优化,并采用MEMS表面牺牲层工艺制备该器件,激光频率仪测量验证了该微型谐振梁的谐振频率. 相似文献
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研制了一种压电射流倾斜仪,它由一个压电射流角速率传感器和一个气体摆式倾角传感器组成。该倾斜仪能克服外界短周期干扰加速度时倾角测量的影响,并具有成本低、可靠性高等特点。 相似文献
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微机械热对流加速度计 总被引:6,自引:4,他引:6
介绍了基于流体运动的加速度计的原理和制作 .它的原理是自然对流受到加速度信号而产生对流形变 ,从而产生温度差 ,由这个温度差感应了加速度、倾斜、位置变化 .这种加速度计由一个充有流体的密闭腔体组成 ,腔体中包含了一个加热元件和两个对称放置的温度敏感元件 .为了实现这种加速度计 ,采取了微机械制作方法中的前腐蚀工艺 ,把加速度计和伺服电路集成并封装在一起 ,测试了加速度效应 . 相似文献
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微机械热对流加速度计 总被引:2,自引:0,他引:2
介绍了基于流体运动的加速度计的原理和制作.它的原理是自然对流受到加速度信号而产生对流形变,从而产生温度差,由这个温度差感应了加速度、倾斜、位置变化.这种加速度计由一个充有流体的密闭腔体组成,腔体中包含了一个加热元件和两个对称放置的温度敏感元件.为了实现这种加速度计,采取了微机械制作方法中的前腐蚀工艺,把加速度计和伺服电路集成并封装在一起,测试了加速度效应. 相似文献
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F. MaillyAuthor Vitae A. MartinezAuthor VitaeA. GianiAuthor Vitae F. Pascal-DelannoyAuthor VitaeA. BoyerAuthor Vitae 《Microelectronics Journal》2003,34(4):275-280
This paper describes numerical simulation of a micromachined thermal accelerometer and experimental measurements. The sensor principle consists of a heating resistor, which creates a symmetrical temperature profile, and two temperature detectors symmetrically placed on both sides of the heater. When an acceleration is applied, the free convection is modified, the temperature profile becomes asymmetric and the two detectors measure the differential temperature. This temperature profile and sensor sensitivity according to the distance heater-detector have been studied using numerical resolution of fluid dynamics equations with the commercial code CFD2000/STORM: it shows that the optimum distance between the temperature detectors and the heater is about 300 μm. A thermal accelerometer with 3 pairs of detectors placed at 100, 300 and 500 μm from the heater was manufactured using the techniques of micromachining silicon and experimental measurements have shown a good agreement with the numerical simulations: the experimental optimum distance between heater and detectors seems to be close to 400 μm and the differential temperature of detectors is about 3 °C/g for an operating heater power of 54 mW and an heater temperature rise ΔT of 238 °C. The electrical sensitivity is then 2.5 mV/g. 相似文献
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Dae‐Sik Lee Hyoung Gil Choi Kwang Hyo Chung Bun Yeoul Lee Hyeon‐Bong Pyo Hyun C. Yoon 《ETRI Journal》2007,29(5):667-669
This letter presents a smart integrated microfluidic device which can be applied to actively immobilize proteins on demand. The active component in the device is a temperature‐controllable microelectrode array with a smart polymer film, poly(N‐isopropylacrylamide) (PNIPAAm) which can be thermally switched between hydrophilic and hydrophobic states. It is integrated into a micro hot diaphragm having an integrated micro heater and temperature sensors on a 2‐micrometer‐thick silicon oxide/silicon nitride/silicon oxide (O/N/O) template. Only 36 mW is required to heat the large template area of 2 mm×16 mm to 40°C within 1 second. To relay the stimulus‐response activity to the microelectrode surface, the interface is modified with a smart polymer. For a model biomolecular affinity test, an anti‐6‐(2, 4‐dinitrophenyl) aminohexanoic acid (DNP) antibody protein immobilization on the microelectrodes is demonstrated by fluorescence patterns. 相似文献
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基于单片机AT89C52电热水器控制系统,该系统的功能是对电热水器进行温度采集与显示、时钟的显示、热水器的开机方式控制等。设计了系统硬件以微控制器为控制核心,由外围温度检测电路、实时时钟电路、键盘、热水器加热开关、LED显示电路、功能指示电路、报警电路等组成。其中温度测量是电热水器控制系统的重要组成部分,主要采用的是Pt1000铂电阻温度传感器进行温度采集。基于单片机控制的电热水器,具有反应灵敏,抗干扰能力强,稳态温度波动小,达到设定的温度时间短,节省电能等要求。 相似文献
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This paper introduces an analytical modeling of a convective CMOS accelerometer. The device is a one-axis accelerometer based on a three bridges structure (one heater and two detectors). The modeling relies on the use of heat transfer fundamentals and is validated using experimental data issued from both test-vehicles and FEM analysis. It describes the heat conduction phenomenon that determines the thermal initial condition and then the convection mechanism that provides the sensitivity to the acceleration. Although only the static model is detailed, the dynamic behavior of test samples has been characterized and included into the HDL module. In order to illustrate the use of the model, the sensor is simulated together with its control electronics in an implementation of an A/D modulator. Simulation results are then compared with physical measurement with good agreement. 相似文献
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Design and Implementation of a Mechatronic, All-Accelerometer Inertial Measurement Unit 总被引:1,自引:0,他引:1
This paper discusses the design, calibration, simulation, and experimental validation of a kinematically redundant inertial measurement unit that is based solely on accelerometers. The sensor unit comprises 12 accelerometers, two on each face of a cube. The location and direction of the sensors are determined so as to locally optimize the numerical conditioning of the system of governing kinematic equations. The orientational installation error of each sensor is identified by off-line iterative processing of the gravitational acceleration measurements made at a number of known orientations of the unit, thus allowing subsequent calibration. Furthermore, a novel procedure is developed through which the acceleration measurements can be used to directly determine the body angular velocity; this results in a major accuracy improvement over similar works whereby the angular velocity is obtained via integrating the angular acceleration. Experimental results are presented to validate the methodology, design, and implementation. 相似文献