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1.
Silver nanowires (AgNWs)/poly-(3,4-ethylenedioxythiophene/polystyrene sulphonate) (PEDOT:PSS) composite films as conductive electrode for OTFTs were prepared, and their optical and electrical properties were investigated. The conductive composite films used in this study afforded low sheet resistance of <140 Ω/sq and transmittance as high as 70% in the visible region. For the composite film with 0.1 wt.% of AgNWs, contact resistance as low as 2.7 × 104 Ω cm was obtained, as examined by Transfer length model (TLM) analysis, and work function of the corresponding film was 5.0 eV. Furthermore, the composite films were employed as source and drain electrodes for top-gate/bottom-contact organic thin-film transistors (OTFTs) based on solution-processed 5,11-bistriethylsilylethynyl anthradithiophene (TES-ADT) as organic semiconductor, and the resulting device showed high electrical performance with carrier mobility as high as 0.21 cm2/V s.  相似文献   

2.
The properties of the MgZnO nanocrystalline thin films deposited on c-Al2O3 substrates by metal-organic chemical vapor deposition (MOCVD) at various oxygen partial pressures (Po2) were thoroughly studied. It was found that the nanocrystalline films grown in the oxygen partial pressure range from 38 to 56 Pa were all c-axis oriented. From the atomic force microscope (AFM) images and photoluminescence (PL) spectra, we could also find that both the surface morphologies and the optical properties of the MgZnO nanocrystalline thin films depended on the oxygen partial pressure greatly. Hall effect measurements confirmed the conversion of conduction type of MgZnO under a certain range of oxygen partial pressure. With the increase of oxygen content, the crystallinity of MgZnO nanocrystalline thin films was degraded to polycrystalline and the p-type MgZnO was produced when the oxygen partial pressure was larger than 50 Pa. The hole concentration and mobility could reach to 9.71×1017 cm−3 and 2.44 cm2 V−1 s−1, and the resistivity was 2.87 Ω cm while the oxygen partial pressure was 56 Pa.  相似文献   

3.
Indium tin oxide (ITO) thin film prepared by rf sputtering at various Ar-O2 mixtures, were annealed at several temperatures. The electrical, optical and structural properties of the film were systematically investigated before and after post-thermal treatment. The influence of a reactive gas (O2) on the sputtering rate of a metallic (indium/tin) alloy target was also investigated. The films were characterized by X-ray diffraction (XRD) measurement, scanning electron microscopy, and transmittance as a function of wavelength. The resistivity of 8.3×10−4 Ω cm has been achieved for the film thickness of 250 nm, deposited in pure Ar at room temperature (RT).  相似文献   

4.
Indium tin oxide (ITO) thin films were prepared by RF sputtering of ceramic ITO target in pure argon atmosphere at a high base pressure of 3×10−4 mbar without substrate heating and oxygen admittance. The use of pure argon during deposition resulted in films with high transparency (80-85%) in the visible and IR wavelength region. The films were subsequently annealed in air in the temperature range 100-400 °C. The annealed films show decreased transmittance in the IR region and decreased resistivity. The films were characterized by electron microscopy, spectrophotometry and XRD. The predominant orientation of the films is (2 2 2) instead of (4 0 0). The transmission and reflection spectra in the wavelength range 300-2500 nm are used to study the optical behaviour of the films. The optical transmittance and reflectance spectra of the films were simultaneously simulated with different dielectric function models. The best fit of the spectrophotometric data was obtained using the frequency-dependent damping constant in the Drude model coupled with the Bruggeman effective medium theory for the surface roughness. It has been found that the sputtering power and the chamber residual pressure play a key role in the resulting optical properties. This paper presents the refractive index profile, the structure determined from the XRD and the electrical properties of ITO films. It has been found from the electrical measurement that films sputtered at 200 W power and subsequently annealed at 400 °C have a sheet resistance of 80 Ω/□ and resistivity of 1.9×10−3 Ωcm.  相似文献   

5.
We present the results of the preparation and characterization of ITO transparent conducting layers (In2O3:Sn) on glass substrates by the sol-gel process. The chemical and physical parameters in the preparation of the solution and during the deposition of the films were changed, in order to analyze the structural, optical and electrical results having in mind the great technological applications of this material. The crystallographic properties and the average grain size were studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The optical parameters (band gap, refraction index and absorption coefficient) were determined by spectral transmittance and using a simulation software. The electrical characterization was done by the four-point probe method to determine the sheet resistance and resistivity. The films with a sheet resistance of 167.3 Ω/□, and 92.7% transmittance, average grain size of 32.7 nm and cubic structure with a lattice parameter of 10.12 Å were obtained. With the obtained appropriate parameters, low resistivity and highly transparent films, ideal for applications as contact in optical windows in solar cells, smart windows and others can prepared.  相似文献   

6.
High quality zinc oxide thin films have been deposited on silicon substrates by reactive e-beam evaporation in an oxygen environment. The effect of the growth temperature and air annealing on the structural, optical and electrical properties has been investigated. X-ray diffraction measurements have shown that ZnO films are highly c-axis-oriented and that the linewidth of the (002) peak is sensitive to the variation of substrate temperature. The optimum growth temperature has been observed at 300 °C. Raman spectroscopy has been found to be an efficient tool to evaluate the residual stress in the as-grown ZnO films from the position of the E2 (high) mode. On the other hand, the vanishing of the 574 cm−1. Raman feature after annealing has been explained as due to an increase of grain size and the reduction of O-vacancy and Zn interstitial. The SEM images have shown that the surfaces of the electron beam evaporated ZnO became smoother for the growth temperatures higher than 300 °C. The optical transmittance is the highest at 300 °C and has been increased after annealing in air showing an improvement of the optical quality. Finally, the maximum electrical resistivity has been found at 300 °C, which explains its relation with the crystal quality and increased from 5.8×10−2 Ω cm to reach an approximate value of 109 Ω cm after annealing at 750 °C.  相似文献   

7.
Fluorine doped tin oxide (FTO) films were fabricated on a glass substrate by a green sol–gel dip-coating process. Non-toxic SnF2 was used as fluorine source to replace toxic HF or NH4F. Effect of SnF2 content, 0–10 mol%, on structure, electrical resistivity, and optical transmittance of the films were investigated using X-ray diffraction, Hall effect measurements, and UV–vis spectra. Structural analysis revealed that the films are polycrystalline with a tetragonal crystal structure. Grain size varies from 43 to 21 nm with increasing fluorine concentration, which in fact critically impacts resultant electrical and optical properties. The 500 °C-annealed FTO film containing 6 mol% SnF2 shows the lowest electrical resistivity 7.0×10−4 Ω cm, carrier concentration 1.1×1021 cm−3, Hall mobility 8.1 cm2V−1 s−1, optical transmittance 90.1% and optical band-gap 3.91 eV. The 6 mol% SnF2 added film has the highest figure of merit 2.43×10−2 Ω−1 which is four times higher than that of un-doped FTO films. Because of the promising electrical and optical properties, F-doped thin films prepared by this green process are well-suited for use in all aspects of transparent conducting oxide.  相似文献   

8.
Nickel oxide (NiO) films were deposited on Corning glass substrate with variable (0–100%) oxygen content by radio-frequency sputtering. Effects of different oxygen content on the structural, optical, and electrical properties of NiO films were studied. X-ray diffraction showed that the NiO film deposited on substrate with 0% oxygen content resulted in a random polycrystalline structure and small grain size. The introduction of oxygen gas leaded to a (200) preferential orientation and larger grain size. The transmittance decreases with oxygen content due to the increase of oxygen interstitials in NiO films. The 0%-O2 deposited NiO film has a tensile strain and a small band gap. Upon introducing 33%-O2 content, the NiO film exhibits a compressive strain, increasing the bandgap. However, the compressive strain is released and gradually turns into tensile strain, which leads to the narrowing of bandgap with the increase of oxygen content. Hall measurement shows the obtained NiO is p-type and the resistivity decreases from 4.3 × 105 Ω-cm to 5.02 Ω-cm with increasing oxygen content from 0% to 100%. The carrier concentration increases from 6.3 × 1014 cm−3 to 4.6 × 1018 cm−3 and the mobility decreases from 26 cm2/V-s to 0.26 cm2/V-s for the NiO films deposited with oxygen content increasing from 50% to 100%. X-ray photoelectron spectroscopy showed that the Ni+3/Ni+2 ratio is the origin of p-type NiO and the ratio increases from 1.32 to 2.63 by increasing the oxygen content from 0% to 100%, which caused more defects, oxygen interstitials and nickel vacancies.  相似文献   

9.
CuCr0.93Mg0.07O2 thin films were successfully deposited by DC reactive magnetron sputtering at 1123 K from metallic targets. The influence of film thickness on the structural and optoelectronic properties of the films was investigated. X-ray diffraction (XRD) results revealed that all the films had a delafossite structure with no other phases. The optical and electrical properties were investigated by UV–VIS spectrophotometer and Hall measurement, respectively. It was found that the optoelectronic properties exhibited a thickness-dependent behavior. The optical band gap and the average transmittance of the films showed a monotonous decrease with respect to the increase in thickness. The average transmittance in the visible region decreased from 67% to 47% as the thickness increased from ~70 nm to ~280 nm. Simultaneously, the conductivity of the films fell from 1.40 S∙cm−1 to 0.27 S∙cm−1. According to Haacke's figure of merit (FOM), a film with a maximum FOM value of about 1.72×10−7 Ω−1 can be achieved when the thickness is about 70 nm (σ≈ 1.40 S·cm−1 and Tav. ≈67%).  相似文献   

10.
Cu2ZnSnS4 (CZTS) films were obtained by the dip-coating method. The effect of different pH values 4.0, 4.5, and 5.0 on the structural, morphological, optical and electrical properties of samples was investigated by XRD, SEM, UV–vis and Hall Effect measurements. The XRD spectra showed that the characteristic peak intensity of CZTS semiconductor increased with increasing pH value of the precursor solution. It was also observed that increased pH values resulted in a significant reduction in the amount of impurity phases of the films. The UV–vis studies revealed a significant increase in the optical absorption of thin films in the visible region as the pH value of the solution was increased. The band gap of the samples shifted from 2.0 to 1.38 eV by increasing the pH value. The electrical resistivity of the films was found to vary from 2.8×10−2 to 3.1 Ω cm, depending on its pH value.  相似文献   

11.
High-quality Al-doped ZnO (AZO) thin films have been fabricated by electron beam evaporation technique. The effect of the growth temperature on the optical and electrical properties of the electron-beam (e-beam) evaporated AZO film is investigated. X-ray diffraction measurements have shown that e-beam evaporated films are highly c-axis oriented at appropriate growth temperature. Transmittance measurement showed that the best optical and structural quality of the e-beam evaporated AZO film occurred at 200 °C. The scanning electron microscope images have shown that the surfaces of the e-beam evaporated AZO became smoother for the growth temperature at and above 200 °C. Finally, the maximum electrical resistivity of 2.5×10−4 Ω cm and optical transmittance of more than 85% has been found at 200 °C growth temperature, which explains its relation with the crystal quality of the film.  相似文献   

12.
Zinc oxide (ZnO) was largely studied in various applications such as photovoltaic conversion, optoelectronics and piezoelectric, because of its interesting physical properties (morphological, structural, optical and electrical). The present work deals with the preparation of zinc oxide thin films (ZnO) deposited by the spray pyrolysis method. The starting solution was zinc chloride (ZnCl2). Effects of solution molarity and substrate temperature on films properties were investigated. All films deposited were characterized by various techniques such as X-ray diffraction for structural characterizations, profilometry for thickness measurements, UV–vis transmission spectrophotometry for optical properties and the four probes conductivity measurements for electrical characterization. The X-ray diffraction (XRD) patterns show that the films deposited are polycrystalline with (0 0 2) plan as preferential orientation. The UV–vis spectroscopy confirms the possibility of good transparent ZnO thin films deposition with an average transmission of about ∼85% in the visible region. However, the measured electrical resistivities of the deposited films were in the order of 104 Ω cm  相似文献   

13.
采用溶胶—凝胶法在普通玻璃衬底上制备了ZAO(ZnO:A1)薄膜,利用XRD、SEM、紫外—可见光谱和光致发光光谱对所制备的AZO薄膜进行了表征,研究了ZAO薄膜的结构和光学性能.结果表明:ZAO薄膜的微晶晶相与ZnO一致,且具有c轴择优取向;ZAO薄膜在可见光区的透过率超过了88%,在350~575 nm范围内有强的...  相似文献   

14.
The crystalline and electrical properties of Li doped 0.7(Ba,Sr)TiO3-0.3MgO thick film interdigital capacitors have been investigated. Screen printing method was employed to fabricate Li doped 0.7(Ba,Sr)TiO3-0.3MgO thick films on the alumina substrates. (Ba,Sr)TiO3 materials have high dielectric permittivity (>500 @ 1 MHz) and low loss tangent (0.01 @ 1 MHz) in the epitaxial thin film form. To improve dielectric properties and reduce sintering temperature, MgO and Li were added, respectively. 10 μm thick films were screen printed on the alumina substrates and then interdigital capacitors with seven fingers of 200 μm finger gap were patterned with Ag electrode. Current-voltage characteristics were analyzed with elevated temperature range. Up to 50 °C, the thick films showed positive temperature coefficient of resistivity (dρ/dT) of 6.11 × 10Ω cm/°C, then film showed negative temperature coefficient of resistivity (dρ/dT) of −1.74 × 108 Ω cm/°C. From the microwave measurement, the relative dielectric permittivity of Li doped 0.7(Ba,Sr)TiO3-0.3MgO thick films interdigital capacitors were between 313 at 1 GHz and 265 at 7 GHz.  相似文献   

15.
Transparent conducting phosphorus–fluorine co-doped tin oxide (SnO2:(P, F)) thin films have been deposited onto preheated glass substrates using the spray pyrolysis technique by the various dopant quantity of spray solution. The [F/Sn] atomic concentration ratio (x) in the spray solution is kept at value of 0.7 and the [P/Sn] atomic ratio (y) varied at values of 0, 0.001, 0.005, 0.01, 0.02, 0.04, 0.06, and 0.10. The structural, morphological, X-ray diffraction, electrical, optical and photoconductive properties of these films have been studied. It is found that the films are polycrystalline in nature with a tetragonal crystal structure corresponding to SnO2 phase having orientation along the (110) plane and polyhedrons like grains appear in the FE-SEM image. The average grain size increases with increasing P-dopant concentration. The compositional analysis of FTO:P thin films were studied using EDAX. The Hall effect measurements have shown n-type conductivity in all deposited films. The lowest sheet resistance and highest the carrier concentration about 6.4 Ω/□ and 7.4×1022, respectively, were obtained for the film deposited with y=[P/Sn]=0.01. The films deposited with y=0.04 phosphorus-doped SnO2:F shows 68% optical transparency. From the photoconductive studies, the P-doped films exhibited sensitivity to incident light especially in y=0.04. The electrical resistivity and carrier concentration vary in rang 6.2×10−4 to 21.1×10−4 Ω cm and 7.4×1022 to 1.3×1022 cm−3, respectively.  相似文献   

16.
Gallium (Ga)-doped zinc oxide (ZnO:Ga) transparent conductive films were deposited on glass substrates by DC reactive magnetron sputtering. Effects of deposition pressure on the structural, electrical and optical properties of ZnO:Ga films were investigated. X-ray diffraction (XRD) studies show that the films are highly oriented with their crystallographic c-axis perpendicular to the substrate almost independent of the deposition pressure. The morphology of the film is sensitive to the deposition pressure. The transmittance of the ZnO:Ga thin films is over 90% in the visible range and the lowest resistivity of ZnO:Ga films is 4.48×10−4 Ω cm.  相似文献   

17.
The Na-doped p-type ZnO thin films were prepared by DC reactive magnetron sputtering. Two types of substrates were used for separate testing purposes: silicon wafers for crystallinity measurements and glass slides for electrical and optical transmittance measurements. The lowest room-temperature resistivity under the optimal condition was 59.9 Ω cm, with a Hall mobility of 0.406 cm2 V−1s−1 and a carrier concentration of 2.57 × 1017 cm−3. The Na-doped ZnO thin films possessed a good crystallinity with c-axis orientation and a high transmittance (∼85%) in the visible region. The effects of the substrate temperature on the crystallinity and the electrical properties were discussed.  相似文献   

18.
Highly transparent ZnO films were deposited on glass substrates using zinc acetate solution through cost effective spray pyrolysis method. A comprehensive study was carried out to understand the effects of deposition temperature and precursor concentrations on structure, surface morphology, optical, electrical and magnetic properties of the deposited films. All deposited films were polycrystalline in nature with hexagonal wurtzite structure. The films were preferentially oriented along (1 0 1) plane up to 723 K beyond which orientation changed to (0 0 2) plane. Irrespective of precursor concentration used, the films deposited at 673 K and 723 K showed fibrous structure. The films deposited at higher temperature led to enhanced transmittance and optical energy band gap. With higher precursor concentrations the transmittance decreased while the band gap increased. Photoluminescence studies revealed the presence of various defects leading to emission in the visible region apart from band to band transition near UV region. Lowest electrical resistivity was obtained for films deposited at 723 K which is of the order 102 Ω cm. At room temperature, all deposited films were diamagnetic while they were paramagnetic at 5 K.  相似文献   

19.
The study concerns the CNx thin films deposited by Low Pressure Hot Target Reactive Magnetron Sputtering (LP-HTRMS). The thin film resistance changes with relative humidity (RH) and optical properties have been studied in the range of 300-653 K. The temperature coefficients of resistivity changes were −2.5%/K at 300 K and −0.5%/K at 500 K. The activation energy of conductivity Eρ was found to be 0.21 eV in the case of unannealed sample and 0.44 eV when the sample was annealed at 653 K. The CNx thin films fastness to light was tested in the range of 200-2500 nm by measuring their transmittance. The calculations of absorption carrying out with Tauc formula proved the dominance of indirect optical transitions with Eg energy of 1.04 eV and direct transitions of Eg 2.05 eV. The UV radiation was fully absorbed and light transmission was ca. 90% in the range from visible radiation to far infrared of 1000-2500 nm. The CNx thin films showed the high resistance sensitivity to RH changes. At T = 300 K resistance changed from 882 M Ω for 36% RH to 386 k Ω for 85% RH. The CNx thin films susceptibility to humidity was observed in case of both DC and AC current (100 Hz to 10 kHz) measurements. The Si3N4 or SiC buffer adhesive layer was incorporated between CNx film and substrate and its influence on CNx electrical properties was observed.  相似文献   

20.
In this paper we report on the low-temperature growth (Ts=30-250 °C) of zinc oxide thin films by atomic layer deposition method using two different organic zinc precursors: diethylzinc and (for comparison) dimethylzinc, and deionized water as an oxygen precursor. An evident influence of growth temperature and precursors’ doses on electron concentration and Hall mobility of obtained zinc oxide layers is presented. The lowest achieved room-temperature electron concentration was at the level of 1016 cm−3 with mobility up to 110 cm2/V s.  相似文献   

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