MOEMS低频声传感器的设计与实验研究

MOEMS声传感器是MEMS技术、微光学技术、声传感技术相结合发展的新一代声音传感技术,具有灵敏度高、抗电磁场和射频干扰等优点。针对水下潜艇对空声预警涉及的高灵敏度、低频响应好、微型化声传感器整列,研究了反射光强度调制型MOEMS低频声传感阵元。对MOEMS低频声传感器膜片的振动特性进行了有限元分析,得出振动膜片的几何参数,并对反射光强特性进行了仿真和实验。采用设计的MEMS膜片、850 nm波长的LED光源设计并制作了MOEMS低频声传感器样机,通过实验表明,该传感器低频响应好,灵敏度可达200 mV/     

用于周界安防的光纤光栅振动传感系统研究

基于光纤光栅传感理论设计了一种应用于周界安防的低频振动传感器.采用商用解调仪OPD4000对传感器的灵敏度进行了测试,在10～100 Hz频率范围内,传感器灵敏度高于1 000 pm/g.基于非平衡迈克尔逊干涉仪相位载波调制(PGC)解调技术搭建了一套光栅传感器解调系统,实现对传感器低频振动信号的高精度实时解调,使得该系统可广泛应用于机场、监狱、油库、核场所等重要区域的周界安防中.     

PZT-5H基压电纤维复合材料低频传感性能研究

随着地震勘探的深度越来越大,地震反射波不断向低频段发展,迫切要求开发低频传感器。该文设计制备了PZT-5H基压电纤维复合材料(MFC)悬臂梁式传感器,并将其应用于低频传感领域。通过有限元仿真模拟,力-电耦合分析探明了MFC悬臂梁结构中基板材料及结构尺寸参数对MFC电输出性能的影响规律,进而优化结构参数,研制了低频振动监测用MFC悬臂梁传感元件。对其传感性能进行了测试研究。测试结果表明,MFC悬臂梁可很好地感知低频振动加速度的变化,在低频段(5～190 Hz)时加速度灵敏度可达205 mV/g(g=9.8 m/s²)。     

基于极大倾角光纤光栅的龙门架低频振动传感系统的性能研究

提出了一种光强解调型极大倾角光纤光栅(Excessively Tilted Fiber Grating,ExTFG)的龙门架低频振动传感器。首先分析Ex-TFG振动传感的基本原理和传感特性,实验分析Ex-TFG的偏振相关谐振峰的损耗强度与横向压力的关系;然后通过弹性膜片将PZT的振动信号转换为对传感器的横向压力;再通过光电探测模块把光信号转化为电信号;并且对输出信号进行FFT变换分析。实验结果表明,所设计的传感系统对正弦信号频率响应时间为0.045s,检测范围为1~10Hz,平均误差为0.085Hz,最大误差率为1.4%,幅度响应的线性度为96.46%,传感性能良好,其FFT变换主频分量占80%以上,对低频振动信号的传感与检测具有一定的指导意义。     

基于匹配解调方法的光纤光栅振动检测技术与实验研究

介绍了光纤光栅振动检测原理及优点,建立了光纤光栅加速度振动检测的力学模型,分析岩土、结构、建筑行业低频微振动监测的单点光栅匹配解调方法,利用反卷积方法进行传感光栅中心波长的解调,并进行了模拟仿真和实验分析,通过对低频振动信号应用匹配光栅解调检测以及对信号频谱分析,得知该技术方法可行,能有效检测低频振动.     

一种用于周界入侵监测的FBG振动传感器

针对传统周界入侵监测中电学类振动传感器存在 的误报率高、易受电磁干扰和不易实现大面积网络 化和长期可靠的远程监测等不足,研究设计一种基于等强度梁结构的低频光纤布拉格光栅(FBG)振动传 感器。在分析等强度梁振动理论的基础上,推导了基于等强度梁的FBG振动调谐原理。 结合工程应用 实际,确定了等强度梁的结构尺寸,并针对振子质量进行优化设计。采用ANSYS对传感 器进行有限 元分析,得到其一阶谐振频率为94.74Hz。分别采用激振频率为35Hz的振动源对传感器进行振 动试验,试验数据的时域及频域分析结果表明,本文传感器具有良好的动态响应特性,能 够实现对振动频率的准确测量,可以满足特定环境下周界入侵监测的特殊需求。     

一种基于单一椭圆铰链的光纤光栅加速度传感器

针对加速度传感器在振动分析与故障诊断中的需 求,提出了一种基于椭圆铰链的光纤布拉格光栅加速度传感器,椭 圆铰链和质量块组成加速度传感器理论模型的弹簧质量系统。首先,根据传感器结构的力学 模型,推导出了传感器的灵 敏度和谐振频率的计算公式,进而分析了传感器的结构参数对灵敏度和谐振频率的影响;随 后,采用Lingo软件对传感 器参数进行了最优化分析;最后,基于优化结果设计制作了光纤布拉格光栅加速度传感器, 测试了该传感器的灵敏度、 幅频响应和横向抗干扰等性能。结果表明,传感器的谐振频率约为750 Hz,灵敏度约为128 pm/g,横向抗干扰度小于5%,可用于350 Hz以下的低频微弱振动信号的实时监测。     

对称推挽式光纤光栅振动传感器设计研究

为实现对低频振动信号高品质探测,设计了一种新型光纤光栅振动传感器,采用双光栅对称推挽式探头结构,可以有效抑制温度和应力交叉灵敏特性。通过理论仿真分析,表明传感器具有高灵敏度和良好的低频探测性能,经优化设计,灵敏度可达546 pm/g,在0~100 Hz之间,灵敏度动态响应特性良好。     

MEMS压阻超声传感器的设计与优化

提出了一种新的压阻式超声传感器结构,该结构由主振梁和微传感梁组成,在声压的作用下,主振梁振动从而带动微传感梁的振动.通过有限元软件Ansys仿真分析该结构的灵敏度,并与悬臂梁结构压阻式声传感器相比,结果表明灵敏度有了一定的提高.为了实现结构的优化,仿真了结构的尺寸与共振频率的关系,对相同共振频率的结构进行了静力分析,计算并对比了不同尺寸结构的灵敏度,从而得到灵敏度最高的结构,实现了结构的优化.     

光纤气敏传感系统的研究

简述了光纤气体传感原理,详细说明气敏光纤传感器中传感单元结构的设计,并对汽油气体进行检测,达到预期效果.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks