An enhanced MOSFET threshold voltage model for the 6–300 K temperature range

An enhanced threshold voltage model for MOSFETs operating over a wide range of temperatures (6–300K) is presented. The model takes into account the carrier freeze-out effect and the external field-assisted ionization to address the temperature dependence of MOS transistors. For simplicity, an empirical function is incorporated to predict short channel effects over the temperature range. The results from the proposed model demonstrate good agreement with NMOS and PMOS transistors measured from fabricated chips.     

深亚微米CMOS管总剂量辐照特性的对比研究

对深亚微米NMOS和PMOS管进行了60Co γ总剂量辐射实验.实验结果表明,PMOS管在转移特性、噪声、匹配特性方面比NMOS管的抗辐照能力更强.对NMOS管和PMOS管的辐照损伤机理进行了理论分析.分析结果表明,不同的衬底类型导致了PMOS管和NMOS管的辐照效应的差异.基于实验与分析结果,提出了一些深亚微米模拟I...     

The Effects of Mechanical Uniaxial Stress on Junction Leakage in Nanoscale CMOSFETs

This paper reports the influences of uniaxial mechanical stress on the reverse-biased source/drain to substrate junction leakage of state-of-the-art 65 nm CMOS transistors. For n-channel metal-oxide-semiconductor (NMOS) transistors, the band-to-band tunneling (BTBT) dominates the junction leakage current due to heavily doped junction and pocket implants. However, for p-channel metal-oxide-semiconductor (PMOS) transistors with embedded SiGe source/drain, the leakage current is found to result from both BTBT and generation current due to defects generated in the SiGe layer and at the SiGe/Si interface. A four-point bending technique is used to apply mechanical uniaxial stress on NMOS and PMOS devices along the longitudinal direction. It was found that the leakage current of both devices increases (decreases) with applied uniaxial compressive (tensile) stress, and that the strain sensitivity of the junction leakage of NMOS transistors is much weaker than that of PMOS transistors. By combining the bending technique with process strained Si (PSS) technology, additional stress was applied to NMOS and PMOS with high built-in stress to investigate the characteristics of junction leakage under extremely high uniaxial stress. It is shown that uniaxial tensile stress can both enhance the NMOS device performance and decrease the junction leakage. However, for the PMOS, there exists a tradeoff between boosting the transistor performance and decreasing the junction leakage current, so there is a limit in the amount of compressive stress that can be beneficially applied.     

低功耗CMOS工艺中NMOS管阈值电压偏移的研究

研究了在LPLV CMOS工艺中，用表面沟PMOS管工艺使NMOS管的阈值电压发生偏移的问题。在使用表面沟PMOS管的LPLV CMOM工艺中，NMOS管的多晶栅中的杂质不能达到均匀的分布，导致阈值电压发生偏移。文章提出了三个解决方案，并对其可行性进行了研究。     

Static and low frequency noise characterization of surface- and buried-mode 0.1 μm P and N MOSFETs

This work presents the low frequency noise and the electric performances in terms of output/transfer characteristics, threshold voltage, and short channel effect in both NMOS and PMOS transistors for 0.1 μm technologies. For the last one there are two architectures based either on a surface mode of operation (surface channel) or on a buried one (buried channel) featuring either a P+ or a N+ polysilicon gate material. The impact of the channel length on the noise characteristics as well as on the output/transfer characteristics is studied. We find that the 1/f noise can be interpreted in terms of carrier number fluctuations for both N and P channel MOSFETs for surface and buried mode of operation. The oxide trap density Nt is therefore evaluated, demonstrating an overall good oxide quality.     

Static and low frequency noise characterization of surface- and buried-mode 0.1 μm P and N MOSFETs

This work presents the low frequency noise and the electric performances in terms of output/transfer characteristics, threshold voltage, and short channel effect in both NMOS and PMOS transistors for 0.1 μm technologies. For the last one there are two architectures based either on a surface mode of operation (surface channel) or on a buried one (buried channel) featuring either a P+ or a N+ polysilicon gate material. The impact of the channel length on the noise characteristics as well as on the output/transfer characteristics is studied. We find that the 1/f noise can be interpreted in terms of carrier number fluctuations for both N and P channel MOSFETs for surface and buried mode of operation. The oxide trap density Nt is therefore evaluated, demonstrating an overall good oxide quality.     

Observation of halo implant from the drain side reaching the source side and vice versa in extremely short p-channel transistors

The merging of halo implants from the drain side and the source side creates a maximum in the magnitude of the threshold voltage and thus a minimum in the off-current in the metal-oxide-semiconductor transistors. This paper demonstrates that the halo implant from the drain side can cross-over to the source side and vice versa for the look-ahead transistor test structures (transistor test structures with gate length smaller than that of the target transistor). The phenomenon of the cross-over of halo implant is more readily observed in PMOS transistors compared to NMOS transistors because for the same mask gate length, the effective channel length of PMOS transistor tends to be smaller than that of NMOS transistor. The advantage of the cross-over of halo implants can be understood as follows. Since the hole mobility is smaller than the electron mobility in silicon, PMOS transistor tends to have smaller on-current (I_on) than NMOS transistor. The on-current can be increased by using PMOS transistor with smaller mask gate length compared to the NMOS transistor. However, this approach will make the PMOS transistor very sensitive to the statistical variation in the gate electrode length during manufacturing. By making use of the above reported phenomenon, PMOS transistor can be made shorter without running into manufacturing control problem, resulting in bigger I_on but the penalty is that the I_off will become significantly higher.     

Characterization of the ultrathin vertical channel CMOS technology

In this paper, an ultrathin vertical channel (UTVC) CMOS with self-aligned asymmetric lightly doped drain is experimentally demonstrated. In the structure, the UTVC was obtained using solid phase epitaxy, and the midgap material, boron-doped poly-Si/sub 0.5/Ge/sub 0.5/, was used as the gate electrode to obtain symmetrical threshold voltages for both the NMOS and PMOS devices. Due to the ultrathin channel, the fabricated CMOS devices offer good immunity to short channel effects, and the typical subthreshold slopes of the 80 nm NMOS and PMOS are 102 mV/dec and 120 mV/dec, respectively. The fabricated CMOS inverters also show reasonable transfer characteristics. The UTVC CMOS technology provides a simple way to implement sub-100 nm devices for ULSI applications.     

A new multitime programmable non-volatile memory cell using high voltage NMOS

A new multitime programmable (MTP) non-volatile memory (NVM) cell using high voltage NMOS is proposed. A PMOS transistor is used for programming, erasing, and reading, and a high voltage NMOS is used for selecting the memory cell. The memory cell has fewer number of transistors and terminals compared with the typical conventional memory cell. This reduces the area consumption and simplifies the implementation of memory's external circuit. In addition, the subthreshold swing (SS) of the memory cell is improved for larger coupling ratio. Experimental investigation on transfer characteristics, endurance, retention, and threshold voltage V_TH shift and leakage current of the high voltage NMOS of the memory cell are presented. The experimental endurance behaviour of the proposed memory cell is superior to the conventional memory cell.     

Technology limitations for N+/P+ polycidegate CMOS due to lateral dopant diffusion in silicide/polysilicon layers

The device degradation of dual-polycide-gate N⁺/P⁺ CMOS polycide transistors due to the lateral diffusion of dopants in the silicides is studied using a coupled 2-D process and device simulator. Design rule spacings between the NMOS and the PMOS transistor are given for various NMOS:PMOS gate area ratios and thermal processing conditions. The simulations show that contrary to previous findings, micrometer and submicrometer spacings are possible for certain silicide technologies using low-temperature or short higher-temperature furnace steps. Simulations show that CoSi₂ and TiSi₂ appear to be better candidates for submicrometer dual-gate applications than WSi₂     

Low-frequency noise measurements on submicrometre n-channel and p-channel MOSFETs at various operating regions

Silicon founders give in their MOS transistor card models some low-frequency noise parameters for SPICE-based circuit simulators corresponding to pure 1/f ^a or flicker noise, with a very close to unity. MOS transistors used in analogue circuit applications are usually devices with large channel length and width. In low-noise applications, methods such as correlated double sampling are used to suppress the low frequency noise generated by them. Nevertheless, the transistors presently are submicrometre devices exhibiting very different low-frequency noise behaviour. In this paper, experimental low-frequency noise results obtained at room temperature on NMOS and PMOS transistors fabricated using a 0.7 μm process are presented. Both large and small devices on the same process are considered. All regions of operation of transistors are considered. We show that the low-frequency noise behaviour of small area MOSFETs is very different from that of large area devices and that the spectrum is the summation of Lorentzian spectra generated by the switching of individual active traps.     

MOSFET Characteristics in low-temperature plasma-enhanced chemical vapor deposited epitaxial silicon

The fabrication of high-quality MOSFET's using low-temperature (750-800°C) Plasma-Enhanced Chemical Vapor Deposited (PECVD) epitaxial silicon is reported here for the first time. The fabricated devices include PMOS transistors with hole channel mobilities of 213 cm²/V.s (versus 218 cm²/V.s in bulk silicon controls) and NMOS transistors with electron channel mobilities of 520 cm²/V.s (versus 560 cm²/V.s in bulk silicon controls), and with an on-current to off-current ratio of 10⁷. These results indicate that epitaxial silicon films deposited by the PECVD technique are of high quality, even though the epitaxial deposition temperature was only 750-800°C.     

Digital CMOS IC's in 6H-SiC operating on a 5-V power supply

A CMOS technology in 6H-SiC utilizing an implanted p-well process is developed. The p-wells are fabricated by implanting boron ions into an n-type epilayer. PMOS devices are fabricated on an n-type epilayer while the NMOS devices are fabricated on implanted p-wells using a thermally grown gate oxide. The resulting NMOS devices have a threshold voltage of 3.3 V while the PMOS devices have a threshold voltage of -4.2 V at room temperature. The effective channel mobility is around 20 cm ²/Vs for the NMOS devices and around 7.5 cm²/Vs for the PMOS devices. Several digital circuits, such as inverters, NAND's, NOR's, and 11-stage ring oscillators are fabricated using these devices and exhibited stable operation at temperatures ranging from room temperature to 300°C. These digital circuits are the first CMOS circuits in 6H-SiC to operate with a 5-V power supply for temperatures ranging from room temperature up to 300°C     

Strained CMOS Devices With Shallow-Trench-Isolation Stress Buffer Layers

In this brief, shallow-trench-isolation (STI) stress buffer techniques, including sidewall stress buffer and channel surface buffer layers, are developed to reduce the impact of compressive STI stress on the mobility of advanced n-type MOS (NMOS) devices. Our investigation shows that a 7% driving current gain at an NMOS device has been achieved, whereas no degradation at a p-type MOS (PMOS) device was observed. The same junction leakage at both the NMOS and PMOS devices was maintained. A stress relaxation model with simulation is thus proposed to account for the enhanced transport characteristics.     

Sub-quarter-micrometer CMOS on ultrathin (400 Å) SOI

MOS transistors with effective channel lengths down to 0.2 μm have been fabricated in fully depleted, ultrathin (400 Å) silicon-on-insulator (SOI) films. These devices do not exhibit punchthrough, even for the smallest channel lengths, and have performance characteristics comparable to deep-submicrometer bulk transistors. The NMOS devices have a p⁺-polysilicon gate, and the PMOS devices have an n⁺-polysilicon gate, giving threshold voltages close to 1 V with very light channel doping. Because the series resistance associated with the source and drain regions can be very high in such thin SOI films, a titanium salicide process was used using a 0.25 μm oxide spacer. With this process, the sheet resistance of the silicided SOI layer is approximately 5 Ω/□. However, the devices still exhibit significant series resistance, which is likely due to contact resistance between the silicide and silicon source/drain regions     

Design of a fault-tolerant universal cell

The design of a cell constructed from PMOS and NMOS transistors is presented. It has been designed so that it will function as a two input AND, OR and INVERTER, even in the presence of stuck-open or stuck-closed faults.     

A novel dual p-/p+ poly gate CMOS VLSItechnology

A CMOS VLSI technology using p^- and p⁺ poly gates for NMOS and PMOS devices is presented. Due to the midgap work function of the p^- poly gate, the NMOS native threshold voltage is 0.7 V and, therefore, no additional threshold adjust implantation is required. The NMOS transistor is a surface-channel device with improved field-effect mobility and lower body effect due to the reduction in the channel doping concentration. In addition, the p ^- poly gate is shown to be compatible with p⁺ poly-gated surface-channel PMOS devices     

Half-V/SUB DD/ bit-line sensing scheme in CMOS DRAMs

A sensing scheme in which the bit line is precharged to half V/SUB DD/ is introduced for CMOS DRAMs. The proposed circuitry uses a PMOS memory array and incorporates the following features: (1) a complementary sense amplifier consisting of NMOS and PMOS cross-coupled pairs; (2) clocked pulldown of the latching node; (3) complementary clocking of the PMOS pullup; (4) full-sized dummy cell generation of reference potential for sensing; (5) shorting transistor to equalize precharge potential of bit lines; and (6) depletion NMOS decoupling transistors for multiplexing bit lines. The study shows that the half-V/SUB DD/ bit-line sensing scheme has several unique advantages, especially for high-performance high-density CMOS DRAMs, which compared to the full-V/SUB DD/ bit-line sensing scheme used for NMOS memory arrays or the grounded bit-line sensing scheme for PMOS arrays in CMOS DRAMs.     

小尺寸NMOS和PMOS SEU敏感性对比分析

使用软件模拟的方法对NMOS和PMOS的单粒子翻转(SEU)特性进行份真,通过在阱内外碰撞的两种情况下对小尺寸NMOS和PMOS的SEU敏感性进行对比可知,对于深亚微米阶段相同工艺的器件,在阱外碰撞时,NMOS一定比PMOS对SEU敏感;但对于阱内碰撞,NMOS和PMOS对SEU的敏感性要视具体情况而定.