MBE生长InGaAs/GaAs(001)多层矩阵式量子点

用分子束外延(MBE)设备以Stranski-Krastanov(S-K)生长模式,通过间歇式源中断方式外延生长了多个周期垂直堆垛的InGaAs量子点,首次获得大小及密度可调的In0.43Ga0.57As/GaAs(001)矩阵式量子点DWELL结构。样品外延结构大致为500nm的GaAs、多个周期循环堆垛InGaAs量子点和60ML的GaAs隔离层等。生长过程中用反射式高能电子衍射仪(RHEED)实时监控,样品经退火后使用扫描隧道显微镜(STM)进行表面形貌的表征。     

InGaAs/GaAs异质薄膜的MBE生长研究

利用分子束外延技术,在GaAs(001)基片上外延InGaAs/GaAs异质薄膜,通过RHEED图像演变实时监控薄膜生长状况,采用RHEED强度振荡测量薄膜生长速率,确定薄膜中In/Ga的组分比,并提出控制InGaAs薄膜中In/Ga组分比的生长方法.根据RHEED图像,指出获得的InGaAs薄膜处于(2×3)表面重构...     

在RHEED实时监控下GaAs晶体生长研究

采用分子束外延技术,利用RHEED图像可研究GaAs表面重构方式和生长机制。报道了一种新型的分子束外延方法,在RHEED实时监控下,利用GaAs(001)基片同质外延GaAs。通过改变生长和退火的时间与温度(420、500、580℃),结合RHEED图像演变与GaAs表面平整度(粗糙化)的联系,得到表面原子级平整的GaAs样品。完成生长后对样品做EDS分析,确定样品为高纯度GaAs。利用这种方法,得到厚度约为4μm砷化镓晶体。     

MBE生长GaAs(001)薄膜表面的Ostwald熟化过程研究

采用带有RHEED的MBE技术,利用RHEED图像演变实时监控薄膜生长状况,通过RHEED强度振荡测算薄膜生长速率,在GaAs(001)基片上同质外延GaAs薄膜。利用STM对MBE生长的GaAs薄膜表面的熟化过程进行了深入研究。研究发现,随着退火时间的延长,刚完成生长的GaAs表面从具有大量岛和坑的粗糙表面逐渐熟化,在熟化过程中岛不断合并扩大并与平台结合,而坑却逐渐消失。指出当熟化过程完成后GaAs表面将进入原子级平坦状态,并详细解释了熟化过程GaAs表面各种形貌特征形成的内在原因。     

InAs沉积量对InAs/GaAs量子点表面形貌的影响

基于分子束外延(MBE)技术,以反射式高能电子衍射仪(RHEED)作为实时监测工具,在经过Ga液滴刻蚀而具有纳米洞的GaAs衬底上沉积不同厚度的InAs材料形成量子点,并利用扫描隧道显微镜(STM)研究了量子点的形成及分布与InAs沉积量之间的关系。结果表明,在GaAs衬底平坦区,InAs按照SK模式生长,在纳米洞位置,洞内及其周围的台阶会约束量子点的生长成核,而随着InAs沉积量的增加,这种约束会逐渐减小。特别是当InAs沉积量为2ML时,在纳米洞周围会形成尺寸均匀、分布有序且呈环状的量子点结构。     

多周期InGaAs量子点点阵与点链形貌研究

通过分子束外延生长方法,在GaAs(001)衬底上制备生长12周期,16周期,20周期的InGaAs/GaAs量子点,分析了多周期生长的InGaAs/GaAs量子点在16周期下出现较好分布的机理。以及在生长16周期的InGaAs/GaAs量子点下,分析了未退火和退火的初始表面对于量子点分布的影响,未退火处理的衬底生长的InGaAs/GaAs量子点分布更加均匀且有序,量子链延伸得更长。     

单光子源低密度长波长InAs／GaAs量子点的制备

通过优化分子束外延生长条件,得到室温发光在1300nm低密度的自组织InAs/GaAs量子点.使用极低的InAs生长速率(0.001单层/秒)可以把量子点的密度降低到4×106cm-2.这些结果使得InAs/GaAs量子点可以作为单光子源应用在未来的光纤基量子密码、量子通信中.     

1.5微米波段GaAs基异变InAs量子点分子束外延生长

1.55微米波段GaAs基近红外长波长材料在光纤通讯,高频电路和光电集成等领域有潜在的应用价值。本文用分子束外延方法研究了GaAs基异变InAs量子点材料的生长,力图实现在拓展量子点发光波长的同时保持或增加InAs量子点的密度。在实验中,首先优化了In0.15GaAs异变缓冲层的生长,研究了生长温度和退火对减少穿通位错的作用。在此基础上,优化了长波长InAs量子点的生长。最终在GaAs基上获得了温室发光波长在1491nm,半高宽为27.73meV,密度达到4×1010cm-2的InAs量子点。     

Ge基GaAs薄膜和InAs量子点MBE生长研究

采用分子束外延(MBE)法,在优化Ge衬底退火工艺的基础上,通过对比在(001)面偏<111>方向分别为0°、2°、4°和6°的Ge衬底上生长的GaAs薄膜,发现当Ge衬底的偏角为6°时有利于高质量GaAs薄膜的生长;通过改变迁移增强外延(MEE)的生长温度,发现在GaAs成核温度为375℃时,可在6°偏角的Ge衬底上获得质量最好的GaAs薄膜。通过摸索GaAs/Ge衬底上InAs量子点的生长工艺,实现了高效的InAs量子点光致发光,其性能接近GaAs衬底上直接生长的InAs量子点的水平。     

自组织InAs/GaAs量子点的X射线双晶衍射研究

用X射线双晶衍射方法测定了自组织生长的InAs／GaAs量子点的摇摆曲线，根据Takagi-Taupin方程对曲线进行了拟合。在考虑量子点层晶格失配的情况下，理论曲线和实验曲线符合得很好，从而确定了量子点垂直样品表面的失配度，约为4～6％，这与宏观连续体弹性理论的预测相近。结合电镜、原子力显微镜的观察结果表明对子单层沉积方法获得的量子点层采用化合物构层进行拟合所得结果是合理的。     

张应变GaAs层引入使InAs/InP量子点有序化排列的机理研究

采用ＬＰ－ＭＯＶＰＥ技术,在（００１）ＩｎＰ衬底上生长的ＩｎＡｓ／ＩｎＰ自组装量子点是无序的。为了解决这个问题,在ＩｎＰ衬底上先生长张应变的ＧａＡｓ层,然后再生长ＩｎＡｓ层,可得到有序化排列的量子点。本文对张应变ＧａＡｓ层引入使量子点有序化排列的机理进行了分析,为生长有序化、高密度,均匀性好自组装量子点提供了依据。     

Growth of InAs Quantum Dots on GaAs (511)A Substrates: The Competition between Thermal Dynamics and Kinetics

The growth process of InAs quantum dots grown on GaAs (511)A substrates has been studied by atomic force microscopy. According to the atomic force microscopy studies for quantum dots grown with varying InAs coverage, a noncoherent nucleation of quantum dots is observed. Moreover, due to the long migration length of In atoms, the Ostwald ripening process is aggravated, resulting in the bad uniformity of InAs quantum dots on GaAs (511)A. In order to improve the uniformity of nucleation, the growth rate is increased. By studying the effects of increased growth rates on the growth of InAs quantum dots, it is found that the uniformity of InAs quantum dots is greatly improved as the growth rates increase to 0.14 ML s^?1. However, as the growth rates increase further, the uniformity of InAs quantum dots becomes dual‐mode, which can be attributed to the competition between Ostwald ripening and strain relaxation processes. The results in this work provide insights regarding the competition between thermal dynamical barriers and the growth kinetics in the growth of InAs quantum dots, and give guidance to improve the size uniformity of InAs quantum dots on (N11)A substrates.     

Molecular beam epitaxy growth methods of wavelength control for InAs/(In)GaAsN/GaAs heterostructures

We discuss the molecular beam epitaxy (MBE) growth methods of emission wavelength control and property investigations for different types of InAs/(In)GaAsN/GaAs heterostructures containing InGaAsN quantum-size layers: (1) InGaAsN quantum wells deposited by the conventional mode in a GaAs matrix, (2) InAs quantum dots deposited in a GaAsN matrix or covered by an InGaAs(N) layer, and (3) InAs/InGaAsN/GaAsN strain-compensated superlattices with quantum wells and quantum dots. The structures under investigation have demonstrated photoluminescence emission in a wavelength range of ～1.3-1.8?μm at room temperature without essential deterioration of the radiative properties.     

InAs/GaAs multiple quantum dot structures grown by LP-MOVPE

Structures with self-organised InAs quantum dots in a GaAs matrix were grown by the low pressure metal–organic vapour phase epitaxy (LP-MOVPE) technique. Photoluminescence and atomic force microscopy were used as the main characterisation methods for the growth optimisation. The properties of multiple-stacked quantum dot structures are influenced by the thickness of the GaAs separation layers (spacers) between quantum dot-containing InAs layers, by the InAs layer thickness, by arsine partial pressure during growth, and by group III precursor flow interruption time.     

Photoluminescence studies of InAs/GaAs quantum dots covered by InGaAs layers

Photoluminescence (PL), PL excitation (PLE), and time-resolved PL were used to study effects of InGaAs layers on the optical properties of InAs/GaAs quantum dots (QDs). A rich fine structure in the excited states of confined excitons (up to n = 4 quantum states) was observed, providing useful information to study the quantum states in the InAs/GaAs QDs. A significant redshift of the PL peak energy for the QDs covered by InGaAs layers was observed, attributing to the decrease of the QD strain and the lowing of the quantum confinement.     

Structural characterization of GaSb-capped InAs/GaAs quantum dots with a GaAs intermediate layer

GaSb incorporation to InAs/GaAs quantum dots is considered for improving the opto-electronic properties of the systems. In order to optimize these properties, the introduction of an intermediate GaAs layer is considered a good approach. In this work, we study the effect of the introduction of a GaAs intermediate layer between InAs quantum dots and a GaSb capping layer on structural and crystalline quality of these heterostructures. As the thickness of the GaAs intermediate layer increases, a reduction of defect density has been observed as well as changes of quantum dots sizes. This approach suggests a promising method to improve the incorporation of Sb to InAs heterostructures.     

Self-organization of quantum dots in multilayer InAs/GaAs and InGaAs/GaAs structures by submonolayer migration-stimulated epitaxy

Multilayer structures of InGaAs/GaAs quantum dots fabricated by submonolayer migrationstimulated epitaxy have been studied experimentally by scanning tunneling microscopy and results are presented. These results clearly show that in multilayer structures, ordering of nanoobjects into rows occurs in InAs and InGaAs heteroepitaxial layers. Pis#x2019;ma Zh. Tekh. Fiz. 23, 80–84 (November 26, 1997)     

Photoluminescence in the 1.55 μm wavelength range in the InGaAs/GaAs system with quantum dots and wells

It is demonstrated that longwave room-temperature photoluminescence (up to 1.65 μm) can be obtained using InGaAs/GaAs heterostructures of two types grown by low-temperature molecular beam epitaxy: (i) with InAs quantum dots formed at a low growth velocity and (ii) with an In_0.5Ga_0.5As quantum well grown in excess of the group III elements.     

Self-assembled InAs/GaAs quantum dots covered by different strain reducing layers exhibiting strong photo- and electroluminescence in 1.3 and 1.55 microm bands

The effect of different InGaAs and GaAsSb strain reducing layers on photoluminescence and electroluminescence from self-assembled InAs/GaAs quantum dots grown by metal-organic vapour phase epitaxy was investigated. The aim was to shift their luminescence maximum towards optical communication wavelengths at 1.3 or 1.55 microm. Results show that covering by InGaAs strain reducing layer provides stronger shift of photoluminescence maximum (up to 1.55 microm) as compared to GaAsSb one with similar strain in the structure. This is caused by the increase of quantum dot size during InGaAs capping and reduction of quantum confinement of the electron wave function which spreads into the cap. Unfortunately, the weaker electron confinement in quantum dots is a reason of a considerable blue shift of electroluminescence from these InGaAs structures since optical transitions move to InGaAs quantum well. Although strong electroluminescence at 1300 nm was achieved from quantum dots covered by both types of strain reducing layers, the GaAsSb strain reducing layer is more suitable for long wavelength electroluminescence due to higher electron confinement potential allowing suppression of thermal carrier escape from quantum dots.     

Photoluminescence and magnetophotoluminescence of circular and elliptical InAs/GaAs quantum dots

Photoluminescence, magnetophotoluminescence, and atomic force microscopy were used for the characterization of MOVPE prepared InAs/GaAs quantum dots. Significant differences in the behaviour of the first excited photoluminescence transition in magnetic field are explained by the different lateral shape of quantum dots. While the first excited luminescence peak of circular quantum dots splits with increasing magnetic field into two peaks, no splitting occurs for quantum dots with elliptic shape, only small red shift is observed. Theoretical calculations of energy levels in InAs/GaAs quantum dots with circular and elliptical shape with different elongations are presented and compared with experimental results.