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1.
本文介绍用离子束增强沉积(IBED)法在硅片上制备氮化硼(BN)薄膜及镀膜参数对膜中立方氮化硼(c-BN)含量的影响的试验研究,主要研究轰击离子束密、镀膜速率、轰击束中氩气的含量及衬底温度的影响。用红外(IR)谱对膜进行了分析,结果指出:(1)在给定的轰击束能量与束密下氮化硼薄膜中立方相的含量是随镀膜速率而变化的,且存在一个最佳镀膜速率值;(2)提高离子轰击束密,则此最佳镀膜速率值也相应增大;(3)镀膜速率又是随轰击束密及轰击束中氩气含量的增大而减小的;(4)衬底温度在400℃以下时,膜中c-BN相的含量随温度提高而增加。  相似文献   

2.
本文报道了工作气压对射频溅射法制备立方氮化硼(c-BN)薄膜影响的实验结果.c-BN薄膜沉积在p型Si(100)衬底上,溅射靶为六角氮化硼(h-BN),工作气体为Ar气和N2气混合而成,薄膜的成分由傅里叶变换红外吸收谱标识.结果表明,与射频功率、衬底温度和衬底负偏压一样,工作气压也是影响c-BN薄膜生长的重要参数.要得到一定立方相含量的氮化硼薄膜,必须要有合适的工作气压,否则,薄膜中不能形成立方相.在工作气压为5×10-3乇时,得到了立方相含量在90%以上的立方氮化硼薄膜.  相似文献   

3.
采用射频磁控溅射在Pt/Ti/SiO2/Si(100)衬底上制备了钛酸锶钡(BST)薄膜,利用气氛炉对薄膜进行晶化处理,晶化后薄膜的应力采用XRD表征。研究其残余应力随退火气氛、退火温度以及退火降温速率变化的趋势,通过对不同后处理工艺参数实验结果的分析,得到较优化的工艺参数,以制备较小残余应力的优质BST薄膜。  相似文献   

4.
磁控溅射系统在恒定Ar气压和Ar气流流量下,使用不同射频溅射功率在Si(100)衬底上分别沉积Ca薄膜;随后,800℃真空退火1 h.立方相的Ca2Si薄膜首次、单独、直接生长在Si(100)衬底上.实验结果指出,在多相共生的Ca-Si化合物中,沉积Ca薄膜时的射频溅射功率影响了立方相Ca2Si薄膜的质量;最优化的溅射功率是85 W.另外,退火温度为800℃时,有利于单一相Ca2Si的独立生长.并且,退火时间也是关键因素.  相似文献   

5.
在蓝宝石(0001)衬底上低温生长立方相MgxZn1-xO(x〉0.5)晶体薄膜,用X射线衍射(XRD)和透射光谱分析高温退火对薄膜的结构和光学性质的影响.结果表明;对Mg0.53Zn0.47O薄膜,在900℃的退火温度下,(0002)衍射峰以及透射光谱上双吸收边的出现均表明有六方结构从其立方结构中分离出来;但对于Mg含量高于55%的样品,即使经历了1000℃的高温退火,也不会有任何相分裂现象出现.而电学测试结果表明,高温下热稳定性良好的立方相Mg0.55Zn0.45O晶体薄膜还能用于金属-绝缘体-半导体的绝缘层,并且漏电流小.由此可以判断,x≥0.55的超饱和MgZn1-xO薄膜具有稳定的立方相晶体结构和优良的光学、电学性质,因而是制作高质量的光电子器件和量子阱激光器的理想材料.  相似文献   

6.
采用射频磁控溅射技术在Si(100)衬底上沉积了si-ca-si薄膜,并在高真空条件下对样品进行退火处理,直接生成立方相Ca2Si薄膜。研究了不同溅射功率对薄膜的晶体结构、表面(断面)形貌的影响,并对其光学性质进行了测试分析。结果表明:Ca2Si薄膜为立方结构且具有沿(111)向择优生长的特性,当溅射功率为120W时,Ca2Si薄膜变的均匀、致密,在400-800nm波长范围内,溅射功率对折射率n和吸收系数k的影响较小。  相似文献   

7.
磁控溅射系统在恒定Ar气压和Ar气流流量下,使用不同射频溅射功率在Si(100)衬底上分别沉积Ca薄膜;随后,800℃真空退火1 h.立方相的Ca2Si薄膜首次、单独、直接生长在Si(100)衬底上.实验结果指出,在多相共生的Ca-Si化合物中,沉积Ca薄膜时的射频溅射功率影响了立方相Ca2Si薄膜的质量;最优化的溅射功率是85 W.另外,退火温度为800℃时,有利于单一相Ca2Si的独立生长.并且,退火时间也是关键因素.  相似文献   

8.
不同衬底上TiN薄膜的制备及性能研究   总被引:6,自引:1,他引:5  
杨今漫  徐灿 《功能材料》1996,27(1):95-96
利用电弧离子镀技术在不锈钢,硅衬底及玻璃衬底上沉积了TiN薄膜,并在大气环境下进行了700℃30min退火处理,测量了其退火前后的硬度,X射线分析了退火前后的成分,对硅衬底上沉积的薄膜则测量了退火前的电阻率变化。在玻璃衬底上改变实验条件沉积了不同颜色的薄膜,测量了不同色泽薄膜的电阻率和制备条件的关系,对退火后薄膜内微观结构的变化进行初步分析由此讨论了退火后薄膜硬度及电阻率变化的原因,并解释了讨论了  相似文献   

9.
介绍了几种立方氮化硼(C—BN)薄膜的制备工艺,并对薄膜中立方氮化硼相形成的影响因素进行了讨论。  相似文献   

10.
利用磁控溅射在玻璃衬底上制备Ag纳米粒子及其氧化物(AgOx)薄膜,通过高温退火实验,研究银及AgOx薄膜的热稳定特性。采用x射线衍射分析薄膜的晶相结构,采用UV-Vis分光光度计测定薄膜的吸收光谱。结果表明:Ag纳米薄膜在450nm附近出现特征吸收峰,200℃退火后,峰位蓝移,400℃退火后,吸收峰显著减弱,表明Ag纳米粒子在退火过程中发生了蒸发;AgOx薄膜在200℃下退火后,出现Ag纳米粒子特征吸收峰,表明AgOx的热分解,400℃退火同样导致Ag纳米粒子的蒸发。  相似文献   

11.
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.  相似文献   

12.
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……  相似文献   

13.
14.
We associate a variety of innovations with the term "Industry 4.0". The pioneer of many 4.0 modifications forms the basisfor the trend towards the integrated di...  相似文献   

15.
A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.  相似文献   

16.
On November 30, 2007, the China Association for Standardization (CAS) held a press conference at Beijing Diaoyutai State Guest House. Leaders from the China Household Electric Appliance Research Institute, the China Household Electric Appliance Association, and the China Consumers' Association attended and made speeches.……  相似文献   

17.
Zusammenfassung Bei der Gestaltung von Ernteprozessen — beispielsweise des Prozesses Mähdrusch, Körnertransport und -abnahme — als transportverbundene Fließarbeitsverfahren mit mindestens zwei verschiedenen Arbeitsmitteln gibt es einen großen Optimierungsspielraum. Solche Prozesse sind mehrstufige Bedienungsprozesse mit gemischter Anordnung der Bedienungseinrichtungen. Außerdem besitzen sie stark ausgeprägte räumliche Aspekte. Es wird vor allem gezeigt, welche Merkmale solcher Prozesse in Simulationsmodellen abgebildet sein müssen, welche Zielgrößen in Abhängigkeit von welchen Einflußgrößen unter Berücksichtigung welcher Prozeßbedingungen ermittelt werden sollten und wie der Bewertungsprozeß zur Ermittlung der gewünschten Informationen gestaltet werden muß.  相似文献   

18.
ABSTRACT

The production of ferrous metal increased during the Roman Late Republican period, Principate and Empire. The direct bloomery process was used to extract the metal from its ores using slag-tapping and slag-pit furnaces. The fuel was charcoal and an air blast was introduced by bellows-operated tuyères. Iron formed as a bloom, often as a spongy mass of metal, which contained impurities from the smelting process, including unreacted ore, fuel, slag and fragments from the furnace walls, while the metal was often inhomogeneous with varied carbon contents. Blooms were either smithed directly into bars or ingots or they were broken up, which also allowed the removal of gross impurities and a selection of pieces with similar properties to be made. These could then be forge-welded together and formed into characteristically shaped ingots. Making steel in the furnace seems to have been achieved: it depended on the ore and the furnace and conditions within it. Surface carburization was also carried out. Iron and steel were used extensively in construction and for tools and weapons. Fire welding was often used to add pieces of steel to make the edges of tools and weapons, which could be heat-treated by quenching to harden them.  相似文献   

19.
In the present study a high‐boron high speed steel (HSS) roll material was designed. Many expensive alloy elements have been substituted by cheap boron alloy, and high‐boron high speed steel roll has been manufactured by centrifugal casting method. The microstructures, mechanical properties and wear resistance of centrifugal casting high‐boron high speed steel roll have been investigated by optical microscopy (OM), scanning electron microscopy (SEM), and X‐ray diffraction (XRD) analysis, hardness test, impact test and wear test. The results indicated that the solidification microstructures of high‐boron high speed steel roll consisted of M2(B,C), (W,Mo)2(B,C), M3(B,C), M23(B,C)6 type borocarbides and martensite, a small amount of retained austenite. Borocarbides were continuously distributed over the grain boundary. After quenching from 1050 °C, local broken network appeared in partial borocarbides, and fine secondary borocarbide precipitated from the matrix. After tempering from 525 °C, the amount of precipitated borocarbide increased significantly. After heat treatment, the hardness of high‐boron high speed steel roll excelled 60 HRC, and its impact toughness excelled 8.0 J/cm2. The single groove steel rolling amount of high‐boron high speed steel rolls increases by 500% than that of bainite cast iron roll, when the rolls are used in K1 mill housing of bar mill.  相似文献   

20.
The definition of the thixotropy is a decrease in viscosity with time in shear and a subsequent recovery of viscosity after the shear deformation is removed.We ...  相似文献   

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