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1.
基于氧化锌/玻璃(ZnO/Glass)结构的声表面波(SAW)器件可以用来制作性能优良的紫外探测器。使用有限元分析软件COMSOL Multiphysics仿真了该种结构的声表面波器件,并得到其S11参数。基于仿真结果,制备了相应的SAW器件,实验所用ZnO薄膜采用直流反应磁控溅射方法沉积,所制备的ZnO薄膜呈(0002)取向。基于该种结构的SAW紫外探测器对紫外光的反应时间仅3 s,其紫外探测的灵敏度高达36.4×10-6/mW/cm2。  相似文献   

2.
通过离子交换技术对衬底表面改性,然后喷墨打印掩膜图形,在聚酰亚胺衬底两面分别制备了银叉指电极和加热电阻.通过调节电阻加热器两端的直流偏压,实现25 ℃~280 ℃的控温加热.集成的加热器具有双重功能:纳米ZnO敏感薄膜原位沉积和高温检测.结果表明,该传感器对丙酮气体的灵敏度随温度单调增加(<150 ℃).此外,加热器促进了ZnO敏感薄膜表面丙酮气体分子的解吸,缩短了传感器响应和恢复时间,并减小了初始电阻的漂移.此外,在丙酮检测中,加热器能有效地减少湿度干扰.  相似文献   

3.
将4种质量分数(5%,10%,20%,30%)的Co(CH3COO)24H2O混合到四针状纳米ZnO原料里,采用超声化学浸泡法制备出表面改性四针状纳米ZnO颗粒。通过XRD和TEM分析了表面改性四针状纳米ZnO结构的物相和形貌特征。随着Co(CH3COO)24H2O质量分数增大,Co3O4相明显出现,Co3O4相沉积在ZnO表面上。研究表明:以表面改性四针状纳米ZnO粉末为原料制备的厚膜气敏元件,与纯ZnO气敏元件相比,Co(CH3COO)24H2O质量分数为5%的气敏元件对酒精和甲醇有较高的灵敏度,并讨论了表面改性对气敏性能的影响。  相似文献   

4.
We report on a piezoelectric response investigation of AlGaN/GaN circular high electron mobility transistor (C-HEMT) based ring gate capacitor as a new stress sensor device to be potentially applied for dynamic high-pressure sensing. A ring gate capacitor of C-HEMT with an additional ZnO gate interfacial layer was used to measure the changes in the piezoelectric charge induced directly by the variation of piezoelectric polarization of both gate piezoelectric layers (AlGaN, ZnO) for harmonic loading at different excitation frequences. Our experimental results show that about 10 nm thick piezoelectric ZnO layer grown on ring gate/AlGaN interface of C-HEMT can yield almost a 60% increase in the piezoelectric detection sensitivity of the device due to its higher piezoelectric coefficient. A three-dimensional CoventorWare simulation is carried out to confirm the increase in the measured piezoelectric response of ZnO based ring gate capacitor of C-HEMT.  相似文献   

5.
ZnO/SnO2双层膜的结构及敏感特性研究   总被引:4,自引:0,他引:4  
将SnO2及ZnO粉末压制成靶材,采用溅射衍制备了ZnO/SnO2双层薄膜,用XPS,XRD,SEM等手段对制得的薄膜进行分析测试,发现双层膜表面有一定量的吸附氧存在,双层膜中锌、锡有一定的相互扩散,比较了单层SnO2及ZnO膜与双层膜的气敏特性,结果表明双层膜在灵敏度及选择性方面都优于单层膜。  相似文献   

6.
Surface of a gold disc was modified by depositing ZnO film electrochemically. AFM analysis of the film shows c-axis oriented pillar like structures grown normal to the surface. Sensor surface was prepared by immobilizing glucose oxidase (GOD) on the ZnO modified gold disc. Different concentrations of glucose (50-1000 ng/ml) were taken to monitor the sensor response. Sensor was found to be highly sensitive to low concentrations of glucose and sensitivity increases linearly in the range of 50-250 ng/ml. The high sensitivity of the ZnO modified gold disc may be attributed to the SPR induced electron transfer between the two systems (i.e. Au and ZnO). The work indicates promising application of the system as a tool for studying sensitive bio-specific interactions, with further development of highly sensitive and selective bio-molecular and chemical SPR based optical sensors.  相似文献   

7.
采用水热法合成了类积木状ZnO纳米结构,利用X射线衍射仪(XRD)、X射线能谱分析仪(EDS)和扫描电子显微镜(SEM)对制备的ZnO纳米结构的物相、化学组分及微观形貌进行了表征与分析。对基于ZnO纳米结构的气体传感器进行甲烷气敏特性测试,测试结果表明:该传感器的最佳工作电压为5 V,在该电压下对体积分数为200×10-6甲烷气体的灵敏度可高达55.4%,最低检测限为1×10-6。  相似文献   

8.
用溅射法制备了SnO_2/ZnO薄膜,采用XPS,AFS,SEM,等手段研究了薄膜的表面及界面,发现在薄膜中,锌与锡存在不同深度的相互扩散,从SEM的断面观察可看到有一个明显的界面存在。XRD分析则表明:ZnO极易沿(002)面择优取向生长。并且SnO_2/ZnO膜具有良好的气敏性质。  相似文献   

9.
A sensitivity optimization method for the detection of an intermediate layer using a surface plasmon sensor is presented. The dependence of detection sensitivity on distance from the metal surface and the average refractive index over the sensing region are considered. Based on the calculated results, the sensitivity for detecting an intermediate layer in a multilayered sample is determined by varying the refractive index and thickness of each layer. It is shown that, in particular cases, controlling the refractive index and thickness increases the detection sensitivity. The proposed method is useful for designing multilayered samples.  相似文献   

10.
真空蒸发沉积薄膜再经热氧化获得n型掺La的ZnO和SnO2薄膜(玻璃衬底)研究掺La含量与热氧化工艺对薄膜的物相结构、表面形貌和气敏特性的影响.实验给出:掺La使薄膜表面颗粒细化,随La含量增加,ZnO,SnO2薄膜平均晶粒尺寸均增大.掺La可明显降低2种薄膜的气敏工作温度相比之下,掺La对ZnO薄膜的灵敏度改善明显优...  相似文献   

11.
Nanocrystalline ZnO films were deposited onto glass substrates by spray pyrolysis of zinc nitrate solutions and used as a liquid petroleum gas (LPG) sensor. The dependence of the LPG sensing properties on the molar concentration of zinc nitrate solutions was investigated. The ZnO films were oriented along (0 0 2) with the hexagonal crystal structure. The grain size and grain density increased with an increase in molar concentration of zinc nitrate solutions. The gas sensing properties for LPG of the ZnO films for LPG with different grain sizes were measured at different temperatures. The maximum sensitivity of 43% at the operation temperature of 673 K was found for the ZnO film prepared by spraying a 0.1 M solution. The ZnO thin films exhibited good sensitivity and rapid response–recovery characteristics to LPG. Further, it has been shown the gas sensitivity of the ZnO gas sensor depends upon its grain size.  相似文献   

12.
A good route (template-directed synthetic route) for the fabrication of ZnO hollow nanospheres (ZnO-HNSPs) was proposed. ZnO hollow nanosphere is a wonderful platform to immobilize glucose oxidase for glucose biosensor owing to the high specific surface area and high isoelectric point (IEP). Along with nafion and glucose oxidase (GOD), a glucose sensor was designed. Nafion/ZnO-HNSPs/GOD/GCE displays higher catalytic activity toward the glucose oxidation than Nafion/ZnO nano-Flowers/GOD/GCE. Linear response was obtained over a concentration range from 5.0 × 10−3 mM to 13.15 mM with a detection limit of 1.0 μM (S/N = 3), and the sensitivity was 65.82 μA/(mM cm2). Satisfyingly, the Nafion/ZnO-HNSPs/GOD/GCE could effectively avoid the interferences from the common interfering species such as uric acid (UA), ascorbic acid (AA), dopamine (DA) and fructose. The Nafion/ZnO-HNSPs/GOD modified electrode allows high sensitivity, excellently selective, stable, and fast amperometric sensing of glucose and thus is promising for the future development of glucose sensors.  相似文献   

13.
提出了一种环保、高效、低成本的传感器制作方法.应用等离子体射流喷枪沉积ZnO半导体材料,其中等离子体射流喷枪的气源为N2,电源采用输出频率为20 kHz的高频高压电源.使用Zn(NO3)2的水溶液作为前驱物,经过雾化装置形成气溶胶,气溶胶在等离子体的氛围中成功在衬底上沉积出一层ZnO半导体材料,通过XRD、SEM、UV-Vis等对其进行表征分析.并对基于该方法制备的ZnO湿度传感器性能进行表征.ZnO沉积时间为5 min时的灵敏度最高,低湿和高湿下分别为0.435 pF/% RH和19.634 pF/% RH,同时该样品的迟滞、响应时间与恢复时间亦是最优.  相似文献   

14.
为研究金属离子对金属氧化物半导体的表面敏化作用,以均匀沉淀法制备了ZnO纳米颗粒,并通过金属离子表面微滴注以及二次退火的方法制备出金属离子表面修饰的平面型ZnO气体传感器阵列。并以乙醚蒸汽为目标气体,进行气敏性能测试。发现大部分传感器对乙醚响应性很好,并且经过表面修饰,ZnO的乙醚敏感性能大多得到提升。特别地,Mg2+表面修饰的ZnO膜层展现了最优的气敏性能。X射线光电子能谱和光致发光谱证实,经过Mg2+表面修饰之后,氧空位缺陷浓度明显增加,并且表面羟基基团的数量显著减少,二者的协同作用构成了Mg2+表面修饰ZnO的敏化机制。  相似文献   

15.
This article presents the design, simulation, fabrication, and testing of a compact two‐port microwave resonator coated with nanomaterials for ethanol gas sensing applications. The proposed gas sensor consists of a transmission line loaded with three triangular split ring resonators for ethanol detection at three frequency bands viz. 2.2, 4.6, and 6.3 GHz. The transmission line has all‐pass characteristics in which band gaps are introduced using three split ring resonators. The TiO2 and ZnO nanorods are used as sensitive layers for the proposed sensing application. The nanorods, which are grown on a glass substrate of thickness 1 mm, are loaded on to the two‐port microwave resonator making the device sensitive to ethanol. The microwave behavior of the sensor is analyzed using the scattering parameters. The absorption of the ethanol gas causes frequency detuning which is used to analyze the presence of ethanol and its concentration. From the experiments, it is understood that there is an increase in the frequency shift with an increase in the concentration of ethanol gas. The sensing device with ZnO as a sensitive layer showed a higher average sensitivity of 2.35 compared to TiO2 whose average sensitivity is 1.29.  相似文献   

16.
ZnO and Sn doped ZnO (ZnO:Sn) thin films at various doping concentrations from 1 to 10 at.% were prepared by the sol-gel method for an ethanol sensing application. The Sn doping significantly influenced the film growth, grain size and response of the films. The XRD patterns showed that the hexagonal wurtzite structure of the ZnO film was retained even after the Sn doping. The crystallite grain sizes of the ZnO:Sn thin films at 0, 2 and 4 at.% were estimated by using the typical Scherrer's equation. The crystalline quality of the films at 6, 8 and 10 at.% of Sn was degenerated. Typical FESEM images demonstrated the different morphologies for the ZnO:Sn thin films at various Sn concentrations; many pores of various dimensions were observed depending on the doping level. A TEM analysis of the ZnO:Sn thin films at 0, 2 and 4 at.% was performed to verify the grain size. The optimum Sn doping level of ZnO:Sn thin film for ethanol sensing was estimated to be 4 at.%. The 4 at.% sample obtained the highest response to ethanol vapor in the 10-400 ppm level range at a low operating temperature of 250 °C. The sensing mechanism was explained by a variation in the sensitivity model from a neck-grain-boundary controlled sensitivity to a neck-controlled sensitivity. Our work demonstrates the ability to reduce the working temperature as well as to increase the response of ZnO thin film based gas sensors to detect ethanol, which would be of great merit for commercialized applications.  相似文献   

17.
以锌盐和碱为原料,采用水热和溶剂热法合成了三种形貌的氧化锌粉体,利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)和X射线光电子能谱仪(XPS)对产物的结构和形貌及表面化学状态进行了表征,并将粉体制备成厚膜型气敏元件,测试了其对几种还原性气体的气敏性能,结果表明:在工作温度为395℃时,三种形貌氧化锌对相同浓度的同种测试气体的灵敏度大小顺序为:菜花状氧化锌﹥棒状氧化锌﹥六棱柱状氧化锌。并对影响氧化锌材料气敏性的各种因素进行了分析。  相似文献   

18.
Crises affecting societies at a national level have regularly highlighted the importance of societies being prepared and resilient. There is a lack of standardized and proven procedures to ensure continuity of vital societal functions at a national level, as demonstrated in the recent COVID-19 pandemic. This article investigates how the methodology of business continuity management (BCM) can be used at a national level to increase resilience and societal safety. The article shows that a societal safety approach, where critical societal functions are based on societal values and basic individual needs, can be a fundamental platform for national continuity management. National risk assessments (NRAs), refer to the process and documentation of assessing risks at a national level. NRAs in three Nordic countries where societal safety is the basis for national disaster risk management (DRM) is analyzed, and in two other countries, which have worked extensively with NRAs. This article presents several possibilities and problems inherent in using the BCM process and methodology for national DRM. Finally, a rough proposal is given on how DRM can be developed at the national level with the help of concepts and methods from BCM that would increase societal safety.  相似文献   

19.
We present the fabrication and characterization of new type of flexible gas sensors, composed mainly of a bottom ZnO conductive layer on metal foil, vertically aligned ZnO nanorod channel, and graphene-based top conductive electrode. Multiple cycling tests demonstrated the ZnO nanorods (NRs) and graphene (Gr) hybrid architectures accommodated the flexural deformation without mechanical or electrical failure for bending radius below 0.8 cm under the repeated bending and releasing up to 100 times. In addition, the hybrid architectures fabricated on glass substrate showed good optical transmittance larger than ∼70% for visible light, indicating potential application in transparent devices. Furthermore, our gas sensors demonstrated the ppm level detection of ethanol gas vapor with the sensitivity (resistance in air/resistance in target gas) as high as ∼9 for 10 ppm ethanol.  相似文献   

20.
ZnO nanoparticles loaded with 0.2-2.0 at.% Pt have been successfully produced in a single step by flame spray pyrolysis (FSP) technique using zinc naphthenate and platinum(II) acetylacetonate, as precursors dissolved in xylene and their acetylene sensing characteristics have been investigated. The particle properties were analyzed by XRD, BET, TEM, SEM and EDS. Under the 5/5 (precursor/oxygen) flame condition, ZnO nanoparticles and nanorods were observed. The crystallite sizes of ZnO spherical and hexagonal particles were found to be ranging from 5 to 20 nm while ZnO nanorods were seen to be 5-20 nm in width and 20-40 nm in length. In addition, very fine Pt nanoparticles with diameter of ∼1 nm were uniformly deposited on the surface of ZnO particles. From gas-sensing characterization, acetylene sensing characteristics of ZnO nanoparticles is significantly improved as Pt content increased from 0 to 2  at.%. The 2 at.% Pt loaded ZnO sensing film showed an optimum C2H2 response of ∼836 at 1% acetylene concentration and 300 °C operating temperature. A low detection limit of 50 ppm was obtained at 300 °C operating temperature. In addition, Pt loaded ZnO sensing films exhibited good selectivity towards hydrogen, methane and carbon monoxide.  相似文献   

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