共查询到19条相似文献,搜索用时 187 毫秒
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一种具有亚波长光栅结构的光探测器的设计 总被引:2,自引:0,他引:2
高速智能光纤通信系统和网络的飞速发展对光电探测器提出了更高要求.利用严格耦合波(RCWA)理论,给出了在亚波长光栅(SWG)下方具有分布布拉格反射镜(DBR)结构的理论分析模型,将这种结构作为反射镜应用于谐振腔增强型光探测器(RCE PD)的设计中.仿真表明由于SWG的引入,只需要4对λ/4厚度的InGaAsP/InP系DBR,可使整体膜系结构实现在中心波长1.55 μm处反射率达到99.7%,在1.40 μm至1.62/μm范围内反射率高于99%.引入SWG后的RCE PD在1.55 μm附近的量子效率接近90%,串扰衰减系数与量子效率的乘积超过15 dB.有效地解决了InGaAsP/InP介质膜系DBR作为谐振腔反射镜反射率低、反射带宽窄的问题. 相似文献
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介绍了一种新型长波长InP基一镜斜置三镜腔型(OMITMiC)光电探测器,并对其进行了数值模拟。介绍了该光电探测器的两项关键制备工艺。首先,利用动态掩膜湿法腐蚀技术,通过调节HCl:HF:CrO3腐蚀溶液的选择比。在与InP晶格匹配的In0.72Ga0.28As0.6P0.4外延层上制备出了不同倾角的楔形结构。其次,利用选择性湿法腐蚀技术,通过FeCl3;H2O溶液对In0.53Ga0.47As牺牲层的腐蚀,制备出了具有InP/空气隙的高反射率分布式布拉格反射镜(DBR)。 相似文献
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长波长、高灵敏度的InP/InGaAs谐振腔光电探测器 总被引:2,自引:0,他引:2
本文报道了一种能够实现高速、高灵敏度的InP基谐振腔增强型(RCE)光电探测器。它采用衬底入光方式,解决了在InP衬底上外延生长的InP/InGaAs介质膜分布布拉格反射镜(DBR)反射率低的问题,该探测器的吸收层厚度为0.2μm,在波长1.583μm处获得了80%的峰值量子效率,同时为了降低探测器的固有电容,利用质子注入技术使得器件的部分电极绝缘,实验结果表明质子注入不影响RCE光电探测器的量子效率。 相似文献
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设计并研制了由InAsP/InGaAsP应变补偿多量子阱有源层、SiO2/TiO2介质薄膜和GaAs/Al(Ga)As半导体分布布拉格反射镜(DBR)构成的垂直腔面发射激光器(VCSEL).采用直接键合技术实现InP基有源层与GaAs基DBR的晶片融合,并经过侧向湿法腐蚀定义电流限制孔径和沉积介质薄膜DBR等关键器件工艺,研制出InAsP/InGaAsP量子阱垂直腔面发射激光器,其阈值电流为13.5mA,单模激射波长为1288.6nm. 相似文献
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倒装焊组装的光电混合集成RCE探测器面阵 总被引:2,自引:2,他引:0
报道了一种可用于并行光传输系统的64×64光探测器面阵。器件结构采用谐振腔增强型(RCE),吸收区由3层InGaAs/GaAs量子阱构成,谐振腔是由2组多层布拉格结构的反射镜组成,工作波长位于980nm。该器件利用倒装焊技术,将GaAs基的谐振腔增强型光探测器面阵与相应的Si基标准CMOS集成电路混合集成在一起,形成具备64×64路光并行接收及处理的大规模光电集成探测器面阵器件,并对光探测器面阵的主要特性进行了测试,测试结果显示该面阵具有均匀的电特性,反向偏压均大于14V,暗电流约为10nA数量级。 相似文献
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Long-wavelength resonant vertical-cavity LED/photodetector with a 75-nm tuning range 总被引:2,自引:0,他引:2
G.L. Christenson A.T.T.D. Tran Z.H. Zhu Y.H. Lo M. Hong J.P. Mannaerts R. Bhat 《Photonics Technology Letters, IEEE》1997,9(6):725-727
A design for a highly tunable long-wavelength LED/photodetector has been investigated. The device consists of a GaAs-based distributed Bragg reflector (DBR) that is wafer-bonded to InP-based active layers, with a surface-micromachined tunable top DBR mirror to produce the wavelength shift. A 1.5-/spl mu/m device has been fabricated with a continuous tuning range of 75 nm. An extinction ratio of greater than 20 dB existed across the entire tuning range. 相似文献
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高速长波长光探测器是高速光纤通信系统和网络的关键器件,它要求光探测器具有宽的频率响应带宽和高量子效率。常用的PIN光探测器由于量子效率和高速性能均受到吸收层厚度的牵制,使得二者相互制约,成为一对矛盾。谐振腔增强型(RCE)光探测器为这一矛盾的解决提供了有效的方案。基于谐振腔增强型光探测器的实际设计和制作模型,分析了器件吸收层中的光场分布,并将其运用于载流子的连续方程,从理论上详细地分析了器件的高速响应特性,给出了计算结果。针对研制的高速长波长谐振腔增强型光探测器,进行了理论分析和实际器件测试的结果比较,得到了比较一致的结果。 相似文献
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I-Hsing Tan Dudley J.J. Babic D.I. Cohen D.A. Young B.D. Hu E.L. Bowers J.E. Miller B.I. Koren U. Young M.G. 《Photonics Technology Letters, IEEE》1994,6(7):811-813
We demonstrate greater than 90% quantum efficiency in an In0.53Ga0.47As photodetector with a thin (900 Å) absorbing layer. This was achieved by inserting the In0.53 Ga0.47As/InP epitaxial layer into a microcavity composed of a GaAs/AlAs quarter-wavelength stack (QWS) and a Si/SiO2 dielectric mirror. The 900-Å-thick In0.53 Ga0.47As layer was wafer fused to a GaAs/AlAs mirror, having nearly 100% power reflectivity. A Si/SiO2 dielectric mirror was subsequently deposited onto the wafer-fused photodiode to form an asymmetric Fabry-Perot cavity. The external quantum efficiency and absorption bandwidth for the wafer-fused RCE photodiodes were measured to be 94±3% and 14 nm, respectively. To our knowledge, these wafer-fused RCE photodetectors have the highest external quantum efficiency and narrowest absorption bandwidth ever reported on the long-wavelength resonant-cavity-enhanced photodetectors 相似文献
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Gebretsadik H. Qasaimeh O. Hongtao Jiang Bhattacharya P. Caneau C. Bhat R. 《Lightwave Technology, Journal of》1999,17(12):2595-2604
It is possible to grow defect-free strained layers on patterned substrates (mesas or grooves) up to thicknesses far exceeding the critical thickness. Defect nucleation and propagation are inhibited in such growth. We have exploited this property to propose a novel InP-based 1.55-μm vertical cavity surface emitting lasers (VCSEL's). Careful photoluminescence and transmission electron microscopy (TEM) studies have confirmed that there are no propagating defects in the GaAs/AlxGa1-xAs distributed Bragg reflector (DBR) grown on the patterned InP-based heterostructures, specifically in the multiquantum-well (MQW) region. Lasers were designed with InP/InGaAsP bottom mirrors, InAlAs-oxide current confinement and short-stack GaAs/Al xOy top DBR mirrors. An optimal reflectivity and a maximum wall plug efficiency are determined analytically for this structure. In addition, a theoretical analysis of the modulation response of this device is performed using a rate equation model. Both analyzes show the potential of such a device for implementation in practical designs where high power and modulation bandwidth are required. Lasers with 8-40 μm diameter have been fabricated and characterized. A threshold current of 5 mA is observed at 15°C for an 8 μm diameter device; and up to 60 μW of light output is recorded 相似文献
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在PIN型光探测器的基础上制备了一种适用于波分复用系统的具有平顶陡边响应的长波长光探测器。利用低压金属有机化学气相沉积(LP-MOCVD)设备在GaAs衬底上二次外延生长了具有台阶结构的GaAs/AlGaAs滤波腔和InP基PIN光探测器。高质量的GaAs/InP异质外延采用了低温缓冲层生长工艺;具有台阶结构的Fabry-Pérot(F-P)滤波腔采用了纳米量级台阶的制备方法。通过理论计算优化了实现平顶陡边光谱响应特性的器件结构;并通过实验成功制备出了具有平顶陡边响应性能的光探测器,器件的工作波长位于1 549nm,峰值量子效率大于25%,0.5dB光谱响应线宽为3.9nm,3dB光谱响应线宽为4.2nm,响应速率达到17GHz。 相似文献
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The 1.55-μm quantum-dot (QD) micropillar cavities are strongly required as single photon sources (SPSs) for silica-fiber-based quantum information processing. Theoretical analysis shows that the adiabatic distributed Bragg reflector (DBR) structure may greatly improve the quality of a micropillar cavity. An InGaAsP/InP micropillar cavity is originally difficult, but it becomes more likely usable with inserted tapered (thickness decreased towards the center) distributed DBRs. Simulation turns out that, incorporating adiabatically tapered DBRs, a Si/SiO2-InP hybrid micropillar cavity, which enables weakly coupling InAs/InP quantum dots (QDs), can even well satisfy strong coupling at a smaller diameter. Certainly, not only the tapered structure, other adiabatic designs, e.g., both DBR layers getting thicker and one thicker one thinner, also improve the quality, reduce the diameter, and degrade the fabrication difficulty of Si/SiO2-InP hybrid micropillar cavities. Furthermore, the problem of the thin epitaxial semiconductor layer can also be greatly resolved by inserting adiabatic InGaAsP/InP DBRs. With tapered DBRs, the InGaAsP/InP-air-aperture micro-pillar cavity serves as an efficient, coherent, and monolithically producible 1.55-μm single-photon source (SPS). The adiabatic design is thus an effective way to obtain prospective candidates for 1.55-μm QD SPSs. 相似文献
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A 1.3 ?m InP/InGaAsP channelled-substrate buried-heterostructure laser is monolithically integrated with a monitoring photodetector. The lasers have threshold currents in the range of 25?30 mA and the photodetector provides ~ 15 ?A of photocurrent per milliwatt of laser power. 相似文献