High-resolution constant-height imaging with apertured silicon cantilever probes

We present high-resolution aperture probes based on non-contact silicon atomic force microscopy (AFM) cantilevers for simultaneous AFM and near-infrared scanning near-field optical microscopy (SNOM). For use in near-field optical microscopy, conventional AFM cantilevers are modified by covering their tip side with an opaque aluminium layer. To fabricate an aperture, this metal layer is opened at the end of the polyhedral probe using focused ion beams (FIB). Here we show that apertures of less than 50 nm can be obtained using this technique, which actually yield a resolution of about 50 nm, corresponding to λ/20 at the wavelength used. To exclude artefacts induced by distance control, we work in constant-height mode. Our attention is particularly focused on the distance dependence of resolution and to the influence of slight cantilever bending on the optical images when scanning at such low scan heights, where first small attractive forces exerted on the cantilever become detectable.     

Near-field optics on silicon–electrolyte junctions

A technique allowing near-field photocurrent (PC) mapping of silicon surfaces in contact with an electrolyte is presented. The illumination source is an optical fibre tip with a 100-nm aperture. A shear force detection system controls the tip–sample distance while scanning the tip across the silicon–electrolyte interface. Topographic and PC images on SiO₂/Si mesas both show 300 nm resolution. It is shown that this PC contrast is induced by the tip–topography interaction and hence the PC resolution is limited by the resolution of the topography. Indeed, PC mapping on topography-less patterned porous-silicon/silicon samples shows that the lateral resolution is only limited by the aperture size which is of the order of 100 nm.     

Piezoresistor-equipped fluorescence-based cantilever probe for near-field scanning

Scanning near-field optical microscopes (SNOMs) with fluorescence-based probes are promising tools for evaluating the optical characteristics of nanoaperture devices used for biological investigations, and this article reports on the development of a microfabricated fluorescence-based SNOM probe with a piezoresistor. The piezoresistor was built into a two-legged root of a 160-microm-long cantilever. To improve the displacement sensitivity of the cantilever, the piezoresistor's doped area was shallowly formed on the cantilever surface. A fluorescent bead, 500 nm in diameter, was attached to the bottom of the cantilever end as a light-intensity-sensitive material in the visible-light range. The surface of the scanned sample was simply detected by the probe's end being displaced by contact with the sample. Measuring displacements piezoresistively is advantageous because it eliminates the noise arising from the use of the optical-lever method and is free of any disturbance in the absorption or the emission spectrum of the fluorescent material at the probe tip. The displacement sensitivity was estimated to be 6.1 x 10(-6) nm(-1), and the minimum measurable displacement was small enough for near-field measurement. This probe enabled clear scanning images of the light field near a 300 x 300 nm(2) aperture to be obtained in the near-field region where the tip-sample distance is much shorter than the light wavelength. This scanning result indicates that the piezoresistive way of tip-sample distance regulation is effective for characterizing nanoaperture optical devices.     

Three-dimensional analysis of light propagation through uncoated near-field fibre probes

The near-field emission from uncoated tapered fibre probes is investigated for different probe geometries. The three-dimensional model calculations are based on Maxwell's curl equations and describe the propagation of a 10 fs optical pulse (λ = 805 nm) through tapers of different lengths and different diameters of the taper exit. The numerical evaluation is done with a finite difference time domain code. Two tapers with cone angles of 50°, with taper lengths of 1.5 µm and 1.0 µm and exit diameters of 100 nm and 520 nm, respectively, are considered. We find that without sample the short taper with large exit diameter optimizes both light transmission and spatial resolution. In the presence of a sample with a high dielectric constant, however, the spatial near-field distribution changes drastically for both taper geometries. We find a pronounced increase in spatial resolution, down to about 250 nm inside the medium. This collimation of the near-field distribution arises from interferences between emitted and reflected light from the sample surface and from a collimation effect that the field experiences in the high-index semiconductor material. The combination of high spatial resolution and transmission and collection efficiencies makes such probes interesting for spectroscopic investigations, as demonstrated by recent experiments.     

Microfabricated silicon dioxide cantilever with subwavelength aperture

We have developed a microfabricated SiO₂ cantilever with subwavelength aperture for scanning near-field optical microscopy (SNOM), to overcome the disadvantages of conventional optical fibre probes such as low reproducibility and low optical throughput. The microcantilever, which has a SiO₂ cantilever and an aperture tip near the end of the cantilever, is fabricated in a reproducible batch process. The circular aperture with a diameter of 100–150 nm is formed by a focused ion-beam technique. Incident light is directly focused on the aperture from the rear side of the cantilever using a focusing objective, and high optical throughput (10⁻² to 10⁻³) is obtained. The microcantilever can be operated as a SNOM probe in contact mode or in dynamic mode.     

Shear force imaging of DNA in a near-field scanning optical microscope (NSOM)

A near-field scanning optical module has been constructed as an accessory for a Nanoscope IIIa commercial scanning probe microscope. Distance feedback and topographic registration are accomplished with an uncoated optical fibre scanning tip by implementation of the shear force technique. The tip is driven by a piezoelectric actuator at a resonance frequency of 8–80 kHz. A laser diode beam is scattered by the tip and detected by a split photodiode, with lock-in detection of the difference signal. The amplitude ( r ) and phase (τ) responses were characterized as a function of the calibrated tip–sample separation. Using an r cos τ feedback signal, imaging of pUC18 relaxed circular plasmid DNA spread on mica precoated with cetylpyridinium chloride was achieved. The apparent width (28 ± 5 nm) was approximately four times that achieved by scanning force measurements with the same instrument; the apparent height of the DNA (0.6 ± 0.3 nm) was similar with the two techniques. These results demonstrate the applicability of the shear force signal for imaging biological macromolecules according to topography and in conjunction with the optical signals of a near-field scanning optical microscope (NSOM).     

Quantum theoretical approach to a near-field optical system

The paper proposes a quantum theoretical formulation of an optical near-field system based on the projection-operator method. Special attention is paid to a nanometric probe tip–quantum mechanical sample system, whose interactions are essential for describing such phenomena as atom guidance and manipulation, or local excitation of a single quantum dot. The relationship to the virtual photon model − an intuitive model − is discussed, and the latter's empirical assumption of the Yukawa-type interaction between probe and sample is justified theoretically. Several applications of the theory are briefly outlined.     

Dynamic etching method for fabricating a variety of tip shapes in the optical fibre probe of a scanning near-field optical microscope

A novel etching method for an optical fibre probe of a scanning near-field optical microscope (SNOM) was developed to fabricate a variety of tip shapes through dynamic movement during etching. By moving the fibre in two-phase fluids of HF solution and organic solvent, the taper length and angle can be varied according to the movement of the position of the meniscus on the optical fibre. This method produces both long (sharp angle) and short (wide angle) tapered tips compared to tips made with stationary etching processes. A bent-type probe for a SNOM/AFM was fabricated by applying this technique and its throughput efficiency was examined. A wide-angle probe with a 50° angle at the tip showed a throughput efficiency of 3.3 × 10⁻⁴ at a resolution of 100 nm.     

A single gold particle as a probe for apertureless scanning near-field optical microscopy

We report on the fabrication, characterization and application of a probe consisting of a single gold nanoparticle for apertureless scanning near-field optical microscopy. Particles with diameters of 100 nm have been successfully and reproducibly mounted at the end of sharp glass fibre tips. We present the first optical images taken with such a probe. We have also recorded plasmon resonances of gold particles and discuss schemes for exploiting the wavelength dependence of their scattering cross-section for a novel form of apertureless scanning near-field optical microscopy.     

Spectroscopic scanning near-field optical microscopy with a free electron laser: CH2 bond imaging in diamond films

Hydrogen chemistry in thin films and biological systems is one of the most difficult experimental problems in today's science and technology. We successfully tested a novel solution, based on the spectroscopic version of scanning near-field optical microscopy (SNOM). The tunable infrared radiation of the Vanderbilt free electron laser enabled us to reveal clearly hydrogen-decorated grain boundaries on nominally hydrogen-free diamond films. The images were obtained by SNOM detection of reflected 3.5 µm photons, corresponding to the C–H stretch absorption, and reached a lateral resolution of 0.2 µm, well below the λ/2 (λ= wavelength) limit of classical microscopy.     

Towards phonon photonics: scattering-type near-field optical microscopy reveals phonon-enhanced near-field interaction

Diffraction limits the spatial resolution in classical microscopy or the dimensions of optical circuits to about half the illumination wavelength. Scanning near-field microscopy can overcome this limitation by exploiting the evanescent near fields existing close to any illuminated object. We use a scattering-type near-field optical microscope (s-SNOM) that uses the illuminated metal tip of an atomic force microscope (AFM) to act as scattering near-field probe. The presented images are direct evidence that the s-SNOM enables optical imaging at a spatial resolution on a 10 nm scale, independent of the wavelength used (λ=633 nm and 10 μm). Operating the microscope at specific mid-infrared frequencies we found a tip-induced phonon-polariton resonance on flat polar crystals such as SiC and Si₃N₄. Being a spectral fingerprint of any polar material such phonon-enhanced near-field interaction has enormous applicability in nondestructive, material-specific infrared microscopy at nanoscale resolution. The potential of s-SNOM to study eigenfields of surface polaritons in nanostructures opens the door to the development of phonon photonics—a proposed infrared nanotechnology that uses localized or propagating surface phonon polaritons for probing, manipulating and guiding infrared light in nanoscale devices, analogous to plasmon photonics.     

Environmental sensors based on micromachined cantilevers with integrated read-out

An AFM probe with integrated piezoresistive read-out has been developed and applied as a cantilever-based environmental sensor. The probe has a built-in reference cantilever, which makes it possible to subtract background drift directly in the measurement. Moreover, the integrated read-out facilitates measurements in liquid. The probe has been successfully implemented in gaseous as well as in liquid experiments. For example, the probe has been used as an accurate and minute thermal sensor and as a humidity sensor. In liquid, the probe has been used to detect the presence of alcohol in water.     

Self-sensing piezoresistive cantilever and its magnetic force microscopy applications

A newly developed Si self-sensing piezoresistive cantilever is presented. Si piezoresistive cantilevers for scanning microscopy are fabricated by Si micro-machining technique. The sensitivity of the piezoresistive cantilever is comparable to the current laser detecting system. Topographic images are successfully obtained with the piezoresistive cantilever and some comparisons are made with the laser detecting system. Furthermore, the magnetic film (Co-Cr-Pt) is coated on the tip of the piezoresistive cantilever for magnetic force microscopy (MFM) application. The magnetic images are successfully obtained with the self-sensing MFM piezoresistive cantilever. The self-sensing piezoresistive cantilevers have been successfully applied in scanning probe microscopy and MFM.     

Development of dual-probe atomic force microscopy system using optical beam deflection sensors with obliquely incident laser beams

We developed a dual-probe (DP) atomic force microscopy (AFM) system that has two independently controlled probes. The deflection of each cantilever is measured by the optical beam deflection (OBD) method. In order to keep a large space over the two probes for an objective lens with a large numerical aperture, we employed the OBD sensors with obliquely incident laser beams. In this paper, we describe the details of our developed DP-AFM system, including analysis of the sensitivity of the OBD sensor for detection of the cantilever deflection. We also describe a method to eliminate the crosstalk caused by the vertical translation of the cantilever. In addition, we demonstrate simultaneous topographic imaging of a test sample by the two probes and surface potential measurement on an α-sexithiophene (α-6T) thin film by one probe while electrical charges were injected by the other probe.     

Evaluation of nano-optical probe from scanning near-field optical microscope images

We studied a nanometre-sized optical probe in a scanning near-field optical microscope. The probe profile is determined by using a knife-edge method and a modulated transfer function evaluation method which uses nanometre-sized line-and-space tungsten patterns (with spaces 1 μm to 50 nm apart) on SiO₂ substrates. The aluminium-covered, pipette-pulled fibre probe used here has two optical probes: one with a large diameter (350 nm) and the other with a small diameter (10 nm). The small-diameter probe has an optical intensity ≈63 times larger than that of the large-diameter probe, but the power is about 1/25 of that of the large probe.     

Apertureless near-field optical microscopy via local second-harmonic generation

We describe an apertureless scanning near-field optical microscope (SNOM) based on the local second-harmonic generation enhancement resulting from an electromagnetic interaction between a probe tip and a surface. The imaging mechanisms of such apertureless second-harmonic SNOM are numerically studied. The technique allows one to achieve strongly confined sources of second-harmonic light at the probe tip apex and/or surface area under the tip. First experimental realization of this technique has been carried out using a silver-coated fibre tip as a probe. The experiments reveal a strong influence of the tip–surface interaction as well as polarization of the excitation light on images obtained with apertureless second-harmonic SNOM. The technique can be useful for studying the localized electromagnetic excitations on surfaces as well as for visualization of lateral variations of linear and nonlinear optical properties of surfaces.     

An evanescent-field optical microscope

The classic diffraction limit of resolution in optical microscopy (～γ/2) can be overcome by detecting the diffracted field of a submicrometre-size probe in its near field. The present stage of this so-called scanning near-field optical microscopy (SNOM) is reviewed. An evanescent-field optical microscope (EFOM) is presented in which the near-field regime is provided by the exponentially decaying evanescent field caused by total internal reflection at a refractive-index transition. A sample placed in this field causes a spatial variation of the evanescent field which is characteristic for the dielectric and topographic properties of the sample. The evanescent field is frustrated by a dielectric probe and thus converted into a radiative field. In our case the probe consists either of an etched optical fibre or of a highly sharpened diamond tip. The probe is scanned over the sample surface with nanometre precision using a piezo-electric positioner. The distance between probe and sample is controlled by a feedback on the detected optical signal. The resolution of the microscope is determined by both the gradient of the evanescent field and the sharpness of the tip. Details of the experimental set-up are discussed. The coupling of the evanescent field to the submicrometre probe as a function of probe-sample distance, angle of incidence and polarization has been characterized quantitatively. The observed coupling is generally in agreement with presented theoretical calculations. Microscopy has been performed on a regular latex sphere structure, which clearly demonstrates the capacity of the evanescent-field optical microscope for nanometre-scale optical imaging. Resolution is typically 100 nm laterally and 10 nm vertically. The technique is promising for biological applications, especially if combined with optical spectroscopy.     

The height regulation of a near-field scanning optical microscope probe tip

A nonoptical detection of the optical fibre tip has been developed. By detecting the output signal from a tiny piezoelectric detector attached to the vibrating fibre tip, the distance between the fibre tip and the sample has been successfully controlled. The frequency responses of the system composed of tip, the dither and the detector have been studied. The difference between the shear-force detection and the tapping-mode detection is discussed. It is found that the shear force exerted on the tip reduces the vibration amplitude with an unvaried resonance frequency. However, in the tapping mode, the resonance frequency varies with the tip–sample distance as the force is exerted on the fibre tip only within a half period. This requires better adjustments for the tapping-mode detection.     

Polarization properties of bent-type optical fibre probe for magneto-optical imaging

Quantitative evaluation of magneto-optical parameters is necessary in order to apply scanning near-field optical microscope (SNOM) technology to the study of magnetism on the mesoscopic scale. For this purpose, quantitative knowledge of polarization transmission properties through an optical fibre probe is required. We therefore determined the Stokes parameters of the bent-type optical fibre probe that is used as a cantilever for atomic force microscope operation in our SNOM system. As a result, it is found that the degree of polarization is maintained in the light emitted from the probe, although the probe acts as if it were a wave plate. This anisotropic polarization state of the light emitted from the probe was compensated for by using a Berek compensator placed in front of the fibre coupler.