用于硅基氮化镓可调微镜的静电梳齿型微驱动器设计

提出并设计了一种用于硅基氮化镓(GaN)可调微镜的静电梳齿型微驱动器.利用有限元软件建立了该器件的几何结构模型,对器件的结构进行了仿真优化.此外,采用微机电系统(MEMS)加工工艺,制作出了用于硅基氮化镓可调微镜的梳齿型微驱动器,并对其驱动特性进行测试.测试结果表明:所制作的微驱动器的位移随着电压的变化呈二次方关系,与仿真结果基本一致.当加载驱动电压为200 V时,微驱动器的驱动位移可达到1.08 μm.     

基于ARM和FPGA的DMD驱动波形实验平台

提出了一种基于ARM和FPGA的数字微镜器件(DMD)驱动波形实验平台的设计,该设计由数字微镜驱动器和电压转换器两部分构成。阐述了数字微镜驱动器和电压转换器的硬件工作原理,以及ARM微控制器和FPGA的软件工作流程。实验结果表明,该系统能够达到预计的设计要求。     

MEMS微镜动力学模型修正技术研究

针对MEMS微镜动力学试验周期长、成本高的问题,通过Solidworks软件建立MEMS微镜几何模型,通过Hypermesh软件建立有限元模型。针对微镜镀层材料参数、厚度难以测量,以及微镜动力学特性受镀层加工工艺影响的问题,用元素型模型修正方法对模型进行修正,修正后,模型特征频率及振型与试验结果基本一致,表明通过元素型模型修正方法可以实现微镜模型的有效修正,修正后的模型动力学分析结果与实验接近。     

电热驱动Bimorph微执行器对流系数估算方法研究

随着电热驱动MEMS器件尺寸进一步缩小,传统热对流系数的取值已无法满足微系统分析建模需求。针对电热型Bimorph结构的MEMS微镜驱动器,通过分析其温度分布,并以其平均温度为参考指标建立简单热阻和对流热阻分段模型,推算出微尺度下精确的对流系数,提高了微执行器设计模型的驱动性能。经理论计算和实验测试验证,对流系数值的误差在8.1%以内,满足实际设计需求,验证了该方法的合理性和可行性。     

压电驱动器的机电动力学模型研究

为深入研究压电驱动器的输入-输出特性曲线,建立了压电驱动器的机电动力学模型,画出了机电模型的信号流图,解释了压电驱动器产生非线性滞环现象的成因;研发了压电式二维微动平台和电荷反馈式驱动电源,对模型及其预测结果进行了实验验证.理论分析与实验数据表明,压电驱动器外部电荷反馈回路的作用与正压电效应所形成的内部电荷反馈回路的作用是一致的.     

MEMS近红外光谱仪微镜驱动控制系统研发

针对微机电系统（MEMS）近红外光谱仪中MEMS微镜驱动系统的耦合与复杂扰动问题,提出了一种基于扰动观测器（DOB）与模型预测控制（MPC）的复合控制结构。通过分析MEMS微镜的驱动工作原理,建立MEMS微镜偏转角与驱动电压的传递函数模型,设计了MPC以消除系统耦合,通过分析系统扰动模型,设计了DOB实现对系统内部与外部扰动的集中监测。仿真研究与实验测试结果表明：基于DOB MPC复合结构的MEMS微镜驱动控制系统,既可以有效抑制系统的外部扰动,又可以抑制由模型失配和变量耦合导致的内部扰动。     

永磁驱动器的多目标参数优化设计

为了满足永磁驱动器在实际运行中具有较大的输出转矩和较小的涡流损耗的目的,建立了永磁驱动器的3维有限元模型,分析了永磁驱动器的主要结构参数对输出转矩和涡流损耗的影响。采用正交实验设计方法,获得了用于非线性永磁驱动器建模的样本空间。采用支持向量机建立永磁驱动器的非线性回归模型,并用多目标微粒群算法进行永磁驱动器的结构参数多目标优化,得到了最优结构参数解。有限元仿真实验对比优化前后永磁驱动器的涡流密度和受力分布的结果,验证了该优化方法用于永磁驱动器结构参数优化是可行的。优化结果使永磁驱动器可在涡流损耗较小的情况下获得较大的输出转矩,从而进一步提高系统的工作效率。     

计及边缘效应的扭转微镜的动态特性分析

基于计及边缘效应的矩形平行板的静电力计算公式,建立了扭转微镜的动力学模型,采用Rom-berg数值积分法计算驱动力,并借助迭代修正齐次扩容精细积分法求解非线性动力方程.数值计算结果表明:电压、微镜和电极的几何尺寸等参数都会影响微镜的边缘效应,从而使微镜的动态响应产生较大的误差,在分析微镜力学性能时应考虑边缘效应的影响.     

平面线圈型MEMS微电磁驱动器的理论分析与实验研究

介绍了一种平面线圈型电磁驱动的MEMS微驱动器,基于分段磁路的网络方程法,针对微电磁驱动器所采用的平面线圈的结构特点,比较了考虑磁动势的分布效应和传统的集总处理两种方法所建立的平面线圈微驱动器的非线性磁路模型.实验结果表明考虑线圈绕组半径不同而产生的分布效应可以为平面线圈型微驱动器建立可靠的模型,便于定量分析微驱动器结构物理参数对于磁通分布和电磁力的影响,从而为进一步优化设计该微电磁驱动器提供了理论分析依据.     

变刚度关节驱动器动力学特性的分析与研究

提出了一种以板簧为弹性元件、以螺旋盘为刚度调节机构的变刚度关节驱动器,研究了该关节驱动器的刚度调节特性.建立了包括电机、同步带及谐波减速器的柔顺性和摩擦特性的动力学模型.通过位置阶跃和击球实验验证了动力学模型的正确性.研究表明变刚度关节驱动器的爆发性不仅与关节刚度有关,还与能量释放的时机有关,为提升机器人与人的交互作业的动态特性提供了理论依据.     

Micro-mirror laser scanner combined with a varifocal mirror

A laser beam scanning system consisting of a scanning micro-mirror and a varifocal micro-mirror is fabricated for laser beam sensing with variable beam diameter. The scanning micro-mirror is operated under the resonant oscillation condition with an electrostatic comb-drive actuator. The varifocal micro-mirror is driven by a bending moment generated at the circumference of mirror with a parallel-palate electrostatic actuator. The scanning micro-mirror and the varifocal mirror are fabricated on a silicon on insulator wafer. The rotational angle of 9° at 766 Hz is obtained at the voltage of 300 V. The spot size of the laser beam is adjusted from 0.5 to 3.5 cm at the distance of 43 m by changing varifocal voltage. The proposed scanning system can be useful for several sensing techniques.     

基于硅塑性变形的蛇形梁垂直梳齿驱动器

设计了基于硅塑性变形的垂直梳齿驱动器,中央可动微镜由四组蛇形曲折梁支撑。驱动器的制作采用硅—硅键合技术,首先利用DRIE干法刻蚀技术释放可动梳齿与固定梳齿,然后通过各向异性湿法腐蚀制作的施压凸台实现可动梳齿和固定梳齿的精确自对准,最后利用硅塑性变形使可动梳齿和固定梳齿在垂直方向上产生位错,成功制作出在Z方向依靠位错梳齿实现垂直驱动的蛇形梁静电梳齿驱动器。     

基于压电陶瓷微位移执行器的精密定位技术研究

阐述了压电陶瓷微位移执行器的驱动原理,介绍了执行器的性能与应用情况;利用自行设计的输出特性测试系统,对WTYD0808042压电陶瓷微位移执行器进行了相关实验研究,分析了执行器的非线性和迟滞特性;采用Duhem算子建立了压电执行器的迟滞模型,利用建立的Duhem模型作为PID反馈控制的前馈环节进行闭环精密定位控制的研究。实验结果表明:该模型能够有效降低非线性和迟滞特性对压电执行器位移输出精度的影响,提高执行器的动态响应特性。     

高速MEMS扫描微镜动态变形特性研究

扭转镜面的动态形变是影响显示成像用MEMS扫描微镜光学分辨率的主导因素,研究了高速转动的MEMS扫描微镜的动态形变特性,得到了相关有用的结论。结果表明当MEMS扫描微镜镜面几何尺寸一定时,如果要获得系统衍射极限光学分辨率,需要对转动频率,扭转角度和镜面厚度进行优化设计和选择,简单通过增加镜面厚度保证光学分辨率的方法不利于MEMS扫描微镜综合性能的改善和提高。     

On a tunable bistable MEMS-theory and experiment

A tunable micromechanical bistable system is presented in this paper. It consists of a long slender micromechanical beam attached to an actuator. The beam is subjected to a transverse force at the middle and a residual stress developed during fabrication. The actuator generates a force along the axial direction of the beam, and is shared by the beam and springs of the actuator. If the total axial load on the beam is compressive and exceeds a critical value, then the beam buckles along the transverse direction and it has two possible equilibrium states. Thus, the actuator and beam together become a bistable system. An analytical model is presented to characterize the system. The model is based on the first mode of buckling of the beam. The model accounts for the elastic axial shortening of the beam and the nonlinear coupling between the beam and actuator. The main result of this paper is a closed-form relation between the transverse force and corresponding equilibrium transverse displacement of the beam for a given actuator force. An experimental micromechanical device is designed and fabricated to verify the theoretical model. Excellent correspondence is found between theory and experiment, as if the experimental device emulates the mathematical model, which is an important result of this paper, since now experimental studies, both quasi-static and dynamic, of bistable systems are possible, which are otherwise difficult to conduct with macrosystems. Several examples of possible applications of the bistable system are provided, including digital sensing of physical parameters     

Numerical simulation of a polysilicon thermal flexure actuator

 An electrothermal equation of a polysilicon thermal flexure actuator is presented, which takes heat conduction, air convection and radiation into account. A numerical method is developed to solve the equation. The deflection model based on the matrix displacement method, i.e. finite element method (FEM) in structural mechanics, is given. It transforms deflection equations into a matrix and is easy to calculate numerically. Simulation results for the actuator with typical dimensions are presented. Discussions are finally given. Received: 28 April 2000/Accepted: 9 January 2001     

Mathematical model with sensor and actuator for a transelevator

In this paper, the structural, sensor, and actuator mathematical models of a transelevator are presented; after, the mathematical model with sensor and actuator of the transelevator is obtained by using the combination of the above mentioned mathematical models. The proposed mathematical model is validated comparing the simulation results against the experimental results. Finally, the stability analysis of the aforementioned model is studied.     

Dynamic model with sensor and actuator for an articulated robotic arm

In this paper, the dynamic model with sensor and actuator for the articulated robotic arm is obtained by using the combination of the structural, the sensor, and the actuator dynamic models. The proposed approach is validated comparing the simulation results against the experimental results.     

车辆悬架用电磁执行器的建模与试验研究

应用电磁感应的基本原理,设计了一种新型的车辆主动悬架用电磁直线执行器,该执行器具有响应快,出力大和动行程大的特点。通过两种不同的建模手段,即有限元建模和集总元件动力学建模的电磁力仿真对比分析,两者基本吻合,表明了执行器模型的准确性。利用所建立的有限元模型,研究了执行器结构参数如气隙厚度和次级铜层厚度对电磁力的影响规律,并选取合理的参数进行执行器的样件试制。通过对加工后的样机模型进行电磁力响应的试验测试,并分别与有限元模型和集总元件动力学数学模型进行相应的比较,试验数据与仿真结果基本一致,进一步验证了模型的准确性。