谐振式MEMS压力传感器的设计与分析

提出一种基于静电激励/压阻检测的硅微谐振式压力传感器,该器件采取面内动平衡的振动模式,为了抑制压力敏感膜片受压变形时谐振器的高度变化,在谐振器固定端设计了悬置扭转结构。根据对传感器数学模型的分析与建立,并利用MEMS有限元仿真软件对传感器在0～120 kPa范围以及全范围过压1.5倍下进行模拟分析与仿真验证,初始频率为24.01 kHz,传感器灵敏度达18 Hz/kPa。利用硅-硅键合技术实现压力传感器的真空封装,并通过TSV通孔技术将传感器与电路芯片进行三维混合集成封装。     

内置皮拉尼计的硅通孔圆片级MEMS真空封装研究

针对现有的圆片级真空封装存在检测难、易泄漏等问题,提出了内置皮拉尼计的硅通孔圆片级MEMS真空封装方法。研制了用于圆片级真空封装导线互连的硅通孔,探讨了玻璃盖板与硅圆片之间阳极键合工艺与硅圆片与硅圆片之间的金硅共晶键合工艺,研制了用于检测封装壳体内部真空度的皮拉尼计; 研制了内置皮拉尼计的4英寸硅通孔圆片级真空封装,研制了低温激活非蒸散型吸气剂。实验研究表明,该研究解决了长时间保持真空度的问题。     

通用型耐高温微型压力传感器封装工艺研究

针对通用型高温微型压力传感器的测量要求,采用SIMOX(separation by implanted oxygen)技术SOI(silicon on insulator)晶片4层结构Pt5Si2-Ti-Pt-Au合金化引线系统,解决了高温压力传感器引线的难点。制作了静电键合实验装置,完成了硅／玻璃环静电键合,制作了压焊工作台,选用退火后的金丝,金金连接完成内引线键合。自制了耐高温覆铜传引板,定制了含Ag的高温焊锡丝,选用了耐高温导线作为外导线,完成了耐高温封装的关键部分。研制了高精度、稳定性的压阻式压力传感器。     

低热零点漂移的高温绝压压力传感器

传统的高温绝压压力传感器一般采用硅和玻璃进行阳极键合来制备绝压腔。由于高温环境下硅片和硼硅玻璃的热膨胀系数不匹配，从而产生较高的热零点漂移。文中提出了一种低热零点漂移的压力传感器设计方案，由硅-玻璃-硅的三层结构代替普通的双层阳极键合结构，并给出了热力学仿真模型。分析表明：改变传感器硅与玻璃的结构比例，实现应力匹配可以有效减小热应力。对芯片进行了高温实验测试，发现传感器的热零点漂移变化率减小了50%。     

无引线封装的SOI压阻式压力传感器设计

在SOI晶圆材料的基础上,设计了压力敏感结构,提高了传感器的高温稳定性;采用敏感芯片背孔引线技术,将硅敏感芯片的正面和硼玻璃进行气密性阳极键合,通过在硼玻璃对应位置加工电极连接孔,实现芯片电极与外部管脚的电气连接,形成无引线封装结构;利用ANSYS软件对敏感芯片进行了力学仿真,对高温敏感芯体进行了热应力分析,完成了无引线封装结构的优化及制作。通过性能测试,该传感器测量范围为0~0.2 MPa,灵敏度为55.0 m V/MPa,非线性误差小于0.2%。     

低热机械噪声的梳齿式加速度计

文中介绍了一种基于低噪声梳齿变面积型加速度计.采用体硅加工工艺,利用SOI材料30 μm顶层硅制造垂直梳齿,梳齿数目达200对,提高了初始电容,能够充分利用尺寸空间,获得具有低噪特性的加速度计.该种形式的加速度计不需要真空封装,也不需要制作阻尼孔就能满足低噪声要求.器件采用三层材料,利用硅-玻璃键合和BCB键合实现,能够有效提高成品率,并给出了成功流片后得到的SEM照片.最后,对器件进行了频谱响应曲线的测试,测试得到器件在非真空封装及无阻尼孔情况下Q值高达156.95.测试结果表明该器件的设计简化了制造工艺,降低了成本,同时得到提高了Q值,能够降低热机械噪声.     

MEMS封装中阳极键合技术的影响因素研究和设计因素分析

结合MEMS气密性封装的需要,以玻璃与硅晶片阳极键合为例,给出阳极键合的封装工艺,从键合机理的角度研究了玻璃与硅阳极键合的影响因素,并就玻璃与硅阳极键合的设计因素做了分析,得到直径为100mm的Pyrex7740玻璃晶片和硅晶片在键合温度为500℃时,硅晶片的径向应力σrr=134.29MPa;键合后晶片的径向膨胀μ=0.1274mm。     

基于硅硅键合技术的高精度压力传感器的研究

硅压阻压力传感器核心部件一般是由单晶硅和玻璃组成的微结构,由于单晶硅和玻璃的材料特性存在差异,在制造过程中会引入封装应力对传感器的性能产生不利影响。采用硅硅键合技术制造压力传感器核心部件的微结构,以同质材料替代异质材料实现器件的封装,可有效减少封装应力,提升压力传感器的性能。文中通过结合硅压阻压力敏感芯片的制造工艺和硅硅键合工艺,实现了敏感芯片与硅衬底间的硅硅键合,键合强度达到体硅强度。研制的差压型压力敏感芯片装配成传感器的零点温度漂移下降60%,静压误差下降约1个数量级。     

多功能真空键合设备的研制

基于圆片键合技术，设计了一种在真空条件下进行圆片键合的工艺设备。在该设备的基础上，进行了阳极键合与金硅键合2种典型的键合试验，键合出来的样品结合强度高而且没有缺陷，验证了该设备的实用性。     

应用双埋层SOI工艺制备低g值微惯性开关

采用双埋层SOI( Silicon-On- Insulator)材料,结合KOH腐蚀工艺、电感耦合等离子体(ICP)刻蚀工艺、阳极键合以及喷雾式涂胶工艺,研制了一种基于平面矩形螺旋梁的低g值微惯性开关.利用二氧化硅KOH腐蚀/ICP刻蚀自停止的特点,平面矩形螺旋梁厚度的精度为±0.46 μm.分析了双埋层SO1材料的电学特性,采用等电位技术,实现了双埋层SOI与上下两层硼硅玻璃的阳极键合.采用玻璃无掩模湿法腐蚀技术,在玻璃封盖底部设计制作了大小为200 μm×200μm的防粘连凸台,解决了芯片在清洗干燥过程中的粘连问题.采用ICP刻蚀用硅衬片方法,解决了ICP刻蚀工艺中高温导致的金硅共晶合金问题.实验验证显示,提出的方法效果较好,芯片成品率得到较大提高,为大批量地研制低g值微惯性开关提供了可靠的工艺基础.     

飞行时间质谱仪射频四极杆驱动器的研制

针对自制垂直引入式飞行时间质谱仪（orthogonal extraction time-of-flight mass spectrometer, O-TOFMS）的需要,运用直接数字频率合成 (direct digital frequency synthesis,DDS)技术,研制了射频四极杆的高压射频驱动电路装置。该驱动器频率可调范围为0.5~2 MHz,幅度最高达到1 000 Vp-p。该射频四极杆驱动器（radio frequency quadrupole driver,RFQ Driver）可用于分子离子反应器（molecule ion reactor,MIR）和RFQ驱动,其结构简洁、成本低、性能稳定可靠。     

从光电容积图中提取脉搏率、呼吸率和心率的新方法

光电容积描记图(PPG)是一种利用光学技术无创检测人体心血管脉搏波的方法。PPG信号来源于MIMIC数据库,它含有许多生理信息。本文提出了将集合经验模态分解(EEMD)、倒谱、快速傅里叶变化和过零点检测相结合的方法,从PPG中可靠地估算脉搏率(PR)、心率(HR)和呼吸频率(RR)。首先,将PPG信号通过EEMD分解为有限个固有模态函数(IMF)。因为EEMD有自适应滤波特性,所以估算不同的生理参数时,可以用不同的IMF分量来重构信号。其次,估算脉搏率时,舍去低频含有伪迹的IMF,再通过过零点检测可以得到瞬时脉搏率。然后,估算心率时,用1 Hz~1.67 Hz(60次/分钟~100次/分钟)的IMF来重构信号,再求倒谱,选取反映心脏活动的频带来得到心率。最后,估算呼吸率时,用0.05 Hz~0.75 Hz(3次/分钟~45次/分钟)的IMF来重构信号,然后对呼吸信号求快速傅里叶变化得到频谱图,寻找频谱图中的峰值得到呼吸率。对来自MIMIC数据库的53个成人PPG信号进行了仿真。仿真结果表明使用该综合信号处理方法提取的生理参数与实际生理参数一致,且该方法有运算量小,精确度高的优点(误差不超过1.17%)。     

UPLC-MS/MS测定二苯甲烷二异氰酸酯

建立了二苯甲烷二异氰酸酯（MDI）的超高效液相色谱-串联质谱（UPLC-MS/MS）联用的分析方法。实验用甲醇作衍生试剂,将二苯甲烷二异氰酸酯衍生成二苯甲烷二氨基甲酸甲酯（MDC）,通过测定二苯甲烷二氨基甲酸甲酯来确定二苯甲烷二异氰酸酯的含量。实验采用Waters Acquity BEH C18超高效液相色谱柱,甲醇-0.1%甲酸作为梯度洗脱液,二苯甲烷二氨基甲酸甲酯在1.5 min内与其他化合物进行完全分离,经四极杆质谱选择离子监测模式检测。线性范围为2~100 μg/L,检出限为1 μg/L,相关系数0.999 4。考察了水、甲酸、甲酸铵流动相体系,以及进样量大小对样品的分离效果,发现甲酸流动相体系的分离效果优于其他两种流动相体系,同时发现在进样量大时出现平头峰。并且在优化条件下,对实际样品中游离的二苯甲烷二异氰酸酯进行了测定。     

Effect of the molecular weight on deformation states of the polystyrene film by AFM single scanning

Nanobundles patterns can be formed on the surface of most thermoplastic polymers when the atomic force microscope (AFM)‐based nanomechanical machining method is employed to scratch their surfaces. Such patterns are reviewed as three‐dimensional sine‐wave structures. In the present study, the single‐line scratch test is used firstly to study different removal states of the polystyrene (PS) polymer with different molecular weights (MWs). Effects of the scratching direction and the scratching velocity on deformation of the PS film and the state of the removed materials are also investigated. Single‐wear box test is then employed to study the possibility of forming bundle structures on PS films with different MWs. The experimental results show that the state between the tip and the sample plays a key role in the nano machining process. If the contact radius between the AFM tip and the polymer surface is larger than the chain end‐to‐end distance, it is designated as the “cutting” state that means the area of both side ridges is less than the area of the groove and materials are removed. If the contact radius is less than the chain end‐to‐end distance, it is designated as the “plowing” state that means the area of both side ridges is larger than the area of the groove and no materials are removed at all. For the perfect bundles formation on the PS film, the plowing state is ideal condition for the larger MW polymers because of the chains’ entanglement. SCANNING 35:308‐315, 2013. © 2012 Wiley Periodicals, Inc.     

Rapid one-of-a-kind production

To shorten the product development cycle time and reduce the cost at the same time, which is very critical for the survival of those small and mid-sized one-of-a-kind production (SMOKP) companies, various computer communication, simulation and computer aided engineering and management techniques have been widely used in these SMOKP companies. However, according to our study, the applications of these advanced computer technologies in these SMOKP companies are lack of system integration and synergy, which result in communication errors, reworks, duplications and hence a longer product development lead time and a higher cost. To solve this problem, an inter/intranet based computer aided rapid product development system is presented in this paper. This system consists of a number of inter/intranet based computer models or sub-systems for supporting rapid development of a one-of-a-kind product. It also employs a novel concurrent product development strategy called “prototype based incremental product development strategy” and an integrated product data structure called “product production structure”. Some industrial implementations of the proposed system, product development strategy and product data structure are also reported in the paper.     

Rapid one-of-a-kind production

To shorten the product development cycle time and reduce the cost at the same time, which is very critical for the survival of those small and mid-sized one-of-a-kind production (SMOKP) companies, various computer communication, simulation and computer aided engineering and management techniques have been widely used in these SMOKP companies. However, according to our study, the applications of these advanced computer technologies in these SMOKP companies are lack of system integration and synergy, which result in communication errors, reworks, duplications and hence a longer product development lead time and a higher cost. To solve this problem, an inter/intranet based computer aided rapid product development system is presented in this paper. This system consists of a number of inter/intranet based computer models or subsystems for supporting rapid development of a one-of-a-kind product. It also employs a novel concurrent product development strategy called “prototype based incremental product development strategy” and an integrated product data structure called “product production structure”. Some industrial implementations of the proposed system, product development strategy and product data structure are also reported in the paper.     

汽车ESC系统DIL/HIL仿真平台设计

全面准确地标定与测试是开发车辆电子稳定控制(electronic stability control,ESC)系统的关键环节。车辆控制过程是典型的强非线性系统,建立精确的车辆模型比较困难,驾驶员模型也很难准确模拟紧急工况下驾驶员的真实反应。在仿真系统中将难以精确建模的液压制动系统、ESC压力调节单元、转向及电子节气门装置采用真实硬件,并在试验平台中嵌入真实驾驶员,基于Matlab/Simulink/dSPACE环境和车辆动力学软件veDYNA,开发硬件在环(hardware-in-the-loop,HIL)和驾驶员在环(driver-in-the-loop,DIL)的仿真试验平台,并在此平台上对所设计的ESC系统进行仿真试验研究。试验结果表明,所设计的DIL/HIL仿真平台可以大幅提高ESC系统的开发效率和测试准确性。     

The efficacy of back propagation neural network with delta bar delta learning in predicting the wear of carbide inserts in face milling

Face milling is a process predominantly affected by dynamic variation of cutting forces, thermo-mechanical shocks and vibration leading to catastrophic tool failure along with gradual wear of the inserts. Keeping in view the industrial importance of this process, it is necessary to devise suitable methods to predict in advance the onset of tool failure without grossly impairing the machining set-up and the job. Hence, the applicability of back propagation neural network with delta bar delta learning rule for faster convergence has been studied with the above objective. The multi sensor based tool condition monitoring strategy shows that the learning rate adaptation scheme combined with the selection of suitable process parameters drastically reduces the training time of the artificial neural network without dispensing with the prediction accuracy.     

复合ICA-SVM机械状态模式分类

提出了一种新颖的、基于独立分量分析(ICA)的复合神经网络，用于不同机械状态模式的特征提取。利用支持向量机(SVM)进行最终分类。与通常的基于经验风险最小化(ERM)原理的神经网络方法相比，基于结构风险最小化(SRM)原理的支持向量机分类方法具有更好的推广能力。而借助多个独立分量分析网络，隐藏于多通道振动观测信号中的不变特征得到有效提取，从而实现了支持向量机分类器在分类能力和推广性两者间的合理平衡。     

同位素稀释质谱法测定贻贝中多氯联苯的国际比对研究(CCQM-P67)

A method developed to participate the pilot study of international comparison CCQM-P67 was introduced. Isotope dilution mass spectrometry (IDMS) was used in the detection of five PCB congeners in freeze-dried muscle tissue. Soxhlet Extraction is used for extraction of mussel, duplicate clean-up of GPS and SPE column were used, C-13 labeled PCB congeners were added as internal standard to avoid the error from sample preparation and diction. High resolution Mass spectrometer was used to give good result of detection.