工作气压对制备立方氮化硼薄膜的影响

用射频溅射法将立方氮化硼(c-BN)薄膜沉积在p型Si(100)衬底上,薄膜的成分由傅里叶变换红外吸收谱和X射线衍射谱标识. 在其他条件不变的情况下,研究了工作气压对制备立方氮化硼薄膜的影响. 研究结果表明,工作气压是影响c-BN薄膜生长的重要参数,要得到一定立方相体积分数的氮化硼薄膜,必须要有合适的工作气压. 工作气压等于或高于2.00Pa时,立方相不能形成;工作气压为0.67Pa时,得到了立方相体积分数为92%的立方氮化硼薄膜.     

锗硅薄膜的光学特性研究

GeSi薄膜的光学特性可以随内部组分的变化而变化,在光电子集成方面优于GaAs、InP等传统的发光材料,已引起了人们的广泛关注.采用等离子体CVD法在玻璃衬底上沉积GeSi薄膜,研究了不同生长条件下的样品的光学特性,从样品的紫外\|可见光反射谱和透射谱计算出光学带隙,发现随着Ge含量的增加,薄膜的光学带隙减小.并且研究了样品的光学带隙与温度的关系,当GeH4流量为4sccm时,薄膜的光学带隙随温度的升高有一个最小值,当GeH4流量为8sccm时,温度升高而薄膜的光学带隙基本不变.     

气体压强对非晶InGaAs薄膜光学常数的影响

论述一种用透射谱包络线法计算非晶薄膜的折射率、消光系数和光学带隙的方法。通过正交实验确定除压强之外的工艺参数,研究压强的改变对薄膜主要光学常数的影响,运用最小二乘法、内插值法在matlab编程基础上,拟合出光学常数曲线,借由观察曲线的特点,分析在低工作气压下,气压的改变对光学常数的影响。     

气体压强对n型a-Si:H薄膜光学性能的影响

用射频等离子增强化学气相沉积(RF-PECVD)制备磷掺杂氢化非晶硅(a-Si:H)薄膜,研究了辉光放电气体压强(20~80 Pa)对薄膜折射率、消光系数、光学带隙以及氢含量的影响;用激光拉曼光谱研究了气体压强对a-Si:H薄膜微结构的影响,并与薄膜的光学性能进行了综合讨论。结果表明,随着辉光放电气体压强的增加,a-Si:H薄膜的光学带隙和氢含量都有不同程度的增大,但折射率和消光系数却逐步减小;与此同时,薄膜内非晶网络的短程和中程有序程度逐渐恶化。     

PLD方法制备ZnO薄膜的特征温度研究

用PLD方法在S i(1 1 1)衬底上制备了ZnO薄膜.在薄膜的沉积过程中,用安装在激光脉冲沉积设备上的反射高能电子衍射仪(RHEED)对薄膜的生长进行了原位监测.结合薄膜的X射线衍射(XRD)分析和荧光光谱(PL)分析,发现达到或者超过650°C时生长的薄膜,结构和光学特性得到了显著的改善.     

MPECVD法在抛光石英玻璃上沉积金刚石薄膜

采用微波等离子体增强化学气相沉积方法(MPECVD),利用氢气和甲烷混合气体,在抛光石英基片上低温沉积出金刚石薄膜。用扫描电子显微镜(SEM)、激光拉曼光谱仪(Raman)和傅立叶红外光谱仪(FTIR)对薄膜的表面形貌、颗粒尺寸、纯度和光学透过性能进行了表征。通过SEM发现,得到的金刚石薄膜的颗粒尺寸为0.2~0.3μm,形核密度超过109cm-2,从薄膜形貌可以发现,较高温度有利于提高薄膜的生长速率和颗粒尺寸的均匀性。通过拉曼光谱和红外透射光谱分析发现,较高温度下沉积的薄膜具有较高的金刚石相含量,薄膜的光学透过性能也相对较好。     

溅射气体流量比对磷掺杂ZnO光学性质的影响

采用磁控溅射方法在石英衬底上制备ZnO薄膜,利用XRD对薄膜结构进行表征,发光光谱和透射吸收光谱表征薄膜的光学性质,讨论了溅射气体流量比对薄膜光学性质的影响。结果表明,当Ar/O₂为1/0.05时,观察到明显的紫外发光,带隙宽度为3.310 eV。     

溶胶凝胶法制备LiTaO3薄膜

用溶胶凝胶法在FTO导电玻璃基片上沉积LiTaO₃薄膜,采用TG-DTA、SEM、XRD、UV-Vis光谱法分析薄膜的表面形貌、结晶性能和光学性能。结果表明,650 °C下退火的薄膜具有在(006)晶向上强烈的择优取向性,表面形貌均匀致密,薄膜裂纹减少,杂质LiTa₃O₈峰的半高峰宽和光学带隙E_g明显受到薄膜结晶性能的影响,光学带隙值E_g随着杂质LiTa₃O₈半高峰宽的降低而增加,LiTaO₃薄膜的光学带隙E_g蓝移从3.87 eV增加到3.91 eV。     

Al掺杂对ZnO薄膜结构和光学性能的影响

研究了Al掺杂对采用直流磁控溅射方法制备的ZnO薄膜结构及光学性能的影响。X射线衍射结果揭示薄膜具有良好的C轴择优取向生长特性,同时,衬底温度对它们的透射谱和荧光谱有着明显影响,所有薄膜都有大于86%的可见光透过率和陡峭的本征吸收边,但ZAO薄膜的光学透过率略低。Al掺杂导致了更宽的光学带隙,光致发光光谱显示ZnO具有较强的近带本征吸收峰和深能级发射峰,但Al掺杂使得深能级发射峰降低。随着衬底温度的升高,近带边吸收峰蓝移,与光学带隙Eg变化趋势一致。     

Fe掺杂对ZnO薄膜的微结构与光学性质的影响

采用溶胶一凝胶法在石英玻璃衬底上制备了Fe掺杂的ZnO薄膜,研究了不同的Fe掺杂浓度对ZnO薄膜的微结构与光学性质的影响.利用x射线衍射分析了薄膜样品的晶向和晶相.利用原子力显微镜观测了薄膜样品的表面形貌,利用双光束紫外-可见分光光度计分析了znO薄膜样品的光学性质.实验结果表明:所有ZnO薄膜样品都是六角纤锌矿结构,ZnO晶粒沿c轴择优生长.质量分数为1%fe掺入之后,ZnO薄膜的C轴择优取向进一步增强,薄膜的晶化质量也得到进一步提高.当Fe的掺杂浓度高于1%时,ZnO薄膜(002)衍射峰的强度又降低了,这可能是由于Fe2+(x=2或3)和zn2+具有不同的离子半径,大量的Fe2+进入晶格取代Zn2+导致晶格严重畸变,从而影响了znO晶粒的正常生长.所制备的ZnO薄膜在可见光区都具有高的透射丰,由吸收边估算出来的ZnO薄膜的光学带隙表明:随着Fe的掺杂浓度的提高,光学带隙逐渐展宽.     

Deposition of antimony telluride thin film by ECALE

The process of Sb2Te3 thin film growth on the Pt substrate by electrochemical atomic layer epitaxy (ECALE) was studied. Cyclic voltammetric scanning was performed to analyze the electrochemical behavior of Te and Sb on the Pt substrate. Sb2Te3 film was formed using an automated flow deposition system by alternately depositing Te and Sb atomic layers for 400 circles. The deposited Sb2Te3 films were characterized by XRD, EDX, FTIR and FESEM observation. Sb2Te3 compound structure was confirmed by XRD pattern and agreed well with the results of EDX quantitative analysis and coulometric analysis. FESEM micrographs showed that the deposit was composed of fine nano particles with size of about 20 nm. FESEM image of the cross section showed that the deposited films were very smooth and dense with thickness of about 190 nm. The optical band gap of the deposited Sb2Te3 film was determined as 0.42 eV by FTIR spectroscopy, and it was blue shifted in comparison with that of the bulk Sb2Te3 single crystal due to its nanocrystalline microstructure.     

离子束溅射制备Bi2Te3热电薄膜

采用离子束溅射技术,溅射不同面积比例的Bi/Te二元复合靶,制备Bi2Te3热电薄膜,所制备的薄膜Bi∶Te原子比接近2∶3.X射线衍射测量结果显示,薄膜的主要衍射峰与Bi2Te3标准衍射峰相同,在(015)晶面上择优选向明显,存在少量的Bi和[Bi,Te]杂质峰.霍尔系数测试及Seebeck系数测量结果表明,薄膜都为n型半导体薄膜,电导率量级为105Sm-1,电学性能良好.在不同条件下制备的薄膜Seebeck系数最大值为-168μVK-1,最小值为-32μVK-1.其中,Bi∶Te原子比为0.69,退火温度为300℃的薄膜功率因子最大,达1.1×10-3Wm-1K-2.     

硝酸-冰乙酸腐蚀对CdTe太阳电池性能的影响

在CdTe与金属背电极间形成稳定的低电阻接触,有助于提高CdTe太阳电池性能。采用硝酸-冰乙酸腐蚀CdTe薄膜并用真空蒸发法沉积铜背接触层,制备CdTe太阳电池。结果表明,化学腐蚀后在膜面生成了富碲层,硝酸-冰乙酸腐蚀为各向同性刻蚀。对背接触层进行优化退火处理,获得转化效率11.75%的CdTe太阳电池。     

Ge2 Sb2 Te5晶体结构的第一性原理模拟

基于密度泛函理论,采用CASTEP软件对Ge2Sb2Te5亚稳态晶体进行结构优化,并比较了局部密度泛函LDA CA-PZ和广义梯度近似GGA PBE两种不同电子交换关联函数对模型晶体结构、能带、态密度、分波态密度、布居数等相关性质的影响,获得Ge2Sb2Te5亚稳态晶体结构的性质.研究发现,电子交互关联函数采用局部密度泛函LDA CA-PZ时计算体系的总能量更低,具有更好的稳定性,但该优化使晶格常数缩小,而采用广义梯度近似GGA PBE方法对GST材料的晶胞结构进行模拟获得的结果与实验结果较为吻合.亚稳态Ge2Sb2Te5的能带没有带隙,呈现典型的金属性,而对材料性质影响最大的是Te原子.     

Structure, optical, and magnetic properties of Mn-doped ZnO films prepared by sputtering

The microstructural,optical,and magnetic properties and room-temperature photoluminescence(PL) of Mn-doped ZnO thin films were studied.The chemical compositions were examined by energy dispersive X-ray spectroscopy(EDS) and the charge state of Mn ions in the ZnO:Mn films was characterized by X-ray photoelectronic spectrometry(XPS).From the X-ray diffraction(XRD) data of the samples,it can be found that Mn doping does not change the orientation of ZnO thin films.All the films prepared have a wurtzite stru...     

Effect of Na concentrations on microstructure and optical properties of ZnO films

Na-doped ZnO thin films were deposited on the glass substrates using sol-gel method. The effect of Na concentrations on the structural and optical properties of ZnO films was studied. As Na concentration increases from 0.0 at% to 16.0 at%, preferential c-axis orientation becomes more and more obvious, and the intensity of the diffraction peaks from (103) increases. The optical band gap Eg value increases from 3.261 to 3.286 eV first and then decreases as Na concentration increases from 0.0 to 2.0 at% and th...     

Preparation of Bi2-xSbxTe3 thermoelectric films by electrodeposition

1. Introduction In the last decade, green power sources have attract- ed much attention because of severe environmental problem. As a green power source, the greatest virtue of a thermoelectric power generator is that it makes use of all kinds of heat (so…     

Effects of different CdCl_2 annealing methods on the performance of CdS/Cd Te polycrystalline thin film solar cells

In this paper, the effects of different Cd Cl2 annealing methods, including vapor annealing and dip-coating annealing, on the performance of Cd S/Cd Te polycrystalline thin-film solar cells are studied. After annealing, the samples are lightly etched with 1% bromine in methanol to remove surface oxides. Both annealing methods give Cd Te polycrystalline thin films with good crystallinity and complete structure. For solar cells containing the annealed Cd Te films, cell efficiency first increases and then decreases as the concentration of Cd Cl2 solution used for dip-coating annealing increases, and the optimized Cd Cl2 concentration is 12%. The uniformity of the performance of all cells is analyzed by calculating the relative standard deviation for each parameter. The uniformity of cell performance can be improved dramatically by dip-coating annealing instead of vapor annealing. Most notably, an appropriate concentration of Cd Cl2(12%) acts as a protective layer that is conducive to realizing uniform high-performance Cd S/Cd Te solar cells. According to the location of depletion regions, the Cd Te films treated by dip-coating annealing show a relatively low doping concentration, except for the sample treated with a Cd Cl2 concentration of 6%, which is consistent with the changes of short-circuit current density of the cells. It is believed that these results can be applied to the large-scale production of Cd Te polycrystalline thin-film solar cells.     

BiFeO_3薄膜的图案化制备及性能研究

采用短波紫外光照射仪（λ=184.9nm）作为光刻设备,在光掩膜的覆盖下,将沉积在（111）Si基板上的十八烷基三氯硅烷（OTS）自组装单分子层（SAMs）进行刻蚀形成图案,并结合溶胶-凝胶法在功能化的OTS-SAMs表面制备图案化BiFeO3薄膜,并对BiFeO3薄膜性能进行研究.结果表明,所得图案化BiFeO3薄膜为六方扭曲的钙钛矿结构,图案边缘轮廓清晰,宽度在200μm左右;在最大测试电场为385kV/cm下,所得电滞回线有较好的对称性和饱和性,剩余极化强度为0.17μC/cm2,饱和极化强度为3.8μC/cm2,矫顽场强为19kV/cm.在1kHz～1MHz的频率范围内,介电常数随频率增加逐渐减小,介电损耗较小.