MQW DBR lasers with monolithically integrated external-cavity electroabsorption modulators fabricated without modification of the active region

In this letter, we report the design and operation of multiple-quantum-well distributed Bragg reflectors (MQW DBR) lasers with monolithically integrated external-cavity electroabsorption (EA) modulators without modification of the active region fabricated using only a single growth step. Devices were fabricated with operating wavelengths of 1.06, 1.07, and 1.08 /spl mu/m, which are red-shifted from the material gain peak wavelength (/spl lambda/=1.05 /spl mu/m) by 100, 200, and 300 /spl Aring/, respectively. The /spl lambda/=1.06-/spl mu/m device has a continuous-wave (CW) threshold current of 16 mA and a slope efficiency of 0.09 W/A from the modulator facet, while the /spl lambda/=1.08 /spl mu/m device has a CW threshold current of 33 mA and a slope efficiency of 0.40 W/A from the modulator facet. The /spl lambda/=1.06-, 1.07-, and 1.08-/spl mu/m device exhibits an extinction ratio of /spl ges/20 dB at a modulator bias of 1.0, 1.4, and 2 V, respectively.     

High efficiency 90/spl deg/ silica waveguide bend using an air hole photonic crystal region

We propose the hybrid integration of an air hole photonic crystal (PhC) structure with a high /spl Delta/ (0.75%) single-mode silica waveguide to achieve an ultracompact high efficiency 90/spl deg/ bend for transverse-magnetic polarized light. Diffraction from the periodic boundary between the PhC and silica waveguide regions is shown to seriously degrade the optical efficiency of the bend. A microgenetic algorithm (/spl mu/GA) combined with a two-dimensional finite-difference time-domain method is used to modify the PhC and its boundary layer to suppress this diffraction which in turn maximizes bend efficiency. The final optimized structure has a 99.4% bend efficiency at a wavelength of 1.55 /spl mu/m and occupies an area of only 27 /spl times/ 27 /spl mu/m.     

High-performance 1.5 /spl mu/m GaInNAsSb lasers grown on GaAs

Substantially reduced threshold current density and improved efficiency in long-wavelength (>1.4 /spl mu/m) GaAs-based lasers are reported. A 20/spl times/1220 /spl mu/m as-cleaved device showed a room temperature continuous-wave threshold current density of 580 A/cm/sup 2/, external efficiency of 53%, and 200 mW peak output power at 1.5 /spl mu/m. The pulsed threshold current density was 450 A/cm/sup 2/ with 1145 mW peak output power.     

Self-heating and trapping effects on the RF performance of GaN MESFETs

RF power performances of GaN MESFETs incorporating self-heating and trapping effects are reported. A physics-based large-signal model is used, which includes temperature dependences of transport and trapping parameters. Current collapse and dc-to-RF dispersion of output resistance and transconductance due to traps have been accounted for in the formulation. Calculated dc and pulsed I-V characteristics are in excellent agreement with the measured data. At 2 GHz, calculated maximum output power of a 0.3 /spl mu/m/spl times/100 /spl mu/m GaN MESFET is 22.8 dBm at the power gain of 6.1 dB and power-added efficiency of 28.5% are in excellent agreement with the corresponding measured values of 23 dBm, 5.8 dB, and 27.5%, respectively. Better thermal stability is observed for longer gate-length devices due to lower dissipation power density. At 2 GHz, gain compressions due to self-heating are 2.2, 1.9, and 0.75 dB for 0.30 /spl mu/m/spl times/100 /spl mu/m, 0.50 /spl mu/m/spl times/100 /spl mu/m, and 0.75 /spl mu/m/spl times/100 /spl mu/m GaN MESFETs, respectively. Significant increase in gain compression due to thermal effects is reported at elevated frequencies. At 2-GHz and 10-dBm output power, calculated third-order intermodulations (IM3s) of 0.30 /spl mu/m/spl times/100 /spl mu/m, 0.50 /spl mu/m/spl times/100 /spl mu/m, and 0.75 /spl mu/m/spl times/100 /spl mu/m GaN MESFETs are -61, -54, and - 45 dBc, respectively. For the same devices, the IM3 increases by 9, 6, and 3 dBc due to self-heating effects, respectively. Due to self-heating effects, the output referred third-order intercept point decreases by 4 dBm in a 0.30 /spl mu/m/spl times/100 /spl mu/m device.     

Interdigitated Ge p-i-n photodetectors fabricated on a Si substrate using graded SiGe buffer layers

We report an interdigitated p-i-n photodetector fabricated on a 1-/spl mu/m-thick Ge epitaxial layer grown on a Si substrate using a 10-/spl mu/m-thick graded SiGe buffer layer. A growth rate of 45 /spl Aring//s/spl sim/60 /spl Aring//s was achieved using low-energy plasma enhanced chemical vapor deposition. The Ge epitaxial layer had a threading dislocation density of 10/sup 5/ cm/sup -2/ and a rms surface roughness of 3.28 nm. The 3-dB bandwidth and the external quantum efficiency were measured on a photodetector having 1-/spl mu/m finger width and 2-/spl mu/m spacing with a 25/spl times/28 /spl mu/m/sup 2/ active area. At a wavelength of 1.3 /spl mu/m, the bandwidth was 2.2, 3.5, and 3.8 GHz at bias voltages of -1, -3, and -5 V, respectively. The dark current was 3.2 and 5.0 /spl mu/A at -3 and -5 V, respectively. This photodetector exhibited an external quantum efficiency of 49% at a wavelength of 1.3 /spl mu/m.     

1.49-/spl mu/m-band gain-shifted thulium-doped fiber amplifier for WDM transmission systems

This paper describes in detail the amplification characteristics of gain-shifted thulium-doped fiber amplifiers (GS-TDFAs) operating in the 1480to 1510-nm wavelength region (1.49-/spl mu/m S-band) for use in wavelength-division-multiplexing (WDM) systems. Gain shifting of a TDFA, which normally has a gain band at 1.47 /spl mu/m (S/sup +/-band), is achieved by two types of dual-wavelength pumping: (1) 1.05 and 1.56 /spl mu/m or (2) 1.4 and 1.56 /spl mu/m. The main pump source at 1.05 or 1.4 /spl mu/m creates population inversion between /sup 3/F/sub 4/ (upper laser level) and /sup 3/H/sub 4/ (lower laser level), while the auxiliary pump source at 1.56 /spl mu/m reduces the average fractional inversion down to approximately 0.4, which is a desired level for gain shifting. We show experimentally that the former provides a low internal noise figure (<4 dB) due to high fractional inversion at the input end of a thulium fiber, while the latter provides a very high optical efficiency but a higher internal noise figure (/spl sim/5 dB) due to the lower fractional inversion at the input end. These characteristics were verified by numerical simulation based on a comprehensive rate equation modeling. We demonstrated a 1.4- and 1.56-/spl mu/m laser-diode-pumped GS-TDFA with an optical efficiency of 29.3% and high output power of +21.5 dBm. Gain flatness and tilt control were also investigated. These results strongly confirm the feasibility of using GS-TDFAs in practical ultralarge-capacity WDM networks.     

Optimized second-harmonic generation in quantum cascade lasers

Optimized second-harmonic generation (SHG) in quantum cascade (QC) lasers with specially designed active regions is reported. Nonlinear optical cascades of resonantly coupled intersubband transitions with giant second-order nonlinearities were integrated with each QC-laser active region. QC lasers with three-coupled quantum-well (QW) active regions showed up to 2 /spl mu/W of SHG light at 3.75 /spl mu/m wavelength at a fundamental peak power and wavelength of 1 W and 7.5 /spl mu/m, respectively. These lasers resulted in an external linear-to-nonlinear conversion efficiency of up to 1 /spl mu/W/W/sup 2/. An improved 2-QW active region design at fundamental and SHG wavelengths of 9.1 and 4.55 /spl mu/m, respectively, resulted in a 100-fold improved external linear-to-nonlinear power conversion efficiency, i.e. up to 100 /spl mu/W/W/sup 2/. Full theoretical treatment of nonlinear light generation in QC lasers is given, and excellent agreement with the experimental results is obtained. For the best structure, a second-order nonlinear susceptibility of 4.7/spl times/10/sup -5/ esu (2/spl times/10/sup 4/pm/V) is calculated, about two orders of magnitude above conventional nonlinear optical materials and bulk III-V semiconductors.     

InP-based 1.3-1.6-/spl mu/m VCSELs with selectively etched tunnel-junction apertures on a wavelength flexible platform

In this letter, the authors demonstrate a wavelength flexible platform for the production of long-wavelength vertical-cavity surface-emitting lasers which provide full wavelength coverage from 1.3-1.6 /spl mu/m. All-epitaxial InP-based devices with AsSb-based distributed Bragg reflectors were achieved through a common design, process, and growth technology at both the important telecommunications wavelengths of 1.3 and 1.5 /spl mu/m. Thin selectively etched tunnel junctions were implemented as low-loss apertures and offer scalability to small device dimensions. Devices showed low threshold currents (<2 mA), near single-mode (SMSR>20 dB) operation, and high differential efficiency (>40% at 1.3 /spl mu/m and >25% at 1.5 /spl mu/m).     

1.5-/spl mu/m InGaAsP-InP slab-coupled optical waveguide lasers

We report the demonstration of high-power semiconductor slab-coupled optical waveguide lasers (SCOWLs) operating at a wavelength of 1.5 /spl mu/m. The lasers operate with large (4/spl times/8 /spl mu/m diameter) fundamental mode and produce output power in excess of 800 mW. These structures have very low loss (/spl sim/0.5 cm/sup -1/) enabling centimeter-long devices for efficient heat removal. The large fundamental mode allows 55% butt-coupling efficiency to standard optical fiber (SMF-28). Comparisons are made between SCOWL structures having nominal 4- and 5-/spl mu/m-thick waveguides.     

Piezoelectric micro-power generation interface circuits

New power conversion circuits to interface to a piezoelectric micro-power generator have been fabricated and tested. Circuit designs and measurement results are presented for a half-wave synchronous rectifier with voltage doubler, a full-wave synchronous rectifier and a passive full-wave rectifier circuit connected to the piezoelectric micro-power generator. The measured power efficiency of the synchronous rectifier and voltage doubler circuit fabricated in a 0.35-/spl mu/m CMOS process is 88% and the output power exceeds 2.5 /spl mu/W with a 100-k/spl Omega/, 100-nF load. The two full-wave rectifiers (passive and synchronous) were fabricated in a 0.25-/spl mu/m CMOS process. The measured peak power efficiency for the passive full-wave rectifier circuit is 66% with a 220-k/spl Omega/ load and supplies a peak output power of 16 /spl mu/W with a 68-k/spl Omega/ load. Although the active full-wave synchronous rectifier requires quiescent current for operation, it has a higher peak efficiency of 86% with an 82-k/spl Omega/ load, and also exhibits a higher peak power of 22 /spl mu/W with a 68-k/spl Omega/ load which is 37% higher than the passive full-wave rectifier.     

Low-threshold continuous-wave 1.5-/spl mu/m GaInNAsSb lasers grown on GaAs

We present the first continuous-wave (CW) edge-emitting lasers at 1.5 /spl mu/m grown on GaAs by molecular beam epitaxy (MBE). These single quantum well (QW) devices show dramatic improvement in all areas of device performance as compared to previous reports. CW output powers as high as 140 mW (both facets) were obtained from 20 /spl mu/m /spl times/ 2450 /spl mu/m ridge-waveguide lasers possessing a threshold current density of 1.06 kA/cm/sup 2/, external quantum efficiency of 31%, and characteristic temperature T/sub 0/ of 139 K from 10/spl deg/C-60/spl deg/C. The lasing wavelength shifted 0.58 nm/K, resulting in CW laser action at 1.52 /spl mu/m at 70/spl deg/C. This is the first report of CW GaAs-based laser operation beyond 1.5 /spl mu/m. Evidence of Auger recombination and intervalence band absorption was found over the range of operation and prevented CW operation above 70/spl deg/C. Maximum CW output power was limited by insufficient thermal heatsinking; however, devices with a highly reflective (HR) coating applied to one facet produced 707 mW of pulsed output power limited by the laser driver. Similar CW output powers are expected with more sophisticated packaging and further optimization of the gain region. It is expected that such lasers will find application in next-generation optical networks as pump lasers for Raman amplifiers or doped fiber amplifiers, and could displace InP-based lasers for applications from 1.2 to 1.6 /spl mu/m.     

Short wavelength (/spl lambda//spl sim/4.3 /spl mu/m) high-performance continuous-wave quantum-cascade lasers

We report continuous-wave (CW) operation of a 4.3-/spl mu/m quantum-cascade laser from 80 K to 313 K. For a high-reflectivity-coated 11-/spl mu/m-wide and 4-mm-long laser, CW output powers of 1.34 W at 80 K and 26 mW at 313 K are achieved. At 298 K, the CW threshold current density of 1.5 kA/cm/sup 2/ is observed with a CW output power of 166 mW and maximum wall-plug efficiency of 1.47%. The CW emission wavelength varies from 4.15 /spl mu/m at 80 K to 4.34 /spl mu/m at 298 K, corresponding to a temperature-tuning rate of 0.87 nm/K. The beam full-width at half-maximum values for the parallel and the perpendicular far-field patterns are 26/spl deg/ and 49/spl deg/ in CW mode, respectively.     

Multiquantum-well lasers with tapered active stripe for direct coupling to single-mode fiber

We demonstrate narrow beam divergence in 1.3-/spl mu/m wavelength multiquantum-well (MQW) lasers with an active stripe horizontally tapered over the whole cavity, for direct coupling to single mode-fibers. The lasers have reduced output beam divergence in a simple structure which does not contain an additional spot-size transformer. The fabricated laser shows narrow beam divergence of /spl sim/12/spl deg/, while a low-threshold current of 6.9 mA and a high efficiency of 0.62 mW/mA are realized. Furthermore, a direct-coupling efficiency to a single-mode fiber is -4.0-dB and -3-dB alignment tolerance is /spl plusmn/2.5 /spl mu/m.     

Substrate-triggered ESD protection circuit without extra process modification

A substrate-triggered technique is proposed to improve electrostatic discharge (ESD) protection efficiency of ESD protection circuits without extra salicide blocking and ESD-implantation process modifications in a salicided shallow-trench-isolation CMOS process. By using the layout technique, the whole ESD protection circuit can be merged into a compact device structure to enhance the substrate-triggered efficiency. This substrate-triggered design can increase ESD robustness and reduce the trigger voltage of the ESD protection device. This substrate-triggered ESD protection circuit with a field oxide device of channel width of 150 /spl mu/m can sustain a human-body-model ESD level of 3250 V without any extra process modification. Comparing to the traditional ESD protection design of gate-grounded nMOS (ggnMOS) with silicide-blocking process modification in a 0.25-/spl mu/m salicided CMOS process, the proposed substrate-triggered design without extra process modification can improve ESD robustness per unit silicon area from the original 1.2 V//spl mu/m/sup 2/ of ggnMOS to 1.73 V//spl mu/m/sup 2/.     

30-GHz-band over 5-W power performance of short-channel AlGaN/GaN heterojunction FETs

This paper describes the small-signal characterization through delay-time analysis and high-power operation of the Ka-band of AlGaN/GaN heterojunction field-effect transistors (FETs). An FET with a gatewidth of 100 /spl mu/m and a gate length of 0.09 /spl mu/m has exhibited a current gain cutoff frequency (f/sub T/) of 81 GHz, a maximum frequency of oscillation (fmax) of 187 GHz, and a maximum stable gain of 10.5 dB at 30 GHz (8.3 dB at 60 GHz). Delay-time analysis has demonstrated channel electron velocities of 1.50/spl times/10/sup 7/ to 1.75/spl times/10/sup 7/ cm/s in a gate-length range of 0.09-0.25 /spl mu/m. State-of-the-art performance-saturated power of 5.8 W with a linear gain of 9.2 dB and a power-added efficiency of 43.2%-has been achieved at 30 GHz using a single chip having a gatewidth of 1.0 mm and a gate length of 0.25 /spl mu/m.     

Variable numerical-aperture temporal-coherence measurement of resonant-cavity LEDs

The first interferometric measurements of temporal-coherence length variation with numerical aperture (NA) are described for 650 nm, resonant-cavity light-emitting diodes (LEDs) agreeing with spectrally derived results. The interferometrically measured coherence length (22 /spl mu/m to 32 /spl mu/m) reduced by 37% for a 0.42 increase in NA. For a larger range of NA (0-1), this would give coherence lengths (10 /spl mu/m-40 /spl mu/m) lying in the gap between that of conventional LEDs (/spl sim/5 /spl mu/m) and superluminescent diodes (/spl sim/60 /spl mu/m).     

Room-temperature continuous-wave 1.55 /spl mu/m GaInNAsSb laser on GaAs

The first low-threshold 1.55 /spl mu/m lasers grown on GaAs are reported. Lasing at 1.55 /spl mu/m was observed from a 20/spl times/2400 /spl mu/m as-cleaved device with a room-temperature continuous-wave threshold current density of 579 A/cm/sup 2/, external efficiency of 41%, and 130 mW peak output power. The pulsed threshold current density was 550 A/cm/sup 2/ with >600 mW peak output power.     

Vertical-cavity surface-emitting lasers based on submonolayer InGaAs quantum dots

Molecular beam epitaxy-grown 0.98-/spl mu/m vertical-cavity surface-emitting lasers (VCSELs) with a three-stack submonolayer (SML) InGaAs quantum-dot (QD) active region and fully doped Al/sub x/Ga/sub 1-x/As-GaAs DBRs was studied. Large-aperture VCSELs demonstrated internal optical losses less than 0.1% per one pass. Single-mode operation throughout the whole current range was observed for SML QD VCSELs with the tapered oxide apertures diameter less than 2 /spl mu/m. Devices with 3-/spl mu/m tapered-aperture showed high single-mode output power of 4 mW and external quantum efficiency of 68% at room temperature.     

Continuous-wave operation of all-epitaxial InP-based 1.3 /spl mu/m VCSELs with 57% differential quantum efficiency

All-epitaxial InP-based 1.3 /spl mu/m VCSELs with a record-high continuous-wave differential quantum efficiency (57%) for single active region long-wavelength devices are demonstrated. Low-loss optical mode confinement is achieved through a selectively etched undercut tunnel-junction aperture. Singlemode continuous-wave lasing was observed up to 87/spl deg/C and the room-temperature output power was 1.1 mW at a current of 4.1 mA and a wavelength of 1.305 /spl mu/m.     

High-T/sub 0/ strain-compensated InGaAsSb-AlGaAsSb quantum-well lasers emitting at 2.43 /spl mu/m

Strain-compensated InGaAsSb-AlGaAsSb quantum-well (QW) lasers emitting near 2.5 /spl mu/m have been grown by solid-source molecular beam epitaxy. The relatively high arsenic composition causing a tensile strain in the Al/sub 0.25/GaAs/sub 0.08/Sb barriers lowers the valence band edge and the hole energy level, leading to an increased hole confinement and improved laser performance. A 60% external differential efficiency in pulsed mode was achieved for 1000-/spl mu/m-long lasers emitting at 2.43 /spl mu/m. A characteristic temperature T/sub 0/ as high as 163 K and a lasing-wavelength temperature dependence of 1.02 nm//spl deg/C were obtained at room temperature. For 2000 /spl times/ 200 /spl mu/m/sup 2/ broad-area three-QW lasers without lateral current confinement, a low pulsed threshold of 275 A/cm/sup 2/ was measured.