Micro/nanomechanical properties of aluminum-doped zinc oxide films prepared by radio frequency magnetron sputtering

Aluminum-doped zinc oxide (ZnO) was grown on glass substrates by using RF magnetron sputtering. In order to investigate the effect of growth temperature on the mechanical properties of Al-doped ZnO films, the temperature of the substrates during deposition was controlled at room temperature (R.T.), 150 °C, and 300 °C. The crystal structure and topography of the deposited films were investigated by X-ray diffraction (XRD) and Atomic Force Microscopy (AFM). The mechanical properties of films were measured by using nanoindentation and micro-reciprocating pin-on-plate tester to characterize the hardness, modulus, and tribological behavior. The tribological behavior of silicon (100) wafer was also obtained to compare with that of the Al-doped ZnO. It was found that Al-doped ZnO films with (002) oriented plane was favored at high growth temperature. The mechanical properties of the films were significantly affected by growth temperature. The film grown at room temperature showed a relatively low friction coefficient of 0.25 and high wear resistance.     

Influence of growth temperature on the optical and structural properties of ultrathin ZnO films

This study investigates the effect of growth temperature on the optical and structural properties of ultrathin ZnO films on the polished Si substrate. Thickness of the ultrathin ZnO films deposited by atomic layer deposition (ALD) method was about 10 nm. Photoluminescence (PL), X-ray diffraction (XRD), transmission electron microscopy (TEM) and atomic force microscopy (AFM) techniques were used to measure the properties of ultrathin ZnO films. Experimental results showed that the ultrathin ZnO film deposited at 200 °C had excellent ultraviolet emission intensity, and the average roughness of the film surface was about 0.26 nm.     

Influence of preparation methods on photoluminescence properties of ZnO films on quartz glass

The influence of preparation methods on the photoluminescence properties of ZnO film was studied. Two methods were applied to fabricate ZnO films in a conventional pulsed laser deposition apparatus. One is high temperature （500-700℃） oxidation of the metallic zinc film that is obtained by pulsed laser deposition. The other is pulse laser ablation of Zn target in oxygen atmosphere at low temperature （100-250 ℃）. The photoluminescence property was detected by PL spectrum. The room temperature PL spectra of the ZnO films obtained by oxidation method show single violet luminescence emission centered at 424 nm （or 2.90 eV） without any accompanied deep-level emission and UV emission. The violet emission is attributed to interstitial zinc in the films. Nanostructure ZnO film with c-axis （002） orientation is obtained by pulsed laser deposition. The ZnO film deposited at 200 ℃ shows single strong ultraviolet emission. The excellent UV emission is attributed to the good crystalline quality of the film and low intrinsic defects at such low temperature.     

Preparation and Properties Of ZnO:Al (ZAO) Thin Films Eposited by DC Reactive Magnetron Sputtering

采用磁控溅射技术制备了ZnO:Al(ZAO)薄膜。研究了不同的工艺参数对薄膜的组织结构和光电特性的影响.实验结果表明，多晶ZAO薄膜具有（001）择优取向且呈柱状生长，能量机制决定其微观生长状态。讨论了薄膜的内应力，高的沉积温度和低的溅射功率可有效减小薄膜的内应力。优化的ZAO薄膜电阻率和在可见光区的平均透射率可分别达到310-4-410-4cm和80%以上。     

Effect of defect complex on magnetic properties of (Fe,Mn)-doped ZnO thin films

We have observed room temperature ferromagnetism in Mn-doped and (Fe, Mn)-codoped ZnO thin films grown under different oxygen partial pressures by pulsed laser deposition. The X-ray diffraction and optical transmission spectra studies demonstrate the natural incorporation of Fe and Mn cations into wurtzite ZnO lattices. The effects of transition metal doping and defects on the magnetic properties was investigated. It is found that room temperature ferromagnetism is sensitive to oxygen vacancy and Zn vacancy. The absence of ferromagnetism in pure ZnO films grown under different oxygen partial pressures reveals that the transition metal ions should also play an important role in inducing the ferromagnetism.     

Effect of substrate temperature on microstructural and optical properties of ZnO films grown by pulsed laser deposition

ZnO thin films were deposited on n-Si （111） at various substrate temperatures by pulsed laser deposition （PLD）. X-ray diffraction （XRD）, photoluminescence （PL）, Fourier transform infrared spectrophotometer （FTIR）, and scanning electron microscopy （SEM） were used to analyze the structure, morphology, and optical property of the ZnO thin films. An optimal crystallized ZnO thin film was obtained at the substrate temperature of 600℃. A blue shift was found in PL spectra due to size confinement effect as the grain sizes decreased. The surfaces of the ZnO thin films were more planar and compact as the substrate temperature increased.     

Zinc oxide (ZnO) grown on flexible substrate using dual-plasma-enhanced metalorganic vapor deposition (DPEMOCVD)

This study investigates the temperature dependence of zinc oxide (ZnO) grown on polyestersulfone (PES) flexible substrates using the dual plasma-enhanced metal–organic chemical vapor deposition (DPEMOCVD) system. The proposed method uses a direct voltage (DC) and radio-frequency (RF) plasma system. The group-VI precursor, oxygen (O₂), can be completely ionized by the DC plasma system. The effect of optimal DC plasma power on ZnO thin films is thoroughly investigated using X-ray diffraction (XRD). The experimental results indicate that the crystalline structure and optical and electrical properties of ZnO thin films grown on PES substrates are dependent on the deposition temperature. The optimum deposition temperature for ZnO thin films deposited on PES substrates is 185 °C, whereas the DC and RF plasma power is 1.8 W and 350 W, respectively. Additionally, the wettability characteristic regarding the UV irradiation time was assessed by measuring the water contact angle. Under the UV irradiation for 60 min, the ZnO film grown at 185 °C represents a low contact angle of 5°, which approaches to a superhydrophilic surface.     

Eu掺杂ZnO薄膜与Si(100)衬底间扩散过程分析

利用雾化热解工艺,在Si(100)衬底上制备了Eu掺杂的ZnO薄膜,通过N2的作用,将前驱体溶液输送到衬底表面,同时为实现ZnO的晶化,衬底温度保持在350℃.通过RBS分析了薄膜和衬底之间的原子分布,结果显示了ZnO薄膜与Si衬底之间存在过渡层.对RBS数据的分析表明该过渡层的形成是由于Si向ZnO层中的扩散,表明Si向氧化物中的扩散是不能忽略的,即使在350℃的低温下.同时,作者利用Fick扩散方程对Si向Eu3 掺杂ZnO薄膜的扩散行为进行了分析,结果表明掺杂离子Eu3 具有阻止Si扩散的能力,其原因可能与Eu3 离子在晶界上的偏析有关.     

电气石衬底温度对ZnO薄膜的结晶特征和光学特性的影响

利用超声雾化热解技术 (USP) 在不同温度的电气石和玻璃衬底上生长ZnO纳米片状薄膜。结构研究表明晶体为六方纤锌矿多晶结构。衬底温度越高,Raman特征峰越强,XRD结果给出（002）优势定向越明显,晶体结晶性能越好,晶粒尺寸越大。SEM图像显示片状ZnO晶体沿平行衬底方向叠加形成花状晶柱的微观形貌,沉积温度越高,晶柱宽度越大。UV-Vis表明电气石衬底上ZnO吸收峰强度高于玻璃衬底,最大吸收峰位置发生红移,高温下移动更大。     

Structural,optical properties and optical modelling of hydrothermal chemical growth derived ZnO nanowires

ZnO nanowire films were produced at 90 °C using a hydrothermal chemical deposition method, and were characterised with scanning electron microscopy, optical transmission spectrometry and X-ray diffraction. The results showed that the optical band gap is 3.274–3.347 eV. Film porosity and microstructure can be controlled by adjusting the pH of the growth solution. ZnO nanowire films comprise a 2-layer structure as demonstrated by SEM analysis, showing different porosities for each layer. XRD analysis shows preferential growth in the (002) orientation. A comprehensive optical modelling method for nanostructured ZnO thin films was proposed, consisting of Bruggeman effective medium approximations, rough surface light scattering and O'Leary-Johnson-Lim models. Fitted optical transmission of nanostructured ZnO films agreed well with experimental data.     

声表面波器件用SiO2/ZnO/金刚石/Si多层结构制备

为获得高频、高性能金刚石声表面波器件的多层结构,在金刚石/Si衬底使用磁控溅射方法优化ZnO与SiO₂薄膜沉积工艺参数,制备了具有正负温度系数组合的SiO₂/ZnO/金刚石/Si多层结构,并对多层结构进行表征。结果表明:随着氩氧比增加,ZnO薄膜的沉积速率不断加快,薄膜的表面粗糙度不断增大;ZnO薄膜中的原子摩尔分数比随O₂输入量的减少而逐渐接近理想的1∶1。不同氩氧比下制备的ZnO薄膜均呈(002) 面择优取向生长,其中在氩氧比7∶1时,获得了具有细小柱状晶特征、C轴择优取向程度较高的ZnO薄膜。采用最优的ZnO和SiO₂薄膜沉积工艺,在金刚石/Si衬底获得了具有清晰界面的SiO₂/ZnO/金刚石/Si多层结构。      

Temperature impact on morphological evolution of ZnO and its consequent effect on physico-chemical properties

The temperature influenced morphology evolution and its effect on physico-chemical properties of ZnO thin films deposited onto glass substrates from alkaline environment, complexed via EDTA chelant are systematically studied. Temperature dependent growth mechanism model for change in microstructure is proposed. The physico-chemical properties of deposited films are studied by the analysis of structural, morphological, surface wettabillity, optical and electrical properties. Nanocrystalline ZnO thin films with hexagonal structure having mari-gold flowers and tetra pods like morphologies with optical band gaps 3.1 and 2.96 eV showed drastic surface wettabillity transformation from highly hydrophobic (142°) to superhydrophilic (<5°) behavior for bath placed at room temperature (300 K) and 333 K, respectively. The room temperature photoluminescence spectrum in the visible light region showed decreasing in intensity and electric resistivity measurement showed reduction in electrical resistivity from 10⁶ to 10⁴ Ω cm as consequence of increment in deposition temperature. The morphology evolution as impact of bath temperature can provide wide scope with significant change in physico-chemical properties of smart ZnO, which can be potentially tuned in many functional applications with feasibility.     

Filtered vacuum arc deposition of undoped and doped ZnO thin films: Electrical, optical, and structural properties

Filtered vacuum (cathodic) arc deposition (FVAD, FCVD) of metallic and ceramic thin films at low substrate temperature (50-400 °C) is realized by magnetically directing vacuum arc produced, highly ionized, and energetic plasma beam onto substrates, obtaining high quality coatings at high deposition rates. The plasma beam is magnetically filtered to remove macroparticles that are also produced by the arc. The deposited films are usually characterized by their good optical quality and high adhesion to the substrate. Transparent and electrically conducting (TCO) thin films of ZnO, SnO₂, In₂O₃:Sn (ITO), ZnO:Al (AZO), ZnO:Ga, ZnO:Sb, ZnO:Mg and several types of zinc-stannate oxides (ZnSnO₃, Zn₂SnO₄), which could be used in solar cells, optoelectronic devices, and as gas sensors, have been successfully deposited by FVAD using pure or alloyed zinc cathodes. The oxides are obtained by operating the system with oxygen background at low pressure. Post-deposition treatment has also been applied to improve the properties of TCO films.The deposition rate of FVAD ZnO and ZnO:M thin films, where M is a doping or alloying metal, is in the range of 0.2-15 nm/s. The films are generally nonstoichiometric, polycrystalline n-type semiconductors. In most cases, ZnO films have a wurtzite structure. FVAD of p-type ZnO has also been achieved by Sb doping. The electrical conductivity of as-deposited n-type thin ZnO film is in the range 0.2-6 × 10^− 5 Ω m, carrier electron density is 10²³-2 × 10²⁶ m^− 3, and electron mobility is in the range 10-40 cm²/V s, depending on the deposition parameters: arc current, oxygen pressure, substrate bias, and substrate temperature. As the energy band gap of FVAD ZnO films is ∼ 3.3 eV and its extinction coefficient (k) in the visible and near-IR range is smaller than 0.02, the optical transmission of 500 nm thick ZnO film is ∼ 0.90.     

Effects of atomic layer deposition temperatures on structural and electrical properties of ZnO films and its thin film transistors

Organic-inorganic thin film transistors (OITFTs) with Al/ZnO/PVP structure on Si substrate were fabricated and studied as to their structural and electrical properties. PVP (poly-4-vinylphenol) organic gate insulator was coated on Si substrate by spin coating method. The ZnO was deposited as an active layer by using the atomic layer deposition (ALD) method on PVP/Si substrate at various temperatures ranging from 80 to 140 °C. The structural and electrical properties of ZnO thin films were analyzed by X-ray diffraction and by hall-effect measurement system for optimum process of the OITFT. The grain size and carrier concentration of ZnO films increased, and the resistivity decreased as the deposition temperature increased from 80 to 140 °C. The field effect mobility, on/off current ratio and threshold voltage of OITFTs with ZnO active layer deposited at 100 °C were found to be 0.37 cm²/V·s, 5×10² and 5 V, respectively.     

Influence of Gas Flow Rate for Formation of Aligned Nanorods in ZnO Thin Films for Solar-Driven Hydrogen Production

ZnO thin films have been deposited in mixed Ar/N₂ gas ambient at substrate temperature of 500°C by radiofrequency sputtering of ZnO targets. We find that an optimum N₂-to-Ar ratio in the deposition ambient promotes the formation of well-aligned nanorods. ZnO thin films grown in ambient with 25% N₂ gas flow rate promoted nanorods aligned along c-axis and exhibit significantly enhanced photoelectrochemical (PEC) response, compared with ZnO thin films grown in an ambient with different N₂-to-Ar gas flow ratios. Our results suggest that chamber ambient is critical for the formation of aligned nanostructures, which offer potential advantages for improving the efficiency of PEC water splitting for H₂ production.     

Preparation and characterization of ZnO/Cu/ZnO transparent conductive films

ZnO/Cu/ZnO transparent conductive thin films were prepared by RF sputtering deposition of ZnO target and DC sputtering deposition of Cu target on n-type (001) Si and glass substrates at room temperature. The morphology, structure, optical, and electrical properties of the multilayer films were characterized by field emission scanning electron microscope (FESEM), X-ray diffraction (XRD), UV/Vis spectrophotometer, and Hall effect measurement system. The influence of Cu layer thickness and the oxygen pressure in sputtering atmosphere on the film properties were studied. ZnO/Cu/ZnO transparent conductive film fabricated in pure Ar atmosphere with 10 nm Cu layer thickness has the best performance: resistivity of 2.3×10-4 Ω·cm, carrier concentration of 6.44×1016cm-2 , mobility of 4.51cm2·(V·s)-1 , and acceptable average transmittance of 80 % in the visible range. The transmittance and conductivity of the films fabricated with oxygen are lower than those of the films fabricated without oxygen, which indicates that oxygen atmosphere does not improve the optical and electrical properties of ZnO/Cu/ ZnO films.     

Structural, optical and chemical analysis of zinc sulfide thin film deposited by RF-mganetron sputtering and post deposition annealing

Zinc sulfide (ZnS) thin films were deposited by radio-frequency (RF) magnetron sputtering. The effects of the process parameters such as deposition time and RF-power, as well as of post deposition annealing under oxygen containing atmospheres, on the material properties of ZnS films have been investigated. X-ray diffraction analysis reveals out that the as-deposited ZnS films preferred (002) hexagonal wurtzite and (111) cubic zinc blend (111) at 28.60°, while a thicker ZnS film has additional hexagonal wurtzite (100), (110), and (200) planes coexisting with the preferred oriented-planes, suggesting that the thickness is dependent on the growth of ZnS. After annealing, ZnO phases were detected, indicating island-like grain growth on the surface of the ZnS film. By increasing the deposition time and the RF power, the optical band gap energy (E_g) of the ZnS film changes from 4.13 to 3.87 eV, indicating the presence of lower E_g with thicker ZnS film. The lower E_g (～3.27 eV) value of the annealed films is attributed to the ZnO transition. Unlike bulk ZnS material (Zn/S～1.08), deposited ZnS thin film has Zn-rich and S-deficient composition (Zn/S～1.28). However, the Zn/S ratio is closer to the ideal value when there is a longer deposition time or higher RF-power.     

Structural and optical properties of epitaxial ZnO thin films on 4H–SiC (0 0 0 1) substrates prepared by pulsed laser deposition

Epitaxially grown ZnO thin films on 4H–SiC (0 0 0 1) substrates were prepared by using a pulsed laser deposition (PLD) technique at various substrate temperatures from room temperature to 600 °C. The crystallinity, in-plane relationship, surface morphology and optical properties of the ZnO films were investigated by X-ray diffraction (XRD), atomic force microscopy (AFM) and photoluminescence (PL) measurements, respectively. XRD analysis showed that highly c-axis oriented ZnO films were grown epitaxially on 4H–SiC (0 0 0 1) with no lattice rotation at all substrate temperatures, unlike on other hexagonal-structured substrates, due to the very small lattice mismatch between ZnO and 4H–SiC of ～5.49%. Further characterization showed that the substrate temperature has a great influence on the properties of the ZnO films on 4H–SiC substrates. The crystalline quality of the films was improved, and surfaces became denser and smoother as the substrate temperature increased. The temperature-dependent PL measurements revealed the strong near-band-edge (NBE) ultraviolet (UV) emission and the weak deep-level (DL) blue-green band emission at a substrate temperature of 400 °C.     

Structural and optical properties of electrodeposited ZnO thin films on conductive RuO2 oxides

ZnO thin films were grown on the 150 nm-thick RuO₂-coated SiO₂/Si substrates by electrochemical deposition in zinc nitrate aqueous solution with various electrolyte concentrations and deposition currents. Crystal orientation and surface structure of the electrodeposited ZnO thin films were characterized by X-ray diffraction (XRD) and scanning electron microscopy, respectively. The XRD results show the as-electrodeposited ZnO thin films on the RuO₂/SiO₂/Si substrates have mixed crystallographic orientations. The higher electrolyte concentration results in the ZnO thin films with a higher degree of c-axis orientation. Moreover, the use of an ultra-thin 5 nm-thick ZnO buffer layer on the RuO₂/SiO₂/Si substrate markedly improves the degree of preferential c-axis orientation of the electrodeposited ZnO crystalline. The subsequent annealing in vacuum at a low temperature of 300 °C reduces the possible hydrate species in the electrodeposited films. The electrodeposited ZnO thin films on the 5 nm-thick ZnO buffered RuO₂/SiO₂/Si substrates grown in 0.02 M electrolyte at −1.5 mA with a subsequent annealing in vacuum at 300 °C had the best structural and optical properties. The UV to visible emission intensity ratio of the film can reach 7.62.     

High rate reactive magnetron sputtering of ZnO:Al films from rotating metallic targets

Aluminum doped zinc oxide (ZnO:Al) films were reactively sputtered at a high discharge power from dual rotating metallic targets (Zn:Al = 99.5:0.5 wt.%). Deposition conditions like substrate temperature and working points were varied in order to prepare high quality ZnO:Al films. The influences on electrical and optical ZnO:Al thin film properties and surface texture before and after chemical etching in diluted HCl were studied in order to achieve light scattering films as front contact for solar cells. High dynamic deposition rate close to 90 nm m/min and high Hall mobility of up to 47 cm²/Vs were obtained. Transmission of more than 85% in the visible spectral range is obtained for all ZnO:Al films in this study. In addition, the absorption in near infrared region is low due to low doping. Surface texture after etching is usually much rougher than before. However, some films reveal after etching small surface features that are similar to initial surface features. We propose a relationship between initial and post-etched surface textures.