Improved visible transparency of SIO<Subscript>2</Subscript>/ZNO:AL /CEO<Subscript>2</Subscript>-TIO<Subscript>2</Subscript>/SIO<Subscript>2</Subscript> multilayer films with high UV absorption and infrared reflection rate

New visible transparent, UV absorption, and high infrared reflection properties have been realized by depositing multilayer SiO₂/ZnO: Al/CeO₂-TiO₂/SiO₂ films onto glass substrates at low temperature by radio frequency magnetron sputtering. Optimum thickness of SiO₂, ZnO: Al (ZAO) and CeO₂-TiO₂ (CTO) films were designed with the aid of thin film design software. The degree of antireflection can be controlled by adjusting the thickness and refractive index. The outer SiO₂ film can diminish the interference coloring and increase the transparency; the inner SiO₂ film improves the adhesion of the coating on the glass substrate and prevents Ca²⁺, Na⁺ in the glass substrate from entering the ZAO film. The average transmittance in the visible light range increases by nearly 18%-20%, as compared to double layer ZAO/CTO films. And the films display high infrared reflection rate of above 75% in the wavelength range of 10-25 μm and good UV absorption (> 98%) properties. These systems are easy to produce on a large scale at low cost and exhibit high mechanical and chemical durability. The triple functional films with high UV absorption, antireflective and high infrared reflection rate will adapt to application in flat panel display and architectural coating glass, automotive glass, with diminishing light pollution as well as decreasing eye fatigue and increasing comfort.     

Preparation and Properties of Ag—TiO2 Thin Films on Glass SUbstrates

Ag-TiO2 thin films were prepared on glasses.The morphology and structure of Ag-TiO2 films were investigated by XRD.SEM and FT-IR.The photocatalytic and hydrophilic properties of Ag-TiO2 thin films were also evaluated by examining photocatalytic degradation dichlorophos under sunlight illumination and the change of contact angle respectively.The research results show that the Ag-TiO2 thin film is mainly composed of 20-100nm Ag and TiO2 particles,The Ag-TiO2 thin films possess a super-hydrophilic ability and higher photocatalytic activity than that of pure TiO2 thin film.     

Thickness Dependence of Structural and Optical Properties of Chromium Thin Films as an Infrared Reflector for Solar-thermal Conversion Applications

The thermal emittance of Cr film, as an IR reflector, was investigated for the use in SSAC. The Cr thin films with different thicknesses were deposited on silicon wafers, optical quartz and stainless steel substrates by cathodic arc ion plating technology as a metallic IR reflector layer in SSAC. The thickness of Cr thin films was optimized to achieve the minimum thermal emittance. The effects of structural, microstructural, optical, surface and cross-sectional morphological properties of Cr thin films were investigated on the emittance. An optimal thickness about 450 nm of the Cr thin film for the lowest total thermal emittance of 0.05 was obtained. The experimental results suggested that the Cr metallic thin film with optimal thickness could be used as an effective infrared reflector for the development of SSAC structure.     

Preparation and electrical properties of BaPbO3 thin film

BaPbO3 thin films were deposited on Al2O3 substrates by sol-gel spin-coating and rapid thermal annealing. The microstructure and phase of BaPbO3 thin films were determined by X-ray diffractometry, scanning electrons microscopy and energy dispersive X-ray spectrometry. The influence of annealing temperature and annealing time on sheet resistance of the thin films was investigated. The results show that heat treatment, including annealing temperature and time, causes notable change in molar ratio of Pb to Ba, resulting in the variations of sheet resistance. The variation of electrical properties demonstrates that the surface state of the film changes from two-dimensional behavior to three-dimensional behavior with the increase of film thickness. Crack-free BaPbO3 thin films with grain size of 90 nm can be obtained by a rapid thermal annealing at 700 ℃ for 10 min. And the BaPbO3 films with a thickness of 2.5 μm has a sheet resistance of 35 Ω·-1.     

Photocatalytic activities of amorphous TiO<Subscript>2</Subscript>-Cr thin films prepared by magnetron sputtering

Chrome-doped titanium oxide films were prepared by reactive magnetron sputtering method. The films deposited on glass slides at room temperature were investigated by atom force microscope, X-ray diffractometer, X-ray photoelectron spectroscopy, UV-Vis spectrophotometer, the photoluminescence （PL） and ellipse polarization apparatus. The results indicate that TiO2-Cr film exists in the form of amorphous. The prepared films possess a band gap of less than 3.20 eV, and a new absorption peak. The films, irradiated for 5 h under UV light, exhibit excellent photocatalytic activities with the optimum decomposition rate at 98.5% for methylene blue. Consequently, the thickness threshold on these films is 114 nm, at which the rate of photodegradation is 95% in 5 h. When the thickness is over 114 nm, the rate of photodegradation becomes stable. This result is completely different from that of crystalloid TiO2 thin film.     

Optical properties and microstructure of Ta<Subscript>2</Subscript>O<Subscript>5</Subscript> thin films prepared by ion assisted electron beam evaporation

An effective method for determining the refractive index of weak absorption transparent thin films was presented, which is also applicable to other weak absorption dielectric thin films. The as-deposited Ta2O5 thin films prepared by ion assisted electron beam evaporation showed a maxima transmittance as high as 93% which was close to that of the bare substrate, and exhibited a blue shift when the substrate temperature increased from room temperature to 250 ℃. The refractive index seemed to be immune to the substrate temperature and film thickness with its value about 2.14 at incidence wavelength of 55（1 nm. The surface morphology measured by atomic force microscopy （AFM） revealed that the microstructures lead to the slim optical difference, which was the interplay of substrate temperature and assisted ion beam.     

Study on BaTiO<Subscript>3</Subscript> films prepared by AC power microarc oxidation

BaTiO₃ films were prepared by microarc oxidation (MAO) with an in-house built alternating current (AC) power supply in Ba(OH)₂ solution in this study. The surface morphology, combinability with the substrate and phase composition of the films were investigated by XRD, SEM and TEM. The BaTiO₃ films were annealed at a temperature range of 900 to 1200°C and phase compositions were tested thereafter. The results showed that the BaTiO₃ films were mainly composed of the primitive hexagonal phase with relatively small amount of tetragonal and amorphous phases. Moreover, the amount of amorphous phase decreased with the time of annealing. The transformation of BaTiO₃ from hexagonal structure to tetragonal stucture became obvious until the annealing temperature reached 1200°C. The film consisted mainly of BaTiO₃ tetragonal structure with ferroelectric property. The influence of annealing on surface morphology and mechanism of phase transformation of the films were also discussed. Supported by Guangdong Natural Science Foundation (Grant No. 0500649)     

TiO2薄膜的制备及其对304不锈钢防腐性能的研究

采用过氧钛酸溶胶凝胶法（sol-gel）制备 TiO2溶胶,并用浸渍-提拉法在304不锈钢（304SS）上制备TiO2薄膜。利用X射线衍射仪（XRD）,原子力显微镜（AFM ）和紫外-可见分光光度计（UV/Vis）表征了 TiO2晶型、薄膜表面形貌以及光吸收性能。通过极化曲线法分别研究了在暗态和光照条件下TiO2薄膜对304SS的防腐性能。结果表明：在暗态下,镀膜厚度为240．7 nm ,表面粗糙度为3．64 nm的 T iO2薄膜有最佳的机械防腐性能,腐蚀速率可从6．32×10-6 mm/a降低到5．65×10-9 mm/a;在光照条件下,膜厚294．3 nm ,处理温度为400℃,只有单一锐钛矿晶型的TiO2薄膜,对304SS的阴极保护性能较好,腐蚀电位可由-130 mV降到-319 mV。     

PEDT导电聚合物气敏特性研究

采用化学聚合法制备了导电聚合物3,4-乙烯二氧噻吩膜,利用扫描电子显微镜和傅里叶变换红外光谱法对薄膜的光学成分及形貌进行了分析。采用叉指电极结构研制出了3,4-乙烯二氧噻吩薄膜气体传感器,研究了3,4-乙烯二氧噻吩薄膜气体传感器对有毒气体NO2和NH3的敏感特性以及其自身的温度特性。结果发现,3,4-乙烯二氧噻吩薄膜气体传感器对低浓度的NO2和NH3都具有很好的敏感特性。该文还对3,4-乙烯二氧噻吩薄膜对NO2和NH3两种气体的敏感机理进行了详细的讨论。     

Preparation and Properties of Ag-TiO_2 Thin Films on Glass Substrates

1　ＩｎｔｒｏｄｕｃｔｉｏｎＩｎ 1970ｓ ,ｔｈｅｐｈｏｔｏｃａｔａｌｙｔｉｃｐｒｏｐｅｒｔｙｏｆｔｉｔａｎｉｕｍｄｉｏｘｉｄｅ (ＴｉＯ2 )ｗａｓｆｏｕｎｄｂｙＦｕｊｉｓｈｉｍａｅｔａｌ[1] .ＴｉＯ2 ｉｓｗｈｉｔｅｉｎｃｏｌｏｒ,ｉｎｅｘｐｅｎｓｉｖｅ ,ａｎｄｎｏｎｔｏｘｉｃ .Ｂｅｃａｕｓｅｏｆｉｔｓｓｔｒｏｎｇｐｈｏｔｏｃａｔａｌｙｔｉｃｅｆｆｅｃｔ ,ＴｉＯ2 ｉｓｕｓｅｄｉｎｔｈｅｔｒｅａｔｍｅｎｔｏｆｗａｓｔｅｗａｔｅｒａｎｄｔｈｅｐｕｒｉｆｉｃａｔｉｏｎｏｆａｉｒａｓａｎａｎｔｉｂａｃｔｅｒｉａ…     

Preparation of TiO2 Thin Film and Its Antibacterial Activity

TiO2 nanometer thin films with photocatalytic antibacterial activity were prepared by the sol-gel method on fused quartz and soda lime glass precoated with a SiO2 layer. The thin films were characterized by X-ray photoelectron spectroscopy ( XPS ), scanning electron microscopy (SEM), and X- ray diffraction ( XRD ). The results show that sodium and calcium diffusion into nascent TiO2 film is effectively retarded by the SiO2 layer precoated on the soda lime glass, The antibacterial activity of the films was determined. The crystalline of TiO2 nanometer thin film has important effects on the antibacterial activity of the film.     

Influence of argon gas pressure on the ZnO:Al films deposited on flexible TPT substrates at room temperature by magnetron sputtering

Aluminium doped ZnO thin films(ZnO︰Al) were deposited on transparent polymer substrates at room temperature by rf magnetron sputtering method from a ZnO target with Al2O3 of 2.0 wt%. Argon gas pressure varied from 0.5 Pa to 2.5 Pa with radio frequency power of 120 W. XRD results showed that all the ZnO︰Al films had a polycrystalline hexagonal structure and a (002) preferred orientation with the c-axis perpendicular to the substrate. The grain sizes of the films were 6.3-14.8 nm.SEM images indicated the ZnO︰Al film with low Argon gas pressure was denser and the deposition rate of the films depended strongly on the Argon gas pressure, increasing firstly and then decreasing with increasing the pressure. The highest deposition rate was 5.2 nm/min at 1 Pa. The optical transmittance of the ZnO︰Al films increased and the blue shift of the absorption edge appeared when the Argon gas pressure increased. The highest transmittance of obtained ZnO︰Al films at 2.5 Pa was about 85% in the visible region. The electrical properties of the films were worsened with the increase of the Argon gas power from 1 Pa to 2.5 Pa. The resistivity of obtained film at 1.0 Pa was 2.79×10-2 Ω·cm.     

Microstrueturc and Mcehanieal Propcrtics of Heat-treated GeSb2Te4 Thin Films

The effect of annealing on microstructure, adhesive and frictional properties of GeSb2Te4 films were experimentally studied. The GeSb2Te4 films were prepared by radio frequency （RF） magnetron sputtering, and annealed at 200℃ and 340℃ under vacuum circumstance, respectively. The adhesion and friction experiments were mainly conducted with a lateral force microscope （LFM） for the GeSb2Te4 thin films before and after annealing. Their morphology and phase structure were analyzed by using atomic force microscopy （AFM） and X-ray Diffraction （XRD） techniques, and the nanoindention was employed to evaluate their hardness values. Moreover, an electric force microscope （EFM） was used to measure the surface potential. It is found that the deposited GeSb2Te4 thin film undergoes an amorphous-to-fcc and fcc-to-hex structure transition; the adhesion has a weaker dependence on the surface roughness, but a certain correlation with the surface potential of GeSb2Te4 thin films. And the friction behavior of GeSb2Te4 thin films follows their adhesion behavior under a lower applied load. However, such a relation is replaced by the mechanical behavior when the load is relatively higher. Moreover, the GeSb2Te4 thin film annealed at 340℃ presents a lubricative property.     

Effect of Mg-film thickness on the formation of semiconductor Mg2Si films prepared by resistive thermal evaporation method

Mg fi lms of various thicknesses were deposited on Si(111) substrates at room temperature by resistive thermal evaporation method, and then the Mg/Si samples were annealed at 40 ℃ for 4 h. The effects of Mg fi lm thickness on the formation and structure of Mg2Si fi lms were investigated. The results showed that the crystallization quality of Mg2Si fi lms was strongly infl uenced by the thickness of Mg fi lm. The XRD peak intensity of Mg2Si(220) gradually increased initially and then decreased with increasing Mg fi lm thickness. The XRD peak intensity of Mg2Si(220) reached its maximum when the Mg fi lm of 380 nm was used. The thickness of the Mg2Si fi lm annealed at 400 ℃ for 4 h was approximately 3 times of the Mg fi lm.     

Influence of thickness on the properties of solution-derived LiMn<Subscript>2</Subscript>O<Subscript>4</Subscript> thin films

LiMn₂O₄ thin films of different thickness were derived from solution deposition and heat treated by rapid thermal annealing. The phase identification and surface morphology were studied by X-ray diffraction and scanning electron microscopy. The electrochemical properties of the films were examined by galvanostatic charge-discharge experiments and electrochemical impedance spectroscopy. LiMn₂O₄ thin films of different thickness derived from solution deposition and rapid thermal annealing are homogeneous and crack free with the grain size between 20 nm and 50 nm. The specific capacity of these films is between 42 and 47 μAh·cm²·μm⁻¹. The capacity decreases with the increase of discharge current density. The capacity loss per cycle increases from 0.012% to 0.16% after being cycled 50 times as the film thickness increases from 0.18 μm to 1.04 μm. The lithium diffusion coefficients of these films are in the same order of 10⁻¹¹ cm²·s⁻¹.     

Preparation and Properties of IrO2 Thin Films Grown by Pulsed Laser Deposition Technique

Highly conductive IrO2 thin films were prepared on Si （100） substrates by means of pulsed laser deposition technique from an iridium metal target in an oxygen ambient atmosphere. Emphasis was put on the effect of oxygen pressure and substrate temperature on the structure, morphology and resistivity of IrO2 films. It was found that the above properties were strongly dependent on the oxygen pressure and substrate temperature. At 20 Pa oxygen ambient pressure, pure polycrystalline IrO2 thin films were obtained at substrate temperature in the 300-500℃ range with the preferential growth orientation of IrO2 films changed with the substrate temperature. IrO2 films exhibited a uniform and densely packed granular morphology with an average feature size increasing with the substrate temperature. The room-temperature resistivity variations of IrO2 films correlated well with the corresponding film morphology changes. IrO2 films with the minimum resistivity of （42 ±6）μΩ·cm was obtained at 500℃.     

Polyvinylpyrrolidone/graphene oxide thin films coated on quartz crystal microbalance electrode for NH3 detection at room temperature

In this paper, composite film based on polyvinylpyrrolidone (PVP)/graphene oxide (GO) was fabricated by spray method on AT-cut 9.986 MHz quartz crystal microbalance (QCM) for NH₃ sensing. The thin films were characterized by scanning electron microscope (SEM), Fourier transform infrared spectroscopy (FTIR) and ultraviolet-visible spectroscopy (UV-VIS) to investigate the morphologies and the composition contents, respectively. The experimental results reveal that PVP/GO based sensor holds higher sensitivity, larger responsiveness and smaller baseline drift than those based on pure PVP at room temperature. Besides, the prepared sensor exhibits greater response to NH₃ than other gases such as CO, CO₂ and NO₂ at the same concentration. The good linearity, reproducibility and stability demonstrate the practicability of PVP/GO hybrid film in detecting NH₃.     

Influence of annealing temperature on the properties of TiO2 films annealed by ex situ and in situ TEM

TiO₂ thin films were deposited on quartz substrates by DC reactive magnetron sputtering of a pure Ti target in Ar/O₂ plasma at room temperature. The TiO₂ films were annealed at different temperatures ranging from 300 to 800 °C in a tube furnace under flowing oxygen gas for half an hour each. The effect of annealing temperatures on the structure, optical properties, and morphologies were presented and discussed by using X-ray diffraction, optical absorption spectrum, and atomic force microscope. The films show the presence of diffraction peaks from the (101), (004), (200) and (105) lattice planes of the anatase TiO₂ lattice. The direct band gap of the annealed films decreases with the increase of annealing temperature. While, the roughness of the films increases with the increases of annealing temperature, and some significant roughness changes of the TiO₂ film surfaces were observed after the annealing temperature reached 800 °C. Moreover, the influences of annealing on the microstructures of the TiO₂ film were investigated also by in situ observation in transmission electron microscope.     

Transport properties and microstructure of La0.7Sr0.3MnO3 nanocrystalline thin films grown by polymer-assisted chemical solution deposition

Perovskite-based materials can be widely used in the aerospace and transportation field. Perovskite manganese oxides La_0.7Sr_0.3MnO₃ (LSMO) thin films were grown on LaAlO₃ (100) and Si (100) single crystal substrates by the polymer-assisted chemical solution deposition (PACSD) method. Electronic transport behavior, microstructure, and magnetoresistance (MR) of LSMO thin films on different substrates were investigated. The resistance of LSMO films fabricated on LaAlO₃ substrates is smaller than that on the Si substrates. The magnetic field reduces resistance of LSMO films both on Si and LAO in the wide temperature region, when the insulator-metal transition temperature shifts to higher temperature. The low-field magnetoresistance of LSMO films on Si in low temperature range at 1 T is larger than that of LSMO films on LAO. However, the MR of LSMO film on LAO films at room-temperature is about 5.17 %. The thin films are smooth and dense with uniform nanocrystal size grain. These results demonstrate that PACSD is an effective technique for producing high quality LSMO films, which is significant to improve the magnetic properties and the application of automotive sensor.

     

Controlled size and density distribution of nanoparticles by thermal ammonia etching method

Nickel nanometer catalyst thin films were prepared on SiO₂/Si substrates using sputtering coater. The effects of ammonia pretreatment on the catalyst films from continuous film to the nanoparticles were investigated. The nanostructures of the Ni thin films as a function of the catalyst film original thickness, the pretreatment time and temperature were discussed. The optimum parameters of etching process were obtained, and the functional mechanism of ammonia was primarily analyzed. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) were used to evaluate the obtained nanoparticles. It is demonstrated that the controlled size and density distribution of the nanoparticles can be achieved by employing ammonia etching method.