基于双迭片结构的三维声压梯度矢量水听器

矢量水听器可以测量声场中水质点运动的矢量信息,其中由双声压水听器构成的声压梯度矢量水听器,结构简单,适用于低频探测.通过对铍铜合金与压电陶瓷圆片构成的振子进行模态分析,制作了6只一致性好的双迭片型声压水听器作为声压梯度矢量水听器振子.将基于双迭片与压电陶瓷环结构制作的声压梯度矢量水听器进行灵敏度和指向性校准.结果表明,...     

三维压差式光纤矢量水听器设计与实验

阐述了压差式光纤矢量水听器的基本原理,分析了基元灵敏度及间距对其声压灵敏度的影响,进行了三维压差式光纤矢量水听器探头结构设计,研制了二维压差式光纤矢量水听器样品,并进行了性能指标测试。测试结果表明,在20~1 000Hz频段内,压差式光纤矢量水听器的声压灵敏度与理论计算结果基本吻合,在500Hz具有良好的指向性。     

MEMS仿生矢量水听器的微结构优化设计

压阻式的MEMS仿生矢量水听器的固有频率和灵敏度之间是相互制约的,即随微结构的各个尺寸(悬臂梁的长、宽、高及中心连接体的边长)的变化,二者呈现相反的趋势。通过理论分析和推导,得出每个尺寸对水听器固有频率和灵敏度的影响程度不一致,可以合理地设计微结构的各个尺寸(最优解),使矢量水听器在具有相同固有频率条件下得到最大灵敏度。根据常用的微结构,通过Matlab软件计算出了微结构的一组最优解。通过ANSYS软件仿真验证,与常用的微结构相比,该微结构固有频率下降了7%,而灵敏度提高了1倍。最后,测试结果表明:两组尺寸的水听器频带范围为20~1 000 Hz,并且尺寸优化后的水听器比优化前的灵敏度平均高5 dB。     

高灵敏度宽频带阵列式仿生矢量水听器研究

针对MEMS仿生矢量水听器灵敏度和频带相互制约,不能同时满足宽频带高灵敏度测量的问题,在单个MEMS矢量水听器的基础上,设计了由四个单元构成的2×2单片集成微敏感结构阵列,实现了水听器的高灵敏度和宽频带。通过理论分析和ANSYS仿真分析,确定阵列微结构的尺寸,采用硅微机械加工工艺完成了阵列微结构的加工,最后在水声一级计量站对封装好的水听器进行了灵敏度和指向性校准测试。测试结果表明:该阵列式仿生矢量水听器未加前置放大时灵敏度达到-189 dB,频响范围20～5 000 Hz,具有良好的"8"字型指向性。     

集成硅纤毛的MEMS矢量水听器的压阻特性

水听器是水下探测的主要仪器,通过对其结构的研究和改进可显著提升其性能.针对现阶段矢量水听器所采用的纤毛二次集成方式所造成的一致性误差较大的问题,以硅纳米膜作为压敏单元,设计了一种新型基于微电子机械系统(MEMS)的压阻式矢量水听器.通过理论及仿真确定最优尺寸,进行一体化工艺流程的设计,将硅纤毛直接集成在二氧化硅梁上,既...     

介观压阻型硅锗加速度计研究

提出以介观压阻效应为工作原理制作高灵敏度压阻式硅锗加速度计,采用Si1-xGex/Si结构薄膜作为敏感元件,设计了一个双悬臂梁式的压阻武硅锗加速度计,通过理论分析与仿真计算,得出通过调整对该结构的外加应力可以实现对传感器灵敏度的调节,而且利用介观压阻效应原理可以将压阻式硅微加速度计的灵敏度提高一个数量级的结论,为设计新型压阻式硅微加速度计提供了一种思路.     

薄壁圆柱壳体压差式光纤矢量水听器

分析了薄壁圆柱壳体压差式光纤矢量水听器的基本原理.用光纤迈克耳孙干涉法测量水声压差信号,用琼斯矩阵理论分析了干涉系统的偏振衰落原因并用法拉第镜实现偏振补偿.分析了压差判向的声学原理,仿真了余弦指向性曲线.用轴对称问题的准静态弹性力学原理分析了水听器背衬结构模型,得出声压差相移灵敏度的解析式.实验设计并实现了薄壁圆柱壳体压差式光纤矢量水听器样机,其测量的声压相移灵敏度与理论计算结果基本吻合,其指向性测量与计算机仿真分析基本一致.在低频段灵敏度上取得了突破,为低频水声环境应用压差式矢量水听器提供了依据,为小尺寸高灵敏度光纤矢量水听器的研制提供了参考.     

压差式光纤矢量水听器声压相位灵敏度研究

该文介绍了压差式光纤矢量水听器及其基元的工作原理,并分析了光纤层等效处理对仿真结果的影响。基于有限元法对压差式光纤矢量水听器的基本性能进行了仿真分析,根据仿真模型所选定的参数研制压差式光纤矢量水听器样品,并对样品在频率为20～1 000 Hz时进行了测试。测试结果表明,声压相位灵敏度的仿真计算结果与实验测试结果基本一致,平均差值约为1.0 dB。研究结果表明,采用有限元法对压差式光纤矢量水听器的声压相位灵敏度进行仿真具有可行性。     

驻波管测试下压差式光纤矢量水听器的改进

压差式矢量水听器基于声场有限差分原理进行声压梯度测量,而光纤声压传感器结构相对复杂,在工艺上难以保证传感器间的灵敏度一致性.研究了声压传感单元不一致对压差式光纤矢量水听器的影响,指出声压传感基元灵敏度不一致对实际应用中的行波场条件下的测量影响更严重,采用传统的驻波管校准后的压差式光纤矢量水听器在实际运用中就会造成声压的相位测量误差.提出了可通过一维方向上采用双干涉仪结构来克服此问题,并分析了该结构的压差式光纤矢量水听器的驻波管校准方法,依据该方法进行测试,可克服声压传感基元灵敏度不一致的影响,使其能在实际中得以应用.     

水池中低频矢量水听器灵敏度校准

在水池中,低频声源与矢量水听器吊放在水池中央,间距小于水池的混响距离,在100～1 000 Hz范围内测量矢量水听器声压和矢量通道接收信号的灵敏度.对测量得到的灵敏度进行球面修正,可得到矢量水听器声压通道和矢量通道的灵敏度.测量结果表明,这种校准方法能校准低频矢量水听器的灵敏度,结果与理论相符.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.