共查询到18条相似文献,搜索用时 78 毫秒
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磁控溅射MoS2薄膜的生长特性研究 总被引:2,自引:0,他引:2
利用非平衡磁控溅射技术制备出二硫化钼薄膜,并通过扫描电子显微镜和X射线衍射仪研究了工作气压和沉积时间对薄膜表面形貌和结构的影响及其演化规律。实验结果表明,在小于0.40 Pa的气压下,沉积MoS2薄膜的(002)面平行于基体表面,而在高于0.60Pa的高气压下,膜层的(002)面垂直于基体表面.在沉积初期,无论工作气压的高低,薄膜均按(002)基面的方式生长;在沉积后期,低气压下形成的薄膜仍按(002)基面方式生长,而在高气压下薄膜将转向以(002)基面与(100)或(110)棱面联合的方式生长。薄膜的表面形貌、微观结构,与薄膜的生长速率和沉积粒子的能量有关。 相似文献
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磁控溅射MoS2薄膜的结构和微观摩擦磨损特性 总被引:3,自引:4,他引:3
利用磁控溅射法制取了MoS2薄膜,通过X光电子能谱、X射线衍射和AFM/FFM方法对薄膜的表面形貌、成分、化学价态、结构和微观摩擦磨损性能进行了研究。实验结果表明:MoS2薄膜表面呈蠕虫状,微观结构为(100)面平行于基面的非晶态,表面膜由MoS2和少量的MoO3组成。在微观摩擦磨损过程中,MoS2薄膜的摩擦系数较大,且而磨性能高;微摩擦过程中没有磨合阶段,不存在摩擦机理的转变。 相似文献
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MoS2基纳米复合薄膜具有良好的摩擦学性能,但较差的导电性能限制了其在载流条件下作为润滑材料的应用。为提高MoS2基纳米复合薄膜的导电性能,采用非平衡磁控溅射系统沉积2种不同Ag含量的MoS2/Ag纳米复合薄膜,并在不同的电流条件下研究MoS2/Ag纳米复合薄膜与GCr15钢球对摩时的摩擦学性能。结果表明:在载流下2种MoS2/Ag纳米复合薄膜表现出相似的摩擦性能,而低掺杂MoS2/Ag薄膜具有更佳的耐磨性能,这归因于低掺杂MoS2/Ag薄膜具有较好的力学性能;无载流时,MoS2/Ag纳米复合薄膜在摩擦过程中生成的氧化物颗粒增加了磨损、降低了润滑性,磨损机制主要为磨粒磨损;电流小于0.5 A时,电流促进了转移膜形成,使得摩擦因数降低,但磨损率增加,磨损机制主要为黏着磨损;当电流大于0.5 A时,由于电弧烧蚀加速了薄膜的磨损,磨损机制主要为磨粒磨损、黏着磨损和电弧腐蚀磨损。 相似文献
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利用射频磁控溅射技术分别在单面抛光Si(001),Al2O3(0001)和硬质合金(WC-8 wt.%Co)基底表面沉积HfMoNbZrNx薄膜,研究不同氮气流量RN对HfMoNbZrNx薄膜的组织和性能影响。结果表明,HfMoNbZr薄膜倾向于形成非晶态,随着RN的增加,HfMoNbZrN高熵合金氮化薄膜转变为面心立方(FCC)结构并且沉积速率下降;当RN=10%时,薄膜硬度和弹性模量最大,分别为21.8GPa±0.88GPa和293.5GPa±9.56GPa;所有薄膜均发生磨粒磨损,相较于多元合金薄膜,氮化物薄膜的磨损率下降了一个数量级,薄膜耐磨性显著提高。 相似文献
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用射频磁控溅射法在GCr15钢表面制得了MoS2薄膜。通过扫描电镜、摩擦磨损以及划痕试验仪研究了工艺参数对薄膜形貌和性能的影响。结果表明:采用射频溅射法,在功率200W、工作气压3Pa、时间2h条件下制备的MoS2薄膜性能最佳;沉积过程中沉积原子从衬底表面获得足够的扩散能量时薄膜按层状模式生长,扩散能量不足时薄膜按层岛复合模式生长;MoS2薄膜摩擦因数低,具有优良的摩擦学特性。 相似文献
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MoS2 single sheet lubrication by molybdenum dithiocarbamate 总被引:1,自引:0,他引:1
C Grossiord K Varlot J.-M Martin Th Le Mogne C Esnouf K Inoue 《Tribology International》1998,31(12):737-743
The mechanisms by which Modtc reduces friction in the centirange under boundary lubrication have been investigated using analytical tribometry. First, the SRV friction test was coupled with energy-filtering TEM on wear fragments and spatially-resolved XPS inside the wear scars. Second, we performed UHV friction tests on Modtc tribofilms previously created on a large area. The overall data demonstrate that the mechanisms of friction-reduction by Modtc is attributed to the effect of sliding between single layers of MoS2 only, and not to intra-sliding in MoS2 3-D crystal. Highly-dispersed MoS2 sheets are present in a carbon matrix in the tribofilm material. The growth of the 2-D MoS2 single sheets is thought to be formed by degradation of the Modtc molecule by electron transfer mechanisms activated by the friction process. The lubrication of the uncoated, stationary counterface is attributed to successive transfer of individual sheets towards the friction surface. Practically, in these conditions only a few per cent of dispersed MoS2 is sufficient to lubricate at the same level as pure MoS2. 相似文献
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钛合金表面磁控溅射制备羟基磷灰石/氧化钇稳定氧化锆复合涂层 总被引:1,自引:0,他引:1
采用磁控溅射法在Ti6Al4V基体上制备了HA/YSZ复合涂层。用X射线衍射仪、扫描电镜、原子力显微镜和划痕法对涂层进行了表征。结果表明:用磁控溅射法可在Ti6Al4V基体上成功制备HA/YSZ复合涂层,涂层主要含有HA、ZrO2和Y2O3物相,此外还有少量的TCP和CaO相;涂层表面呈多孔状,有利于类骨组织的长入,表面显微粗糙度约为140nm,涂层厚度约为4μm;划痕法测量涂层与基体的附着力约为80N。 相似文献
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Oleksiy V. Penkov Yegor A. Bugayev Igor Zhuravel Valeriy V. Kondratenko Auezhan Amanov Dae-Eun Kim 《Tribology Letters》2012,48(2):123-131
The tribological behavior of carbon/silicon bi-layer coatings deposited on a silicon substrate by DC magnetron sputtering was assessed and compared to that of amorphous carbon and silicon coatings. The motivation was to develop a wear resistant coating for silicon using thin layers of amorphous carbon and silicon. Wear tests were conducted by sliding a stainless steel ball against the coating specimens under applied normal loads in the range of 20?~?50?mN. Results showed that the wear rate of the bi-layer coating was strongly dependent on the ratio of thickness between the carbon and silicon layers. The wear rate of the bi-layer coating with 25?nm thick carbon and 102?nm thick silicon layers was about 48 and 20 times lower than that of the single-layer amorphous carbon and amorphous silicon coating, respectively. In addition, the steady-state friction coefficient of the bi-layer coating could be decreased to 0.09 by optimizing the thickness of the layer. Finally, a model for the wear reduction mechanism of the carbon/silicon bi-layer coating was proposed. 相似文献
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C.J. Klenke 《Tribology International》1990,23(1)
A recent investigation suggests that selected oxides perform well as additives in molybdenum disulphide (MoS2) because of their ability to soften at asperity contacts with the result that the solid lubricant can attain and retain a preferred tribological orientation.This research determined the effectiveness of boric oxide (B2O3), when used as an additive in MoS2, for substrate temperatures ranging from 21°C to 316°C. This range was used to allow the asperity contact temperature to vary below and above the softening point of B2O3. It was found that a moderate friction coefficient and high wear, which is attributed to the additive acting abrasively, occurred when the asperity contact temperature was well below the softening point of the oxide. When the asperity contact temperature neared the softening point of the oxide, the friction coefficient increased dramatically and wear volume was reduced. It is postulated that B2O3 acted adhesively at the interface resulting in a higher coefficient of friction, and wear decreased due to an attainment of a preferred orientation by the MoS2. For asperity contact temperatures significantly above the softening point of B2O3, the friction coefficient returned to about the same value as for temperatures below the softening point. It is speculated that wear continued to increase moderately because of localized melting of the B2O3, permitting the MoS2 to be removed from the interface. These observations support a hypothesis that an additive, such as boric oxide, can soften as the asperity contact temperature approaches the softening point temperature of the additive so that the overall tribological conditions may be improved resulting in reduced interfacial wear. Significant changes in temperature, load or sliding velocity would, of course, dramatically alter the wear characteristics observed at the interface. 相似文献
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The effects of MoS2 concentration on friction were investigated by using the ring compression test. An optimum concentration was found for friction. The optimum value is affected by specimen hardness and surface finish. A second optimum value also seems to exist for annealed (softer) 2011 aluminium alloy specimens. 相似文献
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As the lubricating properties of MoS2 are due to the sliding of lamellae, the crystallographic orientation and structural properties of these lamellae are important for the tribological behaviour. Thus an analysis of the growth morphology of sputtered MoS2 films was carried out. It is shown that morphological properties can be influenced by the parameters of the deposition process; in particular, it is possible to prepare coatings in which the lamellae are oriented parallel to each other. 相似文献
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采用太赫兹散射式扫描近场光学显微镜(THz s-SNOM)研究了化学气相沉积法制备的单层MoS2和WS2晶粒的太赫兹近场响应。在没有可见光激发时,未探测到可分辨的太赫兹近场响应,说明晶粒具有较低的掺杂载流子浓度。有可见光激发时,由于光生载流子的太赫兹近场响应,能够测得与晶粒轮廓完全吻合的太赫兹近场显微图。在相同的光激发条件下,MoS2的太赫兹近场响应强于WS2,反映了两者之间载流子浓度或迁移率的差异。研究结果表明,THz s-SNOM兼具超高的空间分辨率和对光生载流子的灵敏探测能力,对二维半导体材料和器件光电特性的微观机理研究具有独特的优势。 相似文献