共查询到20条相似文献,搜索用时 0 毫秒
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利用旋转甩涂法将掺有硫堇的Nation复合敏感薄膜固定在钾离子(K+)交换玻璃光波导表面,成功检测出了低浓度的二甲苯蒸汽.实验结果表明,常温下该元件对于质量浓度为4ms/m3的二甲苯蒸汽有很明显响应,其线性响应范围为4~6 800mg/m3.相同浓度的其它挥发性气体对检测二甲苯蒸汽干扰较小.该气敏元件具有灵敏度高、线性响应范围宽、响应恢复速度快、制作工艺简单等特点. 相似文献
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氮氧化物是造成全球变暖和产生酸雨的主要物质,因此氮氧化物气体的检测在环境监测和化学工业等许多领域中具有重要意义.该文以甲基绿为敏感试剂,将其掺杂于聚乙烯醇溶液后固定在钾离子玻璃光波导上,研制出检测氮氧化物气体的高灵敏度光波导传感元件.该元件具有响应快、成本低、易制作等特点.可检测出浓度为1.91 mg/m3的二氧化氮气体. 相似文献
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Filling trenches in silicon using phosphosilicate glass (PSG) provides many possibilities for novel device structures for sensors and actuators. This paper describes a plasma planarization technique that provides fully planarized PSG filled silicon trenches for sensor applications. The technique consists of planarizing the substrate using two photoresist layers and plasma etching-back. The lower resist layer is the AZ5214 image reversal resist, which is patterned and then thermally cured. The upper resist layer is a global HPR204 coating. The plasma etching-back is carried out using CHF3/C2F 6 gas mixture with an O2 addition. It is shown that by using the image reversal photoresist approach, fully planarized surface coating can be obtained without resorting to an additional mask. By adding 25 sccm (14%) O2 into the 137 sccm CHF3+18 sccm C2F6 gas mixture, the etch rates for the photoresist and PSG can be matched. Process optimization for the two layer resist coating and plasma etching is discussed 相似文献
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在各种光纤传感器中,光纤Bragg光栅(FBG)传感器是近几年来研究的热点。研究光纤光栅传感器的关键问题是光纤光栅的信号解调,即波长微小移位的检测问题。概述了光纤光栅传感器解调原理,并从响应特性分类角度对光纤光栅的几种解调方法进行了分析比较。 相似文献
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A new non-intrusive measurement technique for two-phase flow in microchannels is presented. The development of an evanescent field-based optical fiber Bragg grating (FBG) sensor is described, and experiments coupled with flow visualization demonstrating the performance of this sensor are presented. Two adjacent 1-mm FBGs in etched D-shaped fiber are embedded into the surface of a PDMS microchannel. Experiments are conducted in both droplet and slug flow regimes and high-speed digital video is captured synchronously with the sensor data. The FBGs exhibit an on?Coff type response to the passage droplets which is shown to correlate precisely with the passage of the liquid phase. This correlation enables the measurement of droplet average velocity and size using only the sensor data. In addition to the use of both FBG signals for the purpose of measuring droplet speed and size, it is shown that for droplets larger than the FBG length, a single FBG can be used to estimate the convection velocity and size of fast moving droplets. This sensing method is potentially useful for monitoring two-phase flow in fuel cells and microfluidic applications such as micro-heat exchangers and lab-on-a-chip systems. 相似文献
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《Sensors and actuators. A, Physical》2006,125(2):267-272
The use of embedded long-period grating (ELPG) in carbon–fiber composite laminate for bending measurement has been demonstrated in this paper. As the bending curvature increases on the ELPG laminate, the coupling strength of the cladding mode decreases while the resonance wavelength remains relatively constant. The ELPG yields a sensitivity of 5.065 dB m−1 and repeatability of 98.1% up to a bending curvature of 2 m−1. It also can be used to determine direction of the bend. 相似文献
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Wireless sensor networks (WSNs) applications are growing rapidly in various fields such as environmental monitoring, health care management, and industry control. However, WSN's are characterized by constrained resources especially; energy which shortens their lifespan. One of the most important factors that cause a rapid drain of energy is radio communication of multivariate data between nodes and base station. Besides, the dynamic changes of environmental variables pose a need for an adaptive solution that cope with these changes over the time. In this paper, a new adaptive and efficient dimension reduction model (APCADR) is proposed for hierarchical sensor networks based on the candid covariance-free incremental PCA (CCIPCA). The performance of the model is evaluated using three real sensor networks datasets collected at Intel Berkeley Research Lab (IBRL), Great St. Bernard (GSB) area, and Lausanne Urban Canopy Experiments (LUCE). Experimental results show 33.33% and 50% reduction of multivariate data in dynamic and static environments, respectively. Results also show that 97–99% of original data is successfully approximated at cluster heads in both environment types. A comparison with the multivariate linear regression model (MLR) and simple linear regression model (SLR) shows the advantage of the proposed model in terms of efficiency, approximation accuracy, and adaptability with dynamic environmental changes. 相似文献
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《Sensors and actuators. A, Physical》2000,79(1):36-45
A fibre-optic Bragg grating sensor for flow-induced vibration measurement is described. The sensor is based on monitoring shift in the Bragg wavelength of a fibre Bragg grating. The fibre Bragg grating, when bonded onto a structure, can measure local axial strain variation of the structure. The sensor was used to measure the flow-induced vibrations on a circular cylinder in a cross-flow. The measured strain ε is consistent with the transverse structural bending displacement Y obtained from a laser vibrometer in terms of the natural frequency of the fluid–structure system and the vortex shedding frequency. The experimental data further indicated that ε and Y are linearly correlated when the bending displacement is small. It is expected that the fibre Bragg grating sensor, because of its physical uniqueness, has an important role to play in the study of fluid–structure interactions. 相似文献
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Parylene surface-micromachined membranes for sensor applications 总被引:2,自引:0,他引:2
Zhifang Fan Engel J.M. Chen J. Chang Liu 《Journal of microelectromechanical systems》2004,13(3):484-490
This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor. 相似文献
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Katrin Schmitt Jonas Rist Carolin Peter Jürgen W?llenstein 《Microsystem Technologies》2012,18(7-8):843-848
We present the development and characterization of a low-cost fiber-optic colorimetric gas sensor for ammonia combined with the electronic circuitry for measurement control and RFID communication. The gas sensor detects ammonia using a 300?μm polyolefin fiber coated with a gas-sensitive polymer film. The spectral and time-dependent sensitivity of various polymer films was tested in transmission measurements at λ?=?590?nm. A prototype of the gas sensor was tested under realistic measurement conditions, i.e. battery-driven and in a completely autonomous mode. The sensor system showed good sensitivity to the ammonia concentrations and response times in the order of minutes. The achievable power consumption was below 100?μW. Bromophenol blue-based films showed a strong reaction to ammonia, with saturation concentrations around 1,000?ppm and response times of about 15?s to 100?ppm. The colorimetric reaction was simulated using a simple kinetic model which was in good agreement with the experimental results. 相似文献
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J. Dübendorfer R.E. Kunz G. Jobst I. Moser G. UrbanAuthor vitae 《Sensors and actuators. B, Chemical》1998,50(3):210-219
Integrated optical sensor chips suitable for high-resolution pH measurements are presented. The pH-sensitive swelling of a polymer membrane is detected by refractometry using a compact multi-channel sensor module. The signal transduction is achieved by means of chirped grating couplers which allow simple yet high functionality sensor modules to be built. The experiments have been performed with high sensitivity replicated polycarbonate TiO2 waveguide sensor chips coated with an ultrathin photopatterned hydrogel membrane having functional groups which reversibly change from the neutral state to a charged state upon acidification. A resolution δpH <±1.1×10−4 in terms of the pH (at pH 7.5) has been obtained in a dual-channel module with size 10×10×10 cm3. 相似文献
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光纤Bragg光栅与长周期光纤光栅比较及传感应用 总被引:2,自引:0,他引:2
阐述了光纤Bragg光栅(FBG)与长周期光纤光栅(LPFG)的常用制作方法、原理、特性,并对它们进行了比较,介绍了目前国内外光纤光栅的最新应用,特别是在传感领域的新应用。对今后的研究方向做了预测,适合于不同用途光纤光栅的写入技术有待于进一步提高,通过减小包层直径来改变光纤光栅特性的方法有待于进一步研究和利用,在折射率传感领域光纤光栅会有更广阔的天地。 相似文献
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Shih-Shou Lo Chii-Chang Chen Shih-Chieh Hsu Cheng-Yi Liu 《Journal of microelectromechanical systems》2006,15(3):584-587
This work demonstrates a direct amorphous Si low-temperature wafer bonding technique to fabricate a semiconductor hollow waveguide with omni-directional reflectors for use in near infrared applications. The 2% dilute KOH solution was used to bond two ODR Si wafers with an amorphous Si thin film on the top of Si wafers. The resultant bonding interface is very thin, with a thickness that is close to that of the SiO/sub 2/ layer in the ODR substrate. Hence, the far-field image shows that light is strongly confined in the waveguides. The propagation loss was reduced to 1.0/spl plusmn/0.5 db/cm in the TE and TM modes, broadening the development of the semiconductor hollow waveguide with omni-directional reflectors for use in optical communication applications. 相似文献