大量程光栅位移测量累积误差的修正

提出了一种自动测量光栅栅距修正累积误差的方法。栅距测量是基于高阶累积量估计光栅传感器输出的两路莫尔条纹信号的时间延迟而得到的,该方法能够实现每个栅距的测量,通过对每个光栅栅距的误差进行修正来减少累积误差,为大量程高精度测量奠定了基础。实验采用长为500 mm的50线/mm的光栅传感器,该传感器包含栅线25 000条,实现栅距测量分辨力为3 nm,达到了纳米级测量。该方法抗干扰能力强,适合在生产现场应用。     

大量程纳米级光栅干涉位移测量

针对传统光栅干涉仪中测量范围和分辨率难以同时提高的问题,提出利用单根大长度、低线数光栅实现大量程、高分辨率位移测量的方法.首先利用长度400mm,栅距10μm计量光栅的±5级衍射光生成条纹图,实现了条纹的10倍光学细分.然后提出一种基于傅里叶变换时移特性的条纹细分新方法,利用相邻两帧条纹图同一位置处相位的变化实现了高达1000倍的条纹电子细分.在此过程中,针对能量泄漏对傅里叶变换法相位提取精度的影响,提出条纹图整周期裁剪的方法,使条纹细分精度至少可达到1/1000条纹周期.仿真和实验结果表明,系统具有纳米级的分辨率和优于10nm的测量精度.     

基于衍射光栅的二维纳米位移测量技术

提出了一种基于正交衍射光栅作为测量基准元件的二维激光干涉测量系统.利用正交光栅的空间对称级的衍射光进行干涉,基于多普勒效应,采用偏振检测的方法获得相位相差90°的干涉信号.通过光电检测把获得的正弦和余弦信号进行相位细分,系统可在平面二维方向上实现纳米级的分辨率.该系统相比其他干涉测量系统,测量结构紧凑,环境因素对其影响较小,可应用于较大行程的平面微位移精密检测.     

集成光栅干涉微位移测量方法

介绍了一种新型集成光栅干涉微位移测量方法,设计加工了微位移敏感芯片,并进行了初步的性能测试．敏感芯片利用硅-玻璃键合体硅工艺制作而成,在玻璃上制有金属光栅,光栅上方有由铝梁支撑的可动结构．实验系统由敏感芯片、半导体激光器、光电二极管以及相应的驱动、检测电路组成入射激光照射到光栅上产生衍射光斑,衍射光的光强随可动结构与光栅之间的距离变化,通过测量衍射光强的变化可以得到位移．测试实验结果表明,所制作的集成光栅干涉微位移敏感芯片可实现位移检测,最小可检测的位移约0．2nm．     

基于光栅位移测量的反射镜设计

针对集成光栅-反射镜位移测试中工艺及装配误差导致反射镜与光栅不能平行的问题,本文设计了一种可自主调节的反射镜.与传统的工艺精度控制不同,方案重点对可调节反射镜结构进行设计,反射镜的偏转采用电容板来调节.建立了单层光栅与反射镜测量位移的理论模型,分析了两者不平行导致的测量误差,通过Ansys软件进行静力学分析,施加0～50V电压,仿真得到静电力作用下反射镜偏转最大位移为7μm,提取的最大应力35MPa.仿真结果表明所设计的反射镜可调节范围大于不平行误差,从理论上验证了反射镜调节的可行性.     

测量薄膜折射率的光栅衍射干涉方法

根据光的干涉理论,讨论了条纹周期数对测量薄膜折射率不确定性的影响,推导出干涉条纹错位量与薄膜折射率和厚度的关系式。由此提出采用光栅衍射干涉测量薄膜折射率的方法和实验方案。实验表明:该方法的干涉条纹测量精度达λ/10~λ/20,薄膜折射率测量精度可达 0.01 以上。     

大量程位移传感器用于三等量块检定时的不确定度分析

近年来,随着光电技术的发展,国内外出现了一系列基于光栅技术的高准确度大行程的位移传感器。光栅类传感器与其他传感器如电感、电容、容栅等比较,具有测量重复性好、准确度高、测量范围大的特点,特别是在较大行程时仍能保持非常好的线性。此外,由于电子细分技术和计算机技术的发展,大大提高了光栅类传感器的准确度,较高准确度的光栅类传感器在25mm测量范围内的最大示值误差可达到MPE=±(0.03 0.5l)μm(式中:l为测量长度,单位:m)。国外生产这类光栅传感器的厂家主要是德国HEIDENHAIN公司,国内也有厂家成功研制了这类传感器。这类光栅…     

一种小型相位光栅干涉式(PGI)微位移传感器

本文在已有的研究成果基础之上，介绍了一种小型相位光栅干涉式(Phase Grating Interference)微位移传感器，该传感器具有大量程、高分辨力的特点。     

光纤Bragg光栅位移和温度双参量传感实验研究

采用一种新颖的等强度梁光纤光栅（FBG）传感结构,将光纤光栅沿梁轴向粘贴在传感梁上,并确保光栅的一半粘贴在梁上,另一半则沿梁的轴向呈自由状态,通过两部分光栅对梁自由端位移和环境温度的不同响应,实现温度和位移的同时测量,测量误差不大于4％。通过多次实验验证,所得结果与理论分析相符合。     

Design,fabrication, and testing of fiber Bragg grating sensors for cryogenic long-range displacement measurement

It is essential to measure the shrinkage/expansion and positioning/aligning of magnets and to control valve displacement which plays a vital role in experiments like the Karlsruhe tritium neutrino experiment beam tube and Cryo pumps. Hence, a displacement sensor which, over a long working range, can be operated under extreme environmental conditions needs to be developed. Fiber Bragg gratings (FBG) have been considered to be excellent sensor elements useful for a variety of applications. This paper will discuss a long range displacement sensors based on fiber Bragg gratings for cryogenic temperature applications. The cryo pump inlet valve control requirements have been taken as example specifications for sensor design. To achieve the development goal, a proper signal transducer and sensor package were designed. A study of the strain transmission of surface-bonded FBG was conducted. The influence of bonding thickness and bonding length was reported. The design, fabrication, and performance were tested at low temperature of around 77 K. The sensor performance was found to be satisfactory at both room temperature and 77 K and linearly for long-range displacement of 550 mm with 14 pm/mm sensitivity and 0.142 mm accuracy.     

快速和高精度透视测量玻璃纤维/树脂复合材料构件内部的离面位移

提出一种光学干涉谱域相位对照B扫描,透视测量透明或半透明玻璃纤维/树脂复合材料内部离面位移的方法。针对玻璃纤维增强树脂基复合材料,设计了一种由树脂层模仿树脂基体、气隙层模仿裂缝气隙、玻璃层模仿玻璃纤维构成的树脂-玻璃复合构件,然后以此复合构件作为标定和量化系统的标准件进行实验研究。通过对平滑或散斑表面树脂-玻璃复合构件分别进行加载前后干涉光谱的两次拍摄,完成构件内部切面的离面位移测量,测量速度快。该系统的视场范围为3.5 mm、轮廓测量分辨率为±26.6 μm、离面位移测量精度为±0.1 μm、测量深度为2.66 mm。该方法在玻璃纤维增强树脂基复合材料力学性能测量和无损检测领域应用前景良好。     

Digital image correlation measurement of near‐tip fatigue crack displacement fields: constant amplitude loading and load history effects

Recent work by de Matos and colleagues employed digital image correlation to measure near tip displacement fields for fatigue cracks in 6082 T6 aluminium alloy. The main focus of this work was to directly measure fatigue crack closure, but the measurements can also be used to examine conditions at and ahead of the crack tip. In this paper, the results are re‐analysed and compared to two crack‐tip deformation models. The first assumes simple elastic deformation (according the Westergaard solution). This allows the history of crack‐tip stress intensity to be examined. Reasonable agreement with the elastic model is obtained, although there is a residual stress intensity caused by the plastic wake, which gives rise to crack closure. The second model examined is a simple elastic–plastic assumption, proposed by Pommier and colleagues. This can be applied to constant amplitude loading, although the results obtained here are very similar to the elastic case. A slightly more complex load case (a single overload in an otherwise constant amplitude variation of load) gives a much more complicated crack‐tip history. Here, the importance of crack‐tip plastic displacement, represented by the second term in Pommier's model becomes much clearer. Load history effects are captured by the residual value of this term and its associated displacement fields as well as by stress intensity factor. The implications for further modelling and experimental work are discussed.     

非真空条件下柔性多层材料高低温绝热性能实验测量

制作了柔性绝热被,设计和搭建了高温、低温环境测试系统,通过测量多层绝热被内外两侧及外侧附近空气的温度变化,衡量不同配置下多个多层绝热被样品的综合绝热性能。考察了厚度、多层配置方式、气密性等对柔性多层材料在常压下的高低温隔热作用和符合-100℃至+135℃高低温环境应用的柔性多层绝热被的最佳厚度及配置方式。