Hydrophilicity on carbon-doped TiO2 thin films under visible light

Carbon-doped TiO₂ thin films in the anatase phase with dopant concentrations of 1.1, 0.9, and 0.7 mol% were fabricated by a radio-frequency magnetron sputtering method. Dopant carbons were located at the oxygen sites. Carbon substitution caused the absorbance edge and/or the shoulder of TiO₂ to shift to a higher wavelength region. Carbon-doped TiO₂ thin films underwent a hydrophilic conversion when irradiating with visible light (400–530 nm). The hydrophilic property under visible light was inferior to that under ultraviolet light, which is explained by considering that the visible light sensitivity originates from the localized C 2p formed in the band-gap.     

Cr-doped TiO2 thin films deposited by RF-sputtering

Cr-doped TiO₂ thin films with different band gaps were prepared. Higher Cr doping was beneficial to the formation of the rutile-TiO₂ phase over the anatase-TiO₂ phase. A 4.8% Cr-doped thin film indicated a band gap of 2.95 eV, which was lower than the band gap of the rutile-TiO₂. Cr doping was accompanied by the formation of not only the rutile-TiO₂ phase but also the Cr₂O₃ phase, lead to the degradation of the hydrophilicity. The TiO₂ thin films with the mixed phase were not desirable to improve the hydrophilicity.     

Microanalysis of Pd and V-doped TiO2 thin films prepared by sputtering

Thin films of TiO₂ doped with vanadium and palladium, prepared by the magnetron sputtering method, were studied by means of X-ray diffraction (XRD), Scanning Electron Microscopy with Energy Disperse Spectrometer (SEM-EDS) and Atomic Force Microscopy (AFM). Investigations have brought important information about microstructure due to dopant incorporation in the TiO₂ host lattice. Directly after deposition thin films were XRD-amorphous and SEM investigations did not reveal details on the microstructure. Analysis of the topography of prepared thin films required application of Atomic Force Microscope. The AFM images show that as-deposited sample was dense with grain sizes varied in the range of 5.5 nm-10 nm, that indicated high quality nanocrystalline behavior. Additional annealing results in the formation of three phases in the thin film, e.g. (Ti,V)O₂ — solid solution, PdO and metallic inclusions of Pd. SEM-EDS system allowed analysis of the elemental composition, especially the V one, which lines have not been evidenced in the XRD diffraction pattern. EDS maps show homogenous distribution of elements Ti, O, V, Pd in prepared thin films.     

Effect of metal ion dopants on photochemical properties of anatase TiO2 films synthesized by a modified sol-gel method

Anatase TiO₂ films were successfully synthesized by a modified sol-gel method wherein peroxo titanic acid solution was derived from TiCl₄/ethanol/water solution at room temperature. The as-prepared films were further surface-doped by photodeposited Fe₂O₃ and Cr₂O₃ to improve its physicochemical properties. The phase and structure of the films were investigated by X-ray diffraction, scanning electron microscopy and X-ray photoelectron spectroscopy. The physicochemical properties of the films were also measured. The results show that both hydrophilicity and photocatalytic activity of the films were remarkably improved by doping transition metal ion Fe³⁺. In case of Cr³⁺ doped films, hydrophilicity was also significantly enhanced but photocatalytic activity for methyl orange under UV irradiation was still comparable with the undoped films.     

Substrate and Fe-doping effects on the hydrophilic properties of TiO2 thin films

Titanium dioxide films are known for their hydrophilic and photocatalytic characteristics. Increasing specific surface area and doping can enhance their photocatalytic activity and hydrophilicity. We report here results regarding the enhancement of the photocatalytic properties of titania by both controlling surface morphology and the anatase/rutile ratio. The samples were deposited on glass, indium tin oxide covered glass, and SrTiO₃ by sputtering and laser ablation techniques. Film structure and surface morphology were investigated by X-ray diffraction and atomic force microscopy. Film hydrophilicity was assessed from contact angle measurements during- and post-irradiation with UV light. The contact angle data are discussed in terms of the synergic effects of surface morphology, structure and composition of the films.     

TiO2 thin films for dyes photodegradation

The aim of the present study is to investigate the influence of the TiO₂ specific surface (powder, film) on the photocatalytic degradation of methyl orange. Porous TiO₂ films were deposited on transparent conducting oxide substrates by spray pyrolysis deposition. The films were characterized by X-ray diffraction (XRD), Scanning Electronic Microscopy, and the UV-Vis spectroscopy. The XRD spectra of nanoporous TiO₂ films revealed an anatase, crystalline structure that is known as the most suitable structure in photocatalysis. The average thickness of the films was 260 nm and the measured band gap is 3.44 eV. The influence of the operational parameters (dye concentration, contact time) on the degradation rate of the dye on TiO₂ was examined. There were calculated the kinetic parameters and the process efficiency. Using thin films of TiO₂ is technologically recommended but raises problems due to lowering the amount of catalyst available for the dye degradation.     

Residual stresses and Raman shift relation in anatase TiO2 thin film

Anatase TiO₂ film (100-1000 nm thick) grown on glass, sapphire (0001), and Si (100) substrates by pulsed dc-magnetron reactive sputtering were evaluated for stress and strain analysis using Raman spectroscopy and curvature measurement techniques. The X-ray analysis revealed that films prepared for this study were purely anatase, and the measurements indicate that the film exhibit that (101) is the preferred growth orientation of the crystallites, especially for the film thicker than 100 nm. Curvature measurements and Raman spectroscopy, with 514.5 nm excitation wavelength, phonon line shift were used for stress analysis. A comparison between Raman lineshapes and peak shifts yields information on the strain distribution as a function of film thickness. The measurements of residual stresses for crystalline anatase TiO₂ thin film showed that all thin film were under compressive stress. A correlation between Raman shifts and the measured stress from the curvature measurements was established. The behavior of the anatase film on three different substrates shows that the strain in film on glass has a higher value compared to the strain on sapphire and on silicon substrates. The dominant 144 cm^− 1E_g mode in anatase TiO₂ clearly shifts to a higher value by 0.45-5.7 cm^− 1 depending on the type of substrate and film thickness. The measurement of the full width at half maximum values of 0.59-0.80 (2θ°) for the anatase (101) peaks revealed that these values are greater than anatase powder 0.119 (2θ°) and this exhibits strong crystal anisotropy with thermal expansion.     

Enhancement of visible light-induced hydrophilicity on nitrogen and sulfur-codoped TiO2 thin films

We fabricated N, S-codoped, N-doped, S-doped TiO₂ anatase thin films by a radio-frequency (RF) sputtering method and evaluated the photoelectrochemical and photoinduced hydrophilic activities. The N, S-codoped TiO₂ thin film showed obviously higher activities than either the N-doped or S-doped TiO₂ under visible light irradiation. The photoinduced hydrophilic activity of the N, S-codoped TiO₂ was also greater than that of the undoped TiO₂ even under fluorescent light bulb, which contained both visible and UV lights. The high activities of the N, S-codoped TiO₂ could be attributed to the hybridization of the introduced N 2p and S 3p, which was supported by the results of ab initio calculations.     

Optical properties of sputter deposited transparent and conducting TiO2:Nb films

Transparent and conducting thin films of TiO₂:Nb were prepared on glass by reactive dc magnetron sputtering in Ar + O₂. Post-deposition annealing in vacuum at 450 °C led to good electrical conductivity and optical transparency. The optical properties in the sub-bandgap region were in good agreement with Drude free electron theory, which accounts for intraband absorption. The band gap of the films was found to be in the range of 3.3 to 3.5 eV and signifies the onset of interband absorption. Electrical conductivities in the 10^− 3 Ω cm range were obtained both from dc electrical measurements and from analysis of the optical measurements.     

Undoped and Cr-doped TiO2 thin films obtained by spray pyrolysis

Undoped and chromium doped titanium oxide thin films were fabricated by spray pyrolysis by using a solution of titanium tetrachloride and ethyl alcohol. The films have been deposited on heated glass substrates at 373 K. After annealing for 90 min at 723 K, the initially amorphous films became polycrystalline with a predominant anatase structure and average crystallite sizes depending on dopant (Cr) concentration. The repartition of chromium impurities in the matrix of titanium oxide films, analyzed by electron paramagnetic resonance and X-ray photoelectron spectroscopy showed that the entrance of chromium into the anatase structure is mainly achieved by substitution. A decrease in unit cell parameters ratio (c/a) with the increase of chromium content sustains this assertion. The wetting properties of the titanium oxide films were evaluated from contact angle measurements between de-ionized water and films surface during- and post-irradiation with UV light. The correlation between the concentration of the dopant, film structure, surface morphology and wettability characteristics is discussed.     

Preparation and antibacterial behavior of Fe-doped nanostructured TiO2 thin films

Fe³⁺-doped nanostructured TiO₂ thin films with antibacterial activity were prepared on soda–lime–silica glass slides by using sol–gel technology. Water containing Escherichia coli K-12 with TiO₂ thin films in was exposed to low intensity fluorescent light and antibacterial efficiency was evaluated with spread plate techniques. The films are porous and have anatase phase. Iron ions increased luminous energy utilization as the absorption edge of the Fe³⁺-doped film has a red shift compared to that of the pure TiO₂ film in the UV–VIS absorption spectrum. The bacterial removal efficiency reached 95% at the optimum concentration of iron ion (about 0.5% (mol)) after 120 min irradiation. The antibacterial behavior of the doped TiO₂ films was explicitly observed using scanning electron microscopy and cell wall damage was found.     

Chemical bonding structure of TiO2 thin films grown on n-type Si

Titanium dioxide thin films were obtained by RF magnetron sputtering system with different Ar and O atmospheres. Chemical bonding structures of the thin films were investigated using the Fourier transform infrared spectroscopy (FTIR) in the range of 400-7500 cm^− 1 for as-deposited and conventionally thermal annealed films at different temperature in air. These structural characterizations of the films were carried out by describing the low-frequency fluctuations of the FTIR spectra using the noninvasive (i.e. error controllable) procedure of the optimal linear smoothing. This approach is based on the criterion of the minimal relative error in selection of the proper smoothing window. It allows the receiving an optimal separation of a possible trend from the high-frequency fluctuations, defined as a random sequence of the relative fluctuations possessing zero trends. Thus, the noise can be read and extra information about the structures was then obtained by comparing with the experimental results. In the film annealed at 900 °C, the rutile phase was the dominant crystalline phase as revealed by infrared spectroscopy. At the annealing temperatures lower than 900 °C, both the anatase and the rutile phases were coexisting. In addition, symmetric and asymmetric Si-O-Si vibrations modes were observed at around 1000 cm^− 1 and 800 cm^− 1, respectively. These peaks suggest that a thin SiO₂ film was formed at the TiO₂/Si interface during the growth and the annealing of the TiO₂ films. It was also observed that the reactivity between TiO₂ film and Si substrate is increased with the increasing annealing temperature.     

Surface properties of doped and undoped TiO2 thin films deposited by magnetron sputtering

In this work, transparent titanium dioxide (TiO₂) thin films were deposited onto microscope glass slides by means of the d.c. reactive magnetron sputtering method. The films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), UV-visible spectroscopy (UV) and contact angle analysis using the Owens-Wendt method for the surface energy calculation. The photocatalytic activity of the films was tested by measuring the photodegradation of Rhodamine-B (RhB) dye under radiation of UV light. Iron-doped TiO₂ films were also prepared in order to study the Fe-doping effect on TiO₂ photocatalytic activity. The influences of different iron concentrations on the contact angle of the series of Fe-doped TiO₂ thin films, were investigated. The influences of total sputtering pressures on TiO₂ photocatalytic activity were also investigated. It was observed that the photocatalytic activity of the TiO₂ thin films was slightly improved by increasing the total sputtering pressure. Moreover, it was also observed that in general, iron-doping was detrimental for photocatalytic activity, nevertheless the films with low iron concentrations showed better photocatalytic activity than those with high iron concentrations. It was found that iron-doping has changed the wettability appetency of TiO₂ coated surfaces.     

Plasma-enhanced chemical vapor deposition of TiO2 thin films for dielectric applications

Amorphous TiO₂ thin films were formed by plasma-enhanced chemical vapor deposition (PECVD) from mixtures of titanium IV isopropoxide (Ti(O-i-C₃H₇)₄) and oxygen. The deposition rate was found to be weakly activated, with an apparent activation energy of 4.5 kJ/mol. The deposition rate increased with equivalence ratio and decreased with plasma power. This dependence on atomic oxygen density was consistent with behavior observed in other metal oxide PECVD systems. Metal-insulator-silicon devices were fabricated, and characterized using capacitance-voltage measurements. The apparent dielectric constant of the TiO₂ thin films increased from 15 to 82 with film thickness. The observed variations were consistent with the formation of an interfacial SiO₂ layer. Assuming that a TiO₂/SiO₂ bilayer behaves as two capacitors in series, an intrinsic TiO₂ dielectric constant of 82 ± 10 and an interfacial SiO₂ layer thickness of 3 ± 1 nm were extracted from electrical measurements.     

Effect of SnO2 on the photocatalytical properties of TiO2 films

TiO₂/SnO₂ thin films with different tin atomic percentages were successfully prepared on glass substrates by the spray pyrolysis method from an alcoholic solution of TiO[C₅H₇O₂]₂ with different concentrations of SnCl₄. The TiO₂/SnO₂ thin films prepared at 450 °C presented the anatase phase in polycrystalline configuration from %Sn = 0 in the starting solution up to %Sn = 20, at higher tin content the films present an amorphous configuration. The resulting thin films have a homogeneous surface structure with some porosity. The photocatalytical properties of the films were evaluated with the degradation of methylene blue. The products of the degradation reaction were identified by ¹H nuclear magnetic resonance and the film properties were studied by atomic force microscopy, scanning electron microscopy, UV–Vis spectroscopy, and X-ray diffraction.     

Characterization of inhomogeneity in TiO2 thin films prepared by pulsed dc reactive magnetron sputtering

This article discusses an analytical method for characterizations of TiO₂ thin films and determinations of the degree of their inhomogeneity. The TiO₂ films were prepared by a pulsed dc magnetron sputtering with an operating pressure as a main experimental parameter. The obtained films were primarily characterized for film crystallinity, microstructures and optical properties by spectroscopic ellipsometry. The measured ellipsometric data were analyzed by the single-, the double, and the triple-layer models in order to match with the inhomogeneous film structure proposed in the Thornton structure zone model. The results were then compared with those obtained from grazing-incidence X-ray diffraction, field-emission scanning electron microscopy and high-resolution transmission electron microscopy. The study revealed that the pulsed dc sputtered TiO₂ films could be best described by the inhomogeneous triple-layer physical model. Although the films deposited at lower operating pressure had a dense structure with a mirror-like surface topography, the films deposited at higher operating pressure had the porous structure with the rough surface and the void.     

Structural, optical and electrical characterization of spray-deposited TiO2 thin films

Titanium oxide (TiO₂) thin films were deposited onto glass substrates by means of spray pyrolysis method using methanolic titanyl acetyl acetonate as precursor solution. The thin films were deposited at three different temperatures namely 350, 400 and 450 °C. As-deposited thin films were amorphous having 100–300 nm thickness. The thin films were subsequently annealed at 500 °C in air for 2 h. Structural, optical and electrical properties of TiO₂ thin films have been studied. Polycrystalline thin films with rutile crystal structure, as evidenced from X-ray diffraction pattern, were obtained with major reflexion along (1 1 0). Surface morphology and growth stages based on atomic force microscopy measurements are discussed. Electrical properties have been studied by means of electrical resistivity and thermoelectric power measurements. Optical study shows that TiO₂ possesses direct optical transition with band gap of 3.4 eV.     

Strain analysis of photocatalytic TiO2 thin films on polymer substrates

Titania (TiO₂) thin films have been deposited on polymer sheets by magnetron sputtering at room temperature. Previous X-ray diffraction experiments revealed, for a wide range of deposition parameters, that the as-deposited titania thin films are predominantly amorphous; however, Raman scattering experiments revealed small traces of crystalline phases. The photocatalytic behaviour of the titania coatings was determined by combined ultra-violet (UV) irradiation and absorption measurements of a chosen dye (pollutants) in the presence of this catalyst. In order to assess the mechanical behaviour of the as-sputtered films, the film/substrate composite system was loaded unidirectionally using a tensile testing machine. As the system was stretched, cracks transverse to the loading direction developed in the film. The number of cracks increased as the applied strain increased, thus the relation between the measured crack density and the applied strain has been used to characterize the film strength and has also been correlated with the film photocatalytic efficiency. As a result of moderate fissuring on the titania film, it was found that for strain deformations up to 5% the photocatalytic activity is enhanced due to the exposure of more catalyst surface area for the pollutant to be adsorbed and subsequently dissociated upon UV illumination.     

Neural cell growth on TiO2 anatase nanostructured surfaces

Titanium oxides have anti-inflammatory activity and tunable electrochemical properties that make them attractive materials for biomedical applications. This work investigated the compatibility of nanometric coatings of low-temperature phases of TiO₂ with neurons in 4-day and 10-day cultures, using different cell densities to quantify cell survival and neurite extension. TiO₂ films were prepared by sol–gel and thermal treatment (250–450 °C) of hydrolyzed titanium tetra-isopropoxide on electrically conducting or insulating slides. The conducting substrates were not passivated by the nanometric oxide layer and could be used as electrodes. Characterization of the films showed nano-structured TiO₂ containing exclusively Ti⁺⁴ valence in anatase and amorphous phases. When coated with polylysine, all films permitted good neuron attachment and survival for at least ten days in culture. However, they generally reduced neurite growth compared to cell culture borosilicate glass, with dendrites more affected than axons. The analyses of surface topography, hydrophilicity, charge and chemical composition revealed that TiO₂ chemistry was the main factor responsible for neurite inhibition.     

Oxygen plasma induced hydrophilicity of TiO2 thin films

Anatase nano-TiO₂ thin films were fabricated by reactive magnetron sputtering metal Ti target followed by thermal annealing in air at 450 °C for 2 hrs. The crystalline structure of the sample films were characterized by X-ray diffraction (XRD) and the hydrophilicity was characterized with the diameters of 1 μl water drop. The films were irradiated by oxygen plasmas and the effects of the radio frequency (rf) power, the gas pressure and the irradiation time of the oxygen plasmas on the hydrophilicity of the TiO₂ thin films were investigated. Hydrophilicity can be induced by oxygen plasmas and further more the hydrophilicity shows high stability whenever under the natural light or in dark.