MOCVD生长InGaAs/InGaAsP多量子阱光泵微碟激光器

用MOCVD方法生长了InGaAs/InGaAsP多量子阱微碟激光器外延片,用光刻、干法刻蚀和湿法刻蚀等现代化的微加工技术制备出直径9.5μm的InGaAs/InGaAsP微碟激光器,并详细介绍了整个制备工艺过程．在液氮温度下用氩离子激光器泵浦方式实现了低阈值光泵激射,测出单个微碟激光器的阈值光功率为150μW,激射波长约为1.6μm,品质因数Q=800,激射光谱线宽为2nm,同时指出微碟激光器激射线宽比F-P普通激光器宽很多是由于其品质因数很高造成的．     

MOCVD生长InGaAs/InGaAsP多量子阱光泵微碟激光器

用 MOCVD方法生长了 In Ga As/ In Ga As P多量子阱微碟激光器外延片 ,用光刻、干法刻蚀和湿法刻蚀等现代化的微加工技术制备出直径 9.5μm的 In Ga As/ In Ga As P微碟激光器 ,并详细介绍了整个制备工艺过程 .在液氮温度下用氩离子激光器泵浦方式实现了低阈值光泵激射 ,测出单个微碟激光器的阈值光功率为 15 0μW,激射波长约为 1.6μm,品质因数 Q=80 0 ,激射光谱线宽为 2 nm,同时指出微碟激光器激射线宽比 F- P普通激光器宽很多是由于其品质因数很高造成的     

光泵浦Si衬底GaN基回音壁模式微盘谐振腔激光器

氮化镓基微盘结构光学谐振腔具有波长选择范围宽、模式体积小和激射阈值低等特点,其在腔量子电动力学、低阈值激光器、生物传感器等方面具有重要的研究价值.通过优化制备微盘的干法刻蚀工艺及选择性湿法腐蚀技术,制备出侧壁陡峭且光滑的高Q值Si衬底GaN基回音壁模式微盘谐振腔,该微盘谐振腔的制备工艺简单、表面损伤小.在室温、266 nm短波长激光泵浦条件下,微盘谐振腔激光器实现了激射,阈值为2.85 MW/cm2,Q值达到2161.     

扫描电镜在研制新型的半导体微腔激光器─微盘激光器中的应用

本研究用扫描电镜（ＳＥＭ）电子束曝光技术和相应的计算机联机成像程序，在ＩｎＧａＡｓＰ／ＩｎＰ液相外延片上形成电子束光刻图形，并采用选择腐蚀等技术，由ＫＹＫＹ－１０００ＢＳＥＭ并附Ｘ射线能谱仪和图像处理系统对研制过程进行监控，成功地在国内首次研制出由ＩｎＧａＡｓＰ单量子阶分别限制的五层四元系组成的新型半导体微盘激光器，微盘直径为２－７μｍ，盘厚０．２－０．４μｍ。这一成功为开展半导体微盘激光器的研究打下了良好的基础。     

基于光谱学方法半导体激光器热特性测量

报道了一种基于激射光谱进行半导体激光器热特性测量的实验方法。结果表明，基于分析在不同脉冲驱动条件下1．3μm InAsp/IngaAsp脊波导应变补偿多量子阱激光器的激射光谱，可以得到该激光器的热阻等热特性参数。实验中也测量了该激光器的其他与热特性相关的光谱特性，如激光器激射光谱随驱动电流的变化等。该方法也可用于其他波段半导体激光器的热特性测量。     

Single Mode Operation of Short-Cavity Quantum Cascade Lasers

报道了激射波长为5.4和7.84μm的应变补偿In1-xGaxAs/In1-yAlyAs量子级联激光器的单模激射.以高质量的应变补偿量子级联激光器材料为支撑,通过减小FP腔长,开辟实现单模器件的新途径.首次实现阈值电流仅为50mA、腔长为145μm的激射波长在λ≈5.4μm的单模激射和阈值电流仅为80mA、腔长为170μm的激射波长在λ≈7.84μm的单模激射.这是目前InGaAs/InAlAs材料体系最短腔长的边发射量子级联激光器.     

短腔长单模量子级联激光器

报道了激射波长为5.4和7.84μm的应变补偿In1-xGaxAs/In1-yAlyAs量子级联激光器的单模激射.以高质量的应变补偿量子级联激光器材料为支撑,通过减小FP腔长,开辟实现单模器件的新途径.首次实现阈值电流仅为50mA、腔长为145μm的激射波长在λ≈5.4μm的单模激射和阈值电流仅为80mA、腔长为170μm的激射波长在λ≈7.84μm的单模激射.这是目前InGaAs/InAlAs材料体系最短腔长的边发射量子级联激光器.     

GaAs/AlGaAs量子级联激光器

利用分子束外延方法生长了激射波长约为9μm的GaAs/Al0.45Ga0.55As量子级联激光器.条宽35μm，腔长2mm的器件准连续激射温度最高达120K，81K下未经收集效率修正的峰值功率超过70mW．     

长波长面发射激光器的现状及其发展前景

回顾了适用于未来并联光通信系统的工作波长为１．３μｍ和１．５５μｍ的垂直腔面发射激光器在近年来的发展概况。讨论了改进上述激光器激射特性的关键问题，其中有高反射镜面、温控、电流限制结构等问题。     

测量激光器结温的脉冲注入法研究

提出了一种精确测量半导体激光器结温的方法。由于激光器的热容很小，因此采用脉冲注入的方法可以显著减小激光器的温升。研究了脉冲电流注入下激光器的激射波长随环境温度的变化规律，通过实验研究得到电流脉冲宽度和周期与激射波长的关系，理论分析得到的定量关系式与实验结果十分吻合。在此基础上得到了精确测量激光器结温的最佳脉冲参数。即脉宽为10ns，脉冲周期为10μs。并且确定了激光器结温与激射波长的定量关系式，波长随温度的漂移系数为0．0728nm／K。这种方法避免了电学测量法中的结电压波形过冲。测量精度明显优于后者，同时也可以方便地测量封装好的激光器组件的温度特性。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.