PIMNT单晶弯曲圆盘换能器设计

新型弛豫铁电单晶材料铌铟酸铅-铌镁酸铅-钛酸铅晶体(Pb(In_1/2Nb_1/2) O₃-Pb(Mg_1/3Nb_2/3) O₃-PbTiO₃, PIMNT)的压电系数是陶瓷材料的 6 倍以上,应变量高出压电陶瓷 10 倍以上,具有较高的机电耦合系数,压电性能优于传统 PZT 材料。文章将单晶材料应用于带空气腔的弯曲圆盘换能器中,利用 ANSYS 仿真软件优化换能器结构,确定换能器尺寸,设计制作 PIMNT 压电单晶换能器和PZT4压电陶瓷换能器,并进行了水池实验。换能器实测结果与仿真结果保持一致,单晶换能器的谐振频率为 2.85 kHz,最大发送电压响应为 136.3 dB。结果表明,相比于同尺寸的陶瓷换能器,将 PIMNT 压电单晶应用于弯曲圆盘换能器可降低谐振频率,提高发送电压响应,提升换能器的工作性能,为进一步改善单晶换能器综合性能提供参考。     

Piezoelectric Energy Harvesting Design Principles for Materials and Structures: Material Figure-of-Merit and Self-Resonance Tuning

Piezoelectric energy harvesters (PEHs) aim to generate sufficient power to operate targeting device from the limited ambient energy. PEH includes mechanical-to-mechanical, mechanical-to-electrical, and electrical-to-electrical energy conversions, which are related to PEH structures, materials, and circuits, respectively; these should be efficient for increasing the total power. This critical review focuses on PEH structures and materials associated with the two major energy conversions to improve PEH performance. First, the resonance tuning mechanisms for PEH structures maintaining continuous resonance, regardless of a change in the vibration frequency, are presented. Based on the manual tuning technique, the electrically- and mechanically-driven self-resonance tuning (SRT) techniques are introduced in detail. The representative SRT harvesters are summarized in terms of tunability, power consumption, and net power. Second, the figure-of-merits of the piezoelectric materials for output power are summarized based on the operating conditions, and optimal piezoelectric materials are suggested. Piezoelectric materials with large k_ij, d_ij, and g_ij values are suitable for most PEHs, whereas those with large k_ij and Q_m values should be used for on-resonance conditions, wherein the mechanical energy is directly supplied to the piezoelectric material. This comprehensive review provides insights for designing efficient structures and selection of proper piezoelectric materials for PEHs.     

压电复合材料用于透镜式聚焦换能器的研究

为了增加聚焦换能器的带宽, 抑制其多模振动耦合现象, 提高电声转换效率, 实验采用1-3型压电复合材料代替压电陶瓷作为超声发射材料, 设计并制作了一种新型的1-3型压电复合材料透镜式聚焦换能器。通过频率特性的对比研究, 证明了1-3型压电复合材料透镜式聚焦换能器不仅能增加换能器的带宽, 达到PZT压电陶瓷透镜式聚焦换能器带宽的3.13倍, 而且能明显抑制径向振动, 得到单一纯净的厚度振动模态。另外, 1-3型压电复合材料透镜式聚焦换能器的电声转换效率达到PZT压电陶瓷透镜式聚焦换能器的1.88倍, 为高效率聚焦超声换能器的实现提供了理论及实验基础。     

Planar ferrite-piezoelectric composite microwave resonator with electric and magnetic frequency tuning

A planar composite microwave resonator based on a bilayer structure comprising a single-crystal yttrium iron garnet (YIG) ferrite film on a lead magnesium niobate-lead titanate (PMN-PT) piezoelectric plate has been studied. The possibility of electric and magnetic tuning of the resonance frequency in this structure is demonstrated. The magnetic tuning in the frequency range of 2–18 GHz is effected by varying the magnetic bias field and the electric tuning within a 20 MHz bandwidth is achieved by applying a dc bias voltage to the piezoelectric layer. An increase in the central frequency of a YIG/PMN-PT composite resonator is accompanied by a growth in the resonator Q from 110 to 990, while the electric tuning bandwidth remains unchanged     

基于机械品质因数的全波压电超声换能器设计

针对全波压电超声换能器常规设计方法存在的尺寸参数较多、计算较复杂等问题,研究了一种利用机械品质因数设计全波压电超声换能器的方法.基于压电超声理论推导了全波压电超声换能器的频率方程,利用电学理论推导了全波压电超声换能器各组成部分的等效电路,利用等效电路求取了在任意等效截面处的等效机械阻抗,进而推导出全波压电超声换能器各部...     

The excitation of Lamb waves in pipes using dry-coupled piezoelectric transducers

The development of a dry-coupled piezoelectric transducer system for the detection of corrosion in chemical plant pipework using cylindrical Lamb waves is described. It is shown that the axisymmetricL(0,2) mode at a frequency of about 70 kHz is an attractive mode to use for longdistance propagation. The results show that a ring of piezoelectric length-expander elements can be used to excite theL(0,2) mode and to suppress all the nonaxisymmetric modes. Tests have been carried out both with the piezoelectric elements bonded to the pipe and fabricated into a simple transducer which was clamped against the pipe. The performance of the dry-coupled system was very similar to that of the bonded elements. In pulse echo tests, the noise floor obtained with the dry-coupled system was less than 1% of the amplitude of the propagatingL(0,2) mode. The drycoupled transducers provide a simple, light, readily detachable system for the long-range inspection of pipework.     

稀土IV型弯张换能器研究

IV型弯张换能器低频发射时具有尺寸小、重量轻的特点,是一种常用的水下低频大功率声源。稀土超磁致伸缩材料相较于压电陶瓷拥有更大的应变量和能量密度,并且杨氏模量较小,可以有效降低换能器谐振频率。利用稀土超磁致伸缩材料作为激励材料,设计了一种低频IV型弯张换能器,对其静态磁场和动态磁场进行了分析,构建出双棒式磁路,并使用有限元分析软件进行了换能器的结构建模与计算。根据计算结果制作了稀土IV型弯张换能器样机,测试结果表明所设计的换能器与仿真结果吻合较好,水中谐振频率为370 Hz,最大声源级为196 d B,能够实现低频、大功率发射。     

Destruction of bacterial spores by phenomenally high efficiency non-contact ultrasonic transducers

Conventional wisdom stipulates that high power ultrasound without direct or indirect transducer contact with the medium to be treated is not possible. This seemingly correct notion is based upon two major hurdles: inefficient transmission of ultrasound from the piezoelectric material into air/gases and exorbitant attenuation of ultrasound by gases. The latter is a natural phenomenon about which nothing can be done, and the former requires an un-conventional approach to transducer design. After many years of R& D in this area, we have finally succeeded in producing transducers that generate immense acoustic pressure in air in the frequency range of ∼50 kHz→10 MHz. By using these transducers without any contact with the material, we demonstrate destruction of 99.9% of dried bacterial spore samples of a close relative of anthrax, Bacillus thuringiensis. Following further refinement of the transducers and the mechanism of their excitation, we anticipate that non-contact ultrasound will have numerous applications including inactivation of agents of bioterrorism and sterilization of medical and surgical equipment, food materials, and air-duct systems of buildings, airplanes, space stations, and others. Electronic Publication     

Efficiency of excitation of piezoceramic transducers at antiresonance frequency

The efficiency of piezoceramic transducers excited at both the resonance and antiresonance frequency was investigated. Losses in piezoceramics are phenomenologically considered to have three coupled mechanisms: dielectric, mechanical, and piezoelectric losses. Expressions for the resonance and antiresonance quality factors, which ultimately determine transducer efficiency, have been received on the basis of complex material constants for both stiffened and unstiffened vibration modes. Comparison of electric and mechanical fields, thermal and electrical losses of power supply, and their distribution in the transducer volume have been made. For a given constant mechanical displacement of the transducer top, the required electric voltage applied to the transducer at the antiresonance frequency is proportional to the resonance quality factor, but the changes in the intrinsic electric and mechanical field characteristics in the common case are not too essential. The requirements on the piezoceramic parameters, types of transducer vibration, and especially on the factor of piezoelectric losses in a range of physically valid values were established to provide maximal quality factors at the antiresonance frequency.     

Design and fabrication of a piezoelectric transducer for wind-power generator

This study investigates the feasibility of a high-performance ZnO piezoelectric transducer for wind-power generation applications. The piezoelectric transducer is constructed of a Cu/ZnO/ITO/PET structure. Closely examining the ITO/PET substrate by a nano indenter reveals a low Young's modulus of 6.62 Gpa for specific deflections. The ZnO piezoelectric film of 965 nm is deposited on ITO/PET substrate using a RF magnetron sputtering system at room temperature. A copper layer is attached to the ZnO/ITO/PET structure to construct piezoelectric transducers. Both scanning electron microscopy and X-ray diffraction indicate that, among the favorable characteristic of the ZnO piezoelectric film include a rigid surface structure and a high c-axis preferred orientation. According to cantilever vibration theory, a transducer with a cantilever length of 9.9 mm and vibration area of 1.5 cm² is designed for natural wind. An appropriate mass loading of 0.57 g on the cantilever is critical for increasing the vibration amplitude and promoting the generated power of a piezoelectric transducer. Finally, an open circuit voltage of 1.87 V for the ZnO piezoelectric transducer at a vibration frequency of 100 Hz is obtained by an oscilloscope. After rectifying and filtering, the output power of the generator exhibits an available benefit of 0.07 μW/cm² with the load resistance of 5 MΩ.     

Evaluating the length of a piezoelectric transducer's cable line

Conclusions Taking into consideration that the operating conditions of a piezoelectric transducer preclude the use of a matching impedance at the end of the cable line, a correct selection of the cable length connected to the piezoelectric transducer has a substantial importance in the technique of piezoelectric measurements. The method described above for determiningl _{max per} can be applied successfully in systems for measuring pulsating pressure, acceleration, and vibrations.Translated from Izmeritel'naya Tekhnika, No. Il, pp. 86–88, November, 1969.     

Effect of Fe and Fe-Ba substitution on the piezoelectric and dielectric properties of lead zirconate titanate ceramics

Polycrystalline samples of Fe and Fe-Ba doped lead zirconate titanate (PZT) ceramics near the morphotrophic phase boundary have been synthesized by a solid-state reaction technique. Preliminary X-ray analysis of the compound confirms that there is no change in the crystal structure of PZT on co-doping with Fe and Ba. The maximum mechanical quality factor Q_m was found to be 1000 for Fe doped material and 880 for Fe-Ba doped material. The electromechanical coupling factor for Fe and Fe-Ba doped samples were 0.535 and 0.495 respectively. The corresponding values for the piezoelectric charge constant d₃₃ were 135 and 250 pC/N respectively. These results are discussed in terms of position occupied by dopants in to the lattice and their corresponding microstructures. These Fe-Ba doped PZT materials could be likely candidates for high power ultrasonic and underwater SONAR transducer systems.     

Improvement electrical properties of sol–gel derived lead zirconate titanate thick films for ultrasonic transducer application

In this work, a fabrication process of piezoelectric PZT [Pb(Zr_0.52Ti_0.48)O₃] thick films up to 60 μm deposited on silicon and aluminum substrates is reported. Crystalline spherical modified PZT powder about 300 nm in diameter was used as filler. PZT polymeric precursor produced by Chemat Inc. was used as the matrix material. Spinning films were annealed at 700 °C for one hour in the furnace in air. The thickness of the thick films was measured using a scanning electron microscope (SEM). Compared with previous piezoelectric PZT composite films, the modified piezoelectric thick films exhibit better dielectric properties. The dielectric constant is over 780 and dielectric loss is 0.04 at 1 KHz. Using a PiezoCAD model, the high frequency transducer was designed and fabricated. It showed a bandwidth of 75% at 40 MHz.     

A new focusing ultrasonic transducer and two foci acoustic lens for acoustic microscopy

The textured piezoelectric film of a new organic-based material produced by vapor deposition was used as an active element of a focusing ultrasonic transducer. The transducer exhibits near theoretical lateral and axial resolution, unipolar pulse response to a step voltage, and 30 dB insertion losses in an octave frequency band. The transducer is acoustically transparent over a wide frequency range and can be fabricated on a concave spherical surface of the standard acoustic lens. The resulting double transducer and two foci acoustic lens are capable of improving the quality of the surface structure imaging or of being used in continuous wave reflection acoustic microscopy.     

Piezoceramics for high-frequency (20 to 100 MHz) single-elementimaging transducers

The performance of transducers operating at high frequencies is greatly influenced by the properties of the piezoelectric materials used in their fabrication. Selection of an appropriate material for a transducer is based on many factors, including material properties, transducer area, and operating frequency. The properties of a number of piezoceramic materials have been experimentally determined by measuring the electrical impedance of air-loaded resonators whose thickness corresponds to resonance frequencies from 10 to 100 MHz. Materials measured include commercially available compositions of lead zirconate titanate (PZT) with relatively high dielectric constants and a modified lead titanate (PT) composition with a much lower dielectric constant. In addition, materials which have been designed or modified to result in improved properties at high frequencies are studied. Conclusions concerning the influence of the microstructure and composition on the frequency dependence of the material properties are made from the calculated properties and microstructural analysis of each material. Issues which affect transducer performance are discussed in relation to the properties. For transducers larger than about 1 mm in diameter, the use of a lower dielectric constant material is shown to result in a better electrical match between the transducer and a standard 50 Ω termination. For transducers whose impedance is close to that of the connecting cables and electrical termination, equivalent circuit model simulations show improved performance without the need for electrical matching networks. Measurements of fabricated transducers show close agreement with the simulations, validating the measurements and showing the performance benefits of electrically matched transducers     

Electrical properties of manganese modified sodium potassium lithium niobate lead-free piezoelectric ceramics

Effects of MnO₂ doping on the microstructure, densification, dielectric, ferroelectric and piezoelectric properties of (Na_0.5K_0.5)_0.935Li_0.065NbO₃ (NKLN) lead-free piezoelectric ceramics were investigated. On the one hand, the addition of a small amount of MnO₂ has little effect on the crystalline structure, however, slightly promotes sintering and grain growth, and improves the uniformity of microstructure to a certain degree. On the other hand, MnO₂ doped NKLN ceramics show hard properties in piezoelectric activities, possessing decreased room-temperature dielectric constant, loss tangent and piezoelectric constants d ₃₃, and increased mechanical quality factors Q _m. The 1.2 mol% MnO₂ doped NKLN ceramics have a loss tangent of approximately 1%, a Q _m of ∼170 and a d ₃₃ of 150 pC/N. These effects were considered to come from the formation of oxygen vacancies and the multi-valence states of Mn ions.     

Exact 3D Saint Venant type solutions for piezoelectric d 15 shear-mode bi-morph and sandwich torsion actuation and sensing problems

This paper is concerned with the analysis of two types of piezoelectric torsion transducers using the d ₁₅-effect of mono-morph piezoelectric materials. The first problem is concerned with a bi-morph transducer made of two identical mono-morph straight rods, which are perfectly bonded to each other along their width; the polarization direction is parallel, but opposite in sign, such that the piezoelectric material parameter d ₁₅ has an opposite sign as well. The second problem sandwiches the bi-morph transducer between two identical elastic face layers. In both cases, the resulting transducer represents a torsion transducer. Therefore, we analyze the electromechanically coupled problem in the framework of Saint Venant’s torsion theory for straight rods taking into account the electrical problem as well. The results of our approach are compared to electromechanically coupled three-dimensional finite element computation and a very good agreement for the mechanical as well as the electrical entities is achieved, in particular for the rate-of-twist, the axial warping function, and the sensed voltage.     

圆管超声换能器响应的激光超声检测

文章着重叙述一种用激光超声检测圆管超声换能器响应的方法。为激励和接收轴对称声场，采用压电圆管作为压电换能元件，并分别用环氧、环氧加钨粉为背衬，制作了两种压电圆管换能器。由激光超声方法和自发自收脉冲反射法实验测定了所制作的换能器的频率响应，并比较了频谱分析结果。实验结果不仅在一定程度上说明了两种背衬的效果，同时也表明激光超声检测换能器响应的可行性。     

Inkjet‐Printed High‐Q Nanocrystalline Diamond Resonators

Diamond is a highly desirable material for state‐of‐the‐art micro‐electromechanical (MEMS) devices, radio‐frequency filters and mass sensors, due to its extreme properties and robustness. However, the fabrication/integration of diamond structures into Si‐based components remain costly and complex. In this work, a lithography‐free, low‐cost method is introduced to fabricate diamond‐based micro‐resonators: a modified home/office desktop inkjet printer is used to locally deposit nanodiamond ink as ?50–60 µm spots, which are grown into ≈1 µm thick nanocrystalline diamond film disks by chemical vapor deposition, and suspended by reactive ion etching. The frequency response of the fabricated structures is analyzed by laser interferometry, showing resonance frequencies in the range of ≈9–30 MHz, with Q ‐factors exceeding 10⁴, and (f₀ × Q) figure of merit up to ≈2.5 × 10¹¹ Hz in vacuum. Analysis in controlled atmospheres shows a clear dependence of the Q‐factors on gas pressure up until 1 atm, with Q ∝ 1/P. When applied as mass sensors, the inkjet‐printed diamond resonators yield mass responsivities up to 981 Hz fg^?1 after Au deposition, and ultrahigh mass resolution up to 278 ± 48 zg, thus outperforming many similar devices produced by traditional top‐down, lithography‐based techniques. In summary, this work demonstrates the fabrication of functional high‐performance diamond‐based micro‐sensors by direct inkjet printing.     

Radiation impedance and equivalent circuit for piezoelectric ultrasonic composite transducers of vibrational mode-conversion

The piezoelectric ultrasonic composite transducer, which can be used in either gas or liquid media, is studied in this paper. The composite transducer is composed of a longitudinal sandwich piezoelectric transducer, a mechanical transformer, and a metal circular plate in flexural vibration. Acoustic radiation is produced by the flexural circular plate, which is excited by the longitudinal sandwich transducer and transformer. Based on the classic flexural theory of plates, the equivalent lumped parameters for a plate in axially symmetric flexural vibration with free boundary conditions are obtained. The radiation impedance of the plate is derived and the relationship between the radiation impedance and the frequency is analyzed. The equivalent circuits for the plate in flexural vibration and the composite transducer are given. The vibrational modes and the harmonic response of the composite piezoelectric transducer are simulated by the numerical method. Based on the theoretical and numerical analysis, two composite piezoelectric ultrasonic transducers are designed and manufactured, their admittance-frequency curves are measured, and the resonance frequency is obtained. The flexural vibrational displacement distribution of the transducer is measured with a laser scanning vibrometer. It is shown that the theoretical results are in good agreement with the measured resonance frequency and the displacement distribution.