共查询到17条相似文献,搜索用时 165 毫秒
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利用金属-半导体结型场效应晶体管(MESFET)作为微加速度计的敏感单元,设计一种4梁-质量块微加速度计结构.通过ANSYS分析软件进行仿真,敏感单位放置于悬臂梁根部的应力最大处,以获得最大的灵敏度.将封装好的微加速度计结构,利用惠斯通电桥测试电路,检测不同载荷下的输出特性,验证了微加速度计的力电耦合效应.测试结果表明,该微加速度计的线性度较好,其最大加载范围可达到24 g,且饱和区的灵敏度可达到4.5 mV/g,为高灵敏微传感器的研究奠定了一定的基础. 相似文献
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微惯性系统以及其他高精密场合往往需要高精度三轴加速度计来检测三个垂直方向加速度矢量。针对类似需求,介绍了一种四边八梁结构式三轴压阻式硅微加速度计,利用硅衬底上单一质量块和惠斯通半桥结构可同时实现三个轴向上的加速度高精度测量。另外设计了微加速度计在高过载环境下的硅一玻璃防护结构和体硅加工工艺,并通过ANSYS仿真和试验验证了加速度计结构的合理性,还对微加速度计相关性能进行了测试,测试结果表明,该微加速度计具有较高的测量精度和较好的线性度,满足设计要求。 相似文献
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本文利用一由两个相互垂直的加速度计组成的栅结构谐振器来同时测量z轴和Y轴的加速度以及z轴的输入角速度.此谐振器利用变面积电容进行检测,具有良好的线性度及快速的信号响应.此谐振器的x轴及Y轴的加速度计的谐振频率分别为1.9315kHz和1.8403kHz.在初始状态下,Ⅳ轴的加速度计被驱动进入谐振状态,且Y轴的加速度随着x轴的加速度计一起振动.当=轴存在角速度输入时,Y轴的加速度计会相应地沿Y轴进行振动,而x轴及Y轴的加速度会改变相应轴上加速度计的平衡位置.测试结果表明,此器件的z轴角速度灵敏度为16mV/((9)·s-1),x和Y轴的加速度灵敏度分别为49mV/g和244mV/g.z轴角速度输出的噪声等效角速度为0.0138(s·/Hz-1),x和Y轴加速度输出的噪声等效加速度为0.42X10-3g//Hz和0.074X10-3。g/√Hz. 相似文献
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本文介绍了传感器信号处理器MAX1457的主要功能及其用于对硅压阻式加速度计进行温度补偿的系统组成、补偿方法等。并通过实际补偿结果表明.利用MAX1457对硅压阻式加速度计进行热零点漂移补偿和热灵敏度漂移补偿.有效提高了压阻式加速度计的温度稳定性。 相似文献
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硅微谐振式加速度计的温度效应及补偿 总被引:1,自引:0,他引:1
零偏和标度因数稳定性是衡量加速度计性能的两个重要参数.为了降低硅微谐振式加速度计的温度敏感性,对其温度影响机理进行了深入研究.通过温度实验发现,硅微谐振式加速度计的零偏和标度因数与设计理论参数有较大区别,且都具有较大的温度灵敏度,分别为0.72 g/℃和1.5℃-1.对弹性模量和谐振器应力与谐振器频率的关系进行了理论计算和FEA仿真验证,其中弹性模量引起的谐振频率-温度灵敏度为-0.7 Hz/℃,谐振器应力引起的谐振频率-温度灵敏度为180 Hz/℃.阐述了加工过程中键合应力产生的原因以及键合应力与谐振器残余应力的关系,发现谐振器应力是造成加速度计输出随温度漂移的主要因素.提出了一种隔离残余应力的隔离梁的设计方案,可使零偏温度灵敏度降至-35 Hz/℃,为温度补偿指明了方向. 相似文献
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低量程高线性压阻式微机械加速度传感器 总被引:1,自引:1,他引:0
介绍了一种低量程高线性压阻式微机械加速度传感器的设计、工艺制作和封装 ,还较详细地介绍了静态和动态特性的测量和结果。为提高灵敏度,传感器采用悬臂梁结构。本文对结构的固有横向效应进行了计算,结果表明此种结构的三种横向效应主要是由于质量块(岛)质心偏离梁中平面,沿梁伸展方向( x向)惯性力分量产生的弯矩所致。提出了调整上下盖板与中间质量块之间的气隙改善器件频响特性的方法。报道的压阻式微机械加速度传感器量程± 1g(g为重力加速度 ), 线性度优于 0.05%,灵敏度约 1mV/gV,阻尼比 0.7,带宽 110Hz。 相似文献
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A variable capacitance acceleration sensor is described. Manufactured using silicon microfabrication techniques, the sensor uses a midplane, flat plate suspension, gas damping, and overrange stops. The sensor is assembled from three silicon wafers, using anodic bonds to inlays of borosilicate glass. Typical sensor properties are 7-pF active capacitance, 3-pF tare capacitance, a response of 0.05 pF/G, a resonance frequency of 3.4 kHz, and damping 0.7 critical. It is concluded that this sensor, with appropriate electronics, forms an accelerometer with an order-of-magnitude greater sensitivity-bandwidth product than a comparable piezoresistive accelerometer, and with extraordinary shock resistance 相似文献
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van Dijk G.J.A. Huijsing J.H. 《IEEE transactions on instrumentation and measurement》1995,44(4):881-886
A fully integrated bridge-output-to-frequency converter has been realized as signal-conditioning circuitry for a one-chip smart thermal mass-flow sensor. The frequency converter reads out four separate resistor bridges of the air-flow sensor in order to realize high sensitivity and directional flow measurement over the full angle range of 360°. The converter selects the sensor bridges individually by means of a microprocessor-controlled analog multiplexer. The flow velocity and direction are also calculated by the microprocessor. The relative measurement cancels all first-order errors. The center frequency is 10 kHz and the sensitivity 1 Hz/(μV/V). A bridge-offset of 10 mV/V is allowed, and the linearity error is 0.1% 相似文献
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Multiscale Hierarchical Design of a Flexible Piezoresistive Pressure Sensor with High Sensitivity and Wide Linearity Range
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Flexible piezoresistive pressure sensors have been attracting wide attention for applications in health monitoring and human‐machine interfaces because of their simple device structure and easy‐readout signals. For practical applications, flexible pressure sensors with both high sensitivity and wide linearity range are highly desirable. Herein, a simple and low‐cost method for the fabrication of a flexible piezoresistive pressure sensor with a hierarchical structure over large areas is presented. The piezoresistive pressure sensor consists of arrays of microscale papillae with nanoscale roughness produced by replicating the lotus leaf's surface and spray‐coating of graphene ink. Finite element analysis (FEA) shows that the hierarchical structure governs the deformation behavior and pressure distribution at the contact interface, leading to a quick and steady increase in contact area with loads. As a result, the piezoresistive pressure sensor demonstrates a high sensitivity of 1.2 kPa−1 and a wide linearity range from 0 to 25 kPa. The flexible pressure sensor is applied for sensitive monitoring of small vibrations, including wrist pulse and acoustic waves. Moreover, a piezoresistive pressure sensor array is fabricated for mapping the spatial distribution of pressure. These results highlight the potential applications of the flexible piezoresistive pressure sensor for health monitoring and electronic skin. 相似文献
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An intensity-modulated fiber-optic accelerometer based on backreflection effects has been manufactured and tested. It uses a multimode fiber placed at a spherical mirror center, and the beam intensity is modulated by a micromachined silicon cantilever. This device has applications as an accelerometer and vibrometer for rotating machines. It exhibits an amplitude linearity of ±1.2% in the range of 0.1-22 m s(-2), a frequency linearity of ±1% in the range of 0-100 Hz, and a temperature sensitivity of less than 0.03%/°C. The sensor is devoted to a wavelength-division multiplexing network. 相似文献