半导体激光器焊接的热分析

为了解决大功率半导体激光器的散热问题,利用有限元软件ANSYS,采用稳态热模拟方法,分析了半导体激光器内部的温度分布情况,对比分析了In、SnPb、AuSn几种不同焊料烧结激光器管芯对激光器热阻的影响。由模拟结果可见,焊料的厚度和热导率对激光器热阻影响很大,在保证浸润性和可靠性的前提下,应尽量减薄焊料厚度。另外,采用高导热率的热沉材料和减薄热沉厚度可有效降低激光器热阻。在这几种焊接方法中,采用In焊料Cu热沉焊接的激光器总热阻最小,是减小激光器热阻的最佳选择。通过光谱法测出了激光器热阻,验证了模拟结果,为优化激光器的封装设计提供了参考依据。     

高功率二极管激光器Au80Sn20焊料焊接实验研究

半导体激光器封装工艺过程对于激光器的输出特性、寿命等性能有重要影响,其中焊料的选择和焊接工艺是最关键的因素。本文采用磁控溅射的方法,在 WCu 热沉上制备了Au80Sn20合金焊料,取代了传统的In焊料,并对焊接工艺进行了改进。国外沉积的和我们制备的Au80Sn20合金焊料焊接DL芯片后的性能参数很接近。充分说明双靶分层溅射镀膜可以实现二极管激光器的封装要求,从而为优化半导体激光器制备工艺和提高半导体激光器的性能奠定基础。     

In-Au复合焊料研究

大功率半导体激光器封装过程中,为降低封装引入的应力,踊般用In焊料进行焊接。In焊料具有易氧化、易"攀爬"的特性,因而导致封装成品率很低。提出了一种新型焊料——In-Au复合焊料,使用此焊料进行封装,很好地解决了上述问题。通过理论分析及实验摸索,确定了In-Au复合焊料蒸发条件,分别利用纯In焊料和In-Au复合焊料封装了一批激光器样品,通过对比这两组样品的焊料浸润性、电光参数、剪切强度等,发现利用In-Au复合焊料封装的样品优于纯In焊料封装的样品。     

不同过渡热沉封装微盘腔半导体激光器热分析

为了降低微盘腔半导体激光器工作时有源区的温度,提升封装的可靠性,基于Ansys Workbench有限元分析分别对AlN,WCu10,SiC,石墨烯,以及CVD金刚石过渡热沉封装的蜗线型微盘腔半导体激光器进行了热特性分析,得到了器件工作时的温度分布以及热应力、热应变分布.结果显示,SiC封装器件的有源区温度较AlN和WCu10封装器件分别降低了 2.18,3.078 C,并在五种过渡热沉封装器件中表现出最低的热应力,器件热应变最小.SiC过渡热沉封装可以有效降低微盘腔半导体激光器工作时的有源区温度,同时减少封装应力与器件应变,从而提高器件的散热能力和可靠性.计算结果对半导体激光器单管散热及阵列集成散热均有指导意义.     

Nd:YAG薄片激光增益介质封装技术

为了保证Nd:YAG薄片激光器的高功率、高光束质量,需解决薄片增益介质封装后的均匀散热、低波前畸变等关键问题。分析了封装过程中薄片增益介质的热应力,模拟了连接界面无缺陷条件下薄片增益介质的热分布,对封装工艺技术进行改进。优化的封装技术将薄片激光增益介质与微通道冷却器连接在一起,采用超声扫描显微镜、激光干涉仪对薄片激光器的焊接界面与增益介质表面面形进行测试。结果表明:该封装技术实现了直径80 mm的大口径YAG薄片与冷却器焊料层均匀、无空洞的界面连接,同时减小了焊接后薄片的波前畸变,60 mm口径内面形畸变PV值小于1 m,均方根RMS值小于0.15 m。该技术封装的单模块Nd:YAG薄片激光器输出功率达到2.3 kW。     

用于大功率半导体激光器的Ag-In焊料研究

大功率半导体激光器的封装对焊料选择极其重要,因为焊料导热或导电性差,激光器工作产生的大量热量使焊料焊接失效,激光器也会遭到损坏。为此,文中研究了软焊料In及其保护层Ag作为一种焊料组合,通过真空蒸发镀膜仪蒸发蒸镀Ag-In与Ag-In-Ag-In两种薄膜方式。根据微结构知识及扩散动力学与热动力学相结合讨论了Ag-In焊料产生间隙的原因,通过XRD衍射仪了解到薄膜间界面化合物AgIn2的生成可能导致表面微结构的改变,结果表明Ag层对In层易被氧化的性质起到了保护作用,多层的Ag-In焊料层可抑制大量间隙的产生,提高器件工作可靠性及稳定性。     

电子封装热应力失效分析新方法

电子设备的封装结构多采用层状排布,封装方式多采用焊接工艺,因此封装体中的电子元件失效形式大多是由于各层封装材料热膨胀性能不匹配,导致开、断开关时焊接点脱落或开裂,进而导致硅芯片工作热量不能通过散热基板扩散至电子设备之外,芯片因工作温度过高而失效。运用ANSYS热分析软件对电子封装结构进行热应力分析发现,温度变化对焊料的脱落、开裂造成显著影响。根据热分析结果,提出有关焊料厚度及封装材料性能的改进意见,这样既节约实验成本,又能有效缩短研究电子封装可靠性及电子设备使用寿命的时间。     

微通道散热大功率半导体激光器研究

基于GaInAs/AlGaAs应变量子阱大光腔结构激光器芯片和无氧铜微通道热沉,采用In焊料烧结工艺,制作了976nm大功率连续激光器单条。在20℃热沉冷却条件下,输入电流110A时,输出功率104.9W,电光转换效率达到最大值64%。输入电流300A时,输出功率276.6W,电光转换效率达到54.2%。对激光器单条的热阻以及特征温度进行了测试分析,根据分析结果模拟了激光器单条在大电流下的输出特性,模拟结果显示热饱和是限制激光器最大输出功率的原因。因此,为了提高大功率激光器的输出功率,需要进一步提高激光器的特征温度,并降低热阻以改善散热情况。     

大功率半导体激光器高可靠烧结技术研究

近几年大功率半导体激光器的应用领域越来越广,许多应用领域都要求半导体激光器能够高可靠性工作.工作焊接质量直接影响着大功率半导体激光器的可靠性,焊接缺陷会导致激光器迅速退化.目前国内普遍采用的铟焊料和锡铅焊料都是软焊料,焊层有形成晶须和热疲劳等可靠性问题.为提高烧结可靠性,采用了金锡焊料烧结激光器新技术.金锡焊料是硬焊料,焊接强度高,抗疲劳性好,对金层无浸蚀现象.通过实验研究掌握了金锡焊料的制备和烧结技术,并与铟焊料、锡铅焊料进行了对比实验.实验结果显示采用金锡焊料烧结激光器可获得更好的性能,是提高半导体激光器可靠性的有效途径.     

VL020回流炉中半导体激光器芯片In焊接研究

利用VL020真空烧结炉,选用In焊料对半导体激光器芯片的焊接技术进行较为深入的研究,分别对焊接时气体保护、焊接前期芯片、热沉的处理、真空工艺过程压力的施加、夹具设计和烧结工艺曲线等因素进行实验分析。结果表明,以上参数对半导体激光器芯片的焊接均有显著的影响,在N2/H2体积分数为95%/5%气体的保护下,通过对夹具施加适当的静压力,In焊料与Au能够充分和快速润湿,实现较高的焊接质量。蔡司显微镜检测结果表明,采用焊接技术可以使半导体激光器芯片具有较低的空洞率,高达90%以上的焊透率,其焊接过程主要通过夹具装配完成,人为影响因素少,成品率高,并适用于小批量生产。     

Uniaxial Ratchetting Behavior of Solder Alloys and Its Simulation by an Elasto-Plastic-Creep Constitutive Model

Ratchetting deformation occurring at solder joints in electronic packaging is a concern for electronic devices. Therefore, ratchetting deformation due to thermal cycling at solder joints should be simulated by structural analysis employing tools such as the finite-element method (FEM). However, simulation of ratchetting deformation is difficult, and little modeling to simulate ratchetting deformation accurately has been reported. This work experimentally examines uniaxial ratchetting deformation of Pb-free and Pb-containing solder alloys to elucidate the effect of rate on uniaxial ratchetting. An elasto-plastic-creep constitutive model is developed to simulate uniaxial ratchetting deformation. The constitutive model incorporates a method to determine the material constants simply from a small number of pure tensile tests and subsequent stress relaxation tests. Uniaxial ratchetting deformation of solder alloys was successfully simulated using this constitutive model and simple method for material constant determination.     

WLCSP中微焊球结构尺寸对其热应力的影响

晶圆级芯片尺寸封装(WLCSP)微焊球结构尺寸对其热机械可靠性有重要的影响。通过二维有限元模拟筛选出对WLCSP微焊球及其凸点下金属层(UBM)中热应力影响显著的参数,采用完全因子实验和多因子方差统计分析定量评估各种因子影响的显著性,最后建立三维模型,用子模型技术研究关键尺寸因子对热应力变化的影响。研究发现,焊球半径是影响焊球热应力的最关键尺寸因子,电镀铜开口和铜焊盘厚度对焊球热应力的影响也较显著;钝化层开口和焊球半径是影响UBM热应力的最关键尺寸因子。随着焊球半径增大,焊球热应力减小。     

CSP封装Sn-3.5Ag焊点的热疲劳寿命预测

对芯片尺寸封装(CSP)中Sn-3.5Ag无铅焊点在热循环加速载荷下的热疲劳寿命进行了预测.首先利用ANSYS软件建立CSP封装的三维有限元对称模型,运用Anand本构模型描述Sn-3.5Ag无铅焊点的粘塑性材料特性;通过有限元模拟的方法分析了封装结构在热循环载荷下的变形及焊点的应力应变行为,并结合Darveaux疲劳寿命模型预测了无铅焊点的热疲劳寿命.     

Thermo-mechanical reliability analysis of a RF SiP module based on LTCC substrate

The RF SiP module based on LTCC substrate has attracted considerable attention in wireless communications for the last two decades. However, the thermo-mechanical reliability of this 3D LTCC architecture has not been well-studied as common as its traditional ceramic package structure. A practical RF SiP module based on LTCC substrate was presented and its thermo-mechanical reliability was analyzed in this paper, with emphasis on the reliability of heat reflow process, the operating state and fatigue of second-level solder joints. The configuration and assembly process of the SiP module were briefly introduced at first, and qualitative analysis was made according to the reliability problem that may occur in the manufacturing process and the operating state. Through FEM simulation, this paper studied the warpage and stress variation of the RF SiP module, as well as parametric studies of some key package dimensions. Solder joint reliability under temperature cycling condition was also analyzed in particular in this paper. The results show that for the heat reflow process and operating state, the maximum warpage is both on the top LTCC substrate, but the maximum stresses are on the outermost solder ball and the kovar column at the corner, respectively. There is a large residual stress on the critical solder ball at the end of the reflow process and the key package dimensions has little effect on it. The thickness of top LTCC substrate has a significant impact on the thermal deformation and thermal stress, followed by the height of kovar columns. The reason for the considerable thermal stress on the kovar column is the non-uniform of temperature distribution. The key to reducing thermal deformation and stress in the operating state is the employment of effective cooling measures. It is found by comparison that the reliability of critical solder joints can be greatly improved by adding suitable underfill.     

CBGA组件热变形的2D-Plane42模型有限元分析

介绍有限元中的2D－Plane42模型在CBGA组件热变形中的应用，利用有限元的模拟CBGA组件的应变、应力的分布，通过模拟表明有限元法是研究微电子封装中BGA焊点、CBGA组件的可靠性的方法。     

Fatigue life of lead-free solder thermal interface materials at varying bond line thickness in microelectronics

Microelectronics failure during operation is commonly attributed to ineffective heat management within the system. Hence, reliability of such devices becomes a challenge area. The use of lead-free solders as thermal interface materials to improve the heat conduction between a chip level device and a heat sink is becoming popular due to their promising thermal and mechanical material properties. Finite element modelling was employed in the analysis of the fatigue life of three lead-free solders (SAC105, SAC305, and SAC405) under commercial thermal cycling load (between −40 °C and 85 °C). This paper presents the results of the simulation work focusing on the effect of varying the solder thermal interface thickness (or bond line thickness) on the reliability of the microelectronic device. The results obtained were based on stress, strain, deformation, and plastic work density. The results showed that the fatigue life of the three solders increases as the solder thermal interface thickness increases. Also, the stresses, strains, and deformation were highest around the edges and vertices of the solder interface. In addition, the optimal solder material of choice based on the criteria of this research is given as SAC405. It has higher operational life span and good reliability capabilities.     

温度循环条件下微弹簧型CCGA焊柱的热疲劳寿命仿真研究

对比封装体不同的热疲劳寿命预测模型,选择适用于微弹簧型陶瓷柱栅阵列(CCGA)封装的寿命预测模型,并对焊点的热疲劳机制进行分析。利用Workbench对焊点进行在温度循环载荷作用下的热疲劳分析。对比不同热疲劳寿命预测模型的结果,表明基于应变能密度的预测模型更适用于微弹簧型CCGA。随后对等效应力、塑性应变、平均塑性应变能密度和温度随时间变化的曲线进行分析,结果表明,在温度保持阶段,焊柱通过发生塑性变形或积累能量来降低其内部热应力水平,减少热疲劳损伤累积;在温度转变阶段,焊柱的应力应变发生剧烈变化,容易产生疲劳损伤。     

CBGA组件热变形的2D-Plane42模型有限元分析

本文介绍有限元中的2D-Plane42模型在CBGA组件热变形中的应用，利用有限元的模拟CBGA组件的应变、应力的分布，通过模拟表明有限元法是研究微电子封装中BGA焊点、CBGA组件的可靠性的方法。     

叠层芯片封装元件热应力分析及焊点寿命预测

研究了温度循环载荷下叠层芯片封装元件(SCSP)的热应力分布情况,建立了SCSP的有限元模型。采用修正后的Coffin-Masson公式,计算了SCSP焊点的热疲劳寿命。结果表明:多层芯片间存在热应力差异。其中顶部与底部芯片的热应力高于中间的隔离芯片。并且由于环氧模塑封材料、芯片之间的热膨胀系数失配,芯片热应力集中区域有发生脱层开裂的可能性。SCSP的焊点热疲劳寿命模拟值为1 052个循环周,低于单芯片封装元件的焊点热疲劳寿命(2 656个循环周)。