EUV‐Lithographie für zukünftige IC‐Chips. EUV‐Lithography for Future IC‐Technology

In the past the overwhelming success of the semiconductor industry was based on the realisation of ever smaller structures on chips in ever shorter periods. This allowed to increase the computational speed of the processors and the amount of data that can be stored in a memory chip. This reduction of the critical dimension was mastered within optical lithography by transition to smaller wavelengths. Those lithography technologies that are currently in the development or test phase, based on 193 nm or as well 157 nm laser sources, will not achieve dimensions around 50 nm. A fundamental change of technology is thus emerging. The currently favored basis for dimensions of 50 nm and below is EUV lithography, based on an optical technology with an exposure wavelength of 13,4 nm. This substantial reduction of the wavelength also implies a radical change of the methodology used up to now.     

Organische UV‐Schutzschichten für die Polycarbonatverglasung

Organic UV‐protective coatings for polycarbonate glazing Polycarbonate as glazing material in outdoor applications requires functional UV protective and scratch resistant coatings. The vacuum coating technology offers a wide range of deposition processes to produce such complex coatings. The Fraunhofer IOF developed an effective UV protection by the deposition of organic UV absorbers. Thermal evaporated organic compounds were investigated as single layers and hybrid layers in a SiO₂ matrix. The UV‐stability of such coatings was increased significantly.     

Plasmabeschichtungsverfahren für die Solarzellenherstellung

Photovoltaics, i.e. the conversion of light into electric energy, is an important link of the chain of regenerative energies, at which the further growing of the photovoltaic industry depends on the reducing of the costs from the manufacturing of the solar modules. Potential to reach the aim are cheaper basic material for the solar cells, as well as the reducing of the cost to manufacture cells and modules and the increasing efficiency of the solar cells. An essential process step during production of crystalline silicon solar cells is their coating with an antireflective and passivation layer. Amorphous hydrogenated silicon nitride (SiN) layers, deposited under vacuum by PECVD (Plasma Enhanced Chemical Vapour Deposition), have been demonstrated to be – besides good anti‐reflection layers – excellent means for surface and bulk passivation of silicon solar cells. Therefore they are especially effecting a significant increase of the conversion efficiency of multi‐crystalline silicon solar cells. With the common concept “SiNA” a series of effective, industrial scale systems for the SiN‐coating has been developed and qualified, caused by its excellent layer properties, high throughput, high up‐time and a maintenance‐friendly design. Consecutively performance parameters of the systems and relevant data of their use under production conditions are introduced.     

Hochdurchsatzbeschichtungen für die Photovoltaik

High throughput coatings for photovoltaics – Contribution of sputtering technology to Paris Climate Goals Photovoltaics (PV) is one of the most important renewable energy sources whose expansion is needed to achieve the climate goals. The considerable drop down in the costs of PV based energy within the last 10 years has led to a very high degree of economic attractiveness for photovoltaics. This was made possible by new cell structures with higher efficiencies, lower material usage and utilization of scaling effects as well as automation in production. Highly efficient PVD coating processes, such as the magnetron sputtering, are increasingly being used in current crystalline PV cell types such as heterojunction or TOPCON solar cells. Thin film technologies are still the backbone for processing of the less material‐intensive thin‐film solar modules.     

Werkzeugbeschichtungen für die Trockenbearbeitung

Tool coatings for dry machining During dry machining a strain collective consisting of mechanical, thermal, and chemical loads is imposed upon the cutting edge. Compared to conventional machining using cooling lubrication fluids, the loads are increased in dry cutting. A feasible solution to protect the cutting edge from thermal wear, abrasion, and tribo‐oxidation is the application of hard coatings. Newly developed Cr_xAl_yY_zN, Cr_xAl_yB_zN and Cr_xAl_ySi_zN PVD coatings were both evaluated in tribological model tests and machining tests concerning their suitability for dry cutting applications. Herein, the used coating technology and the coating properties are described in detail. The measured tool wear and the process forces give further hints for the optimization of the coating system.     

Materialien für die Vakuumbeschichtung

The main criteria for selecting a material for vacuum coating are discussed with respect to required film properties, selection of coating method and appropriate shape of the material. Production methodes are schematically presented together with an overview of quality control methodes of the final product.     

Ellipsometrische Charakterisierung von C‐Schutzschichten für die Speichertechnologie

Spectroscopic Ellipsometry is a fast, non‐destructive and reliable method for characterizing thin films, based on interaction between incident light and a multilayer system. For our investigations, light in the visible spectral range has been used to characterize protective carbon coatings with thicknesses of 2‐7nm on magnetic hard disks. The specific disk layer stack has been described with an adequate one‐layer model. With regard to an accurate analysis of the covering carbon coating a reproducible procedure for determining the underlying metallic material has been developed. The measured ellipsometric parameters (ψ, Δ) display a linear dependence on carbon film thickness which shows an appropriate application of the used model down to a thickness of 2 nm. By means of simulation calculations, criteria for the selection of optimized wavelengths with respect to film characterization has been established. Furthermore, an increasing extinction coefficient κ with rising nitrogen content in the carbon coating could be stated. Apparent time instabilities in the determination of layer thickness d and extinction coefficient κ of the carbon film could be explained as due to adsorption processes on the surface.     

PVD‐Nanocomposite‐Beschichtungen für die Zerspanungs‐ und Umformtechnik

PVD Nanocomposite coatings for the machine cutting and deformation technique Physically and chemically separated wear‐protection layers exhibit increasingly more complex structures. Similarly to the a coil of compact materials increase also here solutions develop as composite materials, which are offered in the form of Nanocomposites. An industrially available solution represents the system MeN/Si₃N₄. This is to be introduced concerning its characteristics as well as its application type within the range of the machine cutting and deformation technique.     

Innovative Technik für die Molekulardestillation

Innovative technique for molecular distillation Thermal sensitive materials as oils, fats, pharmaceuticals, vitamins a.o. can be separated into different fractions by applying the short path or molecular distillation. A new development combines the principle of the short vapor path with the plate falling film evaporator. A pilot unit will start operation in Spring 2010.     

Werkstoffkennwerte für die Lebensdauerberechnung von Strukturen aus Stahlfeinblechen für den Automobilbau

Materials Data for Fatigue Life Calculation of Steel Sheet Structures for Automotive Engineering Within a joint project of the steel and automotive industry 17 steel sheet materials for automotive engineering in various delivery and forming conditions at temperatures of –40 °C, 22 °C and 100 °C were investigated. In the course of 37 test series strain controlled fatigue curves to crack initiation and stress‐strain‐curves under monotonic and cyclic loading were determined. All experimental data, hysteresis loops and determined cyclic properties are available in a database. A correlation between the mechanical properties from tensile tests and the properties from strain controlled cyclic experiments seems to be possible.     

Nanokristalline Diamantschichten für die Zerspanung

Nanocrystalline Diamond Coatings for Cutting Operations The history of the CVD diamond synthesis goes back into the fifties. However, the scientific and economical potenzial was only gradually recognized. In the eighties intensive world‐wide research on CVD diamond synthesis and applications were launched. Industrial products, especially diamond‐coated cutting tools, were introduced to the market in the middle of the nineties. The article shows the latest developments in this area, which comprises nanocrystalline diamond coating structures.     

Zukunftsperspektiven für die Pulvermetallurgie durch die Betriebsfestigkeit

Future Perspectives for the Powder Metallurgy by Structural Durability Considerations The fatigue behaviour under complex variable amplitude loading cannot be simply assessed by knowledge of constant amplitude data. The peculiarity of variable amplitude loading, which occurs in almost all technical applications, is the possible frequent exceedance of the so called fatigue limit without reducing the required service life of the components. This fact which is described as structural durability enables a lightweight design of components and results in an aimed material exploitation. Thus, this advantage has not yet been considered in the design of PM parts. The paper discusses the suitability of PM steels for such complex service loadings and if the concept of structural durability may open new application perspectives.     

ta‐C beschichtete Werkzeuge für die Trockenumformung von Aluminiumblechen

ta‐C coated tools for dry forming of aluminum sheets The suitability of ta‐C coated tool surfaces for sheet forming of aluminum alloys was examined by strip‐draw testing. It was shown that ta‐C coatings, which are known as DLC coatings with superior wear resistance are also favourable concerning the anti‐adhesive behaviour. In attempts with AlMg5Mn‐ as well as Al99Mg1‐sheet materials several hundred sheets could be formed without noticeable aluminum adhering at the ta‐C coated tool surface. Neither the coefficients of friction nor the surface qualities of the aluminum sheets worsened during the observed period. Compared with tests of uncoated tools in combination with lubricants, the dry ta‐C coated tool behaves comparable with a good lubricant. In a real clinch test with aluminum sheets the positive results from strip‐draw experiments were confirmed. Using ta‐C coated clinching stamps and no lubricants a large number of clinching processes could be performed without noticeable adhering and increase of stripping forces.     

Eine Thermovakuumkammer für die Weltraumsimulation

A thermic vacuum chamber is used for testing devices and components under space simulated conditions. We take a cryopump and a LN2 baffle for an oil free and vibration poor vacuum generation at pressures down to 3.10^?6 mbar. The surrounding temperature of the device under test can be varied between 83 K and 373 K by PC controlled shrouds. Temper areas simulate the influence of own and strange heatsources on the tested units. The actual behaviour of the device under test at different vacuum and temperature conditions can be observed via an optical window located at the chamber door. For these measurements there are two optical adjusting benches on both sides of the chamber door. The testing units are mounted in a clear room. A lot of optical and thermal measuring techniques as well as a mass spectrometer can be connected to the vacuum chamber. Because of different electrical and fluid feedthroughs at the chamber it can be used for a wide range of research task. The application of this thermic vacuum chamber is demonstrated at some examples.     

Automatisierte Plasmatechnologie für die Wirkstoffentwicklung

Automated Plasma Technology for Drug Development Processes The fast and economic development of new drugs and materials requires a high grade of automation. Beside biochemical test methods cell based assays such as proliferation, apoptosis or cytotoxicity assays are used for the testing of potential drugs against their biological activity. The use of cells is often connected with the requirement of strict sterile conditions and environments. This results in high investments and operating costs. The use of plasma for the sterilization of different surfaces has been demonstrated in a number of investigations. A suitable plasma source has been developed for the sterilization of micro titer plates used in biological screening processes. The integration of 96 parallel plasma sources into an special device enables the automated sterilization of micro plates in highly complex robot based screening systems. The system will be tested with different cell lines and assays.     

Elektrische Antriebe für die Raumfahrt

Electric Propulsion for Space Flight This article describes electric rocket motors for satellites, probes and manned spacecraft based on principles used for material processing, too. The need for high exhaust velocities is explained and the limitations of conventional chemical thrusters are pointed out. Two important electric propulsion technologies, arcjet thrusters and gridded ion thrusters, together with their applications are described. Both types are currently successfully operated in space. Finally, a hybrid engine using an arcjet thruster and propellant heating by radiofrequency power is introduced. This concept is a potential solution for the propulsion demands of a future piloted mission to Mars.     

Vakuumsysteme für die mobile Analytik

Vacuum systems for mobile applications Rising global pollution levels and therefore more stringent environmental regulations, the rising global danger regarding security in particular bombing attacks, drug trafficking and drug abuse, more precise prediction of natural desasters e.g. volcano eruptions and its effects to humans and air traffic, analysis of environmental effect from fracking, accidents in chemical and petrochemical plants, support police work in scouting offences, local leak detection on vacuum systems require portable and mobile analytical systems for in situ measurements. The article describes the requirements for the vacuum components and shows application examples for better understanding.